Abstract: Disclosed is a substrate processing method including: a substrate loading operation of loading a substrate into a processing space provided by a body; a heating operation of placing the substrate, which has been loaded into the processing space, on a heating chuck and heating the substrate; and an atmosphere changing operation of changing an atmosphere of the processing space, in which the atmosphere changing operation includes: a gas discharging operation of injecting atmosphere changing gas in a state where the substrate is located closer to a baffle than in the heating operation, in which the baffle is provided on a top side of the heating chuck to face the heating chuck and injects the atmosphere changing gas; and a substrate lowering operation of lowering and placing the substrate onto the heating chuck while maintaining the injection of the atmosphere changing gas.

Abstract: Resource synchronization in an machine-to-machine (M2M) system is disclosed. A method of operating an M2M device may comprise creating a first resource, receiving a first message for requesting an update to the first resource, and transmitting a second message for requesting an update to a second resource to another device hosting the second resource synchronized with the first resource. The first resource may comprise at least one attribute for offloading of a resource.

Abstract: A composition for removing edge beads from metal-containing resists, a developer composition of metal-containing resists, and methods of forming patterns using the same are disclosed. The composition according to one or more embodiments includes a C1 to C10 carboxylic acid compound substituted with at least one fluorine; and an organic solvent.

Abstract: A message repetition transmission method and apparatus in an M2M system is provided. According to an embodiment, method includes: setting attribute information for message repetition transmission; configuring a first resource that comprises the attribute information and is applied to message repetition transmission; and performing message repetition transmission according to the configured first resource. The attribute information for message repetition transmission can include at least one of information (targetResource) designating a target resource of message repetition transmission and information (valueForRepetition) designating a transmission value that is a message repetition transmission target.

Abstract: A fixing device for a vehicle configured to connect the vehicle's cabin unit and loading unit of loading cargo at the rear of the cabin unit includes a coil transmitting an electromagnetic force to a drive pulley, an assembly module including a drive pulley and mechanically fixing the cabin unit and the loading unit together through a driving force of the drive pulley via the coil when the loading unit moves and aligns with the cabin unit, and a magnetic module enclosing the assembly module on an external side of the assembly module and magnetically fixing the cabin unit and the loading unit together by changing a magnetic circuit through a rotation force of a magnetic body while the cabin unit and the loading unit are mechanically connected to each other.

Abstract: A semiconductor device includes a substrate having a first region and a second region, first active fins that extend in a first direction in the first region, second active fins that extend in the first direction in the second region, a first field insulating layer between the first active fins and that extend in a second direction, a second field insulating layer between the second active fins and extending in the second direction, a gate line that extends in the second direction on the second field insulating layer, the gate line linearly along with the first field insulating layer, a gate isolation layer between the first field insulating layer and the gate line, and gate spacers that extend in the second direction, the gate spacers in contact with both sidewalls of each of the first field insulating layer, the gate line, and the gate isolation layer.

Abstract: A method and apparatus of managing information are configured to replace parts of an Internet of Things (IoT) device in a machine-to-machine (M2M) system. A method for operating a first device may include receiving a first message for requesting registration of at least one resource related to a second device including a plurality of parts, generating at least one resource comprising information on the plurality of parts, and transmitting, to the second device, a second message for recommending replacement of a part corresponding to a condition for replacing at least one of the plurality of parts when the condition is satisfied.

Abstract: A precise position correction method based on collaborative cognition in an autonomous vehicle includes: estimating object information on a road within a detection range on an autonomous vehicle; receiving a shared message from at least one of a first vehicle (another connected vehicle (CV) or automated vehicle (CAV)) and a road infrastructure device for V2X communication on the road, receiving the message including driving status information of the other CV when the first vehicle is the other CV, and receiving the driving status information of the other CAV and the message about a second vehicle, in which the V2X communication is not possible, recognized by the other CAV; calculating an estimated error by comparing the estimated object information with the message; and setting a radius based on the first vehicle corresponding to an estimated error application radius in consideration of a distance between the autonomous vehicle and the first vehicle.

Abstract: A hairdryer is described. The hairdryer includes an air intake aperture which has a variable airflow cross section. The hairdryer also includes an air expulsion aperture with a fan positioned between the air intake aperture and the air expulsion aperture. The air intake aperture is adapted to regulate amount of air flowing out of the air expulsion aperture.

Abstract: The electronic wave leakage measurement system according to the present invention is a system for measuring the electronic wave leakage of an electronic wave shielding structure. The system comprising a signal generator for generating an electronic wave generation signal; a transmitting antenna for transmitting the electronic wave towards a wall surface of the electronic wave shielding structure by receiving the signal from the signal generator; a receiving antenna capable of beam steering and comprising N individual antenna modules for receiving the electronic wave that has passed through the wall surface of the electronic wave shielding structure; and a signal analyzer that analyzes and displays the received electronic wave signal from the receiving antenna.

Abstract: A semiconductor device is disclosed. The semiconductor device includes a gate electrode on a substrate and extending in a first direction, source/drain patterns spaced apart from each other, in a second direction, with the gate electrode interposed therebetween, a gate contact electrically connected to the gate electrode, and an active contact electrically connected to at least one of the source/drain patterns. The active contact includes a lower contact pattern electrically connected to the at least one of the source/drain patterns, the lower contact pattern having a first width in the first direction, and an upper contact pattern electrically connected to a top surface of the lower contact pattern, the upper contact pattern having a second width in the first direction that is smaller than the first width. The upper contact pattern and the gate contact horizontally overlap each other.

Abstract: A security key is configured to be replaced when a device is replaced in a machine-to-machine (M2M) system. A method for operating a first device may include: receiving a first message including first information associated with security key replacement from a second device or a third device; receiving a third message including second information associated with security key replacement, which is generated based on a second message including a security key replacement indication, from the second device or the third device; and replacing the security key.

Abstract: The refrigerator of the present disclosure allows sufficient air flow to a detection sensor by allowing the detection sensor to be located on an air discharge side of a blowing fan to determine a frosting degree or a defrosting degree of a cooling source.

Abstract: The present disclosure provides a refrigerator operation control method capable of accurately recognizing whether an abnormal situation occurs as well as determining a defrosting time using an identified rotation speed of a blowing fan.

Abstract: The present disclosure related to managing a data license in a machine-to-machine (M2M) system, and a method for operating a first device may include generating a first resource including data and a second resource including information for managing a license of the data, receiving a message for requesting an operation for the data from a second device, determining, based on the information in the second resource, whether the operation is permitted, and transmitting a second message for performing the operation to the second device or a third device.

Abstract: A semiconductor device may include a substrate including a first region and a second region and a first active pattern on the first region. The first active pattern may include a pair of first source/drain patterns and a first channel pattern therebetween, and the first channel pattern may include a plurality of first semiconductor patterns stacked on the substrate. The semiconductor device may further include a first gate electrode, which is provided on the first channel patterns, and a supporting pattern, which is provided on side surfaces of the plurality of first semiconductor patterns to connect the side surfaces of the plurality of first semiconductor patterns to each other.

Abstract: A semiconductor device is disclosed. The semiconductor device includes a gate electrode on a substrate and extending in a first direction, source/drain patterns spaced apart from each other, in a second direction, with the gate electrode interposed therebetween, a gate contact electrically connected to the gate electrode, and an active contact electrically connected to at least one of the source/drain patterns. The active contact includes a lower contact pattern electrically connected to the at least one of the source/drain patterns, the lower contact pattern having a first width in the first direction, and an upper contact pattern electrically connected to a top surface of the lower contact pattern, the upper contact pattern having a second width in the first direction that is smaller than the first width. The upper contact pattern and the gate contact horizontally overlap each other.

Abstract: A semiconductor device includes a substrate having a first region and a second region, first active fins that extend in a first direction in the first region, second active fins that extend in the first direction in the second region, a first field insulating layer between the first active fins and that extend in a second direction, a second field insulating layer between the second active fins and extending in the second direction, a gate line that extends in the second direction on the second field insulating layer, the gate line linearly along with the first field insulating layer, a gate isolation layer between the first field insulating layer and the gate line, and gate spacers that extend in the second direction, the gate spacers in contact with both sidewalls of each of the first field insulating layer, the gate line, and the gate isolation layer.

Abstract: The present disclosure relates to augmenting data in a machine-to-machine (M2M) system, and a method for operating an apparatus may include receiving a request message including information necessary for data augmentation, obtaining original data based on the information, generating augmented data from the original data based on the information, and storing the augmented data.

Abstract: A semiconductor device comprising a gate electrode on a substrate, a source/drain pattern on the substrate on a side of the gate electrode, and a gate contact plug on the gate electrode are disclosed. The gate contact plug may include a first gate contact segment, and a second gate contact segment that extends in a vertical direction from a top surface of the first gate contact segment. An upper width of the first gate contact segment may be greater than a lower width of the second gate contact segment.