Patents by Inventor Miao Zhang

Miao Zhang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8330228
    Abstract: A Ge and Si hybrid material inversion mode GAA (Gate-All-Around) CMOSFET includes a PMOS region having a first channel, an NMOS region having a second channel and a gate region. The first channel and the second channel have a circular-shaped cross section and are formed of n-type Ge and p-type Si, respectively; the surfaces of the first channel and the second channel are substantially surrounded by the gate region; a buried oxide layer is disposed between the PMOS region and the NMOS region and between the PMOS or NMOS region and the Si substrate to isolate them from one another. In an inversion mode, current flows through the overall cylindrical channel, so as to achieve high carrier mobility, reduce low-frequency noises, prevent polysilicon gate depletion and short channel effects and increase the threshold voltage of the device.
    Type: Grant
    Filed: February 11, 2010
    Date of Patent: December 11, 2012
    Assignee: Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences
    Inventors: Deyuan Xiao, Xi Wang, Miao Zhang, Jing Chen, Zhongying Xue
  • Publication number: 20120289832
    Abstract: Method and systems for improving resolution of imaging systems, such as a microscope or a medical ultrasonic scanner, are provided. The resolution of the microscope is improved by reducing direct illumination of unrelated regions of an object under examination. According to an aspect of the present invention, a method is provided to reduce the direct illumination of the unrelated regions in a detectable region such as a cone of light that otherwise could generate substantial noises. In another aspect of the invention, a method is provided that focuses the illumination beams such that the width of the projected beam spot is narrowed, preventing the generation of a large amount of noise. In particular, the width of the illumination beam is narrowed such that the size of the projected illumination beam is smaller than the field of view of the microscope.
    Type: Application
    Filed: December 21, 2010
    Publication date: November 15, 2012
    Inventors: Miao Zhang, Hui Hu
  • Patent number: 8274118
    Abstract: A Ge and Si hybrid material accumulation mode GAA (Gate-All-Around) CMOSFET includes a PMOS region having a first channel, an NMOS region having a second channel and a gate region. The first channel and the second channel have a circular-shaped cross section and are formed of p-type Ge and n-type Si, respectively; the surfaces of the first channel and the second channel are substantially surrounded by the gate region; a buried oxide layer is disposed between the PMOS region and the NMOS region and between the PMOS or NMOS region and the Si substrate to isolate them from one another. In an accumulation mode, current flows through the overall cylindrical channel, so as to achieve high carrier mobility, reduce low-frequency noises, prevent polysilicon gate depletion and short channel effects and increase the threshold voltage of the device.
    Type: Grant
    Filed: February 11, 2010
    Date of Patent: September 25, 2012
    Assignee: Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences
    Inventors: DEYuan Xiao, Xi Wang, Miao Zhang, Jing Chen, Zhongying Xue
  • Patent number: 8274119
    Abstract: A Ge and Si hybrid material accumulation mode GAA (Gate-All-Around) CMOSFET includes a PMOS region having a first channel, an NMOS region having a second channel and a gate region. The first channel and the second channel have a racetrack-shaped cross section and are formed of p-type Ge and n-type Si, respectively; the surfaces of the first channel and the second channel are substantially surrounded by the gate region; a buried oxide layer is disposed between the PMOS region and the NMOS region and between the PMOS or NMOS region and the Si substrate to isolate them from one another. In an accumulation mode, current flows through the overall racetrack-shaped channel. The disclosed device has high carrier mobility, high device drive current, and maintains the electrical integrity of the device. Meanwhile, polysilicon gate depletion and short channel effects are prevented.
    Type: Grant
    Filed: February 11, 2010
    Date of Patent: September 25, 2012
    Assignee: Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences
    Inventors: Deyuan Xiao, Xi Wang, Miao Zhang, Jing Chen, Zhongying Xue
  • Patent number: 8264042
    Abstract: A hybrid orientation accumulation mode GAA (Gate-All-Around) CMOSFET includes a PMOS region having a first channel, an NMOS region having a second channel and a gate region. The first channel and the second channel have a racetrack-shaped cross section and are formed of p-type Si(110) and n-type Si(100), respectively; the surfaces of the first channel and the second channel are substantially surrounded by the gate region; a buried oxide layer is disposed between the PMOS region and the NMOS region and between the PMOS or NMOS region and the Si substrate to isolate them from one another. The device structure according to the prevent invention is quite simple, compact and highly integrated. In an accumulation mode, current flows through the overall racetrack-shaped channel. The disclosed device results in high carrier mobility. Meanwhile polysilicon gate depletion and short channel effects are prevented, and threshold voltage is increased.
    Type: Grant
    Filed: February 11, 2010
    Date of Patent: September 11, 2012
    Assignee: Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences
    Inventors: Deyuan Xiao, Xi Wang, Miao Zhang, Jing Chen, Zhong Ying Xue
  • Publication number: 20120164003
    Abstract: A blower fan including a motor having a rotating shaft, a bracket, a fan housing having a cavity, a fan wheel, and fan blades. The motor is disposed on the fan housing via the bracket. An extended portion of the rotating shaft extends into the cavity of the fan housing and connects with the fan wheel. The fan blades are disposed on the rotating shaft and between the motor and the fan housing. On the casing of the motor is disposed with air vents. The bracket forms an annular side wall. A cavity is formed inside the annular side wall. The annular side wall is outfitted with air outlets which are connected with the cavity of the annular side wall and the fan blades are disposed in the cavity.
    Type: Application
    Filed: February 26, 2012
    Publication date: June 28, 2012
    Applicant: Zhongshan Broad-Ocean Motor Manufacturing Co., Ltd
    Inventors: Xiang LIU, Ping LU, Miao ZHANG
  • Publication number: 20120129320
    Abstract: The present invention discloses a method of NiSiGe epitaxial growth by introducing Al interlayer, comprising the deposition of an Al thin film on the surface of SiGe layer, subsequent deposition of a Ni layer on Al thin film and then the annealing process for the reaction between Ni layer and SiGe material of SiGe layer to form NiSiGe material. Due to the barrier effect of Al interlayer, NiSiGe layer features a single crystal structure, a flat interface with SiGe substrate and a thickness of up to 0.3 nm, significantly enhancing interface performance.
    Type: Application
    Filed: July 25, 2011
    Publication date: May 24, 2012
    Applicant: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES
    Inventors: Miao Zhang, Bo Zhang, Zhongying Xue, Xi Wang
  • Publication number: 20120122299
    Abstract: A method for forming an edge-chamfered substrate with a buried insulating layer is provided, which comprises the following steps: providing a first substrate (S10); forming an etching mask layer on surfaces of the first substrate, wherein said etching mask layer is formed on the whole surfaces of the first substrate (S11); chamfering a glazed surface of the first substrate and the etching mask layer thereon by the edge grinding (S12); by rotary etching, etching the first substrate which is exposed by the edge grinding on the etching mask layer (S13); providing a second substrate (S14); and bonding the first substrate to the second substrate with a buried insulating layer (S15). The method avoids the edge collapses and the changes of the warp degree in subsequent processes.
    Type: Application
    Filed: July 10, 2010
    Publication date: May 17, 2012
    Applicants: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCE, SHANGHAI SIMGUI TECHNOLOGY CO., LTD.
    Inventors: Xiang Wang, Xing Wei, Miao Zhang, Chenglu Lin, Xi Wang
  • Publication number: 20120112283
    Abstract: The present invention discloses an ESD protection structure in a SOI CMOS circuitry. The ESD protection structure includes a variety of longitudinal (vertical) PN junction structures having significantly enlarged junction areas for current flow. The resulting devices achieve increased heavy current release capability. Processes of fabricating varieties of the ESD protection longitudinal PN junction are also disclosed. Compatibility of the disclosed fabrication processes with current SOI technology reduces implementation cost and improves the integration robustness.
    Type: Application
    Filed: December 16, 2010
    Publication date: May 10, 2012
    Applicant: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY
    Inventors: Xiaolu Huang, Xing Wei, Xinhong Cheng, Jing Chen, Miao Zhang, Xi Wang
  • Publication number: 20120049262
    Abstract: A DRAM cell structure with extended trench, the DRAM cell structure comprises: a NMOS transistor and a trench capacitor connected with the source electrode of the NMOS transistor; the trench capacitor comprises: a semiconductor substrate; a multilayer structure as the bottom plate of the trench capacitor, formed over the semiconductor substrate, which is composed of N-type SiGe layers and N-type Si layers arranged alternatively; a trench formed through the multilayer structure deeply into the semiconductor substrate, whose sidewall cross section is serrate-shaped; a dielectric layer formed on the inner face of the trench; a first polycrystalline silicon layer which is filled in the trench as the top plate of the trench capacitor; and a P-type Si layer formed over the multilayer structure. The present invention adopts doping epitaxial growth process to fabricate a multilayer structure composed of N-type SiGe layers and N-type Si layers arranged alternatively as the bottom plate of the trench capacitor.
    Type: Application
    Filed: November 3, 2010
    Publication date: March 1, 2012
    Applicant: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY
    Inventors: Xiaolu Huang, Jing Chen, Miao Zhang, Xi Wang
  • Publication number: 20110254099
    Abstract: A Ge and Si hybrid material accumulation mode GAA (Gate-All-Around) CMOSFET includes a PMOS region having a first channel, an NMOS region having a second channel and a gate region. The first channel and the second channel have a circular-shaped cross section and are formed of p-type Ge and n-type Si, respectively; the surfaces of the first channel and the second channel are substantially surrounded by the gate region; a buried oxide layer is disposed between the PMOS region and the NMOS region and between the PMOS or NMOS region and the Si substrate to isolate them from one another. In an accumulation mode, current flows through the overall cylindrical channel, so as to achieve high carrier mobility, reduce low-frequency noises, prevent polysilicon gate depletion and short channel effects and increase the threshold voltage of the device.
    Type: Application
    Filed: February 11, 2010
    Publication date: October 20, 2011
    Applicant: Shanghai Institute of Microsystem and Information Technology Chinese Academy
    Inventors: Deyuan Xiao, Xi Wang, Miao Zhang, Jing Chen, Zhongying Xue
  • Publication number: 20110254100
    Abstract: A Ge and Si hybrid material accumulation mode GAA (Gate-All-Around) CMOSFET includes a PMOS region having a first channel, an NMOS region having a second channel and a gate region. The first channel and the second channel have a racetrack-shaped cross section and are formed of p-type Ge and n-type Si, respectively; the surfaces of the first channel and the second channel are substantially surrounded by the gate region; a buried oxide layer is disposed between the PMOS region and the NMOS region and between the PMOS or NMOS region and the Si substrate to isolate them from one another. In an accumulation mode, current flows through the overall racetrack-shaped channel. The disclosed device has high carrier mobility, high device drive current, and maintains the electrical integrity of the device. Meanwhile, polysilicon gate depletion and short channel effects are prevented.
    Type: Application
    Filed: February 11, 2010
    Publication date: October 20, 2011
    Applicant: Shanghai Institute of Microsystem and Information Technology Chinese Academy
    Inventors: Deyuan Xiao, Xi Wang, Miao Zhang, Jing Chen, Zhongying Xue
  • Publication number: 20110254102
    Abstract: A hybrid orientation inversion mode GAA (Gate-All-Around) CMOSFET includes a PMOS region having a first channel, an NMOS region having a second channel and a gate region. The first channel and the second channel have a racetrack-shaped cross section and are formed of n-type Si (110) and p-type Si(100), respectively; the surfaces of the first channel and the second channel are substantially surrounded by the gate region; a buried oxide layer is disposed between the PMOS region and the NMOS region and between the PMOS or NMOS region and the Si substrate to isolate them from one another. The device structure according to the prevent invention is quite simple, compact and highly integrated. In an inversion mode, the devices have different orientation channels, the GAA structure with the racetrack-shaped, high-k gate dielectric layer and metal gate, so as to achieve high carrier mobility, and prevent polysilicon gate depletion and short channel effects.
    Type: Application
    Filed: February 11, 2010
    Publication date: October 20, 2011
    Applicant: Shanghai Institute of Microsystem and Information Technology Chinese Academy
    Inventors: Deyuan Xiao, Xi Wang, Miao Zhang, Jing Chen, Zhongying Xue
  • Publication number: 20110254101
    Abstract: A Ge and Si hybrid material inversion mode GAA (Gate-All-Around) CMOSFET includes a PMOS region having a first channel, an NMOS region having a second channel and a gate region. The first channel and the second channel have a circular-shaped cross section and are formed of n-type Ge and p-type Si, respectively; the surfaces of the first channel and the second channel are substantially surrounded by the gate region; a buried oxide layer is disposed between the PMOS region and the NMOS region and between the PMOS or NMOS region and the Si substrate to isolate them from one another. In an inversion mode, current flows through the overall cylindrical channel, so as to achieve high carrier mobility, reduce low-frequency noises, prevent polysilicon gate depletion and short channel effects and increase the threshold voltage of the device.
    Type: Application
    Filed: February 11, 2010
    Publication date: October 20, 2011
    Applicant: Shanghai Institute of Microsystem and Information Technology Chinese Academy
    Inventors: Deyuan Xiao, Xi Wang, Miao Zhang, Jing Chen, Zhongying Xue
  • Publication number: 20110254013
    Abstract: A hybrid orientation accumulation mode GAA (Gate-All-Around) CMOSFET includes a PMOS region having a first channel, an NMOS region having a second channel and a gate region. The first channel and the second channel have a racetrack-shaped cross section and are formed of p-type Si(110) and n-type Si(100), respectively; the surfaces of the first channel and the second channel are substantially surrounded by the gate region; a buried oxide layer is disposed between the PMOS region and the NMOS region and between the PMOS or NMOS region and the Si substrate to isolate them from one another. The device structure according to the prevent invention is quite simple, compact and highly integrated. In an accumulation mode, current flows through the overall racetrack-shaped channel. The disclosed device results in high carrier mobility. Meanwhile polysilicon gate depletion and short channel effects are prevented, and threshold voltage is increased.
    Type: Application
    Filed: February 11, 2010
    Publication date: October 20, 2011
    Applicant: Shanghai Institute of Microsystem and Infomation Technology Chinese Academy
    Inventors: Deyuan Xiao, Xi Wang, Miao Zhang, Jing Chen, Zhong Ying Xue
  • Publication number: 20110248354
    Abstract: A Ge and Si hybrid material inversion mode GAA (Gate-All-Around) CMOSFET includes a PMOS region having a first channel, an NMOS region having a second channel and a gate region. The first channel and the second channel have a racetrack-shaped cross section and are formed of n-type Ge and p-type Si, respectively; the surfaces of the first channel and the second channel are substantially surrounded by the gate region; a buried oxide layer is disposed between the PMOS region and the NMOS region and between the PMOS or NMOS region and the Si substrate to isolate them from one another. In an inversion mode, the devices have hybrid material, GAA structure with the racetrack-shaped, high-k gate dielectric layer and metal gate, so as to achieve high carrier mobility, prevent polysilicon gate depletion and short channel effects.
    Type: Application
    Filed: February 11, 2010
    Publication date: October 13, 2011
    Applicant: Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences
    Inventors: Deyuan Xiao, Xi Wang, Miao Zhang, Jing Chen, Zhongying Xue