Patents by Inventor Miaomiao Wang

Miaomiao Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230102261
    Abstract: Semiconductor devices, integrated chips, and methods of forming the same include forming a fill over a stack of semiconductor layers. The stack of semiconductor layers includes a first sacrificial layer and a set of alternating second sacrificial layers and channel layers. A dielectric fin is formed over the stack of semiconductor layers. The first sacrificial layer and the second sacrificial layers are etched away, leaving the channel layers supported by the dielectric fin over an exposed substrate surface. A dielectric layer is conformally deposited on the exposed substrate surface, the dielectric layer having a consistent thickness across the top surface. A conductive material is deposited over the dielectric layer.
    Type: Application
    Filed: September 27, 2021
    Publication date: March 30, 2023
    Inventors: Huimei Zhou, Andrew M. Greene, Julien Frougier, Ruqiang Bao, Jingyun Zhang, Miaomiao Wang, Dechao Guo
  • Publication number: 20230065715
    Abstract: A complementary field effect transistor (CFET) structure including a first transistor disposed above a second transistor, and a first source/drain region of the first transistor disposed above a second source/drain region of the second transistor, wherein the second source/drain region comprises a recessed notch beneath the first source/drain region.
    Type: Application
    Filed: September 1, 2021
    Publication date: March 2, 2023
    Inventors: Ruilong Xie, HUIMEI ZHOU, MIAOMIAO WANG, Alexander Reznicek
  • Publication number: 20230041159
    Abstract: A nanosheet semiconductor device includes a first ferroelectric region between a channel nanosheet stack and a gate contact. The channel nanosheet stack includes a plurality of channel nanosheets each connected to a source and connected to a drain and a gate surrounding the plurality of channel nanosheets and connected to the source and connected to the drain. The nanosheet semiconductor device may further include a second ferroelectric region upon a sidewall of the channel nanosheet stack. Sidewalls of the first ferroelectric region may be substantially coplanar with or inset from underlying sidewalls of the channel nanosheet stack.
    Type: Application
    Filed: August 9, 2021
    Publication date: February 9, 2023
    Inventors: Jingyun Zhang, REINALDO VEGA, MIAOMIAO WANG, Takashi Ando
  • Publication number: 20220394369
    Abstract: Disclosed is an intelligent head-mounted apparatus, comprising: a lens; a leg coupled to the lens and provided with a cavity therein; a sound generation device provided in the cavity and dividing the cavity into a front sound cavity and a rear sound cavity; a sound outlet hole provided on the leg and in communication with the front sound cavity; and a main sound leakage hole provided on the leg and in communication with the rear sound cavity, wherein positions of the sound outlet hole and the main sound leakage hole are configured such that the sound outlet hole is located at a front side of an auricle of a wearer, and the main sound leakage hole is located at a rear side of the auricle of the wearer when the wearer wears the intelligent head-mounted apparatus.
    Type: Application
    Filed: October 30, 2020
    Publication date: December 8, 2022
    Inventors: Xinfeng YANG, Chengxiang ZHAI, Miaomiao WANG
  • Publication number: 20220390770
    Abstract: Disclosed is an intelligent head-mounted apparatus, comprising: a lens; a leg coupled to the lens and provided with a cavity therein; a sound generation device provided in the cavity and dividing the cavity into front and rear sound cavities; a sound outlet hole provided on the leg and in communication with the front sound cavity; main and auxiliary sound leakage holes provided on the leg and in communication with the rear sound cavity, positions of the sound outlet hole, the main sound leakage hole and the auxiliary sound leakage hole are configured such that the sound outlet hole and the auxiliary sound leakage hole are located at a front side of an auricle of a wearer, the main sound leakage hole is located at a rear side of the auricle of the wearer when the wearer wears the intelligent head-mounted apparatus.
    Type: Application
    Filed: October 30, 2020
    Publication date: December 8, 2022
    Inventors: Xinfeng YANG, Chengxiang ZHAI, Miaomiao WANG
  • Patent number: 11493366
    Abstract: In a rotary motion detecting device that outputs a signal corresponding to rotary motion of a rotary disk coupled to a shaft, a boss is fixed to the shaft, the boss is fixed to one surface of the rotary disk, and one of the boss and the shaft is a hole member having a hole formed therein and the other is an inserted member that is inserted in the hole. The hole member has an inner periphery (inner diameter) that is larger than an outer periphery (outer diameter) of the inserted member so that the shaft can be vertical to the rotary disk without being restricted by the boss.
    Type: Grant
    Filed: July 21, 2020
    Date of Patent: November 8, 2022
    Assignee: FANUC CORPORATION
    Inventor: Miaomiao Wang
  • Publication number: 20220200870
    Abstract: An analysis device obtains connection states of a testing terminal pair that respectively correspond to a plurality of unit moments in a first historical time segment. The testing terminal pair includes a first terminal and a second terminal, the first historical time segment is a time segment before a current time, the first historical time segment includes M consecutive unit moments, and M is a natural number greater than or equal to 2. The analysis device determines, based on the connection states of the testing terminal pair that respectively correspond to the plurality of unit moments in the first historical time segment, a connection state that is of the testing terminal pair and that corresponds to at least one unit moment in a future time segment.
    Type: Application
    Filed: March 11, 2022
    Publication date: June 23, 2022
    Inventors: Hao ZHANG, Yuming XIE, Miaomiao WANG, Zhongyu WANG
  • Publication number: 20210384139
    Abstract: Semiconductor device layout designs for Vt tuning are provided. In one aspect, a semiconductor device is provided. The semiconductor device includes: at least one first metal line in contact with a source or drain of an FET; at least one second metal line in contact with a gate of the FET, wherein the first metal line crosses the second metal line; and an oxygen diffusion blocking layer on top of the at least one first metal line in an overlap area of the at least one first metal line and the at least one second metal line. A method of forming a semiconductor device is also provided.
    Type: Application
    Filed: June 3, 2020
    Publication date: December 9, 2021
    Inventors: Huimei ZHOU, Su Chen FAN, Miaomiao WANG, Zuoguang LIU
  • Publication number: 20210159173
    Abstract: A semiconductor structure includes a resistance tunable fuse stack structure. A fabrication method for forming the same includes forming on a substrate layer a first fuse conductive layer, directly on, and contacting a top surface of, the substrate layer, followed by forming a first inter-layer dielectric (ILD) layer, directly on, and contacting a top surface of, the first fuse conductive layer. The method forms a second fuse conductive layer, directly on, and contacting a top surface of, the first ILD layer, followed by forming a second ILD layer, directly on, and contacting a top surface of, the second fuse conductive layer, the layers are interleaved in a stack forming a fuse stack structure. First and second fuse contacts are formed in the fuse stack structure vertically extending through the layers and contacting the first and second fuse conductive layers.
    Type: Application
    Filed: February 3, 2021
    Publication date: May 27, 2021
    Applicant: International Business Machines Corporation
    Inventors: Alexander REZNICEK, Chih-Chao YANG, Miaomiao WANG, Donald Francis CANAPERI
  • Publication number: 20210090996
    Abstract: A semiconductor structure includes a resistance tunable fuse stack structure. A fabrication method for forming the same includes forming on a substrate layer a first fuse conductive layer, directly on, and contacting a top surface of, the substrate layer, followed by forming a first inter- layer dielectric (ILD) layer, directly on, and contacting a top surface of, the first fuse conductive layer. The method forms a second fuse conductive layer, directly on, and contacting a top surface of, the first ILD layer, followed by forming a second ILD layer, directly on, and contacting a top surface of, the second fuse conductive layer, the layers are interleaved in a stack forming a fuse stack structure. First and second fuse electrical contacts are formed in the fuse stack structure vertically extending through the layers and contacting the first and second fuse conductive layers.
    Type: Application
    Filed: September 20, 2019
    Publication date: March 25, 2021
    Inventors: Alexander REZNICEK, Chih-Chao YANG, Miaomiao WANG, Donald Francis CANAPERI
  • Patent number: 10957642
    Abstract: A semiconductor structure includes a resistance tunable fuse stack structure. A fabrication method for forming the same includes forming on a substrate layer a first fuse conductive layer, directly on, and contacting a top surface of, the substrate layer, followed by forming a first inter-layer dielectric (ILD) layer, directly on, and contacting a top surface of, the first fuse conductive layer. The method forms a second fuse conductive layer, directly on, and contacting a top surface of, the first ILD layer, followed by forming a second ILD layer, directly on, and contacting a top surface of, the second fuse conductive layer, the layers are interleaved in a stack forming a fuse stack structure. First and second fuse electrical contacts are formed in the fuse stack structure vertically extending through the layers and contacting the first and second fuse conductive layers.
    Type: Grant
    Filed: September 20, 2019
    Date of Patent: March 23, 2021
    Assignee: International Business Machines Corporation
    Inventors: Alexander Reznicek, Chih-Chao Yang, Miaomiao Wang, Donald Francis Canaperi
  • Publication number: 20210033429
    Abstract: In a rotary motion detecting device that outputs a signal corresponding to rotary motion of a rotary disk coupled to a shaft, a boss is fixed to the shaft, the boss is fixed to one surface of the rotary disk, and one of the boss and the shaft is a hole member having a hole formed therein and the other is an inserted member that is inserted in the hole. The hole member has an inner periphery (inner diameter) that is larger than an outer periphery (outer diameter) of the inserted member so that the shaft can be vertical to the rotary disk without being restricted by the boss.
    Type: Application
    Filed: July 21, 2020
    Publication date: February 4, 2021
    Inventor: Miaomiao WANG
  • Patent number: 10903318
    Abstract: A method is presented for reducing external resistance of a vertical field-effect-transistor (FET). The method includes forming a plurality of fins over a sacrificial layer disposed over a substrate, selectively removing the sacrificial layer to form an etch stop layer in direct contact with the substrate, disposing embedded bottom source/drain regions between a bottom portion of the plurality of fins and the etch stop layer, disposing encapsulation layers over the plurality of fins, recessing at least one of the encapsulation layers to expose top portions of the plurality of fins, forming top spacers adjacent the top portions of the plurality of fins, and forming top source/drain regions over the top portions of the plurality of fins.
    Type: Grant
    Filed: January 29, 2020
    Date of Patent: January 26, 2021
    Assignee: International Business Machines Corporation
    Inventors: Choonghyun Lee, Reinaldo Vega, Jingyun Zhang, Miaomiao Wang
  • Patent number: 10833172
    Abstract: A semiconductor structure and a method for fabricating the same. The semiconductor structure includes at least one semiconductor fin. A first source/drain contacts the semiconductor fin. An interfacial layer contacts sidewalls of the semiconductor fin. An insulating layer contacts the interfacial layer. One or more conductive gate layers encapsulate the interfacial and insulating layers. A second source/drain is formed above the first source/drain. The method comprises forming at least one semiconductor fin. An interfacial layer is formed in contact with sidewalls of the semiconductor fin. An insulating layer is formed in contact with the interfacial layer. The interfacial layer and the insulating layer are encapsulated by one or more conductive gate layers.
    Type: Grant
    Filed: August 17, 2018
    Date of Patent: November 10, 2020
    Assignee: International Business Machines Corporation
    Inventors: Choonghyun Lee, Christopher J. Waskiewicz, Miaomiao Wang, Hemanth Jagannathan
  • Publication number: 20200168706
    Abstract: A method is presented for reducing external resistance of a vertical field-effect-transistor (FET). The method includes forming a plurality of fins over a sacrificial layer disposed over a substrate, selectively removing the sacrificial layer to form an etch stop layer in direct contact with the substrate, disposing embedded bottom source/drain regions between a bottom portion of the plurality of fins and the etch stop layer, disposing encapsulation layers over the plurality of fins, recessing at least one of the encapsulation layers to expose top portions of the plurality of fins, forming top spacers adjacent the top portions of the plurality of fins, and forming top source/drain regions over the top portions of the plurality of fins.
    Type: Application
    Filed: January 29, 2020
    Publication date: May 28, 2020
    Inventors: Choonghyun Lee, Reinaldo Vega, Jingyun Zhang, Miaomiao Wang
  • Patent number: 10651123
    Abstract: A semiconductor device comprising an anti-fuse is disclosed. The semiconductor anti-fuse includes a highly doped source of a first conductivity type overlying a substrate. The semiconductor anti-fuse further includes a counter-doped layer of a second conductivity type arranged between the highly doped source and the substrate. The semiconductor anti-fuse further includes a highly doped fuse region extending over the highly doped source and comprising an epitaxial growth, the highly doped fuse region implanted with ions.
    Type: Grant
    Filed: May 14, 2019
    Date of Patent: May 12, 2020
    Assignee: International Business Machines Corporation
    Inventors: Alexander Reznicek, Pouya Hashemi, Miaomiao Wang, Takashi Ando
  • Patent number: 10636874
    Abstract: A method is presented for reducing external resistance of a vertical field-effect-transistor (FET). The method includes forming a plurality of fins over a sacrificial layer disposed over a substrate, selectively removing the sacrificial layer to form an etch stop layer in direct contact with the substrate, disposing embedded bottom source/drain regions between a bottom portion of the plurality of fins and the etch stop layer, disposing encapsulation layers over the plurality of fins, recessing at least one of the encapsulation layers to expose top portions of the plurality of fins, forming top spacers adjacent the top portions of the plurality of fins, and forming top source/drain regions over the top portions of the plurality of fins.
    Type: Grant
    Filed: August 29, 2018
    Date of Patent: April 28, 2020
    Assignee: International Business Machines Corporation
    Inventors: Choonghyun Lee, Reinaldo Vega, Jingyun Zhang, Miaomiao Wang
  • Publication number: 20200075723
    Abstract: A method is presented for reducing external resistance of a vertical field-effect-transistor (FET). The method includes forming a plurality of fins over a sacrificial layer disposed over a substrate, selectively removing the sacrificial layer to form an etch stop layer in direct contact with the substrate, disposing embedded bottom source/drain regions between a bottom portion of the plurality of fins and the etch stop layer, disposing encapsulation layers over the plurality of fins, recessing at least one of the encapsulation layers to expose top portions of the plurality of fins, forming top spacers adjacent the top portions of the plurality of fins, and forming top source/drain regions over the top portions of the plurality of fins.
    Type: Application
    Filed: August 29, 2018
    Publication date: March 5, 2020
    Inventors: Choonghyun Lee, Reinaldo Vega, Jingyun Zhang, Miaomiao Wang
  • Publication number: 20200058766
    Abstract: A semiconductor structure and a method for fabricating the same. The semiconductor structure includes at least one semiconductor fin. A first source/drain contacts the semiconductor fin. An interfacial layer contacts sidewalls of the semiconductor fin. An insulating layer contacts the interfacial layer. One or more conductive gate layers encapsulate the interfacial and insulating layers. A second source/drain is formed above the first source/drain. The method comprises forming at least one semiconductor fin. An interfacial layer is formed in contact with sidewalls of the semiconductor fin. An insulating layer is formed in contact with the interfacial layer. The interfacial layer and the insulating layer are encapsulated by one or more conductive gate layers.
    Type: Application
    Filed: August 17, 2018
    Publication date: February 20, 2020
    Inventors: Choonghyun LEE, Christopher J. WASKIEWICZ, Miaomiao WANG, Hemanth JAGANNATHAN
  • Publication number: 20190326215
    Abstract: A back-end-of-the-line (BEOL) anti-fuse of a BEOL structure is disclosed. The anti-fuse structure includes a metallization layer formed in a first insulator layer of the BEOL structure. The metallization layer has a trench formed therein. The trench has substantially vertical sidewalls and angled sidewalls formed underlying the vertical sidewalls, the angled sidewalls angled to meet at an apex. The anti-fuse structure further includes a second insulator formed on the vertical sidewalls and the angled sidewalls. The anti-fuse structure further includes a metallic via formed on the second insulator in the trench.
    Type: Application
    Filed: April 19, 2018
    Publication date: October 24, 2019
    Inventors: Alexander REZNICEK, Chih-Chao YANG, Miaomiao WANG