Patents by Inventor Peter Dirksen
Peter Dirksen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20190176193Abstract: A transducer array (10) is disclosed comprising a plurality of CMUT cells (100, 100, 100?), each CMUT cell comprising a first electrode (110) supported by a substrate (101) and a second electrode (120) supported by a membrane suspended over a cavity (105) between the first electrode and the second electrode, the plurality of CMUT cells comprising a first group of CMUT cells (100) each having a membrane comprising a first layer stack (130); and a second group of CMUT cells (100?) each having membrane comprising a second layer stack (130?), the second layer stack including a layer (135) of a material having a higher density than any of the layers in the first layer stack. Also disclosed is a device comprising such a transducer array, an ultrasound imaging system including such a transducer array and a method of operating such an ultrasound imaging system.Type: ApplicationFiled: June 13, 2017Publication date: June 13, 2019Applicant: Koninklijke Plilips N.V.Inventors: Sergei SHULEPOV, Petrus Henricus Maria TIMMERMANS, Peter DIRKSEN
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Patent number: 10293375Abstract: Disclosed is a method of manufacturing a capacitive micro-machined ultrasonic transducer (CMUT) device comprising a first electrode (112) on a substrate (110) and a second electrode (122) embedded in an electrically insulating membrane, the first electrode and the membrane being separated by a cavity (130) formed by the removal of a sacrificial material (116) in between the first electrode and the membrane, the method comprising forming a membrane portion (22) on the second electrode and a further membrane portion (24) extending from the membrane portion towards the substrate alongside the sacrificial material, wherein the respective thicknesses the membrane portion and the further membrane portion exceed the thickness of the sacrificial material prior to forming said cavity. A CMUT device manufactured in accordance with this method and an apparatus comprising such a CMUT device are also disclosed.Type: GrantFiled: September 15, 2014Date of Patent: May 21, 2019Assignee: Koninklijke Philips N.V.Inventors: Peter Dirksen, Marcel Mulder, Adriaan Leeuwestein
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Publication number: 20180374471Abstract: An acoustic lens suitable for a CMUT array (74) is provided. The acoustic lens comprising: a first layer (47) comprising a thermoset elastomer having a polymeric material selected from hydrocarbons, wherein the first layer has an inner surface (72) arranged to face the array and an outer convex shaped surface (40) arranged to oppose the inner surface; and a second layer (42) coupled to the outer surface of the first layer and comprising thermoplastic polymer polymethylpentene and an elastomer selected from the polyolefin family (POE) blended therein, wherein the outer layer located at the outer surface of the acoustic window layer, wherein the first layer has a first acoustic wave velocity (v1) and the second layer has a second acoustic wave velocity (v2), said second velocity is larger than the first acoustic wave velocity.Type: ApplicationFiled: December 16, 2016Publication date: December 27, 2018Applicant: KONINKLIJKE PHILIPS N.V.Inventors: PETER DIRKSEN, SERGEI SHULEPOV, FRANCISCUS JOHANNES GERARDUS HAKKENS, PETRUS HENRICUS MARIA TIMMERMANS, LUCAS JOHANNES ANNA MARIA BECKERS
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Publication number: 20180333136Abstract: An acoustic window layer for an ultrasound array, which layer has an inner surface arranged to face the array and an outer surface arranged to face a patient, and comprising an outer layer comprising a thermoplastic polymer selected from a polyolefin family (TPO) and an elastomer selected from the polyolefin family (POE) blended therein, wherein the outer layer located at the outer surface of the acoustic window layer. In a preferred embodiment the blend comprises a copolymer of ethylene-octene and polymethylpentene. The thermoplastic polyolefin provides the blend with mechanical, chemical stability and low acoustic wave attenuation; whilst the polyolefin elastomer provides a possibility to tune the acoustic impedance of the blend and to further improve its acoustic wave propagation properties.Type: ApplicationFiled: November 10, 2016Publication date: November 22, 2018Inventors: PAWEL MICHALSKI, FRANCISCUS JOHANNES GERARDUS HAKKENS, EDWARD THEODORUS MARIA BERBEN, KEVIN GRAYSON WICKLINE, LUCAS JOHANNES ANNA MARIA BECKERS, PETER DIRKSEN
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Patent number: 10092270Abstract: A CMUT transducer cell suitable for use in an ultrasonic CMUT transducer array has a membrane with a first electrode, a substrate with a second electrode, and a cavity between the membrane and the substrate. The CMUT is operated in a precollapsed state by biasing the membrane to a collapsed condition with the floor of the cavity, and a lens is cast over the collapsed membrane. When the lens material has polymerized or is of a sufficient stiffness, the bias voltage is removed and the lens material retains the membrane in the collapsed state.Type: GrantFiled: February 10, 2010Date of Patent: October 9, 2018Assignee: KONINKLIJKE PHILIPS ELECTRONICS N.V.Inventor: Peter Dirksen
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Patent number: 10008958Abstract: The present invention relates to a method of manufacturing a capacitive micro-machined transducer (100), in particular a CMUT, the method comprising depositing a first electrode layer (10) on a substrate (1), depositing a first dielectric film (20) on the first electrode layer (10), depositing a sacrificial layer (30) on the first dielectric film (20), the sacrificial layer (30) being removable for forming a cavity (35) of the transducer, depositing a second dielectric film (40) on the sacrificial layer (30), and depositing a second electrode layer (50) on the second dielectric film (40), wherein the first dielectric film (20) and/or the second dielectric film (40) comprises a first layer comprising an oxide, a second layer comprising a high-k material, and a third layer comprising an oxide, and wherein the depositing steps are performed by Atomic Layer Deposition. The present invention further relates to a capacitive micro-machined transducer (100), in particular a CMUT, manufactured by such method.Type: GrantFiled: February 18, 2015Date of Patent: June 26, 2018Assignee: Koninklijke Philips N.V.Inventors: Peter Dirksen, Ruediger Mauczok, Koray Karakaya, Johan Hendrik Klootwijk, Bout Marcelis, Marcel Mulder
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Publication number: 20180159445Abstract: The present invention relates to a wafer (100) being subdivided and separable into a plurality of dies. Each die (110) comprises an array of capacitive micro-machined transducer cells (1). Each cell comprises a substrate (10) comprising a first electrode (11), a membrane (13) comprising a second electrode (14), and a cavity (12) between the substrate (10) and the membrane (13). Each cell (1) of at least a part of the dies (110) comprises a compensating plate (15) on the membrane (13), each compensating plate (15) having a configuration for influencing a bow (h) of the membrane (13). The configurations of the compensating plates (13) vary across the wafer (100). The present invention further relates to a method of manufacturing such a wafer and a method of manufacturing such a die.Type: ApplicationFiled: February 6, 2018Publication date: June 7, 2018Inventor: Peter Dirksen
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Patent number: 9986916Abstract: A catheter (700, 800, 1206) includes a shaft with distal (808, 906, 1004, 208) and proximal ends (1006). The distal end comprises at least one array of capacitive micromachined ultrasound transducers (308, 402, 404, 500, 512, 600, 604, 802, 008) with an adjustable focus for controllably heating a target zone (806, 1014, 1210). A connector (1012) at the proximal end supplies the at least one array of capacitive micromachined ultrasound transducers with electrical power and controls the adjustable focus.Type: GrantFiled: November 15, 2011Date of Patent: June 5, 2018Assignee: KONINKLIJKE PHILIPS N.V.Inventors: Max Oskar Köhler, Peter Dirksen, Shunmugavelu Sokka, Ronald Dekker
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Patent number: 9917535Abstract: The present invention relates to a wafer (100) being subdivided and separable into a plurality of dies. Each die (110) comprises an array of capacitive micro-machined transducer cells (1). Each cell comprises a substrate (10) comprising a first electrode (11), a membrane (13) comprising a second electrode (14), and a cavity (12) between the substrate (10) and the membrane (13). Each cell (1) of at least a part of the dies (110) comprises a compensating plate (15) on the membrane (13), each compensating plate (15) having a configuration for influencing a bow (h) of the membrane (13). The configurations of the compensating plates (13) vary across the wafer (100). The present invention further relates to a method of manufacturing such a wafer and a method of manufacturing such a die.Type: GrantFiled: May 30, 2013Date of Patent: March 13, 2018Assignee: KONINKLUJKE PHILIPS N.V.Inventor: Peter Dirksen
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Publication number: 20180065148Abstract: An ultrasound array for acoustic wave transmission comprising at least one capacitive micro-machined ultrasound transducer (CMUT) cell (6), wherein the CMUT cell comprises a substrate (4); a first electrode (7); a cell membrane (5) having a second electrode (7?), which opposes the first electrode and the substrate with a cavity (8) there between, wherein the membrane is arranged to vibrate upon the cell activation; and an acoustic window layer (13), overlaying the cell membrane, and having an inner surface opposing the cell membrane and an outer surface. The acoustic window layer comprises a first layer comprising molecules of antioxidant and a polymeric material (47) with insulating particles (41) embedded therein, wherein the polymeric material consists of hydrogen and carbon atoms and has a density equal or below 0.95 g/cm3 and an acoustic impedance equal or above 1.45 MRayl.Type: ApplicationFiled: February 23, 2016Publication date: March 8, 2018Inventors: LUCAS JOHANNES ANNA MARIA BECKERS, FRANCISCUS JOHANNES GERARDUS HAKKENS, PETER DIRKSEN
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Publication number: 20180021813Abstract: An ultrasound array for acoustic wave transmission comprising at least one capacitive micro-machined ultrasound transducer (CMUT) cell (6), wherein the CMUT cell comprises a substrate (4) having a first electrode (7); a cell membrane (5) having a second electrode (7?), which opposes the first electrode with a cavity (8) there between, wherein the membrane is arranged to vibrate upon the cell activation; and an acoustic window layer (13), overlaying the cell membrane, and having an inner surface opposing the cell membrane and an outer surface; the acoustic window layer is in a direct contact with the cell membrane and comprises a first layer comprising molecules of antioxidant and a polymeric material, wherein the polymeric material consists of hydrogen and carbon atoms and has a density equal or 3 below 0.95 g/cm and an acoustic impedance equal or above 1.4 MRayl.Type: ApplicationFiled: February 25, 2016Publication date: January 25, 2018Inventors: LUCAS JOHANNES ANNA MARIA BECKERS, FRANCISCUS JOHANNES GERARDUS HAKKENS, PETER DIRKSEN
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Patent number: 9828236Abstract: The present invention relates to a method of manufacturing a capacitive micro- machined transducer (100), in particular a CMUT, the method comprising depositing a first electrode layer (10) on a substrate (1), depositing a first dielectric film (20) on the first electrode layer (10), depositing a sacrificial layer (30) on the first dielectric film (20), the sacrificial layer (30) being removable for forming a cavity (35) of the transducer, depositing a second dielectric film (40) on the sacrificial layer (30), depositing a second electrode layer (50) on the second dielectric film (40), and patterning at least one of the deposited layers and films (10, 20, 30, 40, 50), wherein the depositing steps are performed by Atomic Layer Deposition. The present invention further relates to a capacitive micro-machined transducer (100), in particular a CMUT, manufactured by such method.Type: GrantFiled: January 23, 2013Date of Patent: November 28, 2017Assignee: KONINKLIJKE PHILIPS N.V.Inventors: Peter Dirksen, Ruediger Mauczok, Koray Karakaya, Johan Klootwijk, Bout Marcelis, Marcel Mulder
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Publication number: 20170165715Abstract: A large aperture CMUT transducer array is formed of a plurality of adjacently located tiles of CMUT cells. The adjacent edges of the tiles are formed by an anisotropic etch process, preferably a deep reactive ion etching process which is capable of cutting through the die and its substrate while maintaining vertical edges in close proximity to the CMUT cells at the edge of the tile. This enables the CMUT cells of continuous rows or columns to exhibit a constant pitch over multiple CMUT cell tiles. The tiles also contain interconnect electrodes along an edge for making electrical connections to the tiles with flex circuit.Type: ApplicationFiled: July 13, 2015Publication date: June 15, 2017Inventors: WOJTEK SUDOL, PETER DIRKSEN, VINCENT ADRIANUS HENNEKEN, RONALD DEKKER, MARCUS CORNELIS LOUWERSE
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Publication number: 20170154619Abstract: An acoustical lens (20) for an ultrasound probe (14) is disclosed. The acoustical lens comprises an inner surface (26) for facing an emission surface (46) of an ultrasound transducer (40) and for receiving ultrasound waves from the ultrasound transducer. The acoustical lens further comprises an outer surface (24) for emitting the ultrasound waves received at the inner surface, wherein the inner surface is formed as a convexly curved surface and wherein at least one recess (34) is associated to an edge of the inner surface for capturing mold material.Type: ApplicationFiled: April 30, 2015Publication date: June 1, 2017Applicant: KONINLIJKE PHILIPS N.V.Inventors: Lucas Johannes Anna Maria Beckers, Peter Dirksen, Nico Maris Adriaan de Wild, Franciscus Johannes Gerardus Hakkens
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Patent number: 9550211Abstract: CMUT devices are used in many applications e.g. for ultrasound imaging and pressure measurement. These devices operate by sensing a change in capacitance caused by deflection of a membrane (32) comprising one of a pair of electrodes in the device by ultrasound exposure of or pressure applied on, the membrane. The CMUT device may be susceptible to the effects of changing temperature.Type: GrantFiled: April 6, 2012Date of Patent: January 24, 2017Assignee: Koninklijke Philips N.V.Inventors: Peter Dirksen, Adriaan Leeuwestein
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Patent number: 9539854Abstract: The patent application discloses a capacitive micromachined ultrasound transducer, comprising a silicon substrate; a cavity; a first electrode, which is arranged between the silicon substrate and the cavity; wherein the first electrode is arranged under the cavity; a membrane, wherein the membrane is arranged above the cavity and opposite to the first electrode; a second electrode, wherein the second electrode is arranged above the cavity and opposite to the first electrode; wherein the second electrode is arranged in or close to the membrane, wherein the first electrode and the second electrode are adapted to be supplied by a voltage; and a first isolation layer, which is arranged between the first electrode and the second electrode, wherein the first isolation layer comprises a dielectric. It is also described a system for generating or detecting ultrasound waves, wherein the system comprises a transducer according to the patent application.Type: GrantFiled: February 17, 2015Date of Patent: January 10, 2017Assignee: Koninklijke Philips N.V.Inventors: Johan H. Klootwijk, Peter Dirksen, Marcel Mulder, Elisabeth M. L. Moonen
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Patent number: 9534949Abstract: The present invention relates to a pre-collapsed capacitive micro-machined transducer cell (10) comprising a substrate (12), and a membrane (14) disposed above a total membrane area (Atotal), wherein a cavity (20) is formed between the membrane (14) and the substrate (12), the membrane comprising a hole (15) and an edge portion (14a) surrounding the hole (15). The cell (10) further comprises a stress layer (17) on the membrane (14), the stress layer (17) having a predetermined stress value with respect to the membrane (14), the stress layer (17) being adapted to provide a bending moment on the membrane (14) in a direction towards the substrate (12) such that the edge portion (14a) of the membrane (14) is collapsed to the substrate (12). The present invention further relates to a method of manufacturing such pre-collapsed capacitive micro-machined transducer cell (10).Type: GrantFiled: October 26, 2012Date of Patent: January 3, 2017Assignee: KONINKLIJKE PHILIPS N.V.Inventors: Peter Dirksen, Ronald Dekker, Vincent Adrianus Henneken, Adriaan Leeuwestein, Bout Marcelis, John Douglas Fraser
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Publication number: 20160365840Abstract: The present invention relates to a transducer (11) comprising a membrane (31) configured to change shape in response to a force, the membrane (31) having a first major surface (16) and a second major surface (17), a piezoelectric layer (18) formed over the first major surface (16) of the membrane (31), the piezoelectric layer (18) having an active portion, first and second electrodes (19) in contact with the piezoelectric layer (18), wherein an electric field between the first and second electrodes (19) determines the mechanical movement of the piezoelectric layer (18), support structures (40) at the second major surface (17) of the membrane (15) on adjacent sides of the active portion of the piezoelectric layer (18), at least part of the support structures (40) forming walls perpendicular, or at least not parallel, to the second major surface (17) of the membrane (31), so as to form a trench (41) of any shape underlying the active portion, so that an ultrasound transducer is obtained with a high output prType: ApplicationFiled: August 25, 2016Publication date: December 15, 2016Inventors: MAREIKE KLEE, RUEDIGER MAUCZOK, HENRI MARIE JOSEPH BOOTS, NICO MARIS ADRIAAN DE WILD, BIJU KUMAR SREEDHARAN NAIR, OLAF WUNNICKE, WILLEM FRANKE PASVEER, DIRK VAN DE LAGEMAAT, PETER DIRKSEN
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Patent number: 9440258Abstract: The present invention relates to a transducer (11) comprising—a membrane (31) configured to change shape in response to a force, the membrane (31) having a first major surface (16) and a second major surface (17), —a piezoelectric layer (18) formed over the first major surface (16) of the membrane (31), the piezoelectric layer (18) having an active portion, —first and second electrodes (19) in contact with the piezoelectric layer (18), wherein an electric field between the first and second electrodes (19) determines the mechanical movement of the piezoelectric layer (18), —support structures (40) at the second major surface (17) of the membrane (15) on adjacent sides of the active portion of the piezoelectric layer (18), at least part of the support structures (40) forming walls perpendicular, or at least not parallel, to the second major surface (17) of the membrane (31), so as to form a trench (41) of any shape underlying the active portion, so that an ultrasound transducer is obtained with a high output prType: GrantFiled: July 12, 2011Date of Patent: September 13, 2016Assignee: Koninklijke Philips Electronics N.V.Inventors: Mareike Klee, Ruediger Mauczok, Henri Marie Joseph Boots, Nico Maris Adriaan De Wild, Biju Kumar Sreedharan Nair, Olaf Wunnicke, Willem Franke Pasveer, Dirk Van De Lagemaat, Peter Dirksen
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Publication number: 20160228915Abstract: Disclosed is a method of manufacturing a capacitive micro-machined ultrasonic transducer (CMUT) device comprising a first electrode (112) on a substrate (110) and a second electrode (122) embedded in an electrically insulating membrane, the first electrode and the membrane being separated by a cavity (130) formed by the removal of a sacrificial material (116) in between the first electrode and the membrane, the method comprising forming a membrane portion (22) on the second electrode and a further membrane portion (24) extending from the membrane portion towards the substrate alongside the sacrificial material, wherein the respective thicknesses the membrane portion and the further membrane portion exceed the thickness of the sacrificial material prior to forming said cavity. A CMUT device manufactured in accordance with this method and an apparatus comprising such a CMUT device are also disclosed.Type: ApplicationFiled: September 15, 2014Publication date: August 11, 2016Inventors: PETER DIRKSEN, MARCEL MULDER, ADRIAAN LEEUWESTEIN