Abstract: This electrostatic actuator includes an electret film and a conductor layer formed on the electret film, and the conductor layer is so formed as to have a sectional shape reduced in width upward from the side closer to the electret film.

Abstract: An electrostatic induction power generator includes first and second substrates arranged to be opposed to each other, a third substrate arranged between the first and second substrates, first and second electrodes provided on both surfaces of the third substrate respectively, a third electrode provided on a surface of the first substrate; and a fourth electrode provided on a surface of the second substrate.

Abstract: An electrostatic acting device in which leakage of charge from an electret film is suppressed. The electrostatic acting device comprises a movable electrode section (20) having a movable electrode (22) and a fixed electrode section (10) having an electret film (12) opposed to the movable electrode section (20) at a predetermined distance and capable of storing charge and a conductive layer (13) formed on a predetermined region on the upper surface of the electret film (12). The conductive layer (13) is formed on the surface of a region of the electret film (12), and the region is projected.

Abstract: An electrostatic operation device in which a variation in the amount of electric charges accumulated in an electret film caused by physical impact can be suppressed. The electrostatic operation device (electrostatic induction power generating device (1)) comprises movable electrodes (8), an electret film (5) so formed as to face the movable electrodes (8) at a space therebetween, and a stopper (401b) for suppressing the approach of the movable electrodes (8) to the electret film (5) within a predetermined space.

Abstract: This electrostatic actuator includes an electret film and a conductor layer formed on the electret film, and the conductor layer is so formed as to have a sectional shape reduced in width upward from the side closer to the electret film.

Abstract: An electrostatic acting device is so formed that a distance between partial regions of a first electrode of a first substrate and a second electrode of a second substrate is smaller than an interelectrode distance controlled by a gap control portion.

Abstract: An electronic apparatus includes a power generator including a movable portion displaced by kinetic energy acting on an electronic apparatus body and a conversion portion converting displacement of the movable portion to electric energy, wherein the movable portion of the power generator is arranged at a position separated from a support portion of the electronic apparatus body.

Abstract: An electric power generator capable of using external vibrations in various directions to generate power. A fixed substrate having a surface with a plurality of electret electrodes and a movable substrate having a surface with a movable electrode are spaced from each other. The fixed substrate is fixed in the electric power generator. Spring driving bodies support the movable substrate so that the movable substrate elastically moves in any direction within an XY plane when receiving external vibrations.

Abstract: An electronic apparatus includes a power generator including a movable portion displaced by kinetic energy acting on an electronic apparatus body and a conversion portion converting displacement of the movable portion to electric energy, wherein the movable portion of the power generator is arranged on or below a gravity center of the electronic apparatus body in a state where the electronic apparatus body is supported in a used state.

Abstract: A power generator capable of improving power generation efficiency is obtained. This power generator includes a movable portion moving by kinetic energy acting on a power generator body, a first conversion portion converting kinetic energy of the movable portion to electric energy and a movement direction changing portion changing a direction in which the movable portion moves to a direction along a direction in which acceleration applied to the movable portion is larger regardless of a direction of the power generator body.

Abstract: This electrostatic actuator includes an electret film and a conductor layer formed on the electret film, and the conductor layer is so formed as to have a sectional shape reduced in width upward from the side closer to the electret film.

Abstract: This energy converter includes a first flat coil and a magnet opposed to the first flat coil at an interval, and the first flat coil and the magnet are so formed as to be relatively movable, for converting kinetic energy to electric energy by electromagnetic induction.

Abstract: An electret device includes an electret film capable of storing charges and a protective film formed so as to substantially surround a side end surface of the electret film.

Abstract: An electret device includes an electret film into which charges are injected and a barrier film provided on a surface of the electret film and having an electron affinity smaller than the electron affinity of the electret film.

Abstract: A sensor hard to break and capable of improving sensitivity is obtained. This sensor comprises an electrode plate and a diaphragm, opposed to the electrode plate, including a first elastic film arranged on a central portion and a second elastic film, arranged at least on a peripheral portion of the first elastic film, made of a material having a lower elastic modulus than the first elastic film.

Abstract: A semiconductor sensor for improving manufacturing productivity. Opposing electrodes, or a diaphragm electrode and a fixed electrode, form an electrostatic capacity sensing semiconductor microphone on a microphone chip. A through electrode is formed on the microphone chip by a conductor extending between the upper and lower surfaces of the semiconductor substrate. The through electrode directly and electrically connects a MEMS configuration formed by the diaphragm electrode to the wiring of a printed wiring board without using wire bonding.

Abstract: An electret device includes an electret film capable of storing charges and a charge outflow inhibition film formed on an upper surface of a region having a high charge density in the electret film and inhibiting the charges stored in the electret film from flowing out

Abstract: After etching the interlayer dielectric film 4 formed on the lower layer interconnect line 1 into a shape with holes, the upper layer dielectric film 6 is etched into a shape with trenches utilizing the etching stopper 5. The etching stopper 5 which is exposed at the bottom of the trench is removed by additional etching, and then, the interlayer dielectric film 4 which is exposed at the bottom of the trench is etched back to a predetermined thickness. Subsequently, the hole and the trench are filled with an interconnect metal 10.

Abstract: An electric power generator capable of using external vibrations in various directions to generate power. A fixed substrate having a surface with a plurality of electret electrodes and a movable substrate having a surface with a movable electrode are spaced from each other. The fixed substrate is fixed in the electric power generator. Spring driving bodies support the movable substrate so that the movable substrate elastically moves in any direction within an XY plane when receiving external vibrations.

Abstract: An electrostatic induction generator requiring no electric power supply device and capable of being mounted on a printed board is obtained. This electrostatic induction generator includes a pair of first electrodes capable of storing charges, a pair of vibrating electrodes capable of vibrating in a first direction and a second direction different from the first direction, and charged with opposite charges due to charges stored in the pair of first electrodes respectively, and a second electrode for electrically connecting the pair of vibrating electrodes to each other in a case where the pair of vibrating electrodes are at prescribed positions.