Patents by Inventor Shih-Hsun Chang

Shih-Hsun Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10037995
    Abstract: A semiconductor device includes first-type-channel field effect transistors (FETs) including a first first-type-channel FET including a first gate structure and a second first-type-channel FET including a second gate structure. The first first-type-channel FET has a smaller threshold voltage than the second first-type-channel FET. The first gate structure includes a first work function adjustment material (WFM) layer and the second gate structure includes a second WFM layer. At least one of thickness and material of the first and second WFM layers is different from each other.
    Type: Grant
    Filed: November 18, 2016
    Date of Patent: July 31, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shun-Jang Liao, Chia-Chun Liao, Shu-Hui Wang, Shih-Hsun Chang
  • Publication number: 20180166274
    Abstract: An NMOS transistor gate structure includes at least one spacer defining a gate region over a semiconductor substrate, a gate dielectric layer disposed on the gate region and lining an inner sidewall of the spacer, a bottom barrier layer conformally disposed on the gate dielectric layer, a work function metal layer disposed on the bottom barrier layer, and a filling metal partially wrapped by the work function metal layer. The bottom barrier layer has an oxygen concentration higher than a nitrogen concentration. The bottom barrier layer is in direct contact with the gate dielectric layer. The bottom barrier layer includes a material selected from Ta, TaN, TaTi, TaTiN and a combination thereof.
    Type: Application
    Filed: December 12, 2016
    Publication date: June 14, 2018
    Inventors: Ming-Huei Lin, Yen-Yu Chen, Chih-Pin Tsao, Shih-Hsun Chang
  • Publication number: 20180108653
    Abstract: A semiconductor structure includes a pair of gate structures and an isolation structure. Each of the gate structures includes a work function metal, a gate, and a barrier layer between the work function metal and the gate. The isolation structure is disposed between the gate structures. The barrier layer covers a sidewall of the isolation structure.
    Type: Application
    Filed: December 17, 2017
    Publication date: April 19, 2018
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yi-Jen CHEN, Chun-Sheng LIANG, Shu-Hui WANG, Shih-Hsun CHANG, Hsin-Che CHIANG
  • Publication number: 20180083001
    Abstract: A semiconductor device includes a first semiconductor channel, a second semiconductor channel, a first gate stack and a second gate stack. The first gate stack is present on the first semiconductor channel. The second gate stack is present on the second semiconductor channel. The first gate stack and the second gate stack are different at least in tantalum nitride amount.
    Type: Application
    Filed: September 22, 2016
    Publication date: March 22, 2018
    Inventors: Yen-Yu Chen, Ming-Huei Lin, Chih-Pin Tsao, Shih-Hsun Chang
  • Patent number: 9922976
    Abstract: A semiconductor device includes a first semiconductor channel, a second semiconductor channel, a first gate stack and a second gate stack. The first gate stack is present on the first semiconductor channel. The second gate stack is present on the second semiconductor channel. The first gate stack and the second gate stack are different at least in tantalum nitride amount.
    Type: Grant
    Filed: September 22, 2016
    Date of Patent: March 20, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yen-Yu Chen, Ming-Huei Lin, Chih-Pin Tsao, Shih-Hsun Chang
  • Publication number: 20180019242
    Abstract: A semiconductor device manufacturing method includes forming fins in first and second regions defined on a substrate. The fins include first fin, second fin, third fin, and fourth fin. A dielectric layer is formed over fins and a work function adjustment layer is formed over dielectric layer. A hard mask is formed covering third and fourth fins. A first conductive material layer is formed over first fin and not over second fin. A second conductive material layer is formed over first and second fins. A first metal gate electrode fill material is formed over first and second fins. The hard mask covering third and fourth fins is removed. A third conductive material layer is formed over third fin and not over fourth fin. A fourth conductive material layer is formed over third and fourth fins, and a second metal gate electrode fill material is formed over third and fourth fins.
    Type: Application
    Filed: July 15, 2016
    Publication date: January 18, 2018
    Inventors: Chia-Chun LIAO, Chun-Sheng LIANG, Shu-Hui WANG, Shih-Hsun CHANG, Yi-Jen CHEN
  • Patent number: 9859273
    Abstract: A process of manufacturing a semiconductor structure is provided. The process begins with forming a work function metal layer on a substrate, and a hardmask is covered over the work function metal layer. A trench is formed to penetrate the hardmask and the work function metal layer, and an isolation structure is filled in the trench.
    Type: Grant
    Filed: May 28, 2015
    Date of Patent: January 2, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yi-Jen Chen, Chun-Sheng Liang, Shu-Hui Wang, Shih-Hsun Chang, Hsin-Che Chiang
  • Publication number: 20170352559
    Abstract: A method of forming a semiconductor device includes forming a fin over a substrate, forming a polysilicon gate structure over the fin, and replacing the polysilicon gate structure with a metal gate structure. Replacing of the polysilicon gate structure includes depositing a work function metal layer over the fin, performing a sublimation process on a non-fluorine based metal precursor to produce a gaseous non-fluorine based metal precursor, and depositing a substantially fluorine-free metal layer over the work function metal layer based on the gaseous non-fluorine based metal precursor. The substantially fluorine-free metal layer includes an amount of fluorine less than about 5 atomic percent.
    Type: Application
    Filed: May 31, 2017
    Publication date: December 7, 2017
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Li-Jung LIU, Chih-Pin TSAO, Chia-Wei SOONG, Jyh-Huei CHEN, Shu-Hui WANG, Shih-Hsun CHANG
  • Publication number: 20170345721
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a substrate. The semiconductor device structure includes a gate stack over the substrate. The gate stack has a first upper portion and a first lower portion, and the first upper portion is wider than the first lower portion. The semiconductor device structure includes a spacer layer surrounding the gate stack. The spacer layer has a second upper portion and a second lower portion. The second upper portion is thinner than the second lower portion.
    Type: Application
    Filed: May 27, 2016
    Publication date: November 30, 2017
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ming-Heng TSAI, Chun-Sheng LIANG, Pei-Lin WU, Yi-Ren CHEN, Shih-Hsun CHANG
  • Patent number: 9799566
    Abstract: A semiconductor device includes a first semiconductor channel, a second semiconductor channel, a first gate stack and a second gate stack. The first gate stack is present on the first semiconductor channel. The first gate stack includes a first work function layer and a first interposing layer present between the first semiconductor channel and the first work function layer. The second gate stack is present on the second semiconductor channel. The second gate stack includes a second work function layer and a second interposing layer present between the second semiconductor channel and the second work function layer. The first interposing layer and the second interposing layer are different at least in tantalum nitride amount.
    Type: Grant
    Filed: September 22, 2016
    Date of Patent: October 24, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shun-Jang Liao, Shu-Hui Wang, Shih-Hsun Chang
  • Publication number: 20170229461
    Abstract: A semiconductor device includes first-type-channel field effect transistors (FETs) including a first first-type-channel FET including a first gate structure and a second first-type-channel FET including a second gate structure. The first first-type-channel FET has a smaller threshold voltage than the second first-type-channel FET. The first gate structure includes a first work function adjustment material (WFM) layer and the second gate structure includes a second WFM layer. At least one of thickness and material of the first and second WFM layers is different from each other.
    Type: Application
    Filed: November 18, 2016
    Publication date: August 10, 2017
    Inventors: Shun-Jang LIAO, Chia-Chun LIAO, Shu-Hui WANG, Shih-Hsun CHANG
  • Publication number: 20170025536
    Abstract: A method of semiconductor fabrication includes forming a dielectric layer over a substrate. A dummy gate structure is formed on the dielectric layer, which defines a dummy gate dielectric region. A portion of the dielectric layer not included in the dummy gate dielectric region is etched to form a dielectric etch back region. A spacer element is formed on a portion of the dielectric etch back region, which abuts the dummy gate structure, and defines a spacer dielectric region A height of the dummy gate dielectric region is greater than the height of the spacer dielectric region. A recessed portion is formed in the substrate, over which a strained material is selectively grown to form a strained recessed region adjacent the spacer dielectric region. The dummy gate structure and the dummy gate dielectric region are removed. A gate electrode layer and a gate dielectric layer are formed.
    Type: Application
    Filed: July 24, 2015
    Publication date: January 26, 2017
    Inventors: Chun-Sheng LIANG, Shih-Hsun CHANG
  • Publication number: 20160359043
    Abstract: A method of manufacturing a semiconductor Fin FET includes forming a fin structure over a substrate. The fin structure includes an upper layer, part of which is exposed from an isolation insulating layer. A dummy gate structure is formed over part of the fin structure. The dummy gate structure includes a dummy gate electrode layer and a dummy gate dielectric layer. A source and a drain are formed. The dummy gate electrode is removed so that the upper layer covered by the dummy gate dielectric layer is exposed. The upper layer of the fin structure is removed to make a recess formed by the dummy gate dielectric layer. Part of the upper layer remains at a bottom of the recess. A channel layer is formed in the recess. The dummy gate dielectric layer is removed. A gate structure is formed over the channel layer.
    Type: Application
    Filed: June 3, 2015
    Publication date: December 8, 2016
    Inventors: Yi-Jen CHEN, CHIA-CHUN Liao, Chun-Sheng LIANG, Shih-Hsun CHANG, Jen-Hsiang LU
  • Publication number: 20160351563
    Abstract: A process of manufacturing a semiconductor structure is provided. The process begins with forming a work function metal layer on a substrate, and a hardmask is covered over the work function metal layer. A trench is formed to penetrate the hardmask and the work function metal layer, and an isolation structure is filled in the trench.
    Type: Application
    Filed: May 28, 2015
    Publication date: December 1, 2016
    Inventors: Yi-Jen CHEN, Chun-Sheng LIANG, Shu-Hui WANG, Shih-Hsun CHANG, Hsin-Che CHIANG
  • Patent number: 9341313
    Abstract: A gas hood for a gas regulator comprises a housing for covering a gas regulator, an opening for receiving the gas regulator and semi-sealing the space between the housing and the gas regulator, and a gas inlet for constantly introducing gas into the space, wherein parts of the gas escapes from the opening so that the space can maintain a micro-positive pressure.
    Type: Grant
    Filed: June 21, 2012
    Date of Patent: May 17, 2016
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventor: Shih-Hsun Chang
  • Publication number: 20160129658
    Abstract: A method for manufacturing a paper container having a foamable layer is provided. A sheet material has opposing first and second faces and a paper layer. An insulating layer is at least partially coated on the first face to form a paper container substrate, and the insulating layer at least includes a foamable layer including a waterborne acrylic resin part, foam powder and a waterborne additive part. The foam powder is evenly distributed in an insulating substrate form by the waterborne acrylic resin part and the waterborne additive part. The paper container substrate is manufactured into the paper container including a body portion and a bottom board. The insulating layer is located on an outer circumferential face of the body portion.
    Type: Application
    Filed: November 4, 2015
    Publication date: May 12, 2016
    Inventors: CHIEN-BIN CHANG, SHIH-HSUN CHANG
  • Patent number: 8912610
    Abstract: The present disclosure provides a semiconductor structure. The semiconductor structure includes a semiconductor substrate; and a gate stack disposed on the semiconductor substrate. The gate stack includes a high k dielectric material layer, a capping layer disposed on the high k dielectric material layer, and a metal layer disposed on the capping layer. The capping layer and the high k dielectric material layer have a footing structure.
    Type: Grant
    Filed: April 3, 2012
    Date of Patent: December 16, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jr Jung Lin, Yun-Ju Sun, Shih-Hsun Chang, Chia-Jen Chen, Tomonari Yamamoto, Chih-Wei Kuo, Meng-Yi Sun, Kuo-Chiang Ting
  • Patent number: 8883598
    Abstract: Semiconductor devices and methods of forming the same. The method includes providing a semiconductor substrate having a channel layer over the substrate. A capping layer including silicon and having a first thickness is formed over the channel layer. The capping layer is partially oxidized to form an oxidized portion of the capping layer. The oxidized portion of the capping layer is removed to form a thinned capping layer having a second thickness less than the first thickness.
    Type: Grant
    Filed: March 5, 2012
    Date of Patent: November 11, 2014
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Che-Ting Chu, Shih-Hsun Chang, Pang-Yen Tsai
  • Publication number: 20130340858
    Abstract: A gas hood for a gas regulator comprises a housing for covering a gas regulator, an opening for receiving the gas regulator and semi-sealing the space between the housing and the gas regulator, and a gas inlet for constantly introducing gas into the space, wherein parts of the gas escapes from the opening so that the space can maintain a micro-positive pressure.
    Type: Application
    Filed: June 21, 2012
    Publication date: December 26, 2013
    Inventor: Shih-Hsun Chang
  • Patent number: D739976
    Type: Grant
    Filed: September 23, 2013
    Date of Patent: September 29, 2015
    Assignee: Unity Opto Technology Co., Ltd.
    Inventors: Ching-Huei Wu, Chih-Hsien Wu, Ching-Li Chou, Shih-Hsun Chang