Patents by Inventor Purakh Raj Verma

Purakh Raj Verma has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190221518
    Abstract: A semiconductor device includes: a first gate line and a second gate line extending along a first direction, a third gate extending along a second direction and between the first gate line and the second gate line, and a drain region adjacent to one side of the third gate line. Preferably, the third gate line includes a first protrusion overlapping the drain region.
    Type: Application
    Filed: September 6, 2018
    Publication date: July 18, 2019
    Inventors: Purakh Raj Verma, Chia-Huei Lin, Kuo-Yuh Yang
  • Publication number: 20190221517
    Abstract: A semiconductor device on silicon-on-insulator (SOI) substrate includes: a first gate line and a second gate line extending along a first direction, a third gate extending along a second direction and between the first gate line and the second gate line, and a drain region adjacent to one side of the third gate line. Preferably, the third gate line includes a first protrusion overlapping the drain region.
    Type: Application
    Filed: February 11, 2018
    Publication date: July 18, 2019
    Inventors: Purakh Raj Verma, Chia-Huei Lin, Kuo-Yuh Yang
  • Patent number: 10355072
    Abstract: A method for forming a trench capacitor without an additional mask adder and the resulting device are provided. Embodiments include forming a buried implant layer over a substrate; forming an EPI layer over the buried implant layer; forming an oxide layer over the EPI layer; forming a nitride layer over the oxide layer; forming first and second trenches in the nitride layer, the oxide layer, the EPI layer, the buried implant layer and the substrate, the first trench being wider and deeper than the second trench; forming a dielectric layer in the trenches; forming a first polysilicon layer over the dielectric layer in the trenches; removing the first polysilicon layer and the dielectric layer above the EPI layer in the trenches and at a bottom of the first trench; and forming a second polysilicon layer filling the first trench and above the EPI layer in the second trench.
    Type: Grant
    Filed: February 24, 2017
    Date of Patent: July 16, 2019
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Zeng Wang, Wei Si, Jeoung Mo Koo, Purakh Raj Verma
  • Publication number: 20190214458
    Abstract: A method for fabricating semiconductor device includes: forming a metal-oxide semiconductor (MOS) transistor on a substrate; forming a first interlayer dielectric (ILD) layer on the MOS transistor; removing part of the first ILD layer to form a trench adjacent to the MOS transistor; forming a trap rich structure in the trench; forming a second ILD layer on the MOS transistor and the trap rich structure; forming a contact plug in the first ILD layer and the second ILD layer and electrically connected to the MOS transistor; and forming a metal interconnection on the second ILD layer and electrically connected to the contact plug.
    Type: Application
    Filed: February 12, 2018
    Publication date: July 11, 2019
    Inventors: Purakh Raj Verma, Chia-Huei Lin, Kuo-Yuh Yang
  • Publication number: 20190214497
    Abstract: A semiconductor device includes: a first gate structure on a substrate; a first drain region having a first conductive type adjacent to one side of the first gate structure; a source region having the first conductive type adjacent to another side of the first gate structure; and a first body implant region having a second conductive type under part of the first gate structure.
    Type: Application
    Filed: February 8, 2018
    Publication date: July 11, 2019
    Inventors: Purakh Raj Verma, Chia-Huei Lin, Kuo-Yuh Yang
  • Patent number: 10347712
    Abstract: A method for fabricating semiconductor device includes: forming a metal-oxide semiconductor (MOS) transistor on a substrate; forming a first interlayer dielectric (ILD) layer on the MOS transistor; removing part of the first ILD layer to form a trench adjacent to the MOS transistor; forming a trap rich structure in the trench; forming a second ILD layer on the MOS transistor and the trap rich structure; forming a contact plug in the first ILD layer and the second ILD layer and electrically connected to the MOS transistor; and forming a metal interconnection on the second ILD layer and electrically connected to the contact plug.
    Type: Grant
    Filed: February 12, 2018
    Date of Patent: July 9, 2019
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Purakh Raj Verma, Chia-Huei Lin, Kuo-Yuh Yang
  • Patent number: 10347710
    Abstract: A method for forming a thin film resistor (TFR) without via penetration and the resulting device are provided. Embodiments include forming a first ILD over a substrate; forming a second ILD over the first ILD; forming a first metal layer in the second ILD; forming a first nitride layer over the second ILD and the first metal layer; forming a third ILD over the first nitride layer; forming vias through the third ILD and the first nitride layer, coupled to the first metal layer; forming a TFR layer over two of the vias and the third ILD between the two vias; forming a second nitride layer over the TFR layer and the third ILD; forming a fourth ILD over the second nitride layer; and forming a second metal layer in the fourth ILD and the second nitride layer.
    Type: Grant
    Filed: March 1, 2017
    Date of Patent: July 9, 2019
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Purakh Raj Verma, Kemao Lin
  • Publication number: 20190206720
    Abstract: A method for fabricating semiconductor device comprising the steps of: forming a first trench and a second trench in a substrate; forming a liner in the first trench and the second trench; forming a first patterned mask on the substrate to cover the second trench; removing the liner in the first trench; removing the first patterned mask; and forming an insulating layer in the first trench and the second trench to form a trap rich isolation structure in the first trench and a deep trench isolation structure in the second trench.
    Type: Application
    Filed: February 4, 2018
    Publication date: July 4, 2019
    Inventors: Purakh Raj Verma, Chia-Huei Lin, Kuo-Yuh Yang
  • Patent number: 10192886
    Abstract: Devices and methods for forming a device are presented. The method for forming the device includes providing a support substrate having first crystal orientation. A trap rich layer is formed on the support substrate. An insulator layer is formed over a top surface of the trap rich layer. The method further includes forming a top surface layer having second crystal orientation on the insulator layer. The support substrate, the trap rich layer, the insulator layer and the top surface layer correspond to a substrate and the substrate is defined with at least first and second device regions. A transistor is formed in the top surface layer in the first device region and a wide band gap device is formed in the second device region.
    Type: Grant
    Filed: July 31, 2017
    Date of Patent: January 29, 2019
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Purakh Raj Verma, Shaoqiang Zhang
  • Publication number: 20180254315
    Abstract: A method for forming a thin film resistor (TFR) without via penetration and the resulting device are provided. Embodiments include forming a first ILD over a substrate; forming a second ILD over the first ILD; forming a first metal layer in the second ILD; forming a first nitride layer over the second ILD and the first metal layer; forming a third ILD over the first nitride layer; forming vias through the third ILD and the first nitride layer, coupled to the first metal layer; forming a TFR layer over two of the vias and the third ILD between the two vias; forming a second nitride layer over the TFR layer and the third ILD; forming a fourth ILD over the second nitride layer; and forming a second metal layer in the fourth ILD and the second nitride layer.
    Type: Application
    Filed: March 1, 2017
    Publication date: September 6, 2018
    Inventors: Purakh Raj VERMA, Kemao LIN
  • Publication number: 20180247996
    Abstract: A method for forming a trench capacitor without an additional mask adder and the resulting device are provided. Embodiments include forming a buried implant layer over a substrate; forming an EPI layer over the buried implant layer; forming an oxide layer over the EPI layer; forming a nitride layer over the oxide layer; forming first and second trenches in the nitride layer, the oxide layer, the EPI layer, the buried implant layer and the substrate, the first trench being wider and deeper than the second trench; forming a dielectric layer in the trenches; forming a first polysilicon layer over the dielectric layer in the trenches; removing the first polysilicon layer and the dielectric layer above the EPI layer in the trenches and at a bottom of the first trench; and forming a second polysilicon layer filling the first trench and above the EPI layer in the second trench.
    Type: Application
    Filed: February 24, 2017
    Publication date: August 30, 2018
    Inventors: Zeng WANG, Wei SI, Jeoung Mo KOO, Purakh Raj VERMA
  • Patent number: 10062710
    Abstract: Integrated circuits and methods of producing the same are provided herein. In accordance with an exemplary embodiment, an integrated circuit includes an SOI substrate with an active layer overlying a buried insulator layer that in turn overlies a handle layer. A source is defined within the active layer, and a gate well is also defined within the active layer. A first ultra shallow trench isolation extends into the active layer, where a first portion of the active layer is positioned between the first ultra shallow trench isolation and the buried insulator layer. The first ultra shallow trench isolation is positioned between the source and the gate well.
    Type: Grant
    Filed: May 11, 2016
    Date of Patent: August 28, 2018
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Guan Huei See, Rui Tze Toh, Shaoqiang Zhang, Purakh Raj Verma
  • Patent number: 10020394
    Abstract: Devices and methods for forming a device are disclosed. A substrate is provided. A first body well of a second polarity type is formed in the substrate. A second body well of the second polarity type is formed in the first body well. A bottom of the second body well and a bottom of the first body well are contiguous. Dopant concentrations of the first and second body wells include a graded profile. A transistor of a first polarity type is formed over the substrate. The transistor includes a source and a drain. The source is formed in the second body well.
    Type: Grant
    Filed: January 29, 2018
    Date of Patent: July 10, 2018
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Rui Tze Toh, Guan Huei See, Shaoqiang Zhang, Purakh Raj Verma
  • Patent number: 9997393
    Abstract: Methods for fabricating integrated circuits are provided. In one example, a method includes depositing an ILD layer overlying a SOI substrate including a device structure and an isolation structure. The device structure is disposed on a semiconductor layer of the SOI substrate and includes a metal silicide region and the isolation structure extends through the semiconductor layer to a buried insulator layer of the SOI substrate. A patterned mask is used for etching through the ILD layer and forming a device contact opening that exposes the metal silicide region and a substrate contact opening that exposes the isolation structure. A device contact is formed in the device contact opening. The isolation structure and the buried insulator layer are etched through to extend the substrate contact opening to a support substrate of the SOI substrate. A substrate contact is formed in the substrate contact opening.
    Type: Grant
    Filed: June 7, 2017
    Date of Patent: June 12, 2018
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Yuzhan Wang, Bo Yu, Zeng Wang, Wensheng Deng, Purakh Raj Verma
  • Publication number: 20180151726
    Abstract: Devices and methods for forming a device are disclosed. A substrate is provided. A first body well of a second polarity type is formed in the substrate. A second body well of the second polarity type is formed in the first body well. A bottom of the second body well and a bottom of the first body well are contiguous. Dopant concentrations of the first and second body wells include a graded profile. A transistor of a first polarity type is formed over the substrate. The transistor includes a source and a drain. The source is formed in the second body well.
    Type: Application
    Filed: January 29, 2018
    Publication date: May 31, 2018
    Inventors: Rui Tze TOH, Guan Huei SEE, Shaoqiang ZHANG, Purakh Raj VERMA
  • Patent number: 9899514
    Abstract: Devices and methods for forming a device are disclosed. A substrate is provided. A first body well of a second polarity type is formed in the substrate. A second body well of the second polarity type is formed in the first body well. A bottom of the second body well and a bottom of the first body well are contiguous. Dopant concentrations of the first and second body wells include a graded profile. A transistor of a first polarity type is formed over the substrate. The transistor includes a source and a drain. The source is formed in the second body well.
    Type: Grant
    Filed: May 20, 2016
    Date of Patent: February 20, 2018
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Rui Tze Toh, Guan Huei See, Shaoqiang Zhang, Purakh Raj Verma
  • Publication number: 20170358608
    Abstract: Devices and methods for forming a device are presented. The method for forming the device includes providing a support substrate having first crystal orientation. A trap rich layer is formed on the support substrate. An insulator layer is formed over a top surface of the trap rich layer. The method further includes forming a top surface layer having second crystal orientation on the insulator layer. The support substrate, the trap rich layer, the insulator layer and the top surface layer correspond to a substrate and the substrate is defined with at least first and second device regions. A transistor is formed in the top surface layer in the first device region and a wide band gap device is formed in the second device region.
    Type: Application
    Filed: July 31, 2017
    Publication date: December 14, 2017
    Inventors: Purakh Raj VERMA, Shaoqiang ZHANG
  • Patent number: 9842903
    Abstract: Integrated circuits with improved laterally diffused metal oxide semiconductor (LDMOS) structures, and methods of fabricating the same, are provided. An exemplary LDMOS integrated circuit includes an n-type reduced surface field, a p-type body well disposed on a lateral side of the n-type reduced surface field region, a shallow trench isolation structure disposed within the n-type reduced surface field region, and a gate structure disposed partially over the p-type body well, partially over the n-type reduced surface field region, partially over the shallow trench isolation structure, and partially within the shallow trench isolation structure.
    Type: Grant
    Filed: October 20, 2014
    Date of Patent: December 12, 2017
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Yi Lu, Dongli Wang, Deyan Chen, Purakh Raj Verma
  • Publication number: 20170330896
    Abstract: Integrated circuits and methods of producing the same are provided herein. In accordance with an exemplary embodiment, an integrated circuit includes an SOI substrate with an active layer overlying a buried insulator layer that in turn overlies a handle layer. A source is defined within the active layer, and a gate well is also defined within the active layer. A first ultra shallow trench isolation extends into the active layer, where a first portion of the active layer is positioned between the first ultra shallow trench isolation and the buried insulator layer. The first ultra shallow trench isolation is positioned between the source and the gate well.
    Type: Application
    Filed: May 11, 2016
    Publication date: November 16, 2017
    Inventors: Guan Huei See, Rui Tze Toh, Shaoqiang Zhang, Purakh Raj Verma
  • Patent number: 9780207
    Abstract: Devices and methods for forming a device are disclosed. The method includes providing a crystalline-on-insulator substrate having a bulk substrate and a surface substrate separated by a buried insulator layer. The surface substrate is defined with a device region. A transistor having a gate is formed in the device region. A first diffusion region is formed adjacent to a first side of the gate and a second diffusion region is formed adjacent to and displaced away from a second side of the gate. At least a first drift isolation region is formed in the surface substrate adjacent to and underlaps the second side of the gate. A drift well is formed in the surface substrate encompassing the first drift isolation region. A device isolation region surrounding the device region is formed in the surface substrate. The device isolation region includes a second depth which is deeper than a first depth of the first drift isolation region.
    Type: Grant
    Filed: December 30, 2015
    Date of Patent: October 3, 2017
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Liming Li, Shaoqiang Zhang, Purakh Raj Verma, Han Xiao