Patents by Inventor Purakh Raj Verma

Purakh Raj Verma has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9721969
    Abstract: Devices and methods for forming a device are presented. The method for forming the device includes providing a support substrate having first crystal orientation. A trap rich layer is formed on the support substrate. An insulator layer is formed over a top surface of the trap rich layer. The method further includes forming a top surface layer having second crystal orientation on the insulator layer. The support substrate, the trap rich layer, the insulator layer and the top surface layer correspond to a substrate and the substrate is defined with at least first and second device regions. A transistor is formed in the top surface layer in the first device region and a wide band gap device is formed in the second device region.
    Type: Grant
    Filed: June 30, 2015
    Date of Patent: August 1, 2017
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Purakh Raj Verma, Shaoqiang Zhang
  • Publication number: 20170207209
    Abstract: Integrated circuits and methods of producing the same are provided. In an exemplary embodiment, an integrated circuit includes a high voltage capacitor having a first high voltage plate, a second high voltage plate directly overlying the first high voltage plate, and a high voltage dielectric film between the first and second high voltage plates. The integrated circuit also includes a high density capacitor with a first high density plate that is about co-planar with the second high voltage plate, a second high density plate directly overlying the first high density plate, and a thin high density dielectric film positioned between the first and second high density plates.
    Type: Application
    Filed: January 14, 2016
    Publication date: July 20, 2017
    Inventors: Bo Yu, Boon Guan Oon, Shaoqiang Zhang, Purakh Raj Verma, Guan Huei See, Yuzhan Wang
  • Publication number: 20170194490
    Abstract: Devices and methods for forming a device are disclosed. The method includes providing a crystalline-on-insulator substrate having a bulk substrate and a surface substrate separated by a buried insulator layer. The surface substrate is defined with a device region. A transistor having a gate is formed in the device region. A first diffusion region is formed adjacent to a first side of the gate and a second diffusion region is formed adjacent to and displaced away from a second side of the gate. At least a first drift isolation region is formed in the surface substrate adjacent to and underlaps the second side of the gate. A drift well is formed in the surface substrate encompassing the first drift isolation region. A device isolation region surrounding the device region is formed in the surface substrate. The device isolation region includes a second depth which is deeper than a first depth of the first drift isolation region.
    Type: Application
    Filed: December 30, 2015
    Publication date: July 6, 2017
    Inventors: Liming Li, Shaoqiang Zhang, Purakh Raj Verma, Han Xiao
  • Patent number: 9685364
    Abstract: Silicon-on-insulator integrated circuits including body contact structures and methods for fabricating the same are disclosed. A method for fabricating a silicon-on-insulator integrated circuit includes filling a plurality of first and second shallow isolation trenches with an insulating material to form plurality of first and second shallow trench isolation (STI) structures, the plurality of second shallow isolation trenches having doped regions therebeneath, and forming a gate structure over the semiconductor layer that includes a first portion disposed over and parallel to at least two of the plurality of second STI structures and a second portion disposed in between the at least two of the plurality of second STI structures. The method further includes forming contact plugs to a body contact or gate region of the semiconductor layer.
    Type: Grant
    Filed: September 5, 2014
    Date of Patent: June 20, 2017
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Guan Huei See, Rui Tze Toh, Shaoqiang Zhang, Purakh Raj Verma
  • Patent number: 9673084
    Abstract: Semiconductor device isolation and method of forming thereof are presented. A base substrate with lightly doped first polarity type dopants is provided. A buried layer with heavily doped second polarity type dopants is formed in a top portion of the substrate while an epitaxial layer is formed over the buried layer. First and second type deep trench isolation (DTI) structures which extend from surface of the epitaxial layer to a portion of the base substrate are formed to isolate different device regions defined in the substrate. The first and second type DTI structures have different width dimensions. Shallow trench isolation (STI) regions are formed in the epitaxial layer and at least one transistor is formed on the epitaxial layer. The first and second type DTI structures effectively isolate the transistor from other device regions and enhances the breakdown voltage.
    Type: Grant
    Filed: December 3, 2015
    Date of Patent: June 6, 2017
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Kun Liu, Francis Benistant, Ming Li, Namchil Mun, Shiang Yang Ong, Purakh Raj Verma
  • Patent number: 9660020
    Abstract: Integrated circuits with improved laterally diffused metal oxide semiconductor (LDMOS) structures, and methods of fabricating the same, are provided. An exemplary LDMOS integrated circuit includes a p-type semiconductor substrate, an n-type epitaxial layer disposed over and in contact with the p-type semiconductor substrate, and a p-type implant layer disposed within the n-type epitaxial layer, wherein the p-type implant layer is not in contact with the p-type semiconductor substrate. It further includes an n-type reduced surface field region disposed over and in contact with the p-type implant layer, a p-type body well disposed on a lateral side of the p-type implant layer and the n-type reduced surface field region, and a shallow trench isolation (STI) structure disposed within the n-type reduced surface field region. Still further, it includes a gate structure disposed partially over the p-type body well, partially over the n-type surface field region, and partially over the STI structure.
    Type: Grant
    Filed: May 23, 2014
    Date of Patent: May 23, 2017
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Yi Lu, Purakh Raj Verma, Dongli Wang, Deyan Chen
  • Patent number: 9570545
    Abstract: A method of forming a device is disclosed. A substrate defined with a device region is provided. A gate having a gate electrode, first and second gate dielectric layers is formed in a trench. The trench has an upper trench portion and a lower trench portion. A field plate is formed in the trench. First and second diffusion regions are formed. The gate is displaced from the second diffusion region.
    Type: Grant
    Filed: April 22, 2015
    Date of Patent: February 14, 2017
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Yemin Dong, Liang Yi, Zhanfeng Liu, Purakh Raj Verma, Ramadas Nambatyathu
  • Publication number: 20170005111
    Abstract: Devices and methods for forming a device are presented. The method for forming the device includes providing a support substrate having first crystal orientation. A trap rich layer is formed on the support substrate. An insulator layer is formed over a top surface of the trap rich layer. The method further includes forming a top surface layer having second crystal orientation on the insulator layer. The support substrate, the trap rich layer, the insulator layer and the top surface layer correspond to a substrate and the substrate is defined with at least first and second device regions. A transistor is formed in the top surface layer in the first device region and a wide band gap device is formed in the second device region.
    Type: Application
    Filed: June 30, 2015
    Publication date: January 5, 2017
    Inventors: Purakh Raj VERMA, Shaoqiang ZHANG
  • Patent number: 9525061
    Abstract: A device comprising a p-type base region, and a p-type region formed over the p-type base region and in contact with the p-type base region is disclosed. The device also includes an n-well region surrounded by the p-type region, wherein the n-well is formed from an n-type epitaxial layer and the p-type region is formed by counter-doping the same n-type epitaxial layer.
    Type: Grant
    Filed: July 9, 2015
    Date of Patent: December 20, 2016
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Jeoung Mo Koo, Purakh Raj Verma, Guowei Zhang
  • Publication number: 20160343853
    Abstract: Devices and methods for forming a device are disclosed. A substrate is provided. A first body well of a second polarity type is formed in the substrate. A second body well of the second polarity type is formed in the first body well. A bottom of the second body well and a bottom of the first body well are contiguous. Dopant concentrations of the first and second body wells include a graded profile. A transistor of a first polarity type is formed over the substrate. The transistor includes a source and a drain. The source is formed in the second body well.
    Type: Application
    Filed: May 20, 2016
    Publication date: November 24, 2016
    Inventors: Rui Tze TOH, Guan Huei SEE, Shaoqiang ZHANG, Purakh Raj VERMA
  • Publication number: 20160322262
    Abstract: Devices and methods for forming a device are presented. A substrate with lightly doped first polarity type dopants is provided. A buried layer with heavily doped second polarity type dopants is formed in a top portion of the substrate. An epitaxial layer is formed over the buried layer. Deep trench isolation (DTI) regions which extend from top surface of the epitaxial layer to a portion of the substrate are formed. The DTI regions isolate different buried regions defined in the buried layer. Sinker tap regions which at least partially surround sides of the DTI regions and extend from the epitaxial layer into a portion of the buried layer are formed. The sinker tap region connects sinker taps to the buried layer. Shallow trench isolation (STI) regions are formed in the epitaxial layer.
    Type: Application
    Filed: April 29, 2015
    Publication date: November 3, 2016
    Inventors: Ming LI, Jeoung Mo KOO, Purakh Raj VERMA
  • Patent number: 9472512
    Abstract: Integrated circuits and methods of producing the same are provided. In an exemplary embodiment, an integrated circuit includes a substrate, where the substrate includes a buried oxide (BOX) layer positioned between a handle layer and a semiconductor layer. An electronic component overlies the buried oxide layer on a semiconductor layer side, and a gate line is electrically connected to the electronic component. A body line is also electrically connected to the electronic component. A first through BOX contact electrically connects the gate line with the handle layer, and a second through BOX contact electrically connects the body line with the handle layer.
    Type: Grant
    Filed: October 14, 2015
    Date of Patent: October 18, 2016
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Rui Tze Toh, Guan Huei See, Shaoqiang Zhang, Purakh Raj Verma
  • Publication number: 20160163583
    Abstract: Semiconductor device isolation and method of forming thereof are presented. A base substrate with lightly doped first polarity type dopants is provided. A buried layer with heavily doped second polarity type dopants is formed in a top portion of the substrate while an epitaxial layer is formed over the buried layer. First and second type deep trench isolation (DTI) structures which extend from surface of the epitaxial layer to a portion of the base substrate are formed to isolate different device regions defined in the substrate. The first and second type DTI structures have different width dimensions. Shallow trench isolation (STI) regions are formed in the epitaxial layer and at least one transistor is formed on the epitaxial layer. The first and second type DTI structures effectively isolate the transistor from other device regions and enhances the breakdown voltage.
    Type: Application
    Filed: December 3, 2015
    Publication date: June 9, 2016
    Inventors: Kun LIU, Francis BENISTANT, Ming LI, Namchil MUN, Shiang Yang ONG, Purakh Raj VERMA
  • Patent number: 9343571
    Abstract: LDD regions are provided with high implant energy in devices with reduced thickness poly-silicon layers and source/drain junctions. Embodiments include forming an oxide layer on a substrate surface, forming a poly-silicon layer over the oxide layer, forming first and second trenches through the oxide and poly-silicon layers and below the substrate surface, defining a gate region therebetween, implanting a dopant in a LDD region through the first and second trenches, forming spacers on opposite side surfaces of the gate region and extending into the first and second trenches, and implanting a dopant in a source/drain region below each of the first and second trenches.
    Type: Grant
    Filed: July 9, 2014
    Date of Patent: May 17, 2016
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Guowei Zhang, Purakh Raj Verma, Zhiqing Li
  • Publication number: 20160111488
    Abstract: Integrated circuits with improved laterally diffused metal oxide semiconductor (LDMOS) structures, and methods of fabricating the same, are provided. An exemplary LDMOS integrated circuit includes an n-type reduced surface field, a p-type body well disposed on a lateral side of the n-type reduced surface field region, a shallow trench isolation structure disposed within the n-type reduced surface field region, and a gate structure disposed partially over the p-type body well, partially over the n-type reduced surface field region, partially over the shallow trench isolation structure, and partially within the shallow trench isolation structure.
    Type: Application
    Filed: October 20, 2014
    Publication date: April 21, 2016
    Inventors: Yi Lu, Dongli Wang, Deyan Chen, Purakh Raj Verma
  • Publication number: 20160071758
    Abstract: Silicon-on-insulator integrated circuits including body contact structures and methods for fabricating the same are disclosed. A method for fabricating a silicon-on-insulator integrated circuit includes filling a plurality of first and second shallow isolation trenches with an insulating material to form plurality of first and second shallow trench isolation (STI) structures, the plurality of second shallow isolation trenches having doped regions therebeneath, and forming a gate structure over the semiconductor layer that includes a first portion disposed over and parallel to at least two of the plurality of second STI structures and a second portion disposed in between the at least two of the plurality of second STI structures. The method further includes forming contact plugs to a body contact or gate region of the semiconductor layer.
    Type: Application
    Filed: September 5, 2014
    Publication date: March 10, 2016
    Inventors: Guan Huei See, Rui Tze Toh, Shaoqiang Zhang, Purakh Raj Verma
  • Patent number: 9269770
    Abstract: An integrated circuit system includes a substrate, forming a gate over the substrate, forming a first drift region having a first counter diffused region and a source diffused region, the first drift region in the substrate adjacent a first side of the gate, and forming a second drift region having a second counter diffused region and a drain diffused region, the second drift region in the substrate adjacent a second side of the gate opposite the first side of the gate.
    Type: Grant
    Filed: March 8, 2007
    Date of Patent: February 23, 2016
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Yisuo Li, Gang Chen, Francis Benistant, Purakh Raj Verma, Hong Yang, Shao-fu Sanford Chu
  • Patent number: 9252213
    Abstract: Integrated circuits with a buried N layer and methods for fabricating such integrated circuits are provided. The method includes forming a buried N layer overlying a substrate, and forming a monocrystalline layer overlying the buried N layer. After forming the monocrystalline layer, a well tap trench is formed, where the well tap trench penetrates the electronics area and the buried N layer and extends into the substrate. A well tap is formed in the well tap trench.
    Type: Grant
    Filed: December 19, 2013
    Date of Patent: February 2, 2016
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Zhang Guowei, Purakh Raj Verma
  • Patent number: 9230990
    Abstract: Silicon-on-insulator integrated circuits including body contact structures and methods for fabricating the same are disclosed. A method for fabricating a silicon-on-insulator integrated circuit includes filling a plurality of first and second shallow isolation trenches with an insulating material to form plurality of first and second shallow trench isolation (STI) structures, and forming a gate structure over the semiconductor layer that includes a first portion disposed over and parallel to at least two of the plurality of second STI structures and a second portion disposed in between the at least two of the plurality of second STI structures. The method further includes forming contact plugs to a body contact region of the semiconductor layer. The body contact region comprises a portion of the semiconductor layer between at least one of the plurality of first STI structures and at least one of the plurality of second STI structures.
    Type: Grant
    Filed: April 15, 2014
    Date of Patent: January 5, 2016
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Shaoqiang Zhang, Guan Huei See, Purakh Raj Verma
  • Patent number: 9213137
    Abstract: Semiconductor devices and methods for fabricating semiconductor devices are provided. In one example, a method for fabricating a semiconductor device includes etching a waveguide layer in a detector region of a semiconductor substrate to form a recessed waveguide layer section. A ridge structure germanium (Ge) photodetector is formed overlying a portion of the recessed waveguide layer section.
    Type: Grant
    Filed: July 12, 2013
    Date of Patent: December 15, 2015
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Purakh Raj Verma, Kah-Wee Ang