Patents by Inventor Peter Dirksen

Peter Dirksen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10923099
    Abstract: An acoustical lens (20) for an ultrasound probe (14) is disclosed. The acoustical lens comprises an inner surface (26) for facing an emission surface (46) of an ultrasound transducer (40) and for receiving ultrasound waves from the ultrasound transducer. The acoustical lens further comprises an outer surface (24) for emitting the ultrasound waves received at the inner surface, wherein the inner surface is formed as a convexly curved surface and wherein at least one recess (34) is associated to an edge of the inner surface for capturing mold material.
    Type: Grant
    Filed: April 30, 2015
    Date of Patent: February 16, 2021
    Assignee: Koninklijke Philips N.V.
    Inventors: Lucas Johannes Anna Maria Beckers, Peter Dirksen, Nico Maris Adriaan de Wild, Franciscus Johannes Gerardus Hakkens
  • Patent number: 10898924
    Abstract: A large aperture CMUT transducer array is formed of a plurality of adjacently located tiles of CMUT cells. The adjacent edges of the tiles are formed by an anisotropic etch process, preferably a deep reactive ion etching process which is capable of cutting through the die and its substrate while maintaining vertical edges in close proximity to the CMUT cells at the edge of the tile. This enables the CMUT cells of continuous rows or columns to exhibit a constant pitch over multiple CMUT cell tiles. The tiles also contain interconnect electrodes along an edge for making electrical connections to the tiles with flex circuit.
    Type: Grant
    Filed: July 13, 2015
    Date of Patent: January 26, 2021
    Assignee: Koninklijke Philips N.V.
    Inventors: Wojtek Sudol, Peter Dirksen, Vincent Adrianus Henneken, Ronald Dekker, Marcus Cornelis Louwerse
  • Publication number: 20200397321
    Abstract: A capacitive pressure sensor (10) is disclosed comprising a membrane (21) including a second electrode (23) spatially separated by a cavity (20) from a substrate (11) including a first electrode (13) opposing the second electrode; and a central pillar (22) extending from the membrane to the substrate such that the cavity is an annular cavity enveloping said central pillar. Also disclosed is an invasive medical instrument comprising such a capacitive pressure sensor and a method of manufacturing such a capacitive pressure sensor.
    Type: Application
    Filed: February 19, 2019
    Publication date: December 24, 2020
    Inventors: Peter DIRKSEN, Ruediger Günther MAUCZOK, Petrus Henricus Maria TIMMERMANS
  • Patent number: 10736606
    Abstract: An acoustic window layer for an ultrasound array, which layer has an inner surface arranged to face the array and an outer surface arranged to face a patient, and comprising an outer layer comprising a thermoplastic polymer selected from a polyolefin family (TPO) and an elastomer selected from the polyolefin family (POE) blended therein, wherein the outer layer located at the outer surface of the acoustic window layer. In a preferred embodiment the blend comprises a copolymer of ethylene-octene and polymethylpentene. The thermoplastic polyolefin provides the blend with mechanical, chemical stability and low acoustic wave attenuation; whilst the polyolefin elastomer provides a possibility to tune the acoustic impedance of the blend and to further improve its acoustic wave propagation properties.
    Type: Grant
    Filed: November 10, 2016
    Date of Patent: August 11, 2020
    Assignee: Koninklijke Philips N.V.
    Inventors: Pawel Michalski, Franciscus Johannes Gerardus Hakkens, Edward Theodorus Maria Berben, Kevin Grayson Wickline, Lucas Johannes Anna Maria Beckers, Peter Dirksen
  • Publication number: 20200246829
    Abstract: The invention provides an ultrasound transducer device comprising an electroactive polymer (EAP) element coupled atop a capacitive micromachined ultrasonic transducer (CMUT) element, wherein the two elements are controlled to vibrate concurrently at a common frequency by application to each of a drive signal of the same AC frequency.
    Type: Application
    Filed: September 20, 2019
    Publication date: August 6, 2020
    Applicant: KONINKLIJKE PHILIPS N.V.
    Inventors: Franciscus Johannes Gerardus Hakkens, Sergei Shulepov, Peter Dirksen, Mark Thomas Johnson, Daan Anton Van Den Ende
  • Publication number: 20190176193
    Abstract: A transducer array (10) is disclosed comprising a plurality of CMUT cells (100, 100, 100?), each CMUT cell comprising a first electrode (110) supported by a substrate (101) and a second electrode (120) supported by a membrane suspended over a cavity (105) between the first electrode and the second electrode, the plurality of CMUT cells comprising a first group of CMUT cells (100) each having a membrane comprising a first layer stack (130); and a second group of CMUT cells (100?) each having membrane comprising a second layer stack (130?), the second layer stack including a layer (135) of a material having a higher density than any of the layers in the first layer stack. Also disclosed is a device comprising such a transducer array, an ultrasound imaging system including such a transducer array and a method of operating such an ultrasound imaging system.
    Type: Application
    Filed: June 13, 2017
    Publication date: June 13, 2019
    Applicant: Koninklijke Plilips N.V.
    Inventors: Sergei SHULEPOV, Petrus Henricus Maria TIMMERMANS, Peter DIRKSEN
  • Patent number: 10293375
    Abstract: Disclosed is a method of manufacturing a capacitive micro-machined ultrasonic transducer (CMUT) device comprising a first electrode (112) on a substrate (110) and a second electrode (122) embedded in an electrically insulating membrane, the first electrode and the membrane being separated by a cavity (130) formed by the removal of a sacrificial material (116) in between the first electrode and the membrane, the method comprising forming a membrane portion (22) on the second electrode and a further membrane portion (24) extending from the membrane portion towards the substrate alongside the sacrificial material, wherein the respective thicknesses the membrane portion and the further membrane portion exceed the thickness of the sacrificial material prior to forming said cavity. A CMUT device manufactured in accordance with this method and an apparatus comprising such a CMUT device are also disclosed.
    Type: Grant
    Filed: September 15, 2014
    Date of Patent: May 21, 2019
    Assignee: Koninklijke Philips N.V.
    Inventors: Peter Dirksen, Marcel Mulder, Adriaan Leeuwestein
  • Publication number: 20180374471
    Abstract: An acoustic lens suitable for a CMUT array (74) is provided. The acoustic lens comprising: a first layer (47) comprising a thermoset elastomer having a polymeric material selected from hydrocarbons, wherein the first layer has an inner surface (72) arranged to face the array and an outer convex shaped surface (40) arranged to oppose the inner surface; and a second layer (42) coupled to the outer surface of the first layer and comprising thermoplastic polymer polymethylpentene and an elastomer selected from the polyolefin family (POE) blended therein, wherein the outer layer located at the outer surface of the acoustic window layer, wherein the first layer has a first acoustic wave velocity (v1) and the second layer has a second acoustic wave velocity (v2), said second velocity is larger than the first acoustic wave velocity.
    Type: Application
    Filed: December 16, 2016
    Publication date: December 27, 2018
    Applicant: KONINKLIJKE PHILIPS N.V.
    Inventors: PETER DIRKSEN, SERGEI SHULEPOV, FRANCISCUS JOHANNES GERARDUS HAKKENS, PETRUS HENRICUS MARIA TIMMERMANS, LUCAS JOHANNES ANNA MARIA BECKERS
  • Publication number: 20180333136
    Abstract: An acoustic window layer for an ultrasound array, which layer has an inner surface arranged to face the array and an outer surface arranged to face a patient, and comprising an outer layer comprising a thermoplastic polymer selected from a polyolefin family (TPO) and an elastomer selected from the polyolefin family (POE) blended therein, wherein the outer layer located at the outer surface of the acoustic window layer. In a preferred embodiment the blend comprises a copolymer of ethylene-octene and polymethylpentene. The thermoplastic polyolefin provides the blend with mechanical, chemical stability and low acoustic wave attenuation; whilst the polyolefin elastomer provides a possibility to tune the acoustic impedance of the blend and to further improve its acoustic wave propagation properties.
    Type: Application
    Filed: November 10, 2016
    Publication date: November 22, 2018
    Inventors: PAWEL MICHALSKI, FRANCISCUS JOHANNES GERARDUS HAKKENS, EDWARD THEODORUS MARIA BERBEN, KEVIN GRAYSON WICKLINE, LUCAS JOHANNES ANNA MARIA BECKERS, PETER DIRKSEN
  • Patent number: 10092270
    Abstract: A CMUT transducer cell suitable for use in an ultrasonic CMUT transducer array has a membrane with a first electrode, a substrate with a second electrode, and a cavity between the membrane and the substrate. The CMUT is operated in a precollapsed state by biasing the membrane to a collapsed condition with the floor of the cavity, and a lens is cast over the collapsed membrane. When the lens material has polymerized or is of a sufficient stiffness, the bias voltage is removed and the lens material retains the membrane in the collapsed state.
    Type: Grant
    Filed: February 10, 2010
    Date of Patent: October 9, 2018
    Assignee: KONINKLIJKE PHILIPS ELECTRONICS N.V.
    Inventor: Peter Dirksen
  • Patent number: 10008958
    Abstract: The present invention relates to a method of manufacturing a capacitive micro-machined transducer (100), in particular a CMUT, the method comprising depositing a first electrode layer (10) on a substrate (1), depositing a first dielectric film (20) on the first electrode layer (10), depositing a sacrificial layer (30) on the first dielectric film (20), the sacrificial layer (30) being removable for forming a cavity (35) of the transducer, depositing a second dielectric film (40) on the sacrificial layer (30), and depositing a second electrode layer (50) on the second dielectric film (40), wherein the first dielectric film (20) and/or the second dielectric film (40) comprises a first layer comprising an oxide, a second layer comprising a high-k material, and a third layer comprising an oxide, and wherein the depositing steps are performed by Atomic Layer Deposition. The present invention further relates to a capacitive micro-machined transducer (100), in particular a CMUT, manufactured by such method.
    Type: Grant
    Filed: February 18, 2015
    Date of Patent: June 26, 2018
    Assignee: Koninklijke Philips N.V.
    Inventors: Peter Dirksen, Ruediger Mauczok, Koray Karakaya, Johan Hendrik Klootwijk, Bout Marcelis, Marcel Mulder
  • Publication number: 20180159445
    Abstract: The present invention relates to a wafer (100) being subdivided and separable into a plurality of dies. Each die (110) comprises an array of capacitive micro-machined transducer cells (1). Each cell comprises a substrate (10) comprising a first electrode (11), a membrane (13) comprising a second electrode (14), and a cavity (12) between the substrate (10) and the membrane (13). Each cell (1) of at least a part of the dies (110) comprises a compensating plate (15) on the membrane (13), each compensating plate (15) having a configuration for influencing a bow (h) of the membrane (13). The configurations of the compensating plates (13) vary across the wafer (100). The present invention further relates to a method of manufacturing such a wafer and a method of manufacturing such a die.
    Type: Application
    Filed: February 6, 2018
    Publication date: June 7, 2018
    Inventor: Peter Dirksen
  • Patent number: 9986916
    Abstract: A catheter (700, 800, 1206) includes a shaft with distal (808, 906, 1004, 208) and proximal ends (1006). The distal end comprises at least one array of capacitive micromachined ultrasound transducers (308, 402, 404, 500, 512, 600, 604, 802, 008) with an adjustable focus for controllably heating a target zone (806, 1014, 1210). A connector (1012) at the proximal end supplies the at least one array of capacitive micromachined ultrasound transducers with electrical power and controls the adjustable focus.
    Type: Grant
    Filed: November 15, 2011
    Date of Patent: June 5, 2018
    Assignee: KONINKLIJKE PHILIPS N.V.
    Inventors: Max Oskar Köhler, Peter Dirksen, Shunmugavelu Sokka, Ronald Dekker
  • Patent number: 9917535
    Abstract: The present invention relates to a wafer (100) being subdivided and separable into a plurality of dies. Each die (110) comprises an array of capacitive micro-machined transducer cells (1). Each cell comprises a substrate (10) comprising a first electrode (11), a membrane (13) comprising a second electrode (14), and a cavity (12) between the substrate (10) and the membrane (13). Each cell (1) of at least a part of the dies (110) comprises a compensating plate (15) on the membrane (13), each compensating plate (15) having a configuration for influencing a bow (h) of the membrane (13). The configurations of the compensating plates (13) vary across the wafer (100). The present invention further relates to a method of manufacturing such a wafer and a method of manufacturing such a die.
    Type: Grant
    Filed: May 30, 2013
    Date of Patent: March 13, 2018
    Assignee: KONINKLUJKE PHILIPS N.V.
    Inventor: Peter Dirksen
  • Publication number: 20180065148
    Abstract: An ultrasound array for acoustic wave transmission comprising at least one capacitive micro-machined ultrasound transducer (CMUT) cell (6), wherein the CMUT cell comprises a substrate (4); a first electrode (7); a cell membrane (5) having a second electrode (7?), which opposes the first electrode and the substrate with a cavity (8) there between, wherein the membrane is arranged to vibrate upon the cell activation; and an acoustic window layer (13), overlaying the cell membrane, and having an inner surface opposing the cell membrane and an outer surface. The acoustic window layer comprises a first layer comprising molecules of antioxidant and a polymeric material (47) with insulating particles (41) embedded therein, wherein the polymeric material consists of hydrogen and carbon atoms and has a density equal or below 0.95 g/cm3 and an acoustic impedance equal or above 1.45 MRayl.
    Type: Application
    Filed: February 23, 2016
    Publication date: March 8, 2018
    Inventors: LUCAS JOHANNES ANNA MARIA BECKERS, FRANCISCUS JOHANNES GERARDUS HAKKENS, PETER DIRKSEN
  • Publication number: 20180021813
    Abstract: An ultrasound array for acoustic wave transmission comprising at least one capacitive micro-machined ultrasound transducer (CMUT) cell (6), wherein the CMUT cell comprises a substrate (4) having a first electrode (7); a cell membrane (5) having a second electrode (7?), which opposes the first electrode with a cavity (8) there between, wherein the membrane is arranged to vibrate upon the cell activation; and an acoustic window layer (13), overlaying the cell membrane, and having an inner surface opposing the cell membrane and an outer surface; the acoustic window layer is in a direct contact with the cell membrane and comprises a first layer comprising molecules of antioxidant and a polymeric material, wherein the polymeric material consists of hydrogen and carbon atoms and has a density equal or 3 below 0.95 g/cm and an acoustic impedance equal or above 1.4 MRayl.
    Type: Application
    Filed: February 25, 2016
    Publication date: January 25, 2018
    Inventors: LUCAS JOHANNES ANNA MARIA BECKERS, FRANCISCUS JOHANNES GERARDUS HAKKENS, PETER DIRKSEN
  • Patent number: 9828236
    Abstract: The present invention relates to a method of manufacturing a capacitive micro- machined transducer (100), in particular a CMUT, the method comprising depositing a first electrode layer (10) on a substrate (1), depositing a first dielectric film (20) on the first electrode layer (10), depositing a sacrificial layer (30) on the first dielectric film (20), the sacrificial layer (30) being removable for forming a cavity (35) of the transducer, depositing a second dielectric film (40) on the sacrificial layer (30), depositing a second electrode layer (50) on the second dielectric film (40), and patterning at least one of the deposited layers and films (10, 20, 30, 40, 50), wherein the depositing steps are performed by Atomic Layer Deposition. The present invention further relates to a capacitive micro-machined transducer (100), in particular a CMUT, manufactured by such method.
    Type: Grant
    Filed: January 23, 2013
    Date of Patent: November 28, 2017
    Assignee: KONINKLIJKE PHILIPS N.V.
    Inventors: Peter Dirksen, Ruediger Mauczok, Koray Karakaya, Johan Klootwijk, Bout Marcelis, Marcel Mulder
  • Publication number: 20170165715
    Abstract: A large aperture CMUT transducer array is formed of a plurality of adjacently located tiles of CMUT cells. The adjacent edges of the tiles are formed by an anisotropic etch process, preferably a deep reactive ion etching process which is capable of cutting through the die and its substrate while maintaining vertical edges in close proximity to the CMUT cells at the edge of the tile. This enables the CMUT cells of continuous rows or columns to exhibit a constant pitch over multiple CMUT cell tiles. The tiles also contain interconnect electrodes along an edge for making electrical connections to the tiles with flex circuit.
    Type: Application
    Filed: July 13, 2015
    Publication date: June 15, 2017
    Inventors: WOJTEK SUDOL, PETER DIRKSEN, VINCENT ADRIANUS HENNEKEN, RONALD DEKKER, MARCUS CORNELIS LOUWERSE
  • Publication number: 20170154619
    Abstract: An acoustical lens (20) for an ultrasound probe (14) is disclosed. The acoustical lens comprises an inner surface (26) for facing an emission surface (46) of an ultrasound transducer (40) and for receiving ultrasound waves from the ultrasound transducer. The acoustical lens further comprises an outer surface (24) for emitting the ultrasound waves received at the inner surface, wherein the inner surface is formed as a convexly curved surface and wherein at least one recess (34) is associated to an edge of the inner surface for capturing mold material.
    Type: Application
    Filed: April 30, 2015
    Publication date: June 1, 2017
    Applicant: KONINLIJKE PHILIPS N.V.
    Inventors: Lucas Johannes Anna Maria Beckers, Peter Dirksen, Nico Maris Adriaan de Wild, Franciscus Johannes Gerardus Hakkens
  • Patent number: 9550211
    Abstract: CMUT devices are used in many applications e.g. for ultrasound imaging and pressure measurement. These devices operate by sensing a change in capacitance caused by deflection of a membrane (32) comprising one of a pair of electrodes in the device by ultrasound exposure of or pressure applied on, the membrane. The CMUT device may be susceptible to the effects of changing temperature.
    Type: Grant
    Filed: April 6, 2012
    Date of Patent: January 24, 2017
    Assignee: Koninklijke Philips N.V.
    Inventors: Peter Dirksen, Adriaan Leeuwestein