Patents by Inventor Michael Friedmann

Michael Friedmann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Periodic patterns and technique to control misalignment between two layers
    Publication number: 20040061857
    Abstract: A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or interlaced periodic structures are illuminated by incident radiation, and the diffracted radiation of the incident radiation by the overlying or interlaced periodic structures are detected to provide an output signal. The misalignment between the overlying or interlaced periodic structures may then be determined from the output signal.
    Type: Application
    Filed: October 8, 2003
    Publication date: April 1, 2004
    Inventors: Ibrahim Abdulhalim, Mike Adel, Michael Friedmann, Michael Faeyrman
  • Periodic patterns and technique to control misalignment
    Publication number: 20030002043
    Abstract: A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or interlaced periodic structures are illuminated by incident radiation, and the diffracted radiation of the incident radiation by the overlying or interlaced periodic structures are detected to provide an output signal. The misalignment between the overlying or interlaced periodic structures may then be determined from the output signal.
    Type: Application
    Filed: April 10, 2001
    Publication date: January 2, 2003
    Applicant: KLA-Tencor Corporation
    Inventors: Ibrahim Abdulhalim, Mike Adel, Michael Friedmann, Michael Faeyrman