Patents by Inventor Scott Sills
Scott Sills has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8796155Abstract: A method of fabricating a substrate includes forming spaced first features over a substrate. An alterable material is deposited over the spaced first features and the alterable material is altered with material from the spaced first features to form altered material on sidewalls of the spaced first features. A first material is deposited over the altered material, and is of some different composition from that of the altered material. The first material is etched to expose the altered material and spaced second features comprising the first material are formed on sidewalls of the altered material. Then, the altered material is etched from between the spaced second features and the spaced first features. The substrate is processed through a mask pattern comprising the spaced first features and the spaced second features. Other embodiments are disclosed.Type: GrantFiled: December 4, 2008Date of Patent: August 5, 2014Assignee: Micron Technology, Inc.Inventors: Scott Sills, Gurtej S. Sandhu, Anton deVilliers
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Patent number: 8735285Abstract: An integrated circuit and a method of formation provide a contact area formed at an angled end of at least one linearly extending conductive line. In an embodiment, conductive lines with contact landing pads are formed by patterning lines in a mask material, cutting at least one of the material lines to form an angle relative to the extending direction of the material lines, forming extensions from the angled end faces of the mask material, and patterning an underlying conductor by etching using said material lines and extension as a mask. In another embodiment, at least one conductive line is cut at an angle relative to the extending direction of the conductive line to produce an angled end face, and an electrical contact landing pad is formed in contact with the angled end face.Type: GrantFiled: December 4, 2013Date of Patent: May 27, 2014Assignee: Micron Technology, Inc.Inventors: Gurtej Sandhu, Scott Sills
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Patent number: 8711603Abstract: Various embodiments comprise apparatuses having at least two resistance change memory (RCM) cells. In one embodiment, an apparatus includes at least two electrical contacts coupled to each of the RCM cells. A memory cell material is disposed between pairs of each of the electrical contacts coupled to each of the RCM cells. The memory cell material is capable of forming a conductive pathway between the electrical contacts with at least a portion of the memory cell material arranged to cross-couple a conductive pathway between select ones of the at least two electrical contacts electrically coupled to each of the at least two RCM cells. Additional apparatuses and methods are described.Type: GrantFiled: May 11, 2012Date of Patent: April 29, 2014Assignee: Micron Technology, Inc.Inventor: Scott Sills
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Patent number: 8703570Abstract: A method of fabricating a substrate includes forming spaced first features and spaced second features over a substrate. The first and second features alternate with one another and are spaced relative one another. Width of the spaced second features is laterally trimmed to a greater degree than any lateral trimming of width of the spaced first features while laterally trimming width of the spaced second features. After laterally trimming of the second features, spacers are formed on sidewalls of the spaced first features and on sidewalls of the spaced second features. The spacers are of some different composition from that of the spaced first features and from that of the spaced second features. After forming the spacers, the spaced first features and the spaced second features are removed from the substrate. The substrate is processed through a mask pattern comprising the spacers. Other embodiments are disclosed.Type: GrantFiled: July 30, 2012Date of Patent: April 22, 2014Assignee: Micron Technology, Inc.Inventors: Scott Sills, Gurtej S. Sandhu, Anton deVilliers
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Patent number: 8696918Abstract: Some embodiments include methods of forming patterns. A block copolymer film may be formed over a substrate, with the block copolymer having an intrinsic glass transition temperature (Tg,O) and a degradation temperature (Td). A temperature window may be defined to correspond to temperatures (T) within the range of Tg,O?T?Td. While the block copolymer is in the upper half of the temperature window, solvent may be dispersed into the block copolymer to a process volume fraction that induces self-assembly of the block copolymer into a pattern. A defect specification may be defined, and the process volume fraction of solvent may be at level that achieves self-assembly within the defect specification. In some embodiments, the solvent may be removed from within the block copolymer while maintaining the defect specification.Type: GrantFiled: May 5, 2010Date of Patent: April 15, 2014Assignee: Micron Technology, Inc.Inventors: Dan Millward, Scott Sills
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Publication number: 20140094026Abstract: An integrated circuit and a method of formation provide a contact area formed at an angled end of at least one linearly extending conductive line. In an embodiment, conductive lines with contact landing pads are formed by patterning lines in a mask material, cutting at least one of the material lines to form an angle relative to the extending direction of the material lines, forming extensions from the angled end faces of the mask material, and patterning an underlying conductor by etching using said material lines and extension as a mask. In another embodiment, at least one conductive line is cut at an angle relative to the extending direction of the conductive line to produce an angled end face, and an electrical contact landing pad is formed in contact with the angled end face.Type: ApplicationFiled: December 4, 2013Publication date: April 3, 2014Applicant: MICRON TECHNOLOGY, INC.Inventors: Gurtej Sandhu, Scott Sills
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Patent number: 8629051Abstract: An integrated circuit and a method of formation provide a contact area formed at an angled end of at least one linearly extending conductive line. In an embodiment, conductive lines with contact landing pads are formed by patterning lines in a mask material, cutting at least one of the material lines to form an angle relative to the extending direction of the material lines, forming extensions from the angled end faces of the mask material, and patterning an underlying conductor by etching using said material lines and extension as a mask. In another embodiment, at least one conductive line is cut at an angle relative to the extending direction of the conductive line to produce an angled end face, and an electrical contact landing pad is formed in contact with the angled end face.Type: GrantFiled: January 28, 2013Date of Patent: January 14, 2014Assignee: Micron Technology, Inc.Inventors: Gurtej Sandhu, Scott Sills
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Patent number: 8603884Abstract: A method of fabricating a substrate includes forming first and second spaced features over a substrate. The first spaced features have elevationally outermost regions which are different in composition from elevationally outermost regions of the second spaced features. The first and second spaced features alternate with one another. Every other first feature is removed from the substrate and pairs of immediately adjacent second features are formed which alternate with individual of remaining of the first features. After such act of removing, the substrate is processed through a mask pattern comprising the pairs of immediately adjacent second features which alternate with individual of the remaining of the first features. Other embodiments are disclosed.Type: GrantFiled: August 28, 2012Date of Patent: December 10, 2013Assignee: Micron Technology, Inc.Inventors: Scott Sills, Gurtej S. Sandhu, Anton deVilliers
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Publication number: 20130307166Abstract: A method for forming patterns of dense conductor lines and their contact pads is described. Parallel base line patterns are formed over a substrate. Each of the base line patterns is trimmed. Derivative line patterns and derivative transverse patterns are formed as spaces on the sidewalls of the trimmed base line patterns, wherein the derivative transverse patterns are formed between the ends of the derivative line patterns and adjacent to the ends of the trimmed base line patterns. The trimmed base line patterns are removed. At least end portions of the derivative line patterns are removed, such that the derivative line patterns are separated from each other and all or portions of the derivative transverse patterns become patterns of contact pads each connected with a derivative line pattern.Type: ApplicationFiled: May 16, 2012Publication date: November 21, 2013Applicant: NANYA TECHNOLOGY CORPORATIONInventors: Jonathan Doebler, Scott Sills
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Publication number: 20130301336Abstract: Various embodiments comprise apparatuses having at least two resistance change memory (RCM) cells. In one embodiment, an apparatus includes at least two electrical contacts coupled to each of the RCM cells. A memory cell material is disposed between pairs of each of the electrical contacts coupled to each of the RCM cells. The memory cell material is capable of forming a conductive pathway between the electrical contacts with at least a portion of the memory cell material arranged to cross-couple a conductive pathway between select ones of the at least two electrical contacts electrically coupled to each of the at least two RCM cells. Additional apparatuses and methods are described.Type: ApplicationFiled: May 11, 2012Publication date: November 14, 2013Applicant: MICRON TECHNOLOGY, INC.Inventor: Scott Sills
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Patent number: 8563228Abstract: A method of forming a pattern on a substrate includes forming spaced first features over a substrate. The spaced first features have opposing lateral sidewalls. Material is formed onto the opposing lateral sidewalls of the spaced first features. That portion of such material which is received against each of the opposing lateral sidewalls is of different composition from composition of each of the opposing lateral sidewalls. At least one of such portion of the material and the spaced first features is densified to move the at least one laterally away from the other of the at least one to form a void space between each of the opposing lateral sidewalls and such portion of the material.Type: GrantFiled: May 30, 2012Date of Patent: October 22, 2013Assignee: Micron Technology, Inc.Inventors: Scott Sills, Gurtej S. Sandhu
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Publication number: 20130250651Abstract: Various embodiments comprise apparatuses having a number of memory cells including drive circuitry to provide signal pulses of a selected time duration and/or amplitude, and an array of resistance change memory cells electrically coupled to the drive circuitry. The resistance change memory cells may be programmed for a range of retention time periods and operating speeds based on the received signal pulse. Additional apparatuses and methods are described.Type: ApplicationFiled: March 23, 2012Publication date: September 26, 2013Inventor: Scott Sills
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Patent number: 8530939Abstract: Some embodiments include cross-point memory structures. The structures may include a line of first electrode material extending along a first horizontal direction, a multi-sided container of access device materials over the first electrode material, a memory element material within the multi-sided container, and a line of second electrode material over the memory element material and extending along a second horizontal direction that is orthogonal to the first horizontal direction. Some embodiments include methods of forming memory arrays. The methods may include forming a memory cell stack over a first electrode material, and then patterning the first electrode material and the memory cell stack into a first set of spaced lines extending along a first horizontal direction. Spaced lines of second electrode material may be formed over the first set of spaced lines, and may extend along a second horizontal direction that is orthogonal to the first horizontal direction.Type: GrantFiled: May 31, 2012Date of Patent: September 10, 2013Assignee: Micron Technology, Inc.Inventors: Scott Sills, Gurtej S. Sandhu
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Patent number: 8450776Abstract: Epitaxial devices are described that include a textured surface on a substrate. Geometry of the textured surface provides a reduced lattice mismatch between an epitaxial material and the substrate. Devices exhibit better interfacial adhesion and lower defect density than devices formed without texture. Silicon substrates are shown with gallium nitride epitaxial growth and devices such as LEDs are formed within the gallium nitride.Type: GrantFiled: June 20, 2012Date of Patent: May 28, 2013Assignee: Micron Technology, Inc.Inventors: Anton deVilliers, Erik Byers, Scott Sills
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Patent number: 8394579Abstract: Some embodiments include methods of forming patterns in which a block copolymer-containing composition is formed over a substrate, and is then patterned to form a first mask. The block copolymer of the composition is subsequently induced into forming a repeating pattern within the first mask. Portions of the repeating pattern are then removed to form a second mask from the first mask. The patterning of the block copolymer-containing composition may utilize photolithography. Alternatively, the substrate may have regions which wet differently relative to one another with respect to the block copolymer-containing composition, and the patterning of the first mask may utilize such differences in wetting in forming the first mask.Type: GrantFiled: December 1, 2011Date of Patent: March 12, 2013Assignee: Micron Technology, Inc.Inventors: Scott Sills, Dan Millward
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Publication number: 20130059255Abstract: A method of lithographically patterning a substrate that has photoresist having removal areas and non-removal areas includes first exposing at least the non-removal areas to radiation effective to increase outer surface roughness of the photoresist in the non-removal areas at least post-develop but ineffective to change photoresist solubility in a developer for the photoresist to be cleared from the non-removal areas upon develop with the developer. Second exposing of radiation to the removal areas is conducted to be effective to change photoresist solubility in the developer for the photoresist to be cleared from the removal areas upon develop with the developer. The photoresist is developed with the developer effective to clear photoresist from the removal areas and to leave photoresist in the non-removal areas that has outer surface roughness in the non-removal areas which is greater than that before the first exposing. Other implementations and embodiments are contemplated.Type: ApplicationFiled: October 24, 2012Publication date: March 7, 2013Applicant: MICRON TECHNOLOGY, INC.Inventors: Yoshiki Hishiro, Scott Sills, Hiroyuki Mori, Troy Gugel, Paul D. Shirley, Lijing Gou, Adam Olson
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Patent number: 8390010Abstract: Solid state lighting (“SSL”) devices with cellular arrays and associated methods of manufacturing are disclosed herein. In one embodiment, a light emitting diode includes a semiconductor material having a first surface and a second surface opposite the first surface. The semiconductor material has an aperture extending into the semiconductor material from the first surface. The light emitting diode also includes an active region in direct contact with the semiconductor material, and at least a portion of the active region is in the aperture of the semiconductor material.Type: GrantFiled: March 25, 2010Date of Patent: March 5, 2013Assignee: Micron Technology, Inc.Inventors: Scott Sills, Lifang Xu, Scott Schellhammer, Thomas Gehrke, Zaiyuan Ren, Anton De Villiers
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Patent number: 8383504Abstract: An integrated circuit and a method of formation provide a contact area formed at an angled end of at least one linearly extending conductive line. In an embodiment, conductive lines with contact landing pads are formed by patterning lines in a mask material, cutting at least one of the material lines to form an angle relative to the extending direction of the material lines, forming extensions from the angled end faces of the mask material, and patterning an underlying conductor by etching using said material lines and extension as a mask. In another embodiment, at least one conductive line is cut at an angle relative to the extending direction of the conductive line to produce an angled end face, and an electrical contact landing pad is formed in contact with the angled end face.Type: GrantFiled: September 19, 2011Date of Patent: February 26, 2013Assignee: Micron Technology, Inc.Inventors: Gurtej Sandhu, Scott Sills
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Patent number: 8349545Abstract: Some embodiments include methods of forming patterns of openings. The methods may include forming spaced features over a substrate. The features may have tops and may have sidewalls extending downwardly from the tops. A first material may be formed along the tops and sidewalls of the features. The first material may be formed by spin-casting a conformal layer of the first material across the features, or by selective deposition along the features relative to the substrate. After the first material is formed, fill material may be provided between the features while leaving regions of the first material exposed. The exposed regions of the first material may then be selectively removed relative to both the fill material and the features to create the pattern of openings.Type: GrantFiled: February 8, 2012Date of Patent: January 8, 2013Assignee: Micron Technology, Inc.Inventors: Scott Sills, Gurtej Sandhu, John Smythe, Ming Zhang
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Publication number: 20130005903Abstract: In one embodiment, a block copolymer-containing composition includes PS-b-PXVP and a lithium salt, where “X” is 2 or 4. All lithium salt is present in the composition at no greater than 1 ppm by weight. In one embodiment, a homogenous block copolymer-including comprising has PS-b-PXVP present in the composition at no less than 99.99998% by weight, where “X” is 2 or 4. Methods of forming such compositions are disclosed.Type: ApplicationFiled: September 11, 2012Publication date: January 3, 2013Applicant: MICRON TECHNOLOGY, INC.Inventors: Dan Millward, Scott Sills