Patents by Inventor Philip J. Oldiges
Philip J. Oldiges has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11152378Abstract: An integrated circuit package with a buffer providing radiation protection to memory elements and components is described. The integrated circuit packages and the incorporated buffers provide a protective distance between potential sources of internal radiation particles within the integrated circuit package and any memory elements/components which may be sensitive to radiation such as alpha particles. This protective distance allows for the integrated circuit packages to be completed or assembled without needing added more expensive or redundant memory components.Type: GrantFiled: March 25, 2020Date of Patent: October 19, 2021Assignee: International Business Machines CorporationInventors: Daniel L. Stasiak, Hassan Naser, Michael J. Mueller, Kenneth P. Rodbell, Philip J. Oldiges
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Publication number: 20210305257Abstract: An integrated circuit package with a buffer providing radiation protection to memory elements and components is described. The integrated circuit packages and the incorporated buffers provide a protective distance between potential sources of internal radiation particles within the integrated circuit package and any memory elements/components which may be sensitive to radiation such as alpha particles. This protective distance allows for the integrated circuit packages to be completed or assembled without needing added more expensive or redundant memory components.Type: ApplicationFiled: March 25, 2020Publication date: September 30, 2021Inventors: Daniel L. STASIAK, Hassan NASER, Michael J. MUELLER, Kenneth P. RODBELL, Philip J. OLDIGES
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Patent number: 10957780Abstract: A U-shaped gate dielectric structure is provided that has a horizontal gate dielectric portion having a vertical thickness, and a vertical gate dielectric wall portion extending upwards from the horizontal gate dielectric portion. The vertical gate dielectric wall portion has a lateral thickness that is greater than the vertical thickness of the horizontal gate dielectric portion. The U-shaped gate dielectric structure houses a gate conductor portion. Collectively, the U-shaped gate dielectric structure and the gate conductor portion provide a functional gate structure that has reduced capacitance.Type: GrantFiled: February 28, 2019Date of Patent: March 23, 2021Assignee: International Business Machines CorporationInventors: Pranita Kerber, Effendi Leobandung, Philip J. Oldiges
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Patent number: 10468524Abstract: Provided is a method for forming a semiconductor structure. In embodiments of the invention, the method includes forming a semiconductor fin on a source/drain region, forming a liner including a first dielectric material along sidewalls of the semiconductor fin and along sidewalls of the source/drain region, forming a second dielectric material along sidewalls of the liner including the first dielectric material, and removing the liner including the first dielectric material from sidewalls of the semiconductor fin. Removing the liner including the first dielectric material includes exposing portions of the source/drain region. The method further includes forming a spacer layer on the second dielectric material and portions of the source/drain region exposed by removing the liner including the first dielectric material and forming a gate material on the spacer layer.Type: GrantFiled: March 24, 2017Date of Patent: November 5, 2019Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Kangguo Cheng, Xin Miao, Philip J. Oldiges, Wenyu Xu, Chen Zhang
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Patent number: 10438949Abstract: A method for reducing parasitic capacitance of a semiconductor structure is provided. The method includes forming a fin structure over a substrate, forming a first source/drain region between the fin structure and the substrate, forming first spacers adjacent the fin structure, forming second spacers adjacent the first source/drain region and recessing the first source/drain region in exposed areas. The method further includes forming a shallow trench isolation (STI) region within the exposed areas of the recessed first source/drain region, depositing a bottom spacer over the STI region, forming a metal gate stack over the bottom spacer, depositing a top spacer over the metal gate stack, cutting the metal gate stack, forming a second source/drain region over the fin structure, and forming contacts such the STI region extends a length between the metal gate stack and the first source/drain region.Type: GrantFiled: February 14, 2019Date of Patent: October 8, 2019Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Xin Miao, Philip J. Oldiges, Wenyu Xu, Chen Zhang
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Publication number: 20190198640Abstract: A U-shaped gate dielectric structure is provided that has a horizontal gate dielectric portion having a vertical thickness, and a vertical gate dielectric wall portion extending upwards from the horizontal gate dielectric portion. The vertical gate dielectric wall portion has a lateral thickness that is greater than the vertical thickness of the horizontal gate dielectric portion. The U-shaped gate dielectric structure houses a gate conductor portion. Collectively, the U-shaped gate dielectric structure and the gate conductor portion provide a functional gate structure that has reduced capacitance.Type: ApplicationFiled: February 28, 2019Publication date: June 27, 2019Inventors: Pranita Kerber, Effendi Leobandung, Philip J. Oldiges
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Publication number: 20190181139Abstract: A method for reducing parasitic capacitance of a semiconductor structure is provided. The method includes forming a fin structure over a substrate, forming a first source/drain region between the fin structure and the substrate, forming first spacers adjacent the fin structure, forming second spacers adjacent the first source/drain region and recessing the first source/drain region in exposed areas. The method further includes forming a shallow trench isolation (STI) region within the exposed areas of the recessed first source/drain region, depositing a bottom spacer over the STI region, forming a metal gate stack over the bottom spacer, depositing a top spacer over the metal gate stack, cutting the metal gate stack, forming a second source/drain region over the fin structure, and forming contacts such the STI region extends a length between the metal gate stack and the first source/drain region.Type: ApplicationFiled: February 14, 2019Publication date: June 13, 2019Inventors: Kangguo Cheng, Xin Miao, Philip J. Oldiges, Wenyu Xu, Chen Zhang
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Patent number: 10297688Abstract: Provided is a method for forming a semiconductor structure. In embodiments of the invention, the method includes forming a semiconductor fin on a source/drain region, forming a liner including a first dielectric material along sidewalls of the semiconductor fin and along sidewalls of the source/drain region, forming a second dielectric material along sidewalls of the liner including the first dielectric material, and removing the liner including the first dielectric material from sidewalls of the semiconductor fin. Removing the liner including the first dielectric material includes exposing portions of the source/drain region. The method further includes forming a spacer layer on the second dielectric material and portions of the source/drain region exposed by removing the liner including the first dielectric material and forming a gate material on the spacer layer.Type: GrantFiled: April 30, 2018Date of Patent: May 21, 2019Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Kangguo Cheng, Xin Miao, Philip J. Oldiges, Wenyu Xu, Chen Zhang
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Patent number: 10283504Abstract: A method for reducing parasitic capacitance of a semiconductor structure is provided. The method includes forming a fin structure over a substrate, forming a first source/drain region between the fin structure and the substrate, forming first spacers adjacent the fin structure, forming second spacers adjacent the first source/drain region and recessing the first source/drain region in exposed areas. The method further includes forming a shallow trench isolation (STI) region within the exposed areas of the recessed first source/drain region, depositing a bottom spacer over the STI region, forming a metal gate stack over the bottom spacer, depositing a top spacer over the metal gate stack, cutting the metal gate stack, forming a second source/drain region over the fin structure, and forming contacts such the STI region extends a length between the metal gate stack and the first source/drain region.Type: GrantFiled: June 11, 2018Date of Patent: May 7, 2019Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Xin Miao, Philip J. Oldiges, Wenyu Xu, Chen Zhang
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Patent number: 10256319Abstract: A U-shaped gate dielectric structure is provided that has a horizontal gate dielectric portion having a vertical thickness, and a vertical gate dielectric wall portion extending upwards from the horizontal gate dielectric portion. The vertical gate dielectric wall portion has a lateral thickness that is greater than the vertical thickness of the horizontal gate dielectric portion. The U-shaped gate dielectric structure houses a gate conductor portion. Collectively, the U-shaped gate dielectric structure and the gate conductor portion provide a functional gate structure that has reduced capacitance.Type: GrantFiled: May 17, 2017Date of Patent: April 9, 2019Assignee: International Business Machines CorporationInventors: Pranita Kerber, Effendi Leobandung, Philip J. Oldiges
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Publication number: 20180301451Abstract: A method for reducing parasitic capacitance of a semiconductor structure is provided. The method includes forming a fin structure over a substrate, forming a first source/drain region between the fin structure and the substrate, forming first spacers adjacent the fin structure, forming second spacers adjacent the first source/drain region and recessing the first source/drain region in exposed areas. The method further includes forming a shallow trench isolation (STI) region within the exposed areas of the recessed first source/drain region, depositing a bottom spacer over the STI region, forming a metal gate stack over the bottom spacer, depositing a top spacer over the metal gate stack, cutting the metal gate stack, forming a second source/drain region over the fin structure, and forming contacts such the STI region extends a length between the metal gate stack and the first source/drain region.Type: ApplicationFiled: June 11, 2018Publication date: October 18, 2018Inventors: Kangguo Cheng, Xin Miao, Philip J. Oldiges, Wenyu Xu, Chen Zhang
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Publication number: 20180277675Abstract: Provided is a method for forming a semiconductor structure. In embodiments of the invention, the method includes forming a semiconductor fin on a source/drain region, forming a liner including a first dielectric material along sidewalls of the semiconductor fin and along sidewalls of the source/drain region, forming a second dielectric material along sidewalls of the liner including the first dielectric material, and removing the liner including the first dielectric material from sidewalls of the semiconductor fin. Removing the liner including the first dielectric material includes exposing portions of the source/drain region. The method further includes forming a spacer layer on the second dielectric material and portions of the source/drain region exposed by removing the liner including the first dielectric material and forming a gate material on the spacer layer.Type: ApplicationFiled: April 30, 2018Publication date: September 27, 2018Inventors: Kangguo Cheng, Xin Miao, Philip J. Oldiges, Wenyu Xu, Chen Zhang
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Publication number: 20180277674Abstract: Provided is a method for forming a semiconductor structure. In embodiments of the invention, the method includes forming a semiconductor fin on a source/drain region, forming a liner including a first dielectric material along sidewalls of the semiconductor fin and along sidewalls of the source/drain region, forming a second dielectric material along sidewalls of the liner including the first dielectric material, and removing the liner including the first dielectric material from sidewalls of the semiconductor fin. Removing the liner including the first dielectric material includes exposing portions of the source/drain region. The method further includes forming a spacer layer on the second dielectric material and portions of the source/drain region exposed by removing the liner including the first dielectric material and forming a gate material on the spacer layer.Type: ApplicationFiled: March 24, 2017Publication date: September 27, 2018Inventors: Kangguo Cheng, Xin Miao, Philip J. Oldiges, Wenyu Xu, Chen Zhang
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Patent number: 10074652Abstract: A method for reducing parasitic capacitance of a semiconductor structure is provided. The method includes forming a fin structure over a substrate, forming a first source/drain region between the fin structure and the substrate, forming first spacers adjacent the fin structure, forming second spacers adjacent the first source/drain region and recessing the first source/drain region in exposed areas. The method further includes forming a shallow trench isolation (STI) region within the exposed areas of the recessed first source/drain region, depositing a bottom spacer over the STI region, forming a metal gate stack over the bottom spacer, depositing a top spacer over the metal gate stack, cutting the metal gate stack, forming a second source/drain region over the fin structure, and forming contacts such the STI region extends a length between the metal gate stack and the first source/drain region.Type: GrantFiled: November 9, 2017Date of Patent: September 11, 2018Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Xin Miao, Philip J. Oldiges, Wenyu Xu, Chen Zhang
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Patent number: 9853028Abstract: A method for reducing parasitic capacitance of a semiconductor structure is provided. The method includes forming a fin structure over a substrate, forming a first source/drain region between the fin structure and the substrate, forming first spacers adjacent the fin structure, forming second spacers adjacent the first source/drain region and recessing the first source/drain region in exposed areas. The method further includes forming a shallow trench isolation (STI) region within the exposed areas of the recessed first source/drain region, depositing a bottom spacer over the STI region, forming a metal gate stack over the bottom spacer, depositing a top spacer over the metal gate stack, cutting the metal gate stack, forming a second source/drain region over the fin structure, and forming contacts such the STI region extends a length between the metal gate stack and the first source/drain region.Type: GrantFiled: April 17, 2017Date of Patent: December 26, 2017Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Xin Miao, Philip J. Oldiges, Wenyu Xu, Chen Zhang
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Patent number: 9825093Abstract: Embodiments are directed to a method of forming portions of a fin-type field effect transistor (FinFET) device. The method includes forming at least one source region having multiple sides, forming at least one drain region having multiple sides, forming at least one channel region having multiple sides, forming at least one gate region around the multiple sides of the at least one channel region and forming the at least one gate region around the multiple sides of the at least one drain region.Type: GrantFiled: August 21, 2015Date of Patent: November 21, 2017Assignee: GLOBALFOUNDRIES INC.Inventors: Chung H. Lam, Chung-Hsun Lin, Darsen D. Lu, Philip J. Oldiges
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Patent number: 9825094Abstract: Embodiments are directed to a method of forming portions of a fin-type field effect transistor (FinFET) device. The method includes forming at least one source region having multiple sides, forming at least one drain region having multiple sides, forming at least one channel region having multiple sides, forming at least one gate region around the multiple sides of the at least one channel region and forming the at least one gate region around the multiple sides of the at least one drain region.Type: GrantFiled: November 30, 2015Date of Patent: November 21, 2017Assignee: GLOBALFOUNDRIES INC.Inventors: Chung H. Lam, Chung-Hsun Lin, Darsen D. Lu, Philip J. Oldiges
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Publication number: 20170250263Abstract: A U-shaped gate dielectric structure is provided that has a horizontal gate dielectric portion having a vertical thickness, and a vertical gate dielectric wall portion extending upwards from the horizontal gate dielectric portion. The vertical gate dielectric wall portion has a lateral thickness that is greater than the vertical thickness of the horizontal gate dielectric portion. The U-shaped gate dielectric structure houses a gate conductor portion. Collectively, the U-shaped gate dielectric structure and the gate conductor portion provide a functional gate structure that has reduced capacitance.Type: ApplicationFiled: May 17, 2017Publication date: August 31, 2017Inventors: Pranita Kerber, Effendi Leobandung, Philip J. Oldiges
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Patent number: 9583624Abstract: A field effect transistor device comprises a semiconductor substrate, a doped source layer arranged on the semiconductor substrate, an insulator layer arranged on the doped source layer, a fin arranged on the insulator layer, a source region extension portion extending from the doped source layer and through the fin, a gate stack arranged over a channel region of the fin and adjacent to the source region extension portion, a drain region arranged on the fin adjacent to the gate stack; the drain region having a graduated doping concentration.Type: GrantFiled: September 25, 2015Date of Patent: February 28, 2017Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Chung H. Lam, Chung-hsun Lin, Darsen D. Lu, Philip J. Oldiges
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Publication number: 20170053966Abstract: Embodiments are directed to a method of forming portions of a fin-type field effect transistor (FinFET) device. The method includes forming at least one source region having multiple sides, forming at least one drain region having multiple sides, forming at least one channel region having multiple sides, forming at least one gate region around the multiple sides of the at least one channel region and forming the at least one gate region around the multiple sides of the at least one drain region.Type: ApplicationFiled: August 21, 2015Publication date: February 23, 2017Inventors: Chung H. Lam, Chung-Hsun Lin, Darsen D. Lu, Philip J. Oldiges