Patents by Inventor Purakh Raj Verma

Purakh Raj Verma has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11296023
    Abstract: A semiconductor device comprises a buried dielectric layer, a first gate structure, a second gate structure, a first source/drain region, a second source/drain region, a front-side metallization, a backside metallization, and conductive contacts. The first gate structure and the second gate structure disposed respectively in the front-side and back side of the dielectric layer, the first source/drain region and the second source/drain region are disposed between the first gate structure and the second gate structures. The front-side metallization is disposed on the front-side of the buried dielectric layer, and the backside metallization is disposed on the backside of the buried dielectric layer. The conductive contacts penetrate the buried dielectric layer and electrically couple the front-side metallization to the backside metallization.
    Type: Grant
    Filed: January 4, 2021
    Date of Patent: April 5, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Purakh Raj Verma, Ching-Yang Wen, Li Wang, Kai Cheng
  • Publication number: 20220069064
    Abstract: An inductor module and a method for fabricating the same are disclosed. The inductor module includes a substrate, a first inter-level dielectric layer, a plurality of second inter-level dielectric layers, a trench, and a first metal layer. The first inter-level dielectric layer is disposed on the substrate. The second inter-level dielectric layers are sequentially stacked on the first inter-level dielectric layer. The trench is disposed to penetrate at least two of the second inter-level dielectric layers. The first metal layer is disposed in the trench. The first metal layer has a top side surface and a bottom side surface opposite to each other. The top side surface is coplanar with an upper surface of the trench in the second inter-level dielectric layers. The bottom side surface is coplanar with a bottom surface of the trench in the second inter-level dielectric layers.
    Type: Application
    Filed: November 26, 2020
    Publication date: March 3, 2022
    Inventors: Purakh Raj Verma, Su Xing, Shyam Parthasarathy, Xiao Yuan Zhi
  • Publication number: 20220068766
    Abstract: A semiconductor structure with an air gap includes a dielectric stack having a first dielectric layer on a substrate, a second dielectric layer on the first dielectric layer, and a third dielectric layer on the second dielectric layer. A first conductive layer and a second conductive layer are disposed in the dielectric stack. The first conductive layer and the second conductive layer are coplanar. A cross-like-shaped air gap is disposed in the dielectric stack between the first and second conductive layers. An oxide layer is disposed on a sidewall of the second dielectric layer within the cross-like-shaped air gap.
    Type: Application
    Filed: November 8, 2021
    Publication date: March 3, 2022
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Ching-Pin Hsu, Chih-Jung Wang, Chu-Chun Chang, Kuo-Yuh Yang, Chia-Huei Lin, Purakh Raj Verma
  • Publication number: 20220059459
    Abstract: A semiconductor device includes a first gate line and a second gate line extending along a first direction, a third gate line extending along a second direction and between and directly contacting the first gate line and the second gate line, a drain region adjacent to one side of the third gate line, a fourth gate line extending along the second direction and between and directly contacting the first gate line and the second gate line, and a first metal interconnection extending along the second direction between the third gate line and the fourth gate line. Preferably, the third gate line includes a first protrusion and the fourth gate line includes a second protrusion.
    Type: Application
    Filed: November 8, 2021
    Publication date: February 24, 2022
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Purakh Raj Verma, Chia-Huei Lin, Kuo-Yuh Yang
  • Publication number: 20220013430
    Abstract: A semiconductor structure includes a glass substrate and a device wafer. The glass substrate includes a glass layer, a heat dissipation layer and a silicon nitride layer stacked from bottom to top. The device wafer includes at least one semiconductor device integrated in a device layer situated over the silicon nitride layer of the glass substrate. Or, the glass substrate includes a glass layer and a silicon nitride layer stacked from bottom to top. The device wafer includes at least one semiconductor device integrated in a device layer, and a heat dissipation layer is stacked on the device layer, wherein the heat dissipation layer is bonded with the silicon nitride layer of the glass substrate. The present invention also provides a method of wafer bonding for manufacturing said semiconductor structure.
    Type: Application
    Filed: July 9, 2020
    Publication date: January 13, 2022
    Inventors: Chia-Liang Liao, Purakh Raj Verma, Ching-Yang Wen, Chee Hau Ng
  • Patent number: 11205609
    Abstract: A semiconductor structure with an air gap includes a dielectric stack having a first dielectric layer on a substrate, a second dielectric layer on the first dielectric layer, and a third dielectric layer on the second dielectric layer. A first conductive layer and a second conductive layer are disposed in the dielectric stack. The first conductive layer and the second conductive layer are coplanar. A cross-like-shaped air gap is disposed in the dielectric stack between the first and second conductive layers. An oxide layer is disposed on a sidewall of the second dielectric layer within the cross-like-shaped air gap.
    Type: Grant
    Filed: March 31, 2020
    Date of Patent: December 21, 2021
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Ching-Pin Hsu, Chih-Jung Wang, Chu-Chun Chang, Kuo-Yuh Yang, Chia-Huei Lin, Purakh Raj Verma
  • Patent number: 11205605
    Abstract: A semiconductor structure with a back gate includes a device wafer includes a front side and a back side. A transistor is disposed on the front side, wherein the transistor includes a gate structure, a source and a drain. An interlayer dielectric covers the transistor. A first metal layer and a second metal layer are within the interlayer dielectric. A first conductive plug is within the interlayer dielectric and contacts the source and the first metal layer. A second conductive plug is disposed within the interlayer dielectric and contacts the drain and the second metal layer. A back gate, a source conductive pad and a drain conductive pad are disposed on the back side. A first via plug penetrates the device wafer to electrically connect the source conductive pad and the source. A second via plug penetrates the device wafer to electrically connect the drain conductive pad and the drain.
    Type: Grant
    Filed: April 6, 2020
    Date of Patent: December 21, 2021
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Purakh Raj Verma, Kuo-Yuh Yang, Chia-Huei Lin
  • Patent number: 11201115
    Abstract: A semiconductor device includes: a first gate line and a second gate line extending along a first direction, a third gate extending along a second direction and between the first gate line and the second gate line, and a drain region adjacent to one side of the third gate line. Preferably, the third gate line includes a first protrusion overlapping the drain region.
    Type: Grant
    Filed: September 6, 2018
    Date of Patent: December 14, 2021
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Purakh Raj Verma, Chia-Huei Lin, Kuo-Yuh Yang
  • Publication number: 20210384093
    Abstract: An integrated circuit device includes a substrate; an integrated circuit area disposed on the substrate and comprising a dielectric stack; a seal ring disposed in the dielectric stack and around a periphery of the integrated circuit area; a cap layer on the dielectric stack; a trench around the seal ring and exposing a sidewall of the dielectric stack; a memory storage structure disposed on the cap layer; and a moisture blocking layer continuously covering the integrated circuit area and the memory storage structure. The moisture blocking layer extends to the sidewall of the dielectric stack, thereby sealing a boundary between two adjacent dielectric films in the dielectric stack.
    Type: Application
    Filed: August 19, 2021
    Publication date: December 9, 2021
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Purakh Raj Verma, Kuo-Yuh Yang, Chia-Huei Lin, Chu-Chun Chang
  • Publication number: 20210384146
    Abstract: An integrated circuit device includes a substrate; an integrated circuit region on the substrate, said integrated circuit region comprising a dielectric stack; a seal ring disposed in said dielectric stack and around a periphery of the integrated circuit region; a trench around the seal ring and exposing a sidewall of the dielectric stack; and a moisture blocking layer continuously covering the integrated circuit region and extending to the sidewall of the dielectric stack, thereby sealing a boundary between two adjacent dielectric films in the dielectric stack.
    Type: Application
    Filed: August 23, 2021
    Publication date: December 9, 2021
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Purakh Raj Verma, Kuo-Yuh Yang, Chia-Huei Lin, Chu-Chun Chang
  • Publication number: 20210375793
    Abstract: A method of forming integrated circuit device, including: providing a substrate; forming an integrated circuit region on the substrate, the integrated circuit region comprising a dielectric stack; forming a seal ring in the dielectric stack and around a periphery of the integrated circuit region; forming a trench around the seal ring and the trench exposing a sidewall of the dielectric stack; forming a moisture blocking layer continuously covering the integrated circuit region and extending to the sidewall of the dielectric stack, thereby sealing a boundary between two adjacent dielectric films in the dielectric stack; and forming a passivation layer over the moisture blocking layer.
    Type: Application
    Filed: August 13, 2021
    Publication date: December 2, 2021
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Purakh Raj Verma, Kuo-Yuh Yang, Chia-Huei Lin, Chu-Chun Chang
  • Publication number: 20210375800
    Abstract: A method for fabricating an integrated circuit device is disclosed. A substrate is provided and an integrated circuit area is formed on the substrate. The integrated circuit area includes a dielectric stack. A seal ring is formed in the dielectric stack and around a periphery of the integrated circuit area. A trench is formed around the seal ring and exposing a sidewall of the dielectric stack. The trench is formed within a scribe line. A moisture blocking layer is formed on the sidewall of the dielectric stack, thereby sealing a boundary between two adjacent dielectric films in the dielectric stack.
    Type: Application
    Filed: August 16, 2021
    Publication date: December 2, 2021
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Purakh Raj Verma, Kuo-Yuh Yang, Chia-Huei Lin, Chu-Chun Chang
  • Publication number: 20210359131
    Abstract: A LDMOS device includes a semiconductor layer on an insulation layer and a ring shape gate on the semiconductor layer. The ring shape gate includes a first gate portion, a second gate portion, and two third gate portions connecting the first gate portion and the second gate portion. The semiconductor device further includes a first drain region and a second drain region formed in the semiconductor layer at two sides of the ring shape gate, a plurality of source regions formed in the semiconductor layer surrounded by the ring shape gate, a plurality of body contact regions formed in the semiconductor layer and arranged between the source regions, and a first body implant region and a second body implant region formed in the semiconductor layer, respectively underlying part of the first gate portion and part of the second gate portion, and being connected by the body contact regions.
    Type: Application
    Filed: August 2, 2021
    Publication date: November 18, 2021
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Purakh Raj Verma, Chia-Huei Lin, Kuo-Yuh Yang
  • Publication number: 20210351066
    Abstract: A method for fabricating semiconductor device includes the steps of: forming a first trench and a second trench in a substrate as a depth of the first trench is greater than a depth of the second trench; forming a liner in the first trench and the second trench; forming a first patterned mask on the substrate to cover the second trench; removing the liner in the first trench; removing the first patterned mask; and forming an insulating layer in the first trench and the second trench to form a trap rich isolation structure in the first trench and a deep trench isolation structure in the second trench.
    Type: Application
    Filed: July 20, 2021
    Publication date: November 11, 2021
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Purakh Raj Verma, Chia-Huei Lin, Kuo-Yuh Yang
  • Publication number: 20210348684
    Abstract: The invention provides a seal ring structure, which comprises a substrate, and a seal ring positioned on the substrate, wherein the seal ring comprises an inner seal ring comprising a plurality of inner seal units, wherein each of the inner seal units is arranged at intervals with each other, an outer seal ring comprising a plurality of outer seal units arranged at the periphery of the inner seal ring, wherein each of the outer seal units is arranged at intervals with each other, and a plurality of groups of fence-shaped seal units, wherein at least one group of fence-shaped seal units is positioned between one of the inner seal units and the other adjacent outer seal unit.
    Type: Application
    Filed: June 2, 2020
    Publication date: November 11, 2021
    Inventors: HAI BIAO YAO, Su Xing, JINYU LIAO, Purakh Raj Verma
  • Patent number: 11152484
    Abstract: A semiconductor structure including a substrate, a CMOS device and a BJT is provided. The substrate has a first side and a second side opposite to each other. The CMOS device includes an NMOS transistor and a PMOS transistor. The NMOS transistor includes a first N-type doped region and a second N-type doped region disposed in the substrate. The PMOS transistor includes a first P-type doped region and a second P-type doped region disposed in the substrate. The BJT includes a collector, a base and an emitter. The base is disposed on the first side of the substrate. The emitter is disposed on the base. A first metal silicide layer, a second metal silicide layer, and a third metal silicide layer are respectively located on the second side of the substrate and respectively disposed on the collector, the first N-type doped region, and the first P-type doped region.
    Type: Grant
    Filed: March 3, 2020
    Date of Patent: October 19, 2021
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Purakh Raj Verma, Kuo-Yuh Yang
  • Patent number: 11152485
    Abstract: A semiconductor structure including a substrate, a complementary metal oxide semiconductor (CMOS) device, a bipolar junction transistor (BJT), and a first protection layer is provided. The CMOS device includes an N-type metal oxide semiconductor (NMOS) transistor and a P-type metal oxide semiconductor (PMOS) transistor disposed on the substrate. The BJT includes a collector, a base and an emitter. The collector is disposed in the substrate. The base is disposed on the substrate. The emitter is disposed on the base. A top surface of a channel of the NMOS transistor, a top surface of a channel of the PMOS transistor and a top surface of the collector of the BJT have the same height. The first protection layer is disposed on the substrate and exposes the substrate. The base is disposed on the substrate exposed by the first protection layer. The semiconductor structure can have better overall performance.
    Type: Grant
    Filed: March 3, 2020
    Date of Patent: October 19, 2021
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Purakh Raj Verma, Kuo-Yuh Yang
  • Publication number: 20210313116
    Abstract: A structure of capacitors connected in parallel includes a substrate. A trench embedded in the substrate. Numerous electrode layers respectively conformally fill in and cover the trench. The electrode layers are formed of numerous nth electrode layers, wherein n is a positive integer from 1 to M, and M is not less than 3. The nth electrode layer with smaller n is closer to the sidewall of the trench. When n equals to M, the Mth electrode layer fills in the center of the trench, and the top surface of the Mth electrode is aligned with the top surface of the substrate. A capacitor dielectric layer is disposed between the adjacent electrode layers. A first conductive plug contacts the nth electrode layer with odd-numbered n. A second conductive plug contacts the nth electrode layer with even-numbered n.
    Type: Application
    Filed: April 21, 2020
    Publication date: October 7, 2021
    Inventors: Purakh Raj Verma, Ching-Yang Wen, XINGXING CHEN, CHAO JIN
  • Patent number: 11133270
    Abstract: An integrated circuit device includes a substrate, an integrated circuit region on the substrate, a seal ring disposed in a dielectric stack of the integrated circuit region and around a periphery of the integrated circuit region, a trench around the seal ring and exposing a sidewall of the dielectric stack, a moisture blocking layer continuously covering the integrated circuit region and extending to the sidewall of the dielectric stack, thereby sealing a boundary between two adjacent dielectric films in the dielectric stack; and a passivation layer over the moisture blocking layer.
    Type: Grant
    Filed: June 29, 2020
    Date of Patent: September 28, 2021
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Purakh Raj Verma, Kuo-Yuh Yang, Chia-Huei Lin, Chu-Chun Chang
  • Publication number: 20210296159
    Abstract: A semiconductor device includes: a metal-oxide semiconductor (MOS) transistor on a substrate; a deep trench isolation structure in the substrate and around the MOS transistor; and a trap rich isolation structure in the substrate and surrounding the deep trench isolation structure. Preferably, the deep trench isolation structure includes a liner in the substrate and an insulating layer on the liner, in which the top surfaces of the liner and the insulating layer are coplanar. The trap rich isolation structure is made of undoped polysilicon and the trap rich isolation structure includes a ring surrounding the deep trench isolation structure according to a top view.
    Type: Application
    Filed: June 6, 2021
    Publication date: September 23, 2021
    Inventors: Purakh Raj Verma, Chia-Huei Lin, Kuo-Yuh Yang