Patents by Inventor Seung-Hoon Sung

Seung-Hoon Sung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230100505
    Abstract: Embodiments disclosed herein include transistor devices and methods of forming such devices. In an embodiment, a transistor device comprises a first channel, wherein the first channel comprises a semiconductor material and a second channel above the first channel, wherein the second channel comprises the semiconductor material. In an embodiment, a first spacer is between the first channel and the second channel, and a second spacer is between the first channel and the second channel. In an embodiment, a first gate dielectric is over a surface of the first channel that faces the second channel, and a second gate dielectric is over a surface of the second channel that faces the first channel. In an embodiment, the first gate dielectric is physically separated from the second gate dielectric.
    Type: Application
    Filed: September 24, 2021
    Publication date: March 30, 2023
    Inventors: Ashish Verma PENUMATCHA, Sarah ATANASOV, Seung Hoon SUNG, Rahul RAMAMURTHY, I-Cheng TUNG, Uygar E. AVCI, Matthew V. METZ, Jack T. KAVALIEROS, Chia-Ching LIN, Kaan OGUZ
  • Publication number: 20230100952
    Abstract: Embodiments disclosed herein include transistors and transistor gate stacks. In an embodiment, a transistor gate stack comprises a semiconductor channel. In an embodiment, an interlayer (IL) is over the semiconductor channel. In an embodiment, the IL has a thickness of 1 nm or less and comprises zirconium. In an embodiment, a gate dielectric is over the IL, and a gate metal over the gate dielectric.
    Type: Application
    Filed: September 24, 2021
    Publication date: March 30, 2023
    Inventors: I-Cheng TUNG, Ashish Verma PENUMATCHA, Seung Hoon SUNG, Sarah ATANASOV, Jack T. KAVALIEROS, Matther V. METZ, Uygar E. AVCI, Rahul RAMAMURTHY, Chia-Ching LIN, Kaan OGUZ
  • Publication number: 20230102900
    Abstract: A method of fabricating an integrated circuit structure comprises depositing an oxide insulator layer over a substrate having fins. A gate trench is formed within the oxide insulator layer with the fins extending above a surface of the oxide insulator layer within the gate trench. A semiconducting oxide material is deposited to conformally cover the oxide insulator layer, including on top surfaces and sidewalls of both the gate trench and the fins. A gate material is deposited to conformally cover the semiconducting oxide material, including on top surfaces and sidewalls of both the gate trench and the fins. An angled etch is performed to remove the gate material selective to the semiconducting oxide material from sidewalls of the gate trench, but not from sidewalls of the fins.
    Type: Application
    Filed: September 24, 2021
    Publication date: March 30, 2023
    Inventors: Nafees A. KABIR, Shriram SHIVARAMAN, Seung Hoon SUNG, Uygar E. AVCI
  • Publication number: 20230099540
    Abstract: Embodiments disclosed herein include semiconductor devices and methods of forming such semiconductor devices. In an embodiment, a semiconductor device comprises a sub-fin. In an embodiment, the sub-fin comprises a semiconductor material. In an embodiment, a channel is above the sub-fin, where the channel is physically detached from the sub-fin. In an embodiment a first layer is over the sub-fin, and a second layer is over the first layer. In an embodiment, the second layer is different than the first layer.
    Type: Application
    Filed: September 24, 2021
    Publication date: March 30, 2023
    Inventors: Sarah ATANASOV, Rahul RAMAMURTHY, Seung Hoon SUNG
  • Patent number: 11616130
    Abstract: Techniques and mechanisms to provide electrical insulation between a gate and a channel region of a non-planar circuit device. In an embodiment, the gate structure, and insulation spacers at opposite respective sides of the gate structure, each extend over a semiconductor fin structure. In a region between the insulation spacers, a first dielectric layer extends conformally over the fin, and a second dielectric layer adjoins and extends conformally over the first dielectric layer. A third dielectric layer, adjoining the second dielectric layer and the insulation spacers, extends under the gate structure. Of the first, second and third dielectric layers, the third dielectric layer is conformal to respective sidewalls of the insulation spacers. In another embodiment, the second dielectric layer is of dielectric constant which is greater than that of the first dielectric layer, and equal to or less than that of the third dielectric layer.
    Type: Grant
    Filed: March 25, 2019
    Date of Patent: March 28, 2023
    Assignee: Intel Corporation
    Inventors: Seung Hoon Sung, Jack Kavalieros, Ian Young, Matthew Metz, Uygar Avci, Devin Merrill, Ashish Verma Penumatcha, Chia-Ching Lin, Owen Loh
  • Publication number: 20230090093
    Abstract: Thin film transistors having semiconductor structures integrated with two-dimensional (2D) channel materials are described. In an example, an integrated circuit structure includes a two-dimensional (2D) material layer above a substrate. A gate stack is above the 2D material layer, the gate stack having a first side opposite a second side. A semiconductor structure including germanium is included, the semiconductor structure laterally adjacent to and in contact with the 2D material layer adjacent the first side of the gate stack. A first conductive structure is adjacent the first side of the second gate stack, the first conductive structure over and in direct electrical contact with the semiconductor structure. The semiconductor structure is intervening between the first conductive structure and the 2D material layer. A second conductive structure is adjacent the second side of the second gate stack, the second conductive structure over and in direct electrical contact with the 2D material layer.
    Type: Application
    Filed: September 20, 2021
    Publication date: March 23, 2023
    Inventors: Ashish Verma PENUMATCHA, Uygar E. AVCI, Chelsey DOROW, Tanay GOSAVI, Chia-Ching LIN, Carl NAYLOR, Nazila HARATIPOUR, Kevin P. O'BRIEN, Seung Hoon SUNG, Ian A. YOUNG, Urusa ALAAN
  • Publication number: 20230057464
    Abstract: Disclosed herein are memory cells and memory arrays, as well as related methods and devices. For example, in some embodiments, a memory device may include: a support having a surface; and a three-dimensional array of memory cells on the surface of the support, wherein individual memory cells include a transistor and a capacitor, and a channel of the transistor in an individual memory cell is oriented parallel to the surface.
    Type: Application
    Filed: November 7, 2022
    Publication date: February 23, 2023
    Applicant: Intel Corporation
    Inventors: Sean T. Ma, Aaron D. Lilak, Abhishek A. Sharma, Van H. Le, Seung Hoon Sung, Gilbert W. Dewey, Benjamin Chu-Kung, Jack T. Kavalieros, Tahir Ghani
  • Patent number: 11575005
    Abstract: An integrated circuit structure includes: a semiconductor nanowire extending in a length direction and including a body portion; a gate dielectric surrounding the body portion; a gate electrode insulated from the body portion by the gate dielectric; a semiconductor source portion adjacent to a first side of the body portion; and a semiconductor drain portion adjacent to a second side of the body portion opposite the first side, the narrowest dimension of the second side of the body portion being smaller than the narrowest dimension of the first side. In an embodiment, the nanowire has a conical tapering. In an embodiment, the gate electrode extends along the body portion in the length direction to the source portion, but not to the drain portion. In an embodiment, the drain portion at the second side of the body portion has a lower dopant concentration than the source portion at the first side.
    Type: Grant
    Filed: March 30, 2018
    Date of Patent: February 7, 2023
    Assignee: Intel Corporation
    Inventors: Seung Hoon Sung, Dipanjan Basu, Ashish Agrawal, Benjamin Chu-Kung, Siddharth Chouksey, Cory C. Bomberger, Tahir Ghani, Anand S. Murthy, Jack T. Kavalieros
  • Patent number: 11555570
    Abstract: In embodiments, a connector for setting a layout of a brake hose includes a first coupling member coupled to one end of the brake hose; a second coupling member disposed to be spaced apart from the first coupling member, and coupled to the caliper housing or the frame of the master cylinder; and an adjusting unit connected at one end thereof to the first coupling member, connected at other end thereof to the second coupling member, and configured to adjust a shortest length between a bottom surface of the first coupling member and an outer circumferential surface of the second coupling member and to adjust a line passing through a center of the first coupling member with respect to the second coupling member to be positioned in one of up/down/left/right directions, in a test for setting the layout of the brake hose.
    Type: Grant
    Filed: January 7, 2021
    Date of Patent: January 17, 2023
    Assignee: HS R & A CO., LTD.
    Inventors: Byeong Ju Kim, Jae Hyeok Choi, Guk Hyun Kim, Seung Hoon Sung, Seung Hyo Lee
  • Patent number: 11538808
    Abstract: Disclosed herein are memory cells and memory arrays, as well as related methods and devices. For example, in some embodiments, a memory device may include: a support having a surface; and a three-dimensional array of memory cells on the surface of the support, wherein individual memory cells include a transistor and a capacitor, and a channel of the transistor in an individual memory cell is oriented parallel to the surface.
    Type: Grant
    Filed: September 7, 2018
    Date of Patent: December 27, 2022
    Assignee: Intel Corporation
    Inventors: Sean T. Ma, Aaron D. Lilak, Abhishek A. Sharma, Van H. Le, Seung Hoon Sung, Gilbert W. Dewey, Benjamin Chu-Kung, Jack T. Kavalieros, Tahir Ghani
  • Publication number: 20220406895
    Abstract: Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, integrated circuit structures having germanium-based channels are described. In an example, an integrated circuit structure includes a fin having a lower silicon portion, an intermediate germanium portion on the lower silicon portion, and a silicon germanium portion on the intermediate germanium portion. An isolation structure is along sidewalls of the lower silicon portion of the fin. A gate stack is over a top of and along sidewalls of an upper portion of the fin and on a top surface of the isolation structure. A first source or drain structure is at a first side of the gate stack. A second source or drain structure is at a second side of the gate stack.
    Type: Application
    Filed: July 20, 2022
    Publication date: December 22, 2022
    Inventors: Siddharth CHOUKSEY, Glenn GLASS, Anand MURTHY, Harold KENNEL, Jack T. KAVALIEROS, Tahir GHANI, Ashish AGRAWAL, Seung Hoon SUNG
  • Patent number: 11532439
    Abstract: Described is an ultra-dense ferroelectric memory. The memory is fabricated using a patterning method by that applies atomic layer deposition with selective dry and/or wet etch to increase memory density at a given via opening. A ferroelectric capacitor in one example comprises: a first structure (e.g., first electrode) comprising metal; a second structure (e.g., a second electrode) comprising metal; and a third structure comprising ferroelectric material, wherein the third structure is between and adjacent to the first and second structures, wherein a portion of the third structure is interdigitated with the first and second structures to increase surface area of the third structure. The increased surface area allows for higher memory density.
    Type: Grant
    Filed: March 7, 2019
    Date of Patent: December 20, 2022
    Assignee: Intel Corporation
    Inventors: Chia-Ching Lin, Sou-Chi Chang, Nazila Haratipour, Seung Hoon Sung, Ashish Verma Penumatcha, Jack Kavalieros, Uygar E. Avci, Ian A. Young
  • Patent number: 11522060
    Abstract: Embodiments herein describe techniques for a thin-film transistor (TFT) above a substrate. The transistor includes a contact electrode having a conductive material above the substrate, an epitaxial layer above the contact electrode, and a channel layer including a channel material above the epitaxial layer and above the contact electrode. The channel layer is in contact at least partially with the epitaxial layer. A conduction band of the channel material and a conduction band of a material of the epitaxial layer are substantially aligned with an energy level of the conductive material of the contact electrode. A bandgap of the material of the epitaxial layer is smaller than a bandgap of the channel material. Furthermore, a gate electrode is above the channel layer, and separated from the channel layer by a gate dielectric layer. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: September 26, 2018
    Date of Patent: December 6, 2022
    Assignee: Intel Corporation
    Inventors: Seung Hoon Sung, Justin Weber, Matthew Metz, Arnab Sen Gupta, Abhishek Sharma, Benjamin Chu-Kung, Gilbert Dewey, Charles Kuo, Nazila Haratipour, Shriram Shivaraman, Van H. Le, Tahir Ghani, Jack T. Kavalieros, Sean Ma
  • Publication number: 20220381356
    Abstract: A check valve is provided in a refrigerant piping line of a refrigerant piping system to restrict a flow direction of refrigerant. The check value includes a valve body movably disposed inside the refrigerant piping line in a longitudinal direction of the refrigerant piping line, a stopper coupled to a rear end of the valve body to limit a movement of the valve body, and an elastic member disposed between the valve body and the stopper and providing an elastic force to the valve body. The valve body may have at least one locking protrusion formed at the rear end thereof, and the stopper may have a corresponding locking slit. The locking protrusion may pass through the locking slit and then rotate relatively whereby the stopper can be fixed to the valve body.
    Type: Application
    Filed: January 19, 2022
    Publication date: December 1, 2022
    Applicant: HS R & A Co.,Ltd.
    Inventors: Kwon Sik HWANG, Young Jun KIM, Seung Hoon SUNG, Jae Hyeok CHOI
  • Patent number: 11515402
    Abstract: The present description relates to the fabrication of microelectronic transistor source and/or drain regions using angled etching. In one embodiment, a microelectronic transistor may be formed by using an angled etch to reduce the number masking steps required to form p-type doped regions and n-type doped regions. In further embodiments, angled etching may be used to form asymmetric spacers on opposing sides of a transistor gate, wherein the asymmetric spacers may result in asymmetric source/drain configurations.
    Type: Grant
    Filed: March 30, 2016
    Date of Patent: November 29, 2022
    Assignee: Intel Corporation
    Inventors: Seung Hoon Sung, Robert B. Turkot, Marko Radosavljevic, Han Wui Then, Willy Rachmady, Sansaptak Dasgupta, Jack T. Kavalieros
  • Publication number: 20220310818
    Abstract: Self-aligned gate endcap (SAGE) architectures with reduced or removed caps, and methods of fabricating self-aligned gate endcap (SAGE) architectures with reduced or removed caps, are described. In an example, an integrated circuit structure includes a first gate electrode over a first semiconductor fin. A second gate electrode is over a second semiconductor fin. A gate endcap isolation structure is between the first gate electrode and the second gate electrode, the gate endcap isolation structure having a higher-k dielectric cap layer on a lower-k dielectric wall. A local interconnect is on the first gate electrode, on the higher-k dielectric cap layer, and on the second gate electrode, the local interconnect having a bottommost surface above an uppermost surface of the higher-k dielectric cap layer.
    Type: Application
    Filed: March 24, 2021
    Publication date: September 29, 2022
    Inventors: Seung Hoon SUNG, Tristan TRONIC, Szuya S. LIAO, Jack T. KAVALIEROS
  • Patent number: 11450527
    Abstract: An apparatus including a transistor device including a channel including germanium disposed on a substrate; a buffer layer disposed on the substrate between the channel and the substrate, wherein the buffer layer includes silicon germanium; and a seed layer disposed on the substrate between the buffer layer and the substrate, wherein the seed layer includes germanium. A method including forming seed layer on a silicon substrate, wherein the seed layer includes germanium; forming a buffer layer on the seed layer, wherein the buffer layer includes silicon germanium; and forming a transistor device including a channel on the buffer layer.
    Type: Grant
    Filed: July 2, 2016
    Date of Patent: September 20, 2022
    Assignee: Intel Corporation
    Inventors: Van H. Le, Benjamin Chu-Kung, Willy Rachmady, Marc C. French, Seung Hoon Sung, Jack T. Kavalieros, Matthew V. Metz, Ashish Agrawal
  • Patent number: 11450739
    Abstract: A semiconductor structure has a substrate including silicon and a layer of relaxed buffer material on the substrate with a thickness no greater than 300 nm. The buffer material comprises silicon and germanium with a germanium concentration from 20 to 45 atomic percent. A source and a drain are on top of the buffer material. A body extends between the source and drain, where the body is monocrystalline semiconductor material comprising silicon and germanium with a germanium concentration of at least 30 atomic percent. A gate structure is wrapped around the body.
    Type: Grant
    Filed: September 14, 2018
    Date of Patent: September 20, 2022
    Assignee: Intel Corporation
    Inventors: Glenn Glass, Anand Murthy, Cory Bomberger, Tahir Ghani, Jack Kavalieros, Siddharth Chouksey, Seung Hoon Sung, Biswajeet Guha, Ashish Agrawal
  • Patent number: 11450750
    Abstract: Embodiments herein describe techniques for a thin-film transistor (TFT). The transistor includes a source electrode oriented in a horizontal direction, and a channel layer in contact with a portion of the source electrode and oriented in a vertical direction substantially orthogonal to the horizontal direction. A gate dielectric layer conformingly covers a top surface of the source electrode and surfaces of the channel layer. A gate electrode conformingly covers a portion of the gate dielectric layer. A drain electrode is above the channel layer, oriented in the horizontal direction. A current path is to include a current portion from the source electrode along a gated region of the channel layer under the gate electrode in the vertical direction, and a current portion along an ungated region of the channel layer in the horizontal direction from the gate electrode to the drain electrode. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: September 28, 2018
    Date of Patent: September 20, 2022
    Assignee: Intel Corporation
    Inventors: Nazila Haratipour, Tahir Ghani, Jack T. Kavalieros, Gilbert Dewey, Benjamin Chu-Kung, Seung Hoon Sung, Van H. Le, Shriram Shivaraman, Abhishek Sharma
  • Patent number: 11444205
    Abstract: Embodiments herein describe techniques for a semiconductor device including a substrate and a transistor above the substrate. The transistor includes a channel layer above the substrate, a conductive contact stack above the substrate and in contact with the channel layer, and a gate electrode separated from the channel layer by a gate dielectric layer. The conductive contact stack may be a drain electrode or a source electrode. In detail, the conductive contact stack includes at least a metal layer, and at least a metal sealant layer to reduce hydrogen diffused into the channel layer through the conductive contact stack. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: September 26, 2018
    Date of Patent: September 13, 2022
    Assignee: Intel Corporatiion
    Inventors: Arnab Sen Gupta, Matthew Metz, Benjamin Chu-Kung, Abhishek Sharma, Van H. Le, Miriam R. Reshotko, Christopher J. Jezewski, Ryan Arch, Ande Kitamura, Jack T. Kavalieros, Seung Hoon Sung, Lawrence Wong, Tahir Ghani