Patents by Inventor Rei Goto

Rei Goto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11870421
    Abstract: Aspects of this disclosure relate to a surface acoustic wave resonator. The surface acoustic wave resonator includes a piezoelectric substrate, interdigital transducer electrodes disposed on an upper surface of the piezoelectric substrate, a dielectric temperature compensation layer disposed on the piezoelectric substrate to cover the interdigital transducer electrodes, and a dielectric passivation layer over the temperature compensation layer. The passivation layer may include an oxide layer configured to have a sound velocity greater than that of the temperature compensation layer to suppress a transverse signal transmission.
    Type: Grant
    Filed: October 22, 2020
    Date of Patent: January 9, 2024
    Assignee: SKYWORKS SOLUTIONS, INC.
    Inventors: Yuya Hiramatsu, Rei Goto, Yumi Torazawa
  • Publication number: 20240007079
    Abstract: A packaged acoustic wave component comprises a substrate having a trap-rich layer arranged at a surface of the substrate, a functional layer disposed over the surface of the substrate such as to cover that surface, a piezoelectric layer disposed over the functional layer and covering the functional layer with the exception of a peripheral portion of the functional layer, a first metal layer comprising an electrode structure disposed over the piezoelectric structure, and a second metal layer disposed partially in contact with the first metal layer and partially in contact with the peripheral portion of the functional layer.
    Type: Application
    Filed: June 27, 2023
    Publication date: January 4, 2024
    Inventors: Rei Goto, Hironori Fukuhara
  • Patent number: 11848658
    Abstract: Aspects of this disclosure relate to an acoustic wave resonator with hyperbolic mode suppression. The acoustic wave resonator can include a piezoelectric layer, an interdigital transducer electrode, a temperature compensation layer, and a mass loading strip. The mass loading strip can be a conductive strip. The mass loading strip can overlap edge portions of fingers of the interdigital transducer electrode. A layer of the mass loading strip can have a density that is at least as high as a density of a material of the interdigital transducer electrode. The material of the interdigital transducer can impact acoustic properties of the acoustic wave resonator.
    Type: Grant
    Filed: October 20, 2020
    Date of Patent: December 19, 2023
    Assignee: Skyworks Solutions, Inc.
    Inventors: Yuya Hiramatsu, Rei Goto, Yumi Torazawa
  • Publication number: 20230403939
    Abstract: A packaged acoustic wave component can include a dielectric layer disposed over a substrate, a piezoelectric structure disposed over the dielectric layer, and an electrode structure disposed over the piezoelectric structure. The component can further include a polymer structure including a polymer structure wall portion and a polymer structure roof portion configured to form a cavity over the electrode structure, a metal structure disposed over the polymer structure. A buffer coating can be disposed over the metal structure. The buffer coating can include a polymer material with a filler material.
    Type: Application
    Filed: June 12, 2023
    Publication date: December 14, 2023
    Inventors: Rei Goto, Hironori Fukuhara
  • Patent number: 11843366
    Abstract: An acoustic wave resonator is disclosed. The acoustic wave resonator can include a piezoelectric layer, an interdigital transducer electrode positioned over the piezoelectric layer, a temperature compensation layer positioned over the interdigital transducer electrode, and a velocity reduction cover that extends over at least a portion of a central region of the interdigital transducer electrode and over at least a portion of the temperature compensation layer. The velocity reduction cover is arranged to cause a velocity of an acoustic wave generated by the acoustic wave resonator to be reduced.
    Type: Grant
    Filed: December 14, 2020
    Date of Patent: December 12, 2023
    Assignee: Skyworks Solutions, Inc.
    Inventors: Hironori Fukuhara, Rei Goto
  • Publication number: 20230396235
    Abstract: In some embodiments, a surface acoustic wave device can include a piezoelectric substrate and an interdigital transducer electrode embedded in a surface of the piezoelectric substrate to support a high-order mode of a surface acoustic wave having a wavelength ? and a phase velocity greater than 8,000 m/s. Such a high-order mode can include a third-order mode, and the phase velocity can be at least 9,000 m/s. In some embodiments, such a surface acoustic wave device can be implemented in products such as a radio-frequency filter, a radio-frequency module and a wireless device.
    Type: Application
    Filed: May 30, 2023
    Publication date: December 7, 2023
    Inventors: Hiroyuki NAKAMURA, Rei GOTO, Keiichi MAKI, Michio KADOTA, Shuji TANAKA
  • Publication number: 20230396233
    Abstract: In some embodiments, a surface acoustic wave device can include a piezoelectric substrate and an interdigital transducer electrode implemented on a surface of the piezoelectric substrate, such that the surface acoustic device supports a surface acoustic wave having a wavelength ? and a phase velocity less than 3,000 m/s with an electromechanical coupling coefficient of at least 9.0. In some embodiments, the phase velocity less than 2,000 m/s, and the surface acoustic wave can include a lowest asymmetry (A0) mode. In some embodiments, such a surface acoustic wave device can be implemented in products such as a radio-frequency filter, a radio-frequency module and a wireless device.
    Type: Application
    Filed: May 30, 2023
    Publication date: December 7, 2023
    Inventors: Hiroyuki NAKAMURA, Rei GOTO, Keiichi MAKI, Michio KADOTA, Shuji TANAKA
  • Publication number: 20230378930
    Abstract: Surface acoustic wave resonators are disclosed. In certain embodiments, a surface acoustic wave resonator can include a high impedance layer, a piezoelectric layer over the high impedance layer, an interdigital transducer electrode over the piezoelectric layer, and a low impedance layer between the high impedance layer and the piezoelectric layer. An acoustic impedance of the high impedance layer is greater than an acoustic impedance of the piezoelectric layer. An acoustic impedance of the low impedance layer is lower than the acoustic impedance of the high impedance layer. The piezoelectric layer can have a cut angle in a range from 115° to 135°. The surface acoustic wave resonator is configured to generate a Rayleigh mode surface acoustic wave having a wavelength of ?.
    Type: Application
    Filed: April 28, 2023
    Publication date: November 23, 2023
    Inventors: Rei Goto, Keiichi Maki
  • Publication number: 20230378937
    Abstract: A radio frequency multiplexer comprises a piezoelectric substrate, a first surface acoustic wave resonator including interdigital transducer electrodes disposed on the piezoelectric substrate and having a first metal layer formed of a first metal and a second metal layer disposed on the first metal layer and formed of a second metal having a higher density than the first metal, and a second surface acoustic wave resonator including interdigital transducer electrodes disposed on the piezoelectric substrate and having a first metal layer formed of the first metal, but lacking the second metal layer.
    Type: Application
    Filed: May 10, 2023
    Publication date: November 23, 2023
    Inventors: Rei Goto, Shoji Okamoto, Hironori Fukuhara
  • Patent number: 11824515
    Abstract: An acoustic wave device that includes a spinel layer, a piezoelectric layer and an interdigital transducer electrode on the piezoelectric layer is disclosed. The piezoelectric layer is disposed between the interdigital transducer electrode and the spinel layer. The acoustic wave device is configured to generate an acoustic wave having a wavelength of ?. The piezoelectric layer can have a thickness than is less than ?. In some embodiments, the acoustic wave device can include a temperature compensating layer that is disposed between the piezoelectric layer and the spinel layer.
    Type: Grant
    Filed: December 29, 2021
    Date of Patent: November 21, 2023
    Assignee: Skyworks Solutions, Inc.
    Inventors: Gong Bin Tang, Rei Goto, Hiroyuki Nakamura, Keiichi Maki
  • Publication number: 20230370044
    Abstract: An acoustic wave device is disclosed. The acoustic wave device can include a piezoelectric layer positioned over a substrate. The acoustic wave device can also include an interdigital transducer electrode positioned over the piezoelectric layer. The acoustic wave device can also include a grounding structure positioned over the piezoelectric layer. The acoustic wave device can also include a conductive layer positioned under the substrate such that the substrate is positioned between the conductive layer and the grounding structure. The acoustic wave device can further include an electrical pathway that electrically connects the conductive layer to the grounding structure.
    Type: Application
    Filed: April 19, 2023
    Publication date: November 16, 2023
    Inventors: Rei Goto, Keiichi Maki
  • Publication number: 20230361753
    Abstract: An acoustic wave device is disclosed. The acoustic wave device can include a substrate, an interdigital transducer electrode disposed on the substrate, and a temperature compensation layer over the interdigital transducer electrode. The IDT electrode includes a lower layer, an upper layer, and a buffer layer disposed between the lower layer and the upper layer. A modulus of elasticity of the buffer layer is less than a modulus of elasticity of the upper layer. The buffer layer is configured to release stress between the lower layer and the upper layer caused due to a difference between a coefficient of thermal expansion of the lower layer and a coefficient of thermal expansion of the upper layer.
    Type: Application
    Filed: March 1, 2023
    Publication date: November 9, 2023
    Inventors: Takanori Yasuda, Keiichi Maki, Yumi Torazawa, Rei Goto, Michael David Hill
  • Publication number: 20230361755
    Abstract: An acoustic wave device comprising a transmit filter including a plurality of surface acoustic wave resonators. Each surface acoustic wave resonator of the transmit filter including an interdigital transducer electrode comprising a first material. The acoustic wave device further comprising a receive filter including a plurality of surface acoustic wave resonators. At least a proportion of the plurality of surface acoustic wave resonators of the receive filter each including an interdigital transducer electrode comprising a second material. The density of the first material is greater than the density of the second material.
    Type: Application
    Filed: March 30, 2023
    Publication date: November 9, 2023
    Inventor: Rei Goto
  • Patent number: 11811392
    Abstract: Aspects of this disclosure relate to a surface acoustic wave resonator that may include a piezoelectric substrate, interdigital transducer (IDT) electrodes disposed on an upper surface of the piezoelectric substrate, and a dielectric film covering the piezoelectric substrate and the IDT electrode for temperature compensation. The IDT electrodes may include bus bar electrode regions spaced apart from each other in a transverse direction perpendicular to a propagation direction of a surface acoustic wave to be excited, an overlapping region sandwiched between the bus bar regions, and gap regions defined between respective bus bar electrode regions and the overlapping region in the transverse direction. Each of the gap regions may include a dummy electrode in a dummy electrode region extending from the bus bar electrode region in the transverse direction. The dielectric film may include an open region exposing a respective bus bar electrode region and dummy electrode region.
    Type: Grant
    Filed: October 22, 2020
    Date of Patent: November 7, 2023
    Assignee: SKYWORKS SOLUTIONS, INC.
    Inventors: Yuya Hiramatsu, Rei Goto, Yumi Torazawa
  • Publication number: 20230344410
    Abstract: An acoustic wave device is disclosed, the acoustic wave device can include a piezoelectric layer, an interdigital transducer electrode over the piezoelectric layer, and a multilayer passivation structure over the interdigital transducer electrode. The multilayer passivation structure has a thickness thinner than a thickness of the interdigital transducer electrode.
    Type: Application
    Filed: March 24, 2023
    Publication date: October 26, 2023
    Inventors: Rei Goto, Hironori Fukuhara
  • Publication number: 20230344416
    Abstract: A multiplexer is disclosed. The multiplexer can include a multilayer piezoelectric substrate surface acoustic wave device that includes at least a portion of a transmission filter. The multiplexer can include a temperature compensated surface acoustic wave device that includes at least a portion of a reception filter. The reception filter is electrically connected to the transmission filter.
    Type: Application
    Filed: March 27, 2023
    Publication date: October 26, 2023
    Inventors: Li Chen, Rei Goto
  • Publication number: 20230344411
    Abstract: An acoustic wave device is disclosed. The acoustic wave device can include a first multiplexer that has a first portion and a second portion. The acoustic wave device can include a second multiplexer that has a third portion and a fourth portion. The first portion and the third portion are formed in a first die. The second portion and the fourth portion are formed in a second die. A difference between a velocity of an acoustic wave that is generated by the first die and a velocity of an acoustic wave that is generated by the second die is at least 200 m/s.
    Type: Application
    Filed: March 27, 2023
    Publication date: October 26, 2023
    Inventors: Li Chen, Rei Goto
  • Publication number: 20230344415
    Abstract: An acoustic wave device is disclosed. The acoustic wave device can include a first multiplexer that has a first portion and a second portion. The acoustic wave device can include a second multiplexer that has a third portion and a fourth portion. The first portion and the third portion are formed in a first die. The second portion and the fourth portion are formed in a second die that has a different physical structure from the first die.
    Type: Application
    Filed: March 27, 2023
    Publication date: October 26, 2023
    Inventors: Li Chen, Rei Goto
  • Publication number: 20230344403
    Abstract: A multilayer piezoelectric substrate acoustic wave device is disclosed. The multilayer piezoelectric substrate acoustic wave device can include a multilayer piezoelectric substrate, an interdigital transducer electrode over the multilayer piezoelectric substrate, and a multilayer passivation structure over the interdigital transducer electrode. The multilayer passivation structure includes a first layer that has a first passivation material and a second layer that has a second passivation material different from the first passivation material.
    Type: Application
    Filed: March 24, 2023
    Publication date: October 26, 2023
    Inventors: Rei Goto, Hironori Fukuhara
  • Publication number: 20230336153
    Abstract: An acoustic wave device is disclosed. the acoustic wave device is configured to generate a wave having a wavelength of L. The acoustic wave device includes a piezoelectric layer a first layer of an interdigital transducer electrode over the piezoelectric layer, and a second layer of the interdigital transducer electrode over the first layer. The first layer has a material with a first mass density of ?. The first mass density of ? is greater than 5000 kg/m3. The first layer has a thickness of t1 less than 0.04 L. The first layer can have the thickness of t1 in a range between 0.0025 L(10220/?) and 0.04 L(10220/?). The second layer has a material with a second mass density that is smaller than the first mass density.
    Type: Application
    Filed: March 23, 2023
    Publication date: October 19, 2023
    Inventors: Rei Goto, Hironori Fukuhara, Yuya Hiramatsu