Abstract: A resistive random access memory (ReRAM) device is provided. The ReRAM device includes a stack structure including a first electrode, a metal oxide layer in contact with the first electrode, and a second electrode in contact with the metal oxide layer. A portion of the stack structure is modified by ion implantation, and the modified portion of the stack structure is offset from edges of the stack structure.

Abstract: A method for forming an in-situ drift-mitigation liner on a sidewall of a phase-change material (PCM) device stack includes providing an intermediate device including a substrate including a bottom wiring portion, a bottom electrode metal layer, a drift-mitigation liner layer, an active area layer, a carbon layer, a top electrode metal layer, patterning the top electrode metal layer to form a top electrode, performing a first intermediate angle ion beam etch (IBE), etching the carbon layer and the active area layer, which are formed on the drift-mitigation liner, to form a carbon portion and an active area portion of the PCM device stack, and performing a low angle IBE, etching the drift-mitigation liner and redepositing material etched from the drift-mitigation liner as a conductive liner material on sidewalls of the PCM device stack including exposed portions of the carbon portion, the active area portion, and the top electrode.

Abstract: A device includes an electronic component, and the electronic component includes a first pad, a second pad, and a strip connecting the first pad and the second pad. The device further includes a first electrode in contact with the first pad and a second electrode in contact with the second pad. The electronic component is made of a phase change material. At least one of the first electrode and the second electrode is coated with a material that is configured to increase a difference in workfunction between the first electrode and the second electrode.

Abstract: A mushroom-type Phase-Change Memory (PCM) device includes a substrate, a lower interconnect disposed in the substrate, a first dielectric layer disposed on the substrate, a bottom electrode disposed in the first dielectric layer and extending above an upper surface of the first dielectric layer, a type drift-mitigation liner encircling an upper portion of the bottom electrode extending above the upper surface of the first dielectric layer, a PCM element disposed on the liner and an upper surface of the bottom electrode, a top electrode disposed on the PCM element, and a second dielectric layer disposed on an exposed portion of the first dielectric layer and the top electrode, wherein the second dielectric layer is disposed on sidewalls of the liner, the PCM element, and the top electrode.

Abstract: A negative capacitance field effect transistor (NCFET) device is provided. The NCFET device includes a substrate, and a transistor stack structure formed on the substrate. The nanosheet stack structure includes a PFET region and an NFET region, the PFET region including a pWF metal layer stack and the NFET region including a nWF metal layer stack. The NCFET device also includes a dielectric interfacial layer formed on the transistor stack structure, the dielectric interfacial layer including metal induced oxygen vacancies, and the dielectric interfacial layer formed on a portion of the transistor stack structure. The NCFET device also includes a top electrode formed on the dielectric interfacial layer.

Abstract: A field effect transistor (FET) device is provided. The device includes an isolation region on a support substrate that separates a first back gate from a second back gate, and a gate dielectric layer on a first channel region and a second channel region. The device further includes a conductive gate layer having a work function value and a ferroelectric layer on the gate dielectric layer, wherein the first back gate can adjust a threshold voltage for the first channel region, and the second back gate can adjust a threshold voltage for the second channel region.

Abstract: A negative capacitance field effect transistor (NCFET) device is provided. The NCFET device includes a substrate, and a transistor stack structure formed on the substrate. The nanosheet stack structure includes a PFET region and an NFET region, the PFET region including a pWF metal layer stack and the NFET region including a nWF metal layer stack. The NCFET device also includes a dielectric interfacial layer formed on the transistor stack structure, the dielectric interfacial layer including metal induced oxygen vacancies, and the dielectric interfacial layer formed on a portion of the transistor stack structure. The NCFET device also includes a top electrode formed on the dielectric interfacial layer.

Abstract: An approach to forming a semiconductor device where the semiconductor device includes a first power rail with one or more vertically stacked contact vias connecting to the first power rail to a portion of a first de-coupling capacitor. The semiconductor device includes the first de-coupling capacitor in a first portion of a semiconductor substrate in a first gate cut trench.

Abstract: A mushroom-type Phase-Change Memory (PCM) device includes a substrate, a lower interconnect disposed in the substrate, a first dielectric layer disposed on the substrate, a bottom electrode disposed in the first dielectric layer and extending above an upper surface of the first dielectric layer, a type drift-mitigation liner encircling an upper portion of the bottom electrode extending above the upper surface of the first dielectric layer, a PCM element disposed on the liner and an upper surface of the bottom electrode, a top electrode disposed on the PCM element, and a second dielectric layer disposed on an exposed portion of the first dielectric layer and the top electrode, wherein the second dielectric layer is disposed on sidewalls of the liner, the PCM element, and the top electrode.

Abstract: A method for forming an in-situ drift-mitigation liner on a sidewall of a phase-change material (PCM) device stack includes providing an intermediate device including a substrate including a bottom wiring portion, a bottom electrode metal layer, a drift-mitigation liner layer, an active area layer, a carbon layer, a top electrode metal layer, patterning the top electrode metal layer to form a top electrode, performing a first intermediate angle ion beam etch (IBE), etching the carbon layer and the active area layer, which are formed on the drift-mitigation liner, to form a carbon portion and an active area portion of the PCM device stack, and performing a low angle IBE, etching the drift-mitigation liner and redepositing material etched from the drift-mitigation liner as a conductive liner material on sidewalls of the PCM device stack including exposed portions of the carbon portion, the active area portion, and the top electrode.

Abstract: A resistive random access memory (ReRAM) device is provided. The ReRAM device includes a stack structure including a first electrode, a metal oxide layer in contact with the first electrode, and a second electrode in contact with the metal oxide layer. A portion of the stack structure is modified by ion implantation, and the modified portion of the stack structure is offset from edges of the stack structure.

Abstract: A resistive random access memory (ReRAM) device is provided. The ReRAM device includes a first electrode, a first resistive structure in contact with the first electrode, a dielectric layer in contact with the first resistive structure, and a second resistive structure in contact with the dielectric layer. The second resistive structure includes a resistive material layer and a high work function metal core. The ReRAM device also includes a second electrode in contact with the second resistive structure.

Abstract: A vertical resistive switching memory device is provided that includes a resistive random access memory (ReRAM) stack embedded in a material stack of alternating layers of an interlayer dielectric material and a recessed electrode material. A selector device encapsulates a portion of the ReRAM stack and is present in an undercut region that is laterally adjacent to each of the recessed electrode material layers of the material stack.

Abstract: A method for manufacturing a phase-change memory device includes providing a substrate including a plurality of bottom electrodes, patterning the substrate to form a plurality of pores in the substrate extending from a surface of the substrate to the bottom electrodes, depositing a phase-change material over the substrate, implanting one or more of a Ge, Sb and Te in the phase-change material to amorphize at least a portion of the phase-change material inside the pore, planarizing the device to exposed the surface of the substrate, and forming a plurality of top electrodes over the pores, in contact with the phase-change material.

Abstract: After forming a contact opening in a dielectric material layer located over a substrate, a metal liner layer comprising a nitride of an alloy and a metal contact layer comprising the alloy that provides the metal liner layer are deposited in-situ in the contact opening by sputter deposition in a single process and without an air break. Compositions of the metal liner layer and the metal contact layer can be changed by varying gas compositions employed in the sputtering process.

Abstract: A method is presented for enabling heat dissipation in resistive random access memory (RRAM) devices. The method includes forming a first thermal conducting layer over a bottom electrode, depositing a metal oxide liner over the first thermal conducting layer, forming a second thermal conducting layer over the metal oxide liner, recessing the second thermal conducting layer to expose the first thermal conducting layer, and forming a top electrode in direct contact with the first and second thermal conducting layers.

Abstract: Tapered resistive memory devices with interface dipoles are provided. In one aspect, a ReRAM device includes: a bottom electrode; a core dielectric that is thermally conductive disposed on the bottom electrode; an oxide resistive memory cell disposed along outer sidewalls of the core dielectric, wherein the oxide resistive memory cell has inner edges adjacent to the core dielectric, and outer edges that are tapered; an outer coating disposed adjacent to the outer edges of the oxide resistive memory cell; and a top electrode disposed on the core dielectric, the oxide resistive memory cell, and the outer coating. A method of forming a ReRAM device as well as a method of operating a ReRAM device are also provided.

Abstract: A method is presented for enabling heat dissipation in resistive random access memory (RRAM) devices. The method includes forming a first thermal conducting layer over a bottom electrode, depositing a metal oxide liner over the first thermal conducting layer, forming a second thermal conducting layer over the metal oxide liner, recessing the second thermal conducting layer to expose the first thermal conducting layer, and forming a top electrode in direct contact with the first and second thermal conducting layers.

Abstract: A semiconductor device with an array of vertically stacked electrochemical random-access memory (ECRAM) devices, includes holes formed in a vertical stack of horizontal electrodes. The horizontal electrodes are horizontally aligned and stacked vertically at different vertical levels within the vertical stack and separated by first fill layers. The semiconductor device includes a stack deposition, including a channel layer, and an electrolyte layer, formed over the vertical stack and holes. Selector layers fill holes. The selector layers include an inner selector layer and outer selector layers. The channel layer, the electrolyte layer and outer selector layers are recessed to the inner selector layer and a fill layer is deposited over the vertical stack. The fill layer has been reduced down to the top of the inner selector layer.

Abstract: A method for manufacturing a semiconductor device includes forming a memory element in a dielectric layer. A first conductive layer is deposited on the dielectric layer and the memory element by atomic layer deposition, and a second conductive layer is deposited on the first conductive layer by physical vapor deposition. In the method, the first and second conductive layers are patterned into an electrode on the memory element.