Abstract: A technique for forming a semiconductor device is provided. Sacrificial mandrels are formed over a hardmask layer on a semiconductor layer. Spacers are formed on sidewalls of the sacrificial mandrels. The sacrificial mandrels are removed to leave the spacers. A masking process leaves exposed a first set of spacers with a second set protected. In response to the masking process, a first fin etch process forms a first set of fins in the semiconductor layer via first set of spacers. The first set of fins has a vertical sidewall profile. Another masking process leaves exposed the second set of spacers with the first set of spacers and the first set of fins protected. In response to the other masking process, a second fin etch process forms a second set of fins in semiconductor layer using the second set of spacers. The second set of fins has a trapezoidal sidewall profile.

Abstract: Semiconductor structures containing FinFET anti-fuses with reduced breakdown voltage are provided which can be readily integrated with high performance FinFETs. The anti-fuse includes at least one metal structure having a faceted sidewall. The sharp corner of the faceted sidewall of the at least one metal structure causes an electric field concentration, thus reducing the breakdown voltage of the anti-fuse.

Abstract: A technique for forming a semiconductor device is provided. Sacrificial mandrels are formed over a hardmask layer on a semiconductor layer. Spacers are formed on sidewalls of the sacrificial mandrels. The sacrificial mandrels are removed to leave the spacers. A masking process leaves exposed a first set of spacers with a second set protected. In response to the masking process, a first fin etch process forms a first set of fins in the semiconductor layer via first set of spacers. The first set of fins has a vertical sidewall profile. Another masking process leaves exposed the second set of spacers with the first set of spacers and the first set of fins protected. In response to the other masking process, a second fin etch process forms a second set of fins in semiconductor layer using the second set of spacers. The second set of fins has a trapezoidal sidewall profile.

Abstract: A technique for forming a semiconductor device is provided. Sacrificial mandrels are formed over a hardmask layer on a semiconductor layer. Spacers are formed on sidewalls of the sacrificial mandrels. The sacrificial mandrels are removed to leave the spacers. A masking process leaves exposed a first set of spacers with a second set protected. In response to the masking process, a first fin etch process forms a first set of fins in the semiconductor layer via first set of spacers. The first set of fins has a vertical sidewall profile. Another masking process leaves exposed the second set of spacers with the first set of spacers and the first set of fins protected. In response to the other masking process, a second fin etch process forms a second set of fins in semiconductor layer using the second set of spacers. The second set of fins has a trapezoidal sidewall profile.

Abstract: A TFT array substrate is disclosed. The TFT array substrate includes a base, a display region disposed on the base, and a gate drive circuit region disposed on the base. The display region includes a plurality of data lines extending along a first direction, and a plurality of scan lines extending along a second direction, the scan lines intersecting and electrically insulated from the data lines. In addition, the gate drive circuit region includes at least one first capacitor, and a plurality of TFTs which are separated from each other to form a margin region between the TFTs, where the first capacitor is disposed in the margin region.

Abstract: An optical encoder includes a light emitting part for emitting light, a stationary slit part and a rotational slit part which allow part of the light emitted from the light emitting part to pass therethrough, a light receiving part for detecting the light passing through the stationary slit part and the rotational slit part, and a support for supporting the stationary slit part. The stationary slit part includes a patterned portion in which a plurality of slits for allowing light to pass therethrough are formed, a fixed portion fixed to the support, and an elastic structure which is elastically deformable and provided between the patterned portion and the fixed portion.

Abstract: Embodiments are directed to a method of forming portions of a fin-type field effect transistor (FinFET). The method includes forming at least one fin, and forming a dielectric layer over at least a portion of the at least one fin. The method further includes forming a work function layer over at least a portion of the dielectric layer. The method further includes forming a source region or a drain region adjacent the at least one fin, and performing an anneal operation, wherein the anneal operation anneals the dielectric layer and either the source region or the drain region, and wherein the work function layer provides a protection function to the at least a portion of the dielectric layer during the anneal operation.

Abstract: Embodiments are directed to a method of forming portions of a fin-type field effect transistor (FinFET). The method includes forming at least one fin, and forming a dielectric layer over at least a portion of the at least one fin. The method further includes forming a work function layer over at least a portion of the dielectric layer. The method further includes forming a source region or a drain region adjacent the at least one fin, and performing an anneal operation, wherein the anneal operation anneals the dielectric layer and either the source region or the drain region, and wherein the work function layer provides a protection function to the at least a portion of the dielectric layer during the anneal operation.

Abstract: Embodiments are directed to a method of forming portions of a fin-type field effect transistor (FinFET). The method includes forming at least one fin, and forming a dielectric layer over at least a portion of the at least one fin. The method further includes forming a work function layer over at least a portion of the dielectric layer. The method further includes forming a source region or a drain region adjacent the at least one fin, and performing an anneal operation, wherein the anneal operation anneals the dielectric layer and either the source region or the drain region, and wherein the work function layer provides a protection function to the at least a portion of the dielectric layer during the anneal operation.

Abstract: A technique for forming a semiconductor device is provided. Sacrificial mandrels are formed over a hardmask layer on a semiconductor layer. Spacers are formed on sidewalls of the sacrificial mandrels. The sacrificial mandrels are removed to leave the spacers. A masking process leaves exposed a first set of spacers with a second set protected. In response to the masking process, a first fin etch process forms a first set of fins in the semiconductor layer via first set of spacers. The first set of fins has a vertical sidewall profile. Another masking process leaves exposed the second set of spacers with the first set of spacers and the first set of fins protected. In response to the other masking process, a second fin etch process forms a second set of fins in semiconductor layer using the second set of spacers. The second set of fins has a trapezoidal sidewall profile.

Abstract: A technique for forming a semiconductor device is provided. Sacrificial mandrels are formed over a hardmask layer on a semiconductor layer. Spacers are formed on sidewalls of the sacrificial mandrels. The sacrificial mandrels are removed to leave the spacers. A masking process leaves exposed a first set of spacers with a second set protected. In response to the masking process, a first fin etch process forms a first set of fins in the semiconductor layer via first set of spacers. The first set of fins has a vertical sidewall profile. Another masking process leaves exposed the second set of spacers with the first set of spacers and the first set of fins protected. In response to the other masking process, a second fin etch process forms a second set of fins in semiconductor layer using the second set of spacers. The second set of fins has a trapezoidal sidewall profile.

Abstract: A technique for forming a semiconductor device is provided. Sacrificial mandrels are formed over a hardmask layer on a semiconductor layer. Spacers are formed on sidewalls of the sacrificial mandrels. The sacrificial mandrels are removed to leave the spacers. A masking process leaves exposed a first set of spacers with a second set protected. In response to the masking process, a first fin etch process forms a first set of fins in the semiconductor layer via first set of spacers. The first set of fins has a vertical sidewall profile. Another masking process leaves exposed the second set of spacers with the first set of spacers and the first set of fins protected. In response to the other masking process, a second fin etch process forms a second set of fins in semiconductor layer using the second set of spacers. The second set of fins has a trapezoidal sidewall profile.

Abstract: A technique for forming a semiconductor device is provided. Sacrificial mandrels are formed over a hardmask layer on a semiconductor layer. Spacers are formed on sidewalls of the sacrificial mandrels. The sacrificial mandrels are removed to leave the spacers. A masking process leaves exposed a first set of spacers with a second set protected. In response to the masking process, a first fin etch process forms a first set of fins in the semiconductor layer via first set of spacers. The first set of fins has a vertical sidewall profile. Another masking process leaves exposed the second set of spacers with the first set of spacers and the first set of fins protected. In response to the other masking process, a second fin etch process forms a second set of fins in semiconductor layer using the second set of spacers. The second set of fins has a trapezoidal sidewall profile.

Abstract: A technique for forming a semiconductor device is provided. Sacrificial mandrels are formed over a hardmask layer on a semiconductor layer. Spacers are formed on sidewalls of the sacrificial mandrels. The sacrificial mandrels are removed to leave the spacers. A masking process leaves exposed a first set of spacers with a second set protected. In response to the masking process, a first fin etch process forms a first set of fins in the semiconductor layer via first set of spacers. The first set of fins has a vertical sidewall profile. Another masking process leaves exposed the second set of spacers with the first set of spacers and the first set of fins protected. In response to the other masking process, a second fin etch process forms a second set of fins in semiconductor layer using the second set of spacers. The second set of fins has a trapezoidal sidewall profile.

Abstract: In an optical encoder which includes a rotary plate formed with a plurality of slit arrays and a plurality of light receiving parts corresponding to the slit arrays, at least one of the outer edge of a light receiving part located on the outer side of the optical axis X of light emitted from a light emitting part and the inner edge of the light receiving part located on the inner side of the optical axis X is positioned at a greater distance from the optical axis than the edge of the slit array corresponding to the light receiving part.

Abstract: An array substrate including a plurality of pixel units each including a 2×2 sub-pixel area matrix, where each of the sub-pixel areas includes three sub-pixel electrodes. The strip electrode of at least one of the sub-pixel electrodes from each of the first sub-pixel area and the third sub-pixel area is parallel to a first direction, and the strip electrode of at least one of the sub-pixel electrodes from each of the second sub-pixel area and the fourth sub-pixel area is parallel to a second direction. The first direction intersects with the second direction. Also, a first area is defined by the sub-pixel electrodes including the strip electrodes parallel to the first direction and the sub-pixel electrodes including the strip electrodes parallel to the second direction, and the first area is provided with a sub-pixel switch.

Abstract: An array substrate including a plurality of pixel units each including a 2×2 sub-pixel area matrix, where each of the sub-pixel areas includes three sub-pixel electrodes. The strip electrode of at least one of the sub-pixel electrodes from each of the first sub-pixel area and the third sub-pixel area is parallel to a first direction, and the strip electrode of at least one of the sub-pixel electrodes from each of the second sub-pixel area and the fourth sub-pixel area is parallel to a second direction. The first direction intersects with the second direction. Also, a first area is defined by the sub-pixel electrodes including the strip electrodes parallel to the first direction and the sub-pixel electrodes including the strip electrodes parallel to the second direction, and the first area is provided with a sub-pixel electrode.

Abstract: A TFT array substrate is disclosed. The TFT array substrate includes a base, a display region disposed on the base, and a gate drive circuit region disposed on the base. The display region includes a plurality of data lines extending along a first direction, and a plurality of scan lines extending along a second direction, the scan lines intersecting and electrically insulated from the data lines. In addition, the gate drive circuit region includes at least one first capacitor, and a plurality of TFTs which are separated from each other to form a margin region between the TFTs, where the first capacitor is disposed in the margin region.

Abstract: An array substrate including a plurality of pixel units each including a 2×2 sub-pixel area matrix, where each of the sub-pixel areas includes three sub-pixel electrodes. The strip electrode of at least one of the sub-pixel electrodes from each of the first sub-pixel area and the third sub-pixel area is parallel to a first direction, and the strip electrode of at least one of the sub-pixel electrodes from each of the second sub-pixel area and the fourth sub-pixel area is parallel to a second direction. The first direction intersects with the second direction. Also, a first area is defined by the sub-pixel electrodes including the strip electrodes parallel to the first direction and the sub-pixel electrodes including the strip electrodes parallel to the second direction, and the first area is provided with a sub-pixel switch.

Abstract: An array substrate including a plurality of pixel units each including a 2×2 sub-pixel area matrix, where each of the sub-pixel areas includes three sub-pixel electrodes. The strip electrode of at least one of the sub-pixel electrodes from each of the first sub-pixel area and the third sub-pixel area is parallel to a first direction, and the strip electrode of at least one of the sub-pixel electrodes from each of the second sub-pixel area and the fourth sub-pixel area is parallel to a second direction. The first direction intersects with the second direction. Also, a first area is defined by the sub-pixel electrodes including the strip electrodes parallel to the first direction and the sub-pixel electrodes including the strip electrodes parallel to the second direction, and the first area is provided with a sub-pixel electrode.