Abstract: Methods and apparatuses for patterning substrates using a positive patterning scheme are described herein. Methods involve receiving a substrate having a patterned core material, depositing a doped spacer material conformally over the patterned core material, selectively etching the core material to the doped spacer material to form a spacer mask, and using the spacer mask to etch a target layer on the substrate. Spacer materials may be doped using any of boron, gallium, phosphorus, arsenic, aluminum, and hafnium. Embodiments are suitable for applications in multiple patterning applications.

Abstract: A lean NOx trap catalyst and its use in an emission treatment system for internal combustion engines is disclosed. The lean NOx trap catalyst comprises a first layer, a second layer, and a third layer.

Abstract: A lean NOx trap catalyst and its use in an emission treatment system for internal combustion engines is disclosed. The lean NOx trap catalyst comprises a first layer, a second layer, and a third layer.

Abstract: An oxidation catalyst for treating an exhaust gas from a compression ignition engine, which oxidation catalyst comprises: a substrate; a first washcoat region comprising palladium (Pd) and a first support material comprising cerium oxide; and a second washcoat region comprising platinum (Pt) and a second support material.

Abstract: A method of making a supported catalytic species comprising an alloy of at least two metals, comprises the steps of: (i) combining a particulate support material, a solution of a first metal compound, a solution of a second metal compound, and a solution of an alkaline precipitating agent to form a slurry mixture; (ii) agitating the resultant mixture; and (iii) contacting the solids with a reducing agent, wherein the first metal in the first metal compound and the second metal in the second metal compound is each independently selected from the group consisting of gold, palladium, platinum, rhodium, iridium, silver, osmium and ruthenium; and wherein the first metal is not the same as the second metal.

Abstract: An exhaust system for treating an exhaust gas from an internal combustion engine is disclosed. The system comprises a modified lean NOx trap (LNT), a urea injection system, and an ammonia-selective catalytic reduction catalyst. The modified LNT comprises a first layer and a second layer. The first layer comprises a NOx adsorbent component and one or more platinum group metals. The second layer comprises a diesel oxidation catalyst zone and an NO oxidation zone. The diesel oxidation catalyst zone comprises a platinum group metal, a zeolite, and optionally an alkaline earth metal. The NO oxidation zone comprises a platinum group metal and a carrier. The modified LNT stores NOx at temperatures below about 200° C. and releases at temperatures above about 200° C. The modified LNT and a method of using the modified LNT are also disclosed.

Abstract: A NOx trap catalyst is disclosed. The NOx trap catalyst comprises a noble metal, a NOx storage component, a support, and a first ceria-containing material. The first ceria-containing material is pre-aged prior to incorporation into the NOx trap catalyst, and may have a surface area of less than 80 m2/g. The invention also includes exhaust systems comprising the NOx trap catalyst, and a method for treating exhaust gas utilizing the NOx trap catalyst.

Abstract: A facility for computing a combined view that superimposes a graphic image representing lots onto a reference map is described. The facility identifies a set of distinguishing features in the graphic image and a set of distinguishing features in the reference map. These sets are used to compute a set of common distinguishing features using various techniques, such a cross-referencing. The facility then computes a combined view of the graphic image of lots and the reference map using the set of common distinguishing features. The facility further determines geographic coordinates of location markers on the graphic image scaled to the reference map.

Abstract: A processing chamber in a substrate processing system includes an upper surface, sidewalls, and a bottom surface and a showerhead connected to and extending downward from the upper surface of the processing chamber. The showerhead includes a stem portion and a base portion. An inverted conical surface is arranged adjacent to the upper surface and the sidewalls of the processing chamber and includes an angled surface arranged to redirect gas flow above the showerhead from a horizontal direction to a downward direction and into a gap between a radially outer portion of the base portion and the sidewalls of the processing chamber.

Abstract: Examples include application of a variable-sized content-defined chunking technique to a first data portion to identify a content-defined chunk boundary at least partially defining a remainder section, merging of the remainder section with a second data portion ordered before the first data portion to create a merged section, and application of the chunking technique to the merged section.

Abstract: The invention provides an exhaust gas cleaning oxidation catalyst and in particular to an oxidation catalyst for cleaning the exhaust gas discharged from internal combustion engines of compression ignition type (particularly diesel engines). The invention further relates to a catalysed substrate monolith comprising an oxidising catalyst on a substrate monolith for use in treating exhaust gas emitted from a lean-burn internal combustion engine. In particular, the invention relates to a catalysed substrate monolith comprising a first washcoat coating and a second washcoat coating, wherein the second washcoat coating is disposed in a layer above the first washcoat coating.

Abstract: An extruded honeycomb catalyst for nitrogen oxide reduction according to the selective catalytic reduction (SCR) method in exhaust gases from motor vehicles includes an extruded active carrier in honeycomb form having a first SCR catalytically active component and with a plurality of channels through which the exhaust gas flows during operation, and a washcoat coating having a second SCR catalytically active component being applied to the extruded body, wherein the first SCR catalytically active component and the second SCR catalytically active component are each independently one of: (i) vanadium catalyst with vanadium as catalytically active component; (ii) mixed-oxide catalyst with one or more oxides, in particular those of transition metals or lanthanides as catalytically active component; and (iii) an Fe- or a Cu-zeolite catalyst.

Abstract: Certain embodiments herein relate to methods of increasing a reaction chamber batch size. A portion of a batch of wafers is processed within the chamber. The processing results in at least some off-target deposition of material on interior surfaces of the reaction chamber. A mid-batch chamber processing is conducted to stabilize the off-target deposition materials accumulated on the chamber interior surfaces. Another portion of the batch of wafers is processed within the chamber. In various embodiments, processing of the chamber (e.g., mid-batch) and subsequent portion of the batch of wafers is repeated until processing of all wafers is complete. Batch size refers to the number of wafers that may be processed in the reaction chamber between chamber clean cycles. Chamber interior surfaces are seasoned prior to batch processing. Seasoning of the chamber interior surfaces involves applying a coating of the same material that may be used for deposition on the wafers during processing of the same.

Abstract: A substrate processing system includes a processing chamber and a showerhead including a faceplate, a stem portion and a cylindrical base portion. A collar connects the showerhead to a top surface of the processing chamber. The collar defines a gas channel to receive secondary purge gas and a plurality of gas slits to direct the secondary purge gas from the gas channel in a radially outward and downward direction. A conical surface is arranged adjacent to the cylindrical base and around the stem portion of the showerhead. An inverted conical surface is arranged adjacent to a top surface and sidewalls of the processing chamber. The conical surface and the inverted conical surface define an angled gas channel from the plurality of gas slits to a gap defined between a radially outer portion of the cylindrical base portion and the sidewalls of the processing chamber.

Abstract: An exhaust system for a compression ignition engine comprising an oxidation catalyst for treating carbon monoxide (CO) and hydrocarbons (HCs) in exhaust gas from the compression ignition engine, wherein the oxidation catalyst comprises: a platinum group metal (PGM) component selected from the group consisting of a platinum (Pt) component, a palladium (Pd) component and a combination thereof; an alkaline earth metal component; a support material comprising a modified alumina incorporating a heteroatom component; and a substrate, wherein the platinum group metal (PGM) component, the alkaline earth metal component and the support material are disposed on the substrate.

Abstract: SCR-active molecular-sieve based catalysts with improved low-temperature performance are made by heating a molecular-sieve in a non-oxidizing atmosphere with steam (hydrothermal treatment), or in a reducing atmosphere without steam (thermal treatment), at a temperature in the range of 600-900° C. for a time period from 5 minutes to two hours. The resulting SCR-active iron-containing molecular sieves exhibit a selective catalytic reduction of nitrogen oxides with NH3 or urea at 250° C. that is at least 50% greater than if the iron-containing molecular-sieve were calcined at 500° C. for two hours without performing the hydrothermal or thermal treatment.

Abstract: The invention provides an exhaust gas cleaning oxidation catalyst and in particular to an oxidation catalyst for cleaning the exhaust gas discharged from internal combustion engines of compression ignition type (particularly diesel engines). The invention further relates to a catalyzed substrate monolith comprising an oxidizing catalyst on a substrate monolith for use in treating exhaust gas emitted from a lean-burn internal combustion engine. In particular, the invention relates to a catalyzed substrate monolith comprising a first washcoat coating and a second washcoat coating, wherein the second washcoat coating is disposed in a layer above the first washcoat coating.

Abstract: A catalytic wall-flow monolith filter for use in an emission treatment system comprises a wall flow monolith comprising a porous substrate having surfaces that define the channels and having a first zone extending in the longitudinal direction from a first end face towards a second end face for a distance less than the filter length and a second zone extending in the longitudinal direction from the second end face towards the first end face and extending in the longitudinal direction for a distance less than the filter length, wherein a first SCR catalyst is distributed throughout the first zone of the porous substrate, an ammonia oxidation catalyst is distributed throughout the second zone of the porous substrate and a second SCR catalyst is located in a layer that covers the surfaces in the second zone of the porous substrate.

Abstract: Examples include the acquisition of objects names for portion index objects. Some examples include acquisition, from a remote object storage system, of a list of object names for a plurality of portion index objects, stored in the remote object storage system. In some examples, for each of the portion index objects, the acquired object name includes an identifier of an associated deduplicated backup item and information identifying a data range of the associated deduplicated backup item that is represented by metadata of the portion index object.

Abstract: Methods and apparatuses for depositing material into high aspect ratio features, features in a multi-laminate stack, features having positively sloped sidewalls, features having negatively sloped sidewalls, features having a re-entrant profile, and/or features having sidewall topography are described herein. Methods involve depositing a first amount of material, such as a dielectric (e.g., silicon oxide), into a feature and forming a sacrificial helmet on the field surface of the substrate, etching some of the first amount of the material to open the feature opening and/or smoothen sidewalls of the feature, and depositing a second amount of material to fill the feature. The sacrificial helmet may be the same as or different material from the first amount of material deposited into the feature.