Abstract: An image display device with which it is possible to visually recognize an image while securing the see-through property regardless of eye movements and changes in interpupillary distance, with which it is possible to display a large-size image with high quality, and which is small, has excellent wearability, and has an excellent external appearance.

Abstract: An image display apparatus includes an image light generating unit that emits image light; a light guide plate in which the image light emitted from the image light generating unit is incident; an incident side diffraction optical element disposed in a light incident section of the light guide plate; and an emission side diffraction optical element disposed in a light emitting section of the light guide plate, wherein a grating pitch of the incident side diffraction optical element and the grating pitch of the emission side diffraction optical element are different in a state where the image light generating unit is not in operation.

Abstract: A display apparatus includes an image forming device, first and second light guide members that respectively have first and second light incidence portions and first and second light emission portions, a first diffractive optical element provided in the first light emission portion, a second diffractive optical element provided in the second light emission portion, and a first external light noise reduction element provided over the second light guide member. The first external light noise reduction element overlaps the first and second light emission portions. The first light incidence portion overlaps the second light incidence portion. Image light from the image forming device is incident on the first light incidence portion. A part of the image light is guided in the first light guide member. Another part of the image light is incident on the second light incidence portion and is guided in the second light guide member.

Abstract: A dichroic prism synthesizes display light emitted from a plurality of display panels, and a plate-shaped light guiding section guides the synthesized light to a light-emitting section. In the display light emitted from the respective pixels of the display panel, although a radiation angle of an effective luminous flux which reaches the eye of an observer is large in a direction corresponding to the vertical direction, a range of incident angle of intersecting effective luminous fluxes to the dichroic mirror is small.

Abstract: An image display device with which it is possible to visually recognize an image while securing the see-through property regardless of eye movements and changes in interpupillary distance, with which it is possible to display a large-size image with high quality, and which is small, has excellent wearability, and has an excellent external appearance.

Abstract: In a luminous flux diameter expanding element, a light guide body includes an incident-side diffraction grating (first incident-side diffraction grating) provided on a surface thereof and an exit-side diffraction grating (first exit-side diffraction grating) provided on another surface thereof. The incident-side diffraction grating and the exit-side diffraction grating have the same grating direction and the same grating period. The diffraction angle of a positive first-order diffracted light and the diffraction angle of a negative first-order diffracted light of a beam incident on the incident-side diffraction grating are greater than or equal to a critical angle determined by the refractive index of the light guide body. The positive first-order diffracted light and the negative first-order diffracted light of the beam diffracted by the incident-side diffraction grating propagate in opposite directions along a y-direction within the light guide body and are emitted from the exit-side diffraction grating.

Abstract: An optical element includes a plurality of partially reflecting surfaces which are provided in parallel to each other with intervals, reflect a portion of image light and external light, and transmit another portion of the image light or external light; and a light transmitting member which supports the plurality of partially reflecting surfaces, in which the light transmitting member includes an incident plane that enters the image light and the external light, and an emission plane that emits the image light and the external light, and each of the plurality of the partially reflecting surfaces is disposed so as to be inclined with respect to the incident plane and the emission plane, and has a plurality of regions having different reflectances in an inclination direction.

Abstract: In a Cu wiring manufacturing method, a MnOx film which becomes a self-formed barrier film by reaction with an interlayer insulating film of a substrate is formed on a surface of a recess formed in the interlayer insulating film by ALD. A hydrogen radical process is performed on a surface of the MnOx film to reduce the surface of the MnOx film. A Ru film is formed by CVD on the surface of the MnOx film which has been reduced by the hydrogen radical process. A Cu-based film is formed on the Ru film by PVD to be filled in the recess. When the Ru film is formed, a film-formation condition of the MnOx film and a condition of the hydrogen radical process are set such that nucleus formation is facilitated and the Ru film is formed in a state where a surface smoothness is high.

Abstract: An optical device includes a light-conducting member, having a first panel surface disposed facing an image forming unit, that conducts image light incident on a light entry plane formed at an end of the first panel surface to a light exit plane formed in front of the viewer's eye; a first diffractive optics element, provided on the light entry plane, that diffracts the image light incident on the light entry plane in a predetermined direction and transmits that light into the light-conducting member; a second diffractive optics element, provided on the light exit plane, that diffracts the image light exiting from the light exit plane in a predetermined direction and transmits that light to the front of the viewer's eye; and one or more reflective planes disposed within a waveguide for the image light diffracted by the first diffractive optics element.

Abstract: An image display apparatus includes an image display device configured to emit image light, a light guide member, a projection lens configured to project the image light toward the light guide member, and a light extracting unit provided on the light guide member, the light extracting unit being configured to extract the image light guided in the light guide member toward an exit pupil. The light extracting unit includes a first edge located at an end portion of the light extracting unit on the light incident section side and a second edge located at an end portion on the opposite side, and is capable of transmitting see-through light having been transmitted in the light guide member toward the exit pupil, and at least one of the first edge and the second edge is located outside a see-through visual field range in which the see-through light passes through.

Abstract: The image display device includes an image generating unit that emits first image light, a pupil expanding element that expands a diameter of a light flux included in the first image light from the image generating unit to obtain second image light, a first light condensing optical system that condenses the second image light and forms an intermediate image, and a second light condensing optical system that condenses light from the intermediate image and generates a virtual image on eye of a viewer, in a plane including at least the image generating unit, the pupil expanding element, and the eye of the viewer, a maximum emission angle of the first image light is smaller than a maximum viewing angle of the virtual image, and the diameter of the light flux included in the second image light is greater than that of a light flux included in the virtual image.

Abstract: In an optical element, a first diffraction grating, second diffraction grating, a third diffraction grating, and a fourth diffraction grating are formed in each of a first surface of a first substrate, a fourth surface of a second substrate, a fifth surface of a third substrate, and an eighth surface of a fourth substrate. Each substrate is fixed by (a first adhesive layer, second adhesive layer, and a third adhesive layer) adhesive layers including a gap material. A first filler with a refractive index equal to that of the first substrate and the second substrate is filled between the first substrate and the second substrate and a third filler formed of air or a medium with a refractive index equal to that of air is filled between the second substrate and the third substrate.

Abstract: An image display device of the embodiment includes an image generation portion that emits image light, a prism optical element into which the image light enters, and a light guide optical system that guides the image light to the prism optical element. The prism optical element includes a prism member having a light refractive surface formed of a flat surface provided on a light incident side of the image light, and a concave mirror provided opposite the light refractive surface of the prism member and having a shape that is concave away from the light refractive surface.

Abstract: An optical element includes a plurality of partially reflecting surfaces which are provided in parallel to each other with intervals, reflect a portion of image light and external light, and transmit another portion of the image light or external light; and a light transmitting member which supports the plurality of partially reflecting surfaces, in which the light transmitting member includes an incident plane that enters the image light and the external light, and an emission plane that emits the image light and the external light, and each of the plurality of the partially reflecting surfaces is disposed so as to be inclined with respect to the incident plane and the emission plane, and has a plurality of regions having different reflectances in an inclination direction.

Abstract: An image display apparatus includes an image light generating unit that emits image light; a light guide plate in which the image light emitted from the image light generating unit is incident; an incident side diffraction optical element disposed in a light incident section of the light guide plate; and an emission side diffraction optical element disposed in a light emitting section of the light guide plate, wherein a grating pitch of the incident side diffraction optical element and the grating pitch of the emission side diffraction optical element are different in a state where the image light generating unit is not in operation.

Abstract: A light flux diameter expanding element includes a light guiding plate with a light input face and a light output face, and with a thickness of 0.2 mm to 0.8 mm; a diffraction grating on the input side; and a diffraction grating on the output side, and is provided so as to have the same grating period as that of the diffraction grating on the input side, in which a forming region of the diffraction grating on the input side is smaller than that of the output side, and a grating period of the diffraction grating on the input side is a period in which a small diffraction angle in diffraction angles of +1-st order diffracted light and ?1-st order diffracted light, which are diffracted in the diffraction grating on the input side, in the light guiding plate becomes larger than a critical angle of the light guiding plate.

Abstract: A substrate processing method is for forming a metal film on a target substrate by using a plasma. The method includes loading a target substrate having a silicon-containing layer on a surface thereof into a processing chamber which is pre-coated by a film containing a metal, introducing hydrogen gas and a gaseous compound of the metal and halogen into the processing chamber, generating a plasma, and forming a metal film on the target substrate. The method further includes performing a first reduction process of forming an atmosphere of a plasma obtained by activating hydrogen gas in the processing chamber, unloading the target substrate from the processing chamber, performing a second reduction process of forming an atmosphere of a plasma obtained by activating hydrogen gas in the processing chamber, and loading a next target substrate into the processing chamber.

Abstract: An image display device with which it is possible to visually recognize an image while securing the see-through property regardless of eye movements and changes in interpupillary distance, with which it is possible to display a large-size image with high quality, and which is small, has excellent wearability, and has an excellent external appearance.

Abstract: An optical element includes a light guide is provided with a incidence section and a emission section, a semitransmissive reflective film is provided in the inside of the light guide, a first diffraction element is provided in the incidence section, and is provided with a plurality of gratings, a second diffraction element is provided in the emission section, and is provided with a plurality of gratings, and a reflective film is provided in the incidence section in a periphery of the first diffraction element, in which the pitch of the plurality of gratings of the first diffraction element is equivalent to the pitch of the plurality of gratings of the second diffraction element, and each extension direction of the plurality of gratings of the first diffraction element is the same direction as each extension direction of the plurality of gratings of the second diffraction element.

Abstract: A light flux diameter expanding element (a pupil expanding element) used in a retina scanning display device includes first to fourth diffraction gratings which are provided with grating patterns extending in a first direction, and fifth to eighth diffraction gratings which are provided with grating patterns extending in a second direction, and includes a half-wave plate between the first diffraction grating and the fifth diffraction grating. A first light flux of polarized light in which an electric field vector oscillates in the first direction enters the first diffraction grating. A second light flux of polarized light in which the electric field vector oscillates in the second direction enters the fifth diffraction grating due to the half-wave plate. Therefore, it is possible to expand a diameter of the incident first light flux in the first direction and the second direction and emit the result as the third light flux.