Patents by Inventor Sheng-Yuan Hsueh

Sheng-Yuan Hsueh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230081533
    Abstract: A semiconductor memory structure includes a substrate having thereon a transistor forming region and a capacitor forming region. A transistor is disposed on the substrate within the transistor forming region. A capacitor is disposed within the capacitor forming region and electrically coupled to the transistor. A first inter-layer dielectric layer covers the transistor forming region and the capacitor forming region. The first inter-layer dielectric layer surrounds a metal gate of the transistor and a bottom plate of the capacitor. A cap layer is disposed on the first inter-layer dielectric layer. The cap layer has a first thickness within the transistor forming region and a second thickness within the capacitor forming region. The first thickness is greater than the second thickness. The cap layer within the capacitor forming region acts as a capacitor dielectric layer of the capacitor.
    Type: Application
    Filed: October 15, 2021
    Publication date: March 16, 2023
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Kuo-Hsing Lee, Chien-Liang Wu, Wen-Kai Lin, Te-Wei Yeh, Sheng-Yuan Hsueh, Chi-Horn Pai
  • Patent number: 11605631
    Abstract: A 3D semiconductor structure includes a buffer layer, a n-type high electron mobility transistor (HEMT) disposed on a first surface of the buffer layer, and a p-type high hole mobility transistor (HHMT) disposed on a second surface of the buffer layer opposite to the first surface.
    Type: Grant
    Filed: November 2, 2021
    Date of Patent: March 14, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Yung-Chen Chiu, Sheng-Yuan Hsueh, Kuo-Hsing Lee, Chien-Liang Wu, Chih-Kai Kang, Guan-Kai Huang
  • Publication number: 20230071086
    Abstract: A semiconductor device includes a substrate having a magnetic tunneling junction (MTJ) region and a logic region, a magnetic tunneling junction (MTJ) on the MTJ region and a first metal interconnection on the MTJ. Preferably, a top view of the MTJ includes a circle and a top view of the first metal interconnection includes an ellipse overlapping the circle.
    Type: Application
    Filed: November 15, 2022
    Publication date: March 9, 2023
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Ting-Hsiang Huang, Yi-Chung Sheng, Sheng-Yuan Hsueh, Kuo-Hsing Lee, Chih-Kai Kang
  • Patent number: 11569295
    Abstract: A magnetoresistive random access memory (MRAM) includes a first transistor and a second transistor on a substrate, a source line coupled to a first source/drain region of the first transistor, and a first metal interconnection coupled to a second source/drain region of the first transistor. Preferably, the first metal interconnection is extended to overlap the first transistor and the second transistor and the first metal interconnection further includes a first end coupled to the second source/drain region of the first transistor and a second end coupled to a magnetic tunneling junction (MTJ).
    Type: Grant
    Filed: July 8, 2020
    Date of Patent: January 31, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Kuo-Hsing Lee, Sheng-Yuan Hsueh, Te-Wei Yeh, Chien-Liang Wu
  • Publication number: 20230015480
    Abstract: A one-time programmable (OTP) memory cell includes a substrate having a first conductivity type and having an active area surrounded by an isolation region, a transistor disposed on the active area, and a capacitor disposed on the active area and electrically coupled to the transistor. The capacitor comprises a diffusion region of a second conductivity type in the substrate, a metallic film in direct contact with the active area, a capacitor dielectric layer on the metallic film, and a metal gate surrounded by the capacitor dielectric layer. The diffusion region and the metallic film constitute a capacitor bottom plate.
    Type: Application
    Filed: August 2, 2021
    Publication date: January 19, 2023
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Kuo-Hsing Lee, Sheng-Yuan Hsueh, Chun-Hsien Lin, Yung-Chen Chiu, Chien-Liang Wu, Te-Wei Yeh
  • Patent number: 11532666
    Abstract: A semiconductor device includes a substrate having a magnetic tunneling junction (MTJ) region and a logic region, a magnetic tunneling junction (MTJ) on the MTJ region, and a first metal interconnection on the MTJ. Preferably, a top view of the MTJ includes a circle, a top view of the first metal interconnection includes a flat oval overlapping the circle, and the MTJ includes a bottom electrode, a fixed layer, a free layer, a capping layer, and a top electrode.
    Type: Grant
    Filed: March 21, 2021
    Date of Patent: December 20, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Ting-Hsiang Huang, Yi-Chung Sheng, Sheng-Yuan Hsueh, Kuo-Hsing Lee, Chih-Kai Kang
  • Publication number: 20220392905
    Abstract: A method for fabricating an one time programmable (OTP) device includes the steps of: forming a first gate structure and a second gate structure extending along a first direction on a substrate; forming a diffusion region adjacent to two sides of the first gate structure and the second gate structure; forming a silicide layer adjacent to the first gate structure; and patterning the first gate structure for forming a third gate structure and a fourth gate structure.
    Type: Application
    Filed: June 30, 2021
    Publication date: December 8, 2022
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Kuo-Hsing Lee, Chun-Hsien Lin, Chih-Wei Yang, Chang-Chien Wong, Te-Wei Yeh, Sheng-Yuan Hsueh
  • Publication number: 20220344358
    Abstract: A semiconductor device includes a substrate having an input/output (I/O) region, an one time programmable (OTP) capacitor region, and a core region, a first metal gate disposed on the I/O region, a second metal gate disposed on the core region, and a third metal gate disposed on the OTP capacitor region. Preferably, the first metal gate includes a first high-k dielectric layer, the second metal gate includes a second high-k dielectric layer, and the first high-k dielectric layer and the second high-k dielectric layer include an I-shape.
    Type: Application
    Filed: May 25, 2021
    Publication date: October 27, 2022
    Inventors: Kuo-Hsing Lee, Chun-Hsien Lin, Sheng-Yuan Hsueh
  • Publication number: 20220336479
    Abstract: A one-time programmable memory structure including a substrate, a transistor, a capacitor, and an interconnect structure is provided. The transistor is located on the substrate. The capacitor includes a first electrode, a second electrode, and an insulating layer. The first electrode is disposed above the substrate. The second electrode is disposed on the first electrode. The first electrode is located between the second electrode and the substrate. The insulating layer is disposed between the first electrode and the second electrode. The interconnect structure is electrically connected between the transistor and the first electrode of the capacitor. The interconnect structure is electrically connected to the first electrode at a top surface of the first electrode.
    Type: Application
    Filed: May 18, 2021
    Publication date: October 20, 2022
    Applicant: United Microelectronics Corp.
    Inventors: Kuo-Hsing Lee, Chi-Horn Pai, Chang Chien Wong, Sheng-Yuan Hsueh, Ching Hsiang Tseng, Shih-Chieh Hsu
  • Publication number: 20220328503
    Abstract: A one-time programmable (OTP) memory cell includes a substrate comprising an active area surrounded by an isolation region, a transistor disposed on the active area, and a diffusion-contact fuse electrically coupled to the transistor. The diffusion-contact fuse includes a diffusion region in the active area, a silicide layer on the diffusion region, and a contact partially landed on the silicide layer and partially landed on the isolation region.
    Type: Application
    Filed: May 7, 2021
    Publication date: October 13, 2022
    Inventors: Kuo-Hsing Lee, Chang-Chien Wong, Sheng-Yuan Hsueh, Ching-Hsiang Tseng, Chi-Horn Pai, Shih-Chieh Hsu
  • Publication number: 20220328504
    Abstract: A bit cell structure for one-time programming is provided in the present invention, including a substrate, a first doped region in the substrate and electrically connecting a source line, a second doped region in the substrate and having a source and a drain electrically connecting a bit line, a heavily-doped channel in the substrate and connecting the first doped region and the source of second doped region, and a word line crossing over the second dope region between the source and the drain.
    Type: Application
    Filed: May 14, 2021
    Publication date: October 13, 2022
    Inventors: Kuo-Hsing Lee, Sheng-Yuan Hsueh, Chi-Horn Pai, Chih-Kai Kang
  • Publication number: 20220302118
    Abstract: The invention provides a semiconductor memory cell, the semiconductor memory cell includes a substrate having a first conductivity type, a doped region in the substrate, wherein the doped region has a second conductivity type, and the first conductivity type is complementary to the second conductivity type, a capacitor insulating layer and an upper electrode on the doped region, a transistor on the substrate, and a shallow trench isolation disposed between the transistor and the capacitor insulating layer, and the shallow trench isolation is disposed in the doped region.
    Type: Application
    Filed: April 14, 2021
    Publication date: September 22, 2022
    Inventors: Kuo-Hsing Lee, Kun-Hsien Lee, Sheng-Yuan Hsueh, Chang-Chien Wong, Ching-Hsiang Tseng, Tsung-Hsun Wu, Chi-Horn Pai, Shih-Chieh Hsu
  • Patent number: 11450670
    Abstract: The invention provides a semiconductor memory cell, the semiconductor memory cell includes a substrate having a first conductivity type, a doped region in the substrate, wherein the doped region has a second conductivity type, and the first conductivity type is complementary to the second conductivity type, a capacitor insulating layer and an upper electrode on the doped region, a transistor on the substrate, and a shallow trench isolation disposed between the transistor and the capacitor insulating layer, and the shallow trench isolation is disposed in the doped region.
    Type: Grant
    Filed: April 14, 2021
    Date of Patent: September 20, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Kuo-Hsing Lee, Kun-Hsien Lee, Sheng-Yuan Hsueh, Chang-Chien Wong, Ching-Hsiang Tseng, Tsung-Hsun Wu, Chi-Horn Pai, Shih-Chieh Hsu
  • Patent number: 11372324
    Abstract: A method for correcting a mask pattern includes: providing an original mask pattern including at least one dense pattern area and at least one isolated pattern area, and the original mask pattern being divided into a first pattern and a second pattern, wherein the first pattern is formed in the isolated pattern area and extends to the dense pattern area, and the second pattern is formed in the dense pattern area; forming at least one slot on at least one section of the first pattern, and the at least one section of the first pattern is located on at least one transition area between the at least one isolated pattern area and the at least one dense pattern area; and performing an optical proximity correction operation on the first pattern formed with at least one slot and the second pattern. Using the corrected mask pattern may avoid the occurrence of necking or breaking on portion of the post-transfer pattern.
    Type: Grant
    Filed: February 11, 2019
    Date of Patent: June 28, 2022
    Assignee: UNITED MICROELECTRONICS CORPORATION
    Inventors: Chia-Chen Sun, Yu-Cheng Tung, Sheng-Yuan Hsueh, Fan Wei Lin
  • Publication number: 20220181478
    Abstract: A high electron mobility transistor (HEMT) includes a carrier transit layer, a carrier supply layer, a main gate, a control gate, a source electrode and a drain electrode. The carrier transit layer is on a substrate. The carrier supply layer is on the carrier transit layer. The main gate and the control gate are on the carrier supply layer. The source electrode and the drain electrode are at two opposite sides of the main gate and the control gate, wherein the source electrode is electrically connected to the control gate by a metal interconnect. The present invention also provides a method of forming a high electron mobility transistor (HEMT).
    Type: Application
    Filed: February 22, 2022
    Publication date: June 9, 2022
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Kuo-Hsing Lee, Yi-Chung Sheng, Sheng-Yuan Hsueh, Chih-Kai Kang, Guan-Kai Huang, Chien-Liang Wu
  • Publication number: 20220173236
    Abstract: A high electron mobility transistor (HEMT) includes a carrier transit layer, a carrier supply layer, a main gate, a control gate, a source electrode and a drain electrode. The carrier transit layer is on a substrate. The carrier supply layer is on the carrier transit layer. The main gate and the control gate are on the carrier supply layer. A fluoride ion doped region is formed right below the main gate in the carrier supply layer. The source electrode and the drain electrode are at two opposite sides of the main gate and the control gate, wherein the source electrode is electrically connected to the control gate by a metal interconnect. The present invention also provides a method of forming a high electron mobility transistor (HEMT).
    Type: Application
    Filed: February 21, 2022
    Publication date: June 2, 2022
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Kuo-Hsing Lee, Yi-Chung Sheng, Sheng-Yuan Hsueh, Chih-Kai Kang, Guan-Kai Huang, Chien-Liang Wu
  • Patent number: 11322215
    Abstract: A one-time programmable (OTP) memory device includes a first memory cell, which further includes a first source line extending along a first direction on a substrate, a first word line extending along the first direction on one side of the first source line, a second word line extending along the first direction on another side of the first source line, a first diffusion region extending along a second direction adjacent to two sides of the first word line and the second word line, and a first metal interconnection connecting the first word line and the second word line.
    Type: Grant
    Filed: May 21, 2021
    Date of Patent: May 3, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Pin Tsao, Tsung-Hsun Wu, Liang-Wei Chiu, Kuo-Hsing Lee, Sheng-Yuan Hsueh, Kun-Hsien Lee, Chang-Chien Wong
  • Patent number: 11316031
    Abstract: A method of forming a fin forced stack inverter includes the following steps. A substrate including a first fin, a second fin and a third fin across a first active area along a first direction is provided, wherein the first fin, the second fin and the third fin are arranged side by side. A fin remove inside active process is performed to remove at least a part of the second fin in the first active area. A first gate is formed across the first fin and the third fin in the first active area along a second direction. The present invention also provides a 1-1 fin forced fin stack inverter formed by said method.
    Type: Grant
    Filed: January 13, 2020
    Date of Patent: April 26, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Kuo-Hsing Lee, Yi-Chung Sheng, Sheng-Yuan Hsueh, Chih-Kai Kang
  • Publication number: 20220123200
    Abstract: The present invention provides a semiconductor device and a method of forming the same, and the semiconductor device includes a substrate, a first interconnect layer and a second interconnect layer. The first interconnect layer is disposed on the substrate, and the first interconnect layer includes a first dielectric layer around a plurality of first magnetic tunneling junction (MTJ) structures. The second interconnect layer is disposed on the first interconnect layer, and the second interconnect layer includes a second dielectric layer around a plurality of second MTJ structures, wherein, the second MTJ structures and the first MTJ structures are alternately arranged along a direction. The semiconductor device may obtain a reduced size of each bit cell under a permissible process window, so as to improve the integration of components.
    Type: Application
    Filed: November 12, 2020
    Publication date: April 21, 2022
    Inventors: Kuo-Hsing Lee, Chun-Hsien Lin, Sheng-Yuan Hsueh
  • Patent number: 11296036
    Abstract: A mark pattern includes unit cells immediately adjacent to each other and arranged in a form of dot matrix to form a register mark or an identification code, wherein each unit cell has configuration identical to functional devices of pMOS and nMOS, and each unit cell includes a first active region, a second active region isolated from the first active region, and first gate structures extending along a first direction and are arranged along a second direction perpendicular to the first direction, and the first gate structures straddling the first active region and the second active region, contact structures disposed between the first gate structures on the first active region and the second active region, and via structures disposed on the contact structures and two opposite ends of the first gate structures.
    Type: Grant
    Filed: August 6, 2020
    Date of Patent: April 5, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chih-Kai Kang, Sheng-Yuan Hsueh, Yi-Chung Sheng, Kuo-Yu Liao, Shu-Hung Yu, Hung-Hsu Lin, Hsiang-Hung Peng