Patents by Inventor Scott Sills

Scott Sills has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20100207168
    Abstract: Some embodiments include cross-point memory structures. The structures may include a line of first electrode material extending along a first horizontal direction, a multi-sided container of access device materials over the first electrode material, a memory element material within the multi-sided container, and a line of second electrode material over the memory element material and extending along a second horizontal direction that is orthogonal to the first horizontal direction. Some embodiments include methods of forming memory arrays. The methods may include forming a memory cell stack over a first electrode material, and then patterning the first electrode material and the memory cell stack into a first set of spaced lines extending along a first horizontal direction. Spaced lines of second electrode material may be formed over the first set of spaced lines, and may extend along a second horizontal direction that is orthogonal to the first horizontal direction.
    Type: Application
    Filed: February 19, 2009
    Publication date: August 19, 2010
    Inventors: Scott Sills, Gurtej S. Sandhu
  • Publication number: 20100144151
    Abstract: A method of fabricating a substrate includes forming spaced first features over a substrate. An alterable material is deposited over the spaced first features and the alterable material is altered with material from the spaced first features to form altered material on sidewalls of the spaced first features. A first material is deposited over the altered material, and is of some different composition from that of the altered material. The first material is etched to expose the altered material and spaced second features comprising the first material are formed on sidewalls of the altered material. Then, the altered material is etched from between the spaced second features and the spaced first features. The substrate is processed through a mask pattern comprising the spaced first features and the spaced second features. Other embodiments are disclosed.
    Type: Application
    Filed: December 4, 2008
    Publication date: June 10, 2010
    Inventors: Scott Sills, Gurtej S. Sandhu, Anton deVilliers
  • Publication number: 20100144150
    Abstract: A method of fabricating a substrate includes forming first and second spaced features over a substrate. The first spaced features have elevationally outermost regions which are different in composition from elevationally outermost regions of the second spaced features. The first and second spaced features alternate with one another. Every other first feature is removed from the substrate and pairs of immediately adjacent second features are formed which alternate with individual of remaining of the first features. After such act of removing, the substrate is processed through a mask pattern comprising the pairs of immediately adjacent second features which alternate with individual of the remaining of the first features. Other embodiments are disclosed.
    Type: Application
    Filed: December 4, 2008
    Publication date: June 10, 2010
    Inventors: Scott Sills, Gurtej S. Sandhu, Anton de Villiers
  • Publication number: 20100144153
    Abstract: A method of fabricating a substrate includes forming spaced first features and spaced second features over a substrate. The first and second features alternate with one another and are spaced relative one another. Width of the spaced second features is laterally trimmed to a greater degree than any lateral trimming of width of the spaced first features while laterally trimming width of the spaced second features. After laterally trimming of the second features, spacers are formed on sidewalls of the spaced first features and on sidewalls of the spaced second features. The spacers are of some different composition from that of the spaced first features and from that of the spaced second features. After forming the spacers, the spaced first features and the spaced second features are removed from the substrate. The substrate is processed through a mask pattern comprising the spacers. Other embodiments are disclosed.
    Type: Application
    Filed: December 4, 2008
    Publication date: June 10, 2010
    Inventors: Scott Sills, Gurtej S. Sandhu, Anton deVilliers
  • Publication number: 20100137496
    Abstract: In one embodiment, a block copolymer-containing composition includes PS-b-PXVP and a lithium salt, where “X” is 2 or 4. All lithium salt is present in the composition at no greater than 1 ppm by weight. In one embodiment, a homogenous block copolymer-including comprising has PS-b-PXVP present in the composition at no less than 99.99998% by weight, where “X” is 2 or 4. Methods of forming such compositions are disclosed.
    Type: Application
    Filed: December 2, 2008
    Publication date: June 3, 2010
    Inventors: Dan Millward, Scott Sills
  • Publication number: 20100092873
    Abstract: Some embodiments include methods of forming patterns in which a block copolymer-containing composition is formed over a substrate, and is then patterned to form a first mask. The block copolymer of the composition is subsequently induced into forming a repeating pattern within the first mask. Portions of the repeating pattern are then removed to form a second mask from the first mask. The patterning of the block copolymer-containing composition may utilize photolithography. Alternatively, the substrate may have regions which wet differently relative to one another with respect to the block copolymer-containing composition, and the patterning of the first mask may utilize such differences in wetting in forming the first mask.
    Type: Application
    Filed: October 9, 2008
    Publication date: April 15, 2010
    Inventors: Scott Sills, Dan Millward
  • Publication number: 20100093175
    Abstract: Some embodiments include methods of forming patterns. A first set of features is photolithographically formed over a substrate, and then a second set of features is photolithographically formed over the substrate. At least some of the features of said second set alternate with features of the first set. Spacer material is formed over and between the features of the first and second sets. The spacer material is anisotropically etched to form spacers along the features of the first and second sets. The features of the first and second sets are then removed to leave a pattern of the spacers over the substrate.
    Type: Application
    Filed: October 9, 2008
    Publication date: April 15, 2010
    Inventors: Ardavan Niroomand, Gurtej S. Sandhu, Mark Kiehlbauch, Scott Sills
  • Publication number: 20090092933
    Abstract: A method of lithographically patterning a substrate that has photoresist having removal areas and non-removal areas includes first exposing at least the non-removal areas to radiation effective to increase outer surface roughness of the photoresist in the non-removal areas at least post-develop but ineffective to change photoresist solubility in a developer for the photoresist to be cleared from the non-removal areas upon develop with the developer. Second exposing of radiation to the removal areas is conducted to be effective to change photoresist solubility in the developer for the photoresist to be cleared from the removal areas upon develop with the developer. The photoresist is developed with the developer effective to clear photoresist from the removal areas and to leave photoresist in the non-removal areas that has outer surface roughness in the non-removal areas which is greater than that before the first exposing. Other implementations and embodiments are contemplated.
    Type: Application
    Filed: October 5, 2007
    Publication date: April 9, 2009
    Inventors: Yoshiki Hishiro, Scott Sills, Hiroyuki Mori, Troy Gugel, Paul D. Shirley, Lijing Gou, Adam Olson
  • Patent number: D559920
    Type: Grant
    Filed: June 8, 2007
    Date of Patent: January 15, 2008
    Inventors: Devon Daniel Krueger, Scott Sill