Abstract: An information processing device is provided which includes a first acquisition unit (214) configured to acquire a control command, inputted by a first user, including positional information for designating a presentation position at which to present a tactile stimulus by a tactile presentation device and mode information for designating a mode of the tactile stimulus, a generation unit (218) configured to generate a tactile control signal for presenting the tactile stimulus to the presentation position in response to the control command, and a first distribution unit (222) configured to distribute the tactile control signal to the tactile presentation device worn on a body of a second user, in which the first distribution unit distributes, according to a predetermined rule, the tactile control signal related to the control command inputted by each of a plurality of the first users to the tactile presentation device.

Abstract: An optical device of the present disclosure includes a first light guide body including a first light-incident portion provided with a first incidence-side diffraction element, and a second light guide body including a second light-incident portion provided with a second incidence-side diffraction element, wherein the second light guide body, when light is caused to enter the first light-incident portion, is disposed at a position at which a part of the light passing through the first light guide body enters the second light-incident portion, and the second incidence-side diffraction element is an element that diffracts light of monochromatic color at a smaller angle than the first incidence-side diffraction element does, when the light of monochromatic color is caused to enter at a same angle.

Abstract: A light flux diameter expanding element includes a light guiding plate with a light input face and a light output face, and with a thickness of 0.2 mm to 0.8 mm; a diffraction grating on the input side; and a diffraction grating on the output side, and is provided so as to have the same grating period as that of the diffraction grating on the input side, in which a forming region of the diffraction grating on the input side is smaller than that of the output side, and a grating period of the diffraction grating on the input side is a period in which a small diffraction angle in diffraction angles of +1-st order diffracted light and ?1-st order diffracted light, which are diffracted in the diffraction grating on the input side, in the light guiding plate becomes larger than a critical angle of the light guiding plate.

Abstract: Included are a first display element configured to display a first virtual image; a second display element configured to display a second virtual image; a combining optical member configured to combine first imaging light and second imaging light; a light-guiding optical system configured to guide light that passed through the combining optical member; and a correction optical system provided between the first display element and the combining optical member and configured to correct an aberration in accordance with a positional difference between the first display element and the second display element.

Abstract: A method of etching silicon oxide on a surface of a substrate is provided. The method comprises alternately repeating heating the substrate to a heating temperature of 60° C. or higher, supplying hydrogen fluoride gas and ammonia gas onto the substrate to react with the silicon oxide, and modifying the silicon oxide to obtain a reaction product, and removing at least a portion of the reaction product from the substrate while stopping the supply of the above gases and continuing to heat the substrate at the heating temperature; and when a process gas that is at least one of the hydrogen fluoride gas and the ammonia gas is supplied, while continuing to supply the process gas from an upstream side of a flow path, closing a valve disposed in the flow path to pressurize the process gas in the flow path, and then opening the valve.

Abstract: A light flux diameter expanding element includes a light guiding plate with a light input face and a light output face, and with a thickness of 0.2 mm to 0.8 mm; a diffraction grating on the input side; and a diffraction grating on the output side, and is provided so as to have the same grating period as that of the diffraction grating on the input side, in which a forming region of the diffraction grating on the input side is smaller than that of the output side, and a grating period of the diffraction grating on the input side is a period in which a small diffraction angle in diffraction angles of +1-st order diffracted light and ?1-st order diffracted light, which are diffracted in the diffraction grating on the input side, in the light guiding plate becomes larger than a critical angle of the light guiding plate.

Abstract: A substrate processing method includes: preparing a substrate which includes a base having an epitaxial layer formed by epitaxial growth, and an insulating film formed on the base and having a penetration portion that exposes the epitaxial layer; forming a silicon film on a surface of the epitaxial layer exposed from the penetration portion rather than a side wall of the penetration portion; and forming a metal film on the silicon film formed on the surface of the epitaxial layer rather than the side wall of the penetration portion, and causing the silicon film to react with the metal film to form a metal silicide film.

Abstract: In a virtual image display apparatus, as viewed from an exit pupil, a first emission diffraction grating and a second emission diffraction grating overlap, and a region, of the first emission diffraction grating, emitting first image light is different from a region, of the second emission diffraction grating, emitting second image light. As a result, an optical path from the first display element to the first emission diffraction grating can be prevented from being largely different from an optical path from a second display element to the second emission diffraction grating. Thus, unevenness in luminance in a virtual image displayed due to an increased difference in luminance between the first image light emitted from the first emission diffraction grating and the second image light emitted from the second emission diffraction grating can be suppressed.

Abstract: The image display device includes an image generating unit that emits first image light, a pupil expanding element that expands a diameter of a light flux included in the first image light from the image generating unit to obtain second image light, a first light condensing optical system that condenses the second image light and forms an intermediate image, and a second light condensing optical system that condenses light from the intermediate image and generates a virtual image on eye of a viewer, in a plane including at least the image generating unit, the pupil expanding element, and the eye of the viewer, a maximum emission angle of the first image light is smaller than a maximum viewing angle of the virtual image, and the diameter of the light flux included in the second image light is greater than that of a light flux included in the virtual image.

Abstract: An optical element includes a substrate and a first hologram element provided on one side of the substrate, and a second hologram element provided on another side of the substrate. The first hologram element is provided to overlap with the second hologram element in a front view. The first hologram element includes a first hologram layer that diffracts part of incident light in a first wavelength band and that transmits another part of the incident light in the first wavelength band. The second hologram element includes a second hologram layer that diffracts, toward the first hologram layer through diffraction, part of light in the first wavelength band transmitted through the first hologram layer and that transmits other part of the light in the first wavelength band transmitted through the first hologram layer.

Abstract: A display device is provided that includes a substrate, a lens layer including a lens, a light-transmitting layer contacting a lens surface of the lens and having translucency, a pixel electrode disposed between the substrate and the lens layer, and a color filter disposed between the pixel electrode and the lens layer. The lens is disposed correspondingly to the pixel electrode. A refractive index of a constituent material for the lens is higher than a refractive index of a constituent material for the light-transmitting layer.

Abstract: An image display device includes, an imaging light generation part configured to generate an imaging light having a single color, a light-guiding plate, an incident side diffraction element provided at a light incident part of the light-guiding plate, and configured to cause the imaging light to enter the light-guiding plate, an exit side diffraction element provided at a light emitting part of the light-guiding plate, and configured to cause the imaging light propagating within the light-guiding plate to exit, and an angle dependent reflective film provided between the light-guiding plate and the exit side diffraction element, and having a reflectance varying depending on magnitude of a propagation angle of the imaging light, in which the reflectance for the imaging light propagating at a relatively small propagation angle is larger than the reflectance for the imaging light propagating at a relatively large propagation angle.

Abstract: A display device of the present disclosure includes a substrate, a lens layer including a lens, a light-transmitting layer that contacts a lens surface of the lens, and has translucency, a pixel electrode disposed between the substrate and the lens layer, and a color filter disposed between the pixel electrode and the lens layer. The lens is disposed so as to correspond to the pixel electrode. A refractive index of a constituent material for the lens is lower than a refractive index of a constituent material for the light-transmitting layer.

Abstract: A display device of the present disclosure includes a substrate, a lens layer including a lens, a light-transmitting layer that contacts a lens surface of the lens, and has translucency, a pixel electrode disposed between the substrate and the lens layer, and a color filter disposed between the pixel electrode and the lens layer. The lens is disposed so as to correspond to the pixel electrode. A refractive index of a constituent material for the lens is lower than a refractive index of a constituent material for the light-transmitting layer.

Abstract: A method of etching silicon oxide on a surface of a substrate is provided. The method comprises alternately repeating heating the substrate to a heating temperature of 60° C. or higher, supplying hydrogen fluoride gas and ammonia gas onto the substrate to react with the silicon oxide, and modifying the silicon oxide to obtain a reaction product, and removing at least a portion of the reaction product from the substrate while stopping the supply of the above gases and continuing to heat the substrate at the heating temperature; and when a process gas that is at least one of the hydrogen fluoride gas and the ammonia gas is supplied, while continuing to supply the process gas from an upstream side of a flow path, closing a valve disposed in the flow path to pressurize the process gas in the flow path, and then opening the valve.

Abstract: Provided is a virtual image display device including an imaging light emitting device, a light-guiding member configured to guide imaging light emitted from the imaging light emitting device, and an emission-side diffraction element provided at a light-emitting portion of the light-guiding member and configured to emit the imaging light by diffraction. In the emission-side diffraction element, a light amount difference between a first component light and a second component light of the imaging light, the first component light being emitted as a central image at a first angle ? of 0° and the second component light being emitted as a peripheral image at a second angle ? of ±? (?>0°), is equal to or less than 20%.

Abstract: Included are a first display element configured to display a first virtual image; a second display element configured to display a second virtual image; a combining optical member configured to combine first imaging light and second imaging light; a light-guiding optical system configured to guide light that passed through the combining optical member; and a correction optical system provided between the first display element and the combining optical member and configured to correct an aberration in accordance with a positional difference between the first display element and the second display element.

Abstract: A virtual image display device of the invention includes an image display element configured to emit image light, a relay optical system configured to generate an intermediate image of the image light emitted from the image display element, and an ocular optical element configured to reflect the intermediate image toward a position assumed to be a position of an eye of an observer to generate an enlarged virtual image. The relay optical system includes a prism, and the prism includes a first bending surface including a bending surface and serving as an incident surface, a second bending surface including a bending surface and serving as an emission surface, and a reflecting surface configured to reflect, toward the second bending surface, the image light incident from the first bending surface.

Abstract: A light flux diameter expanding element includes a light guiding plate with a light input face and a light output face, and with a thickness of 0.2 mm to 0.8 mm; a diffraction grating on the input side; and a diffraction grating on the output side, and is provided so as to have the same grating period as that of the diffraction grating on the input side, in which a forming region of the diffraction grating on the input side is smaller than that of the output side, and a grating period of the diffraction grating on the input side is a period in which a small diffraction angle in diffraction angles of +1-st order diffracted light and ?1-st order diffracted light, which are diffracted in the diffraction grating on the input side, in the light guiding plate becomes larger than a critical angle of the light guiding plate.

Abstract: A light flux diameter expanding element includes a light guiding plate with a light input face and a light output face, and with a thickness of 0.2 mm to 0.8 mm; a diffraction grating on the input side; and a diffraction grating on the output side, and is provided so as to have the same grating period as that of the diffraction grating on the input side, in which a forming region of the diffraction grating on the input side is smaller than that of the output side, and a grating period of the diffraction grating on the input side is a period in which a small diffraction angle in diffraction angles of +1-st order diffracted light and ?1-st order diffracted light, which are diffracted in the diffraction grating on the input side, in the light guiding plate becomes larger than a critical angle of the light guiding plate.