Abstract: A diagnosis apparatus 1 including: a target vibration information generation unit 2 that generates pieces of target vibration information; a comparative relationship information generation unit 3 that generates pieces of comparative relationship information indicating relationships among the pieces of target vibration information, or the pieces of comparative relationship information indicating relationships among pieces of reference vibration information and the pieces of target vibration information, the pieces of reference vibration information indicating vibrations in the target mode among vibrations that are measured in a reference period; and a diagnosis unit 5 that diagnoses that a change has occurred in the structure 20 between the diagnosis period and the reference period based on a result of comparison between a distribution of pieces of reference relationship information and the distribution that has been calculated in relation to the pieces of comparative relationship information.

Abstract: An apparatus for inspecting an electronic device, includes: a placement table on which a substrate having the electronic device provided thereon is placed and including a refrigerant flow path; a light irradiation mechanism having LEDs directed to the substrate; and a controller for controlling heat absorption by the refrigerant and heating by light from the LEDs. The controller includes: a temperature information acquisition part for acquiring information on a temperature of the electronic device; a heating controller for performing the heating control based on the temperature of the electronic device as a current inspection object; and a heat absorption controller for estimating a transition of power applied to the electronic device at a next inspection based on a transition of the temperature of the electronic device in a past inspection, and performing the heat absorption control at a time of the next inspection.

Abstract: A damage diagnosis device is provided with: a detection unit for detecting that, immediately after a vehicle crossing a bridge has exited from the bridge, another vehicle is not crossing the bridge; a determination unit for determining whether the weight of the vehicle satisfies a criterion; and a diagnosis unit that, when the detection unit has detected that no other vehicle is crossing the bridge and the determination unit has determined that the weight of the vehicle satisfies the criterion, diagnoses damage to the bridge on the basis of information representing free vibration generated in the bridge due to the crossing of the vehicle, thereby improving the precision of diagnosis when damage to a bridge is diagnosed on the basis of information representing free vibration generated in the bridge due to the crossing of a vehicle.

Abstract: An assessing device capable of assessing presence or absence of local damage in a structure is provided. The assessing device includes a dominant frequency identifying unit that identifies a dominant frequency of a vibration at each of a plurality of spots in a structure, based on information indicating the vibration at each of the plurality of spots, a phase difference identifying unit that identifies a phase difference at the dominant frequency between the vibrations at the plurality of spots, based on the dominant frequency and information indicating the vibrations; and an assessing unit that assesses damage in the structure, based on the phase difference.

Abstract: The present invention provides a damage detection apparatus, a damage detection method, and a damage detection program that can detect damage in a support by measuring vibration of a supported object. The damage detection apparatus that detects damage in a structure including a supported object and a support according to one example embodiment of the present invention includes a dominant frequency acquisition unit that acquires a dominant frequency from vibration information at a plurality of points on the supported object; a rigid body vibration identification unit that identifies rigid body vibration information on the structure from the acquired dominant frequency; and a damage determination unit that determines damage in the support based on the identified rigid body vibration information.

Abstract: Provided is an electronic device inspection apparatus that suppresses cost increase. A prober is provided with a stage on which a carrier or a wafer is placed. The stage is provided with a stage cover on which the carrier is placed, a cooling unit in contact with the stage cover, and an LED irradiation unit facing the carrier across the stage cover and the cooling unit. Each of the stage cover and the cooling unit is formed of light-transmitting material. A light-transmitting coolant flows in a coolant flow path in the cooling unit. The LED irradiation unit has a plurality of LEDs oriented to the carrier. The carrier is formed of a glass substrate having a substantially disk-like shape. A plurality of electronic devices is arranged on a surface of the carrier at predetermined intervals.

Abstract: A prober includes: a stage that places a substrate formed with a plurality of chips thereon in a matrix; a contact that sequentially contacts with electrode pads of the plurality of chips thereby performing an inspection on electrical characteristic of the plurality of chips; a plurality of LED units provided on a side opposite to a placing surface of the stage so as to independently heat a plurality of areas where the plurality of chips are located, respectively, and each including one or a plurality of LEDs; and a controller that outputs a control signal to drive, among the plurality of LED units, at least an LED unit corresponding to an area of a chip to be inspected, among the area of the chip to be inspected and peripheral areas of the corresponding area.

Abstract: An abnormality diagnosis apparatus including: a feature amount calculation unit 2 configured to perform, on mode vectors generated based on vibration of a structure 20 measured by sensors 21, normalization of amplitude components and normalization for removing an initial phase from phase components, and calculate amplitude feature amounts corresponding to the amplitude components and phase feature amounts corresponding to the phase components; and an abnormality detection unit 3 configured to specify an abnormality in the structure 20 based on the amplitude feature amounts and the phase feature amounts.

Abstract: A testing device for inspecting an electronic device by causing contact terminals to electrically contact the electronic device, includes: a mounting table formed with a light transmission member opposite the side on which a inspection object is placed and having therein a coolant flow path through which a coolant capable of transmitting light flows; a light irradiation mechanism disposed so as to face the surface opposite the inspection object placement side of the mounting table, and having LEDs pointing toward the inspection object; and a controller controlling absorption of heat by the coolant and heating by the lights from the LEDs to control the temperature of the electronic device to be inspected. The controller controls the light output from the LEDs based on the measured temperature of the electronic device to be inspected and controls the absorption of heat by the coolant based on the LED light output.

Abstract: This inspection device inspects an imaging device formed in an object to be inspected by bringing a contact terminal into electrical contact with a wiring layer of the imaging device while causing light to enter the imaging device, wherein the light enters the imaging device from a back surface that is a surface on the side reverse to the side on which the wiring layer is provided, and the inspection device is provided with: a mounting table which is formed from a light transmissive material and on which the object to be inspected is mounted in such a manner that the mounting table faces the back surface of the imaging device; and a light irradiation mechanism which is disposed to face the object to be inspected with the mounting table interposed therebetween, and which has a plurality of LEDs oriented toward the object to be inspected.

Abstract: A damage diagnosing device includes: a generating unit which generates second vibration characteristic information including a characteristic value of an increase characteristic opposite to an amplitude of oscillation exhibited by first vibration characteristic information, relating to a structure including a supporting portion and a supported portion supported at a support point by the supporting portion; a calculating unit which calculates a degree that values indicated by the first vibration characteristic information and the second vibration characteristic information have changed from reference values relating to the first vibration characteristic information and the second vibration characteristic information as a result of damage that has occurred in the structure; and a diagnosing unit which diagnoses the damage on the basis of the degree of change, to more accurately diagnose damage that has occurred in a structure having a supporting portion and a supported portion supported at a support point by th

Abstract: A particle beam treatment apparatus includes: a rotating gantry configured to axially rotate in a state where a bed fixed to a stationary system is disposed inside the rotating gantry and an irradiation port of a beam is fixed to a body of the rotating gantry; a tunnel structure configured to have at least a horizontal floor surface and have an internal space in which at least a part of the bed is accommodated; and a rotation supporter configured to cause the tunnel structure to be stationary in the stationary system independently of axis rotation of the rotating gantry by rotationally displacing the tunnel structure with respect to an inner side surface of the rotating gantry.

Abstract: A particle radiation therapy apparatus 10 includes: a bed 15 for positioning of a patient 12; irradiation ports 16 (16a, 16b) that output a particle beam in a treatment room 11; a horizontal-direction imaging unit 21 composed of a first X-ray source 25 and a first X-ray detector 26 that face each other with the bed 15 interposed therebetween; a vertical-direction imaging unit 22 composed of a second X-ray source 27 and a second X-ray detector 28 that face each other with the bed 15 interposed therebetween; a storage room 18 for housing the first X-ray detector 26 under the floor when the horizontal-direction imaging unit 21 is not used; and a support member 23 that moves the first X-ray detector 26 above the floor and supports it between the bed 15 and the side of the irradiation ports 16 when the horizontal-direction imaging unit 21 is used.

Abstract: A position adjustment device for a flat panel detector comprising: a guide that is provided on a surface side of the flat panel detector and can be measured by an optical device; and a fixing member configured to fix the guide to one of a side of the flat panel detector of a position adjustment unit and a side of a support portion for supporting the flat panel detector, the position adjustment unit being provided between the flat panel detector and the support portion.

Abstract: A vibration determination device according to an exemplary aspect of the present invention includes: at least one memory storing a set of instructions; and at least one processor configured to execute the set of instructions to: determine, based on a plurality of feature values representing features of a vibration of a structure, whether the vibration of the structure is a standard vibration; and detect, when it is not determined that the vibration of the structure is the standard vibration, an outlier included in the plurality of feature values; determine, based on the plurality of feature values other than the detected outlier, whether the vibration of the structure is the standard vibration; and output whether the vibration of the structure is the standard vibration.

Abstract: There is provided a mounting table on which a workpiece is mounted, including: a plurality of layers including a ceiling layer having a front surface on which the workpiece is mounted, and a heating layer formed at a rear surface side of the ceiling layer and configured to heat the ceiling layer, the plurality of layers being stacked above one another. Each of the plurality of layers is formed by a silicon single crystal substrate or a silicon polycrystalline substrate. Each of the plurality of layers is bonded to a different layer which is adjacent in a stacking direction through oxide films formed on the silicon single crystal substrate or the silicon polycrystalline substrate.

Abstract: A temperature control device for controlling a temperature of an object, the temperature control device includes a heater having a heating source configured to heat the object, a cooler having a cooling source configured to cool the object; and a temperature controller configured to control the heating source and the cooling source. The temperature controller includes a sliding mode controller configured to supply power to the heating source as an operation amount, a cooling mode controller configured to supply power to the cooling source as an operation amount, and a switching controller configured to determine whether an output of the sliding mode controller will be output to the heating source as a first operation amount, or an output of the cooling mode controller will be used as a second operation amount, based on a nonlinear term value of the output of the sliding mode controller.

Abstract: A test wafer according to an embodiment of the present disclosure is a test wafer used for simulation of heat emission of devices on a wafer, and includes a silicon wafer and a silicon heater bonded to a surface of the silicon wafer.

Abstract: A plasma processing device processes a substrate by generating plasma using a surface wave formed on a surface of a shower plate by a supplied microwave, which includes a plasma generating antenna equipped with the shower plate for supplying first and second gases into a processing vessel, and a drooping member installed to protrude downward from a lower end surface of the shower plate. An outer surface of the drooping member spreads outward as it goes from a top end to a bottom end thereof. The shower plate includes first and second gas supply holes through which the first and second gases are supplied into the processing vessel, respectively. The first gas supply holes are disposed inward of the outer surface of the drooping member. The second gas supply holes are disposed outward of the outer surface of the drooping member.

Abstract: A particle beam treatment apparatus includes: a rotating gantry configured to axially rotate in a state where a bed fixed to a stationary system is disposed inside the rotating gantry and an irradiation port of a beam is fixed to a body of the rotating gantry; a tunnel structure configured to have at least a horizontal floor surface and have an internal space in which at least a part of the bed is accommodated; and a rotation supporter configured to cause the tunnel structure to be stationary in the stationary system independently of axis rotation of the rotating gantry by rotationally displacing the tunnel structure with respect to an inner side surface of the rotating gantry.