Abstract: A MEMs microactuator can be positioned in an interior region of a frame having at least one opening therein, wherein the frame expands in response to a change in temperature of the frame. A load outside the frame can be coupled to the microactuator through the at least one opening. The microactuator moves relative to the frame in response to the change in temperature to remain substantially stationary relative to the substrate. Other MEMs structures, such as latches that can engage and hold the load in position, can be located outside the frame. Accordingly, in comparison to some conventional structures, temperature compensated microactuators according to the present invention can be made more compact by having the interior region of the frame free of other MEMs structures such as latches.

Abstract: Improved microelectromechanical structures include spaced-apart supports on a microelectronic substrate and a beam that extends between the spaced-apart supports and that expands upon application of heat thereto to thereby cause displacement of the beam between the spaced-apart supports. A heater, located on the beam, applies heat to the beam and displaces with the beam as the beam displaces. Therefore, heat can be directly applied to the arched beam, thereby reducing thermal loss between the heater and the arched beam. Furthermore, an air gap between the heater and arched beam may not need to be heated, thereby allowing improved transient thermal response. Moreover, displacing the heater as the arched beam displaces may further reduce thermal loss and transient thermal response by reducing the separation between the heater and the arched beam as the arched beam displaces.

Abstract: MEMS structures are provided that compensate for ambient temperature changes, process variations, and the like, and can be employed in many applications. These structures include an active microactuator adapted for thermal actuation to move in response to the active alteration of its temperature. The active microactuator may be further adapted to move in response to ambient temperature changes. These structures also include a temperature compensation element, such as a temperature compensation microactuator or frame, adapted to move in response to ambient temperature changes. The active microactuator and the temperature compensation element move cooperatively in response to ambient temperature changes. Thus, a predefined spatial relationship is maintained between the active microactuator and the associated temperature compensation microactuator over a broad range of ambient temperatures absent active alteration of the temperature of the active microactuator.

Abstract: A MEMS actuator is provided that produces significant forces and displacements while consuming a reasonable amount of power. The MEMS actuator includes a microelectronic substrate, spaced apart supports on the substrate and a metallic arched beam extending between the spaced apart supports. The MEMS actuator also includes a heater for heating the arched beam to cause further arching of the beam. In order to effectively transfer heat from the heater to the metallic arched beam, the metallic arched beam extends over and is spaced, albeit slightly, from the heater. As such, the MEMS actuator effectively converts the heat generated by the heater into mechanical motion of the metallic arched beam. A family of other MEMS devices, such as relays, switching arrays and valves, are also provided that include one or more MEMS actuators in order to take advantage of its efficient operating characteristics. In addition, a method of fabricating a MEMS actuator is further provided.

Abstract: Resistor networks, digital potentiometers and microelectromechanical structures that include a plurality of resistors selectable by a plurality of microelectromechanical actuators are provided. More particularly, a thermal relay type of actuator is provided as a switch which may selectively control which of the plurality of resistors is connected. In one particularly advantageous embodiment, the heater for the thermal relay and the plurality of resistors are formed from a common layer of the integrated circuit structure, such as a doped polysilicon layer, which may simplify the manufacturing process. Preferably, a thermal arched beam actuator is utilized in combination with film resistors to provide an integrated circuit device suitable for applications such as digital potentiometers.

Abstract: A method and system for efficiently analyzing databases. In one embodiment, the invention is used to analyze data represented in the form of attribute-value (a-v) pairs. A primary step in building the ontology is to identify parent, child and related a-v pairs of each given a-v pair in the database. A parent is an a-v pair that is always present whenever a given a-v pair is present. A child is an a-v pair that is never present unless the given a-v pair is present. Related pairs of a given a-v pair are those a-v pairs present some of the time when a given a-v pair is present. The system calculates relationships between a-v pairs to produce tables of a-v pairs presented according to the relationships. The user performs additional analysis by investigating the a-v pair relationships through a graphical user interface. Additional visualizations of the data are possible such as through Venn diagrams and animations. Plain-text data documents collected, for example, from the Internet can be analyzed.

Abstract: A MEMS (Micro Electro Mechanical System) variable optical attenuator is provided that is capable of optical attenuation over a full range of optical power. The MEMS variable optical attenuator comprises a microelectronic substrate, a MEMS actuator and an optical shutter. The MEMS variable optical attenuator may also comprise a clamping element capable of locking the optical shutter at a desired attenuation position. The variable light attenuator is capable of attenuating optical beams that have their optical axis running parallel and perpendicular to the substrate. Additionally, the MEMS actuator of the present invention may comprise an array of MEMS actuators capable of supplying the optical shutter with greater displacement distances and, thus a fuller range of optical attenuation. In one embodiment of the invention, the MEMS actuator comprises a thermal arched beam actuator. Additionally, the variable optical attenuator of the present invention may be embodied in a thermal bimorph cantilever structure.

Abstract: Microelectromechanical structures include first and second movable conductive members that extend along and are spaced apart from a microelectronic substrate and are spaced apart from one another, and a movable dielectric link or tether that mechanically links the first and second movable conductive members while electrically isolating the first and second movable conductive members from one another. The movable dielectric link preferably comprises silicon nitride. These microelectromechanical structures can be particularly useful for mechanically coupling structures that are electrically conducting, where it is desired that these structures be coupled in a manner that can reduce and preferably prevent electrical contact or crosstalk. These microelectromechanical structures can be fabricated by forming a sacrificial layer on a microelectronic substrate and forming a dielectric link on the sacrificial layer.

Abstract: An interrupt controller may serially scan a plurality of interrupt request signals and/or receive interrupt request signals on parallel inputs. A scan latency may be associated with updating the status of serially scanned interrupt requests. Spurious interrupts may result from the scan latency. To reduce the chance of spurious interrupts, serially scanned interrupt requests may be masked for an amount of time following an end of interrupt (EOI). Write cycles to clear interrupt requests may be posted in a write buffer. The delay of such write cycles clearing the write buffer may also result in spurious interrupts. To reduce the chance of such spurious interrupts, EOI cycles may be delayed or retried until the write buffer empties.

Abstract: MEMS structures are provided that compensate for ambient temperature changes, process variations, and the like, and can be employed in many applications. These structures include an active microactuator adapted for thermal actuation to move in response to the active alteration of its temperature. The active microactuator may be further adapted to move in response to ambient temperature changes. These structures also include a temperature compensation element, such as a temperature compensation microactuator or frame, adapted to move in response to ambient temperature changes. The active microactuator and the temperature compensation element move cooperatively in response to ambient temperature changes. Thus, a predefined spatial relationship is maintained between the active microactuator and the associated temperature compensation microactuator over a broad range of ambient temperatures absent active alteration of the temperature of the active microactuator.

Abstract: A system and method are presented for laundering textiles (e.g., clean room garments) within a clean room facility. The textile laundering system may be used to launder clean room garments. The system includes a washing machine, a dryer, and means for measuring the number and sizes of particulates present within laundered textiles. The washing machine has two opposed sides, a loading side and an unloading side, and at least one portion which allows access to mechanical and/or electrical equipment (i.e., an equipment access portion). The washing machine is positioned within a sealed opening in a vertical partition separating a first laundering area from a second laundering area such that the loading side is located within the first laundering area and the unloading side is located within the second laundering area. The washing machine uses only "ultrapure" water, substantially free of ions, minerals, and organic material, to launder the textiles.

Abstract: A fiber optic connector is provided that is capable of precisely aligning an optical fiber with another optical element by using a MEMS positioning apparatus subsystem capable of being manufactured in an affordable, repeatable and reliable manner which can precisely microposition an optical fiber relative to another optical element in each of the X, Y and Z directions.

Abstract: A MEMS actuator is provided that produces significant forces and displacements while consuming a reasonable amount of power. The MEMS actuator includes a microelectronic substrate, spaced apart supports on the substrate and a metallic arched beam extending between the spaced apart supports. The MEMS actuator also includes a heater for heating the arched beam to cause further arching of the beam. In order to effectively transfer heat from the heater to the metallic arched beam, the metallic arched beam extends over and is spaced, albeit slightly, from the heater. As such, the MEMS actuator effectively converts the heat generated by the heater into mechanical motion of the metallic arched beam. A family of other MEMS devices, such as relays, switching arrays and valves, are also provided that include one or more MEMS actuators in order to take advantage of its efficient operating characteristics. In addition, a method of fabricating a MEMS actuator is further provided.

Abstract: An apparatus and method are presented for opening an access door having a latch opposite a hinge. The latch locks the access door in a closed position, and may include a pair of parallel locking pins and a connecting member joining the locking pins. The locking pins extend outwardly from the access door and into a pair of holes in an adjacent portion of a frame surrounding the access door. The latch may also include one or more resilient members (e.g., springs) urging the locking pins into the pair of holes. The connecting member and an adjacent fixed portion of the access door are separated by a distance d, and the locking pins extend a distance l into the pair of holes. The present method includes providing a prying member having a first lateral dimension s where s.gtoreq.(d+l) and a second lateral dimension w where w.ltoreq.d. Dimension w of the prying member is inserted between the connecting member and the adjacent fixed portion of the access door.

Abstract: A method and system for efficiently analyzing databases. In one embodiment, the invention is used to analyze data represented in the form of attribute-value (a-v) pairs. A primary step in building the ontology is to identify parent, child and related a-v pairs of each given a-v pair in the database. A parent is an a-v pair that is always present whenever a given a-v pair is present. A child is an a-v pair that is never present unless the given a-v pair is present. Related pairs of a given a-v pair are those a-v pairs present some of the time when a given a-v pair is present. The system calculates relationships between a-v pairs to produce tables of a-v pairs presented according to the relationships. The user performs additional analysis by investigating the a-v pair relationships through a graphical user interface. Additional visualizations of the data are possible such as through Venn diagrams and animations. Plain-text data documents collected, for example, from the Internet can be analyzed.

Abstract: A chemical washing system is presented including a chemical dispensing system. The chemical dispensing system includes a container for storing a liquid chemical, a dispensing unit coupled to the container for dispensing the liquid chemical, and a conduit for conveying the liquid chemical from the dispensing unit to a receptacle of a machine which uses the liquid chemical during normal operation. The container, the dispensing unit, and the receptacle may be enclosed within one or more service areas separate from a "user interface area" containing a portion of the machine with which a user interfaces during normal operation. In order to prevent airborne particulates and other contaminants within the one or more service areas from entering the user interface area, a positive air pressure differential is maintained between the user interface area and the one or more service areas. The chemical washing system includes a textile laundering appliance (e.g.

Abstract: A textile drying system is presented which draws in a quantity of air from an external space substantially equal to a quantity of air exhausted to the external space. The textile drying system includes one or more textile drying appliances (i.e., dryers) and a single air handling unit. Each dryer has an air input port and an air output port. During use, the single air handling unit provides a first quantity of air from a space outside a room in which the one or more dryers are located to the air input port of each dryer. A second quantity of air is exhausted through the air output port of each dryer to the space outside the room, wherein the second quantity of air is substantially equal to the first quantity of air. As a result, the textile drying system does not draw air from, or provide air to, the room in which the textile drying system is located.

Abstract: Enhanced fidelity of pattern transfer of aqueous developable photoresist compositions is achieved with top antireflective coatings which are fluorine-containing and have a refractive index approximately equal to the square root of the underlying photoresist and which are removable in the developer for the photoresist.

Abstract: A drain system is presented for conveying a liquid (e.g., water) exiting an end of a drain line. The drain line may be, for example, mechanically coupled to a drum of a washing machine, and may undergo limited movement during operation of the washing machine. The drain system includes a conduit and a splash plate, and provides mechanical isolation between the moveable drain line and the fixed conduit. The splash plate allows limited relative movement between the drain line and the conduit while providing a substantially splash proof connection between the drain line and the conduit. The drain system is suitable for use within a semiconductor fabrication clean room. The conduit has an axis substantially aligned with an axis of the drain line, and has an end with an opening larger than an outer dimension of the drain line. A lip surrounds the opening in the end of the conduit.

Abstract: A MEMS actuator is provided that produces significant forces and displacements while consuming a reasonable amount of power. The MEMS actuator includes a microelectronic substrate, spaced apart supports on the substrate and a metallic arched beam extending between the spaced apart supports. The MEMS actuator also includes a heater for heating the arched beam to cause further arching of the beam. In order to effectively transfer heat from the heater to the metallic arched beam, the metallic arched beam extends over and is spaced, albeit slightly, from the heater. As such, the MEMS actuator effectively converts the heat generated by the heater into mechanical motion of the metallic arched beam. A family of other MEMS devices, such as relays, switching arrays and valves, are also provided that include one or more MEMS actuators in order to take advantage of its efficient operating characteristics. In addition, a method of fabricating a MEMS actuator is further provided.