Patents by Inventor Philip J. Oldiges

Philip J. Oldiges has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11152378
    Abstract: An integrated circuit package with a buffer providing radiation protection to memory elements and components is described. The integrated circuit packages and the incorporated buffers provide a protective distance between potential sources of internal radiation particles within the integrated circuit package and any memory elements/components which may be sensitive to radiation such as alpha particles. This protective distance allows for the integrated circuit packages to be completed or assembled without needing added more expensive or redundant memory components.
    Type: Grant
    Filed: March 25, 2020
    Date of Patent: October 19, 2021
    Assignee: International Business Machines Corporation
    Inventors: Daniel L. Stasiak, Hassan Naser, Michael J. Mueller, Kenneth P. Rodbell, Philip J. Oldiges
  • Publication number: 20210305257
    Abstract: An integrated circuit package with a buffer providing radiation protection to memory elements and components is described. The integrated circuit packages and the incorporated buffers provide a protective distance between potential sources of internal radiation particles within the integrated circuit package and any memory elements/components which may be sensitive to radiation such as alpha particles. This protective distance allows for the integrated circuit packages to be completed or assembled without needing added more expensive or redundant memory components.
    Type: Application
    Filed: March 25, 2020
    Publication date: September 30, 2021
    Inventors: Daniel L. STASIAK, Hassan NASER, Michael J. MUELLER, Kenneth P. RODBELL, Philip J. OLDIGES
  • Patent number: 10957780
    Abstract: A U-shaped gate dielectric structure is provided that has a horizontal gate dielectric portion having a vertical thickness, and a vertical gate dielectric wall portion extending upwards from the horizontal gate dielectric portion. The vertical gate dielectric wall portion has a lateral thickness that is greater than the vertical thickness of the horizontal gate dielectric portion. The U-shaped gate dielectric structure houses a gate conductor portion. Collectively, the U-shaped gate dielectric structure and the gate conductor portion provide a functional gate structure that has reduced capacitance.
    Type: Grant
    Filed: February 28, 2019
    Date of Patent: March 23, 2021
    Assignee: International Business Machines Corporation
    Inventors: Pranita Kerber, Effendi Leobandung, Philip J. Oldiges
  • Patent number: 10468524
    Abstract: Provided is a method for forming a semiconductor structure. In embodiments of the invention, the method includes forming a semiconductor fin on a source/drain region, forming a liner including a first dielectric material along sidewalls of the semiconductor fin and along sidewalls of the source/drain region, forming a second dielectric material along sidewalls of the liner including the first dielectric material, and removing the liner including the first dielectric material from sidewalls of the semiconductor fin. Removing the liner including the first dielectric material includes exposing portions of the source/drain region. The method further includes forming a spacer layer on the second dielectric material and portions of the source/drain region exposed by removing the liner including the first dielectric material and forming a gate material on the spacer layer.
    Type: Grant
    Filed: March 24, 2017
    Date of Patent: November 5, 2019
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kangguo Cheng, Xin Miao, Philip J. Oldiges, Wenyu Xu, Chen Zhang
  • Patent number: 10438949
    Abstract: A method for reducing parasitic capacitance of a semiconductor structure is provided. The method includes forming a fin structure over a substrate, forming a first source/drain region between the fin structure and the substrate, forming first spacers adjacent the fin structure, forming second spacers adjacent the first source/drain region and recessing the first source/drain region in exposed areas. The method further includes forming a shallow trench isolation (STI) region within the exposed areas of the recessed first source/drain region, depositing a bottom spacer over the STI region, forming a metal gate stack over the bottom spacer, depositing a top spacer over the metal gate stack, cutting the metal gate stack, forming a second source/drain region over the fin structure, and forming contacts such the STI region extends a length between the metal gate stack and the first source/drain region.
    Type: Grant
    Filed: February 14, 2019
    Date of Patent: October 8, 2019
    Assignee: International Business Machines Corporation
    Inventors: Kangguo Cheng, Xin Miao, Philip J. Oldiges, Wenyu Xu, Chen Zhang
  • Publication number: 20190198640
    Abstract: A U-shaped gate dielectric structure is provided that has a horizontal gate dielectric portion having a vertical thickness, and a vertical gate dielectric wall portion extending upwards from the horizontal gate dielectric portion. The vertical gate dielectric wall portion has a lateral thickness that is greater than the vertical thickness of the horizontal gate dielectric portion. The U-shaped gate dielectric structure houses a gate conductor portion. Collectively, the U-shaped gate dielectric structure and the gate conductor portion provide a functional gate structure that has reduced capacitance.
    Type: Application
    Filed: February 28, 2019
    Publication date: June 27, 2019
    Inventors: Pranita Kerber, Effendi Leobandung, Philip J. Oldiges
  • Publication number: 20190181139
    Abstract: A method for reducing parasitic capacitance of a semiconductor structure is provided. The method includes forming a fin structure over a substrate, forming a first source/drain region between the fin structure and the substrate, forming first spacers adjacent the fin structure, forming second spacers adjacent the first source/drain region and recessing the first source/drain region in exposed areas. The method further includes forming a shallow trench isolation (STI) region within the exposed areas of the recessed first source/drain region, depositing a bottom spacer over the STI region, forming a metal gate stack over the bottom spacer, depositing a top spacer over the metal gate stack, cutting the metal gate stack, forming a second source/drain region over the fin structure, and forming contacts such the STI region extends a length between the metal gate stack and the first source/drain region.
    Type: Application
    Filed: February 14, 2019
    Publication date: June 13, 2019
    Inventors: Kangguo Cheng, Xin Miao, Philip J. Oldiges, Wenyu Xu, Chen Zhang
  • Patent number: 10297688
    Abstract: Provided is a method for forming a semiconductor structure. In embodiments of the invention, the method includes forming a semiconductor fin on a source/drain region, forming a liner including a first dielectric material along sidewalls of the semiconductor fin and along sidewalls of the source/drain region, forming a second dielectric material along sidewalls of the liner including the first dielectric material, and removing the liner including the first dielectric material from sidewalls of the semiconductor fin. Removing the liner including the first dielectric material includes exposing portions of the source/drain region. The method further includes forming a spacer layer on the second dielectric material and portions of the source/drain region exposed by removing the liner including the first dielectric material and forming a gate material on the spacer layer.
    Type: Grant
    Filed: April 30, 2018
    Date of Patent: May 21, 2019
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kangguo Cheng, Xin Miao, Philip J. Oldiges, Wenyu Xu, Chen Zhang
  • Patent number: 10283504
    Abstract: A method for reducing parasitic capacitance of a semiconductor structure is provided. The method includes forming a fin structure over a substrate, forming a first source/drain region between the fin structure and the substrate, forming first spacers adjacent the fin structure, forming second spacers adjacent the first source/drain region and recessing the first source/drain region in exposed areas. The method further includes forming a shallow trench isolation (STI) region within the exposed areas of the recessed first source/drain region, depositing a bottom spacer over the STI region, forming a metal gate stack over the bottom spacer, depositing a top spacer over the metal gate stack, cutting the metal gate stack, forming a second source/drain region over the fin structure, and forming contacts such the STI region extends a length between the metal gate stack and the first source/drain region.
    Type: Grant
    Filed: June 11, 2018
    Date of Patent: May 7, 2019
    Assignee: International Business Machines Corporation
    Inventors: Kangguo Cheng, Xin Miao, Philip J. Oldiges, Wenyu Xu, Chen Zhang
  • Patent number: 10256319
    Abstract: A U-shaped gate dielectric structure is provided that has a horizontal gate dielectric portion having a vertical thickness, and a vertical gate dielectric wall portion extending upwards from the horizontal gate dielectric portion. The vertical gate dielectric wall portion has a lateral thickness that is greater than the vertical thickness of the horizontal gate dielectric portion. The U-shaped gate dielectric structure houses a gate conductor portion. Collectively, the U-shaped gate dielectric structure and the gate conductor portion provide a functional gate structure that has reduced capacitance.
    Type: Grant
    Filed: May 17, 2017
    Date of Patent: April 9, 2019
    Assignee: International Business Machines Corporation
    Inventors: Pranita Kerber, Effendi Leobandung, Philip J. Oldiges
  • Publication number: 20180301451
    Abstract: A method for reducing parasitic capacitance of a semiconductor structure is provided. The method includes forming a fin structure over a substrate, forming a first source/drain region between the fin structure and the substrate, forming first spacers adjacent the fin structure, forming second spacers adjacent the first source/drain region and recessing the first source/drain region in exposed areas. The method further includes forming a shallow trench isolation (STI) region within the exposed areas of the recessed first source/drain region, depositing a bottom spacer over the STI region, forming a metal gate stack over the bottom spacer, depositing a top spacer over the metal gate stack, cutting the metal gate stack, forming a second source/drain region over the fin structure, and forming contacts such the STI region extends a length between the metal gate stack and the first source/drain region.
    Type: Application
    Filed: June 11, 2018
    Publication date: October 18, 2018
    Inventors: Kangguo Cheng, Xin Miao, Philip J. Oldiges, Wenyu Xu, Chen Zhang
  • Publication number: 20180277675
    Abstract: Provided is a method for forming a semiconductor structure. In embodiments of the invention, the method includes forming a semiconductor fin on a source/drain region, forming a liner including a first dielectric material along sidewalls of the semiconductor fin and along sidewalls of the source/drain region, forming a second dielectric material along sidewalls of the liner including the first dielectric material, and removing the liner including the first dielectric material from sidewalls of the semiconductor fin. Removing the liner including the first dielectric material includes exposing portions of the source/drain region. The method further includes forming a spacer layer on the second dielectric material and portions of the source/drain region exposed by removing the liner including the first dielectric material and forming a gate material on the spacer layer.
    Type: Application
    Filed: April 30, 2018
    Publication date: September 27, 2018
    Inventors: Kangguo Cheng, Xin Miao, Philip J. Oldiges, Wenyu Xu, Chen Zhang
  • Publication number: 20180277674
    Abstract: Provided is a method for forming a semiconductor structure. In embodiments of the invention, the method includes forming a semiconductor fin on a source/drain region, forming a liner including a first dielectric material along sidewalls of the semiconductor fin and along sidewalls of the source/drain region, forming a second dielectric material along sidewalls of the liner including the first dielectric material, and removing the liner including the first dielectric material from sidewalls of the semiconductor fin. Removing the liner including the first dielectric material includes exposing portions of the source/drain region. The method further includes forming a spacer layer on the second dielectric material and portions of the source/drain region exposed by removing the liner including the first dielectric material and forming a gate material on the spacer layer.
    Type: Application
    Filed: March 24, 2017
    Publication date: September 27, 2018
    Inventors: Kangguo Cheng, Xin Miao, Philip J. Oldiges, Wenyu Xu, Chen Zhang
  • Patent number: 10074652
    Abstract: A method for reducing parasitic capacitance of a semiconductor structure is provided. The method includes forming a fin structure over a substrate, forming a first source/drain region between the fin structure and the substrate, forming first spacers adjacent the fin structure, forming second spacers adjacent the first source/drain region and recessing the first source/drain region in exposed areas. The method further includes forming a shallow trench isolation (STI) region within the exposed areas of the recessed first source/drain region, depositing a bottom spacer over the STI region, forming a metal gate stack over the bottom spacer, depositing a top spacer over the metal gate stack, cutting the metal gate stack, forming a second source/drain region over the fin structure, and forming contacts such the STI region extends a length between the metal gate stack and the first source/drain region.
    Type: Grant
    Filed: November 9, 2017
    Date of Patent: September 11, 2018
    Assignee: International Business Machines Corporation
    Inventors: Kangguo Cheng, Xin Miao, Philip J. Oldiges, Wenyu Xu, Chen Zhang
  • Patent number: 9853028
    Abstract: A method for reducing parasitic capacitance of a semiconductor structure is provided. The method includes forming a fin structure over a substrate, forming a first source/drain region between the fin structure and the substrate, forming first spacers adjacent the fin structure, forming second spacers adjacent the first source/drain region and recessing the first source/drain region in exposed areas. The method further includes forming a shallow trench isolation (STI) region within the exposed areas of the recessed first source/drain region, depositing a bottom spacer over the STI region, forming a metal gate stack over the bottom spacer, depositing a top spacer over the metal gate stack, cutting the metal gate stack, forming a second source/drain region over the fin structure, and forming contacts such the STI region extends a length between the metal gate stack and the first source/drain region.
    Type: Grant
    Filed: April 17, 2017
    Date of Patent: December 26, 2017
    Assignee: International Business Machines Corporation
    Inventors: Kangguo Cheng, Xin Miao, Philip J. Oldiges, Wenyu Xu, Chen Zhang
  • Patent number: 9825093
    Abstract: Embodiments are directed to a method of forming portions of a fin-type field effect transistor (FinFET) device. The method includes forming at least one source region having multiple sides, forming at least one drain region having multiple sides, forming at least one channel region having multiple sides, forming at least one gate region around the multiple sides of the at least one channel region and forming the at least one gate region around the multiple sides of the at least one drain region.
    Type: Grant
    Filed: August 21, 2015
    Date of Patent: November 21, 2017
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Chung H. Lam, Chung-Hsun Lin, Darsen D. Lu, Philip J. Oldiges
  • Patent number: 9825094
    Abstract: Embodiments are directed to a method of forming portions of a fin-type field effect transistor (FinFET) device. The method includes forming at least one source region having multiple sides, forming at least one drain region having multiple sides, forming at least one channel region having multiple sides, forming at least one gate region around the multiple sides of the at least one channel region and forming the at least one gate region around the multiple sides of the at least one drain region.
    Type: Grant
    Filed: November 30, 2015
    Date of Patent: November 21, 2017
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Chung H. Lam, Chung-Hsun Lin, Darsen D. Lu, Philip J. Oldiges
  • Publication number: 20170250263
    Abstract: A U-shaped gate dielectric structure is provided that has a horizontal gate dielectric portion having a vertical thickness, and a vertical gate dielectric wall portion extending upwards from the horizontal gate dielectric portion. The vertical gate dielectric wall portion has a lateral thickness that is greater than the vertical thickness of the horizontal gate dielectric portion. The U-shaped gate dielectric structure houses a gate conductor portion. Collectively, the U-shaped gate dielectric structure and the gate conductor portion provide a functional gate structure that has reduced capacitance.
    Type: Application
    Filed: May 17, 2017
    Publication date: August 31, 2017
    Inventors: Pranita Kerber, Effendi Leobandung, Philip J. Oldiges
  • Patent number: 9583624
    Abstract: A field effect transistor device comprises a semiconductor substrate, a doped source layer arranged on the semiconductor substrate, an insulator layer arranged on the doped source layer, a fin arranged on the insulator layer, a source region extension portion extending from the doped source layer and through the fin, a gate stack arranged over a channel region of the fin and adjacent to the source region extension portion, a drain region arranged on the fin adjacent to the gate stack; the drain region having a graduated doping concentration.
    Type: Grant
    Filed: September 25, 2015
    Date of Patent: February 28, 2017
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Chung H. Lam, Chung-hsun Lin, Darsen D. Lu, Philip J. Oldiges
  • Publication number: 20170053966
    Abstract: Embodiments are directed to a method of forming portions of a fin-type field effect transistor (FinFET) device. The method includes forming at least one source region having multiple sides, forming at least one drain region having multiple sides, forming at least one channel region having multiple sides, forming at least one gate region around the multiple sides of the at least one channel region and forming the at least one gate region around the multiple sides of the at least one drain region.
    Type: Application
    Filed: August 21, 2015
    Publication date: February 23, 2017
    Inventors: Chung H. Lam, Chung-Hsun Lin, Darsen D. Lu, Philip J. Oldiges