Abstract: An optical element driving mechanism is provided that includes a fixed assembly, a movable assembly, and a driving assembly. The movable assembly is configured to be connected to an optical element, and the movable assembly is movable relative to the fixed assembly. The driving assembly is configured to drive the movable member to move relative to the fixed assembly.

Abstract: Systems and methods are provided for determining defects in a semiconductor structure sample that is prepared for analysis by microscopy. A semiconductor structure sample preparation and analysis system includes a semiconductor structure sample that includes a structure, a protective capping layer on the structure, and a gap filler material on the protective capping layer. A microscopy apparatus acquires an image of the semiconductor structure sample. Sample defect recognition circuitry determines the presence of a defect in the semiconductor structure sample based on the acquired image.

Abstract: The telescopic adjuster includes a telescopic rod assembly, a driving unit, and a chain. The telescopic rod assembly includes a fixed tube and a driving tube, where the fixed tube is sleeved over the driving tube or the driving tube is sleeved over the fixed tube, the fixed tube is fixed to a housing, and the driving tube can extend or retract relative to the fixed tube. The driving unit includes a first motor and a first gear, where the first motor is configured to drive the first gear. The chain has one end wound around the first gear and the other end fixed to a top end of the driving tube. When the first motor drives the first gear to rotate, the first gear drives the chain to push or pull the driving tube so that the driving tube extends or retracts relative to the fixed tube.

Abstract: A telescopic adjuster including first and second linear actuators, a connecting platform and first and second telescopic levers is provided. The first linear actuator includes a first screw and a pair of first fixing rings. The first fixing rings are arranged at two respective ends of the first screw. The second linear actuator includes a second screw and a second fixing ring. The second fixing ring is arranged at the end of the second screw, relatively away from the connecting platform. The first and second linear actuators are arranged on the connecting platform in parallel. The first screw pushes the connecting platform to move along the first screw, and the first fixing rings limit a movement of the connecting platform. The first and second telescopic levers are coaxially arranged.

Abstract: An optical element driving mechanism is provided and includes a fixed assembly, a movable assembly, a driving assembly and a stopping assembly. The fixed assembly has a main axis. The movable assembly is configured to connect an optical element, and the movable assembly is movable relative to the fixed assembly. The driving assembly is configured to drive the movable assembly to move relative to the fixed assembly. The stopping assembly is configured to limit the movement of the movable assembly relative to the fixed assembly within a range of motion.

Abstract: A method of fabricating a semiconductor device includes providing a system that includes a susceptor configured to retain a semiconductor substrate, a heating element, and a reflector integrated with the heating element, where the reflector includes a surface defined by a plurality of circumferential ridges having a separation distance that varies from a top portion of the reflector to a bottom portion of the reflector. The method further includes heating the semiconductor substrate and forming an epitaxial layer on the heated semiconductor substrate, where the heating includes emitting thermal energy from the heating element and reflecting the thermal energy from the surface of the reflector onto the semiconductor substrate, where an amount of the thermal energy received by an edge of the semiconductor substrate is more than an amount of the thermal energy received by a center of the semiconductor substrate.

Abstract: A system and apparatus for thermal treatment of a substrate with improved thermal uniformity is provided. In some embodiments, the system includes a heating element, a substrate-retaining element operable to retain a substrate, and a reflective structure operable to direct thermal energy of the heating element towards the substrate retained in the substrate-retaining element. The reflective structure includes a textured portion wherein a texture of the textured portion is configured to direct the thermal energy towards the retained substrate. In some such embodiments, the texture includes a roughened irregular surface configured to direct the thermal energy towards the retained substrate. In some such embodiments, the texture includes a plurality of circumferential ridge structures configured to direct the thermal energy towards the retained substrate.

Abstract: The disclosure is directed to techniques in preparing an atom probe tomography (“APT”) specimen. A structure in a semiconductor device is identified as including a test object for an APT procedure. A target region is identified in the structure where an APT specimen will be obtained. The target region is analyzed to determine whether a challenging component feature exists therein. A challenging component may include a hard-to-evaporate material, a hollow region, or a material unidentifiable with respect to the test object, or other structural features that pose a challenge to a successful APT analysis. If it is determined that a challenging component exists in the target region, the challenging component is replaced with a more suitable material before the APT specimen is prepared.

Abstract: A semiconductor metrology tool for analyzing a sample is disclosed. The semiconductor metrology tool includes a particle generation system , a local electrode, a particle capture device, a position detector, and a processor. The particle generation system is configured to remove a particle from a sample. The local electrode is configured to produce an attractive electric field and to direct the removed particle towards an aperture of the local electrode. The particle capture device is configured to produce a repulsive electric field around a region between the sample and the local electrode and to repel the removed particle towards the aperture. The position detector is configured to determine two-dimensional position coordinates of the removed particle and a flight time of the removed particle. The processor is configured to identify the removed particle based on the flight time.

Abstract: A telescopic adjuster including first and second linear actuators, a connecting platform and first and second telescopic levers is provided. The first linear actuator includes a first screw and a pair of first fixing rings. The first fixing rings are arranged at two respective ends of the first screw. The second linear actuator includes a second screw and a second fixing ring. The second fixing ring is arranged at the end of the second screw, relatively away from the connecting platform. The first and second linear actuators are arranged on the connecting platform in parallel. The first screw pushes the connecting platform to move along the first screw, and the first fixing rings limit a movement of the connecting platform. The first and second telescopic levers are coaxially arranged.

Abstract: A driving mechanism is provided for moving an optical element, including a fixed module, a movable module holding the optical element, a driving assembly for driving the movable module to move relative to the fixed module, a position-sensing element, and a 3D circuit. The fixed module has a base, and the position-sensing element is disposed on the base to detect the movement of the movable module relative to the fixed module. The 3D circuit is embedded in the base and electrically connected to the position-sensing element.

Abstract: A charging base includes a charging cradle, a pad plate, and a recess positioning portion. A mobile device includes a bottom base, a contact portion disposed on the bottom base, and a drive wheel drives the mobile device to move. The charging cradle includes a platform and a charging contact portion, and a height of the charging contact portion is greater than a height of the bottom base, when the drive wheel moves onto the pad plate, the height of the bottom base is greater than the height of the charging contact portion, when the drive wheel reaches the recess positioning portion while moving from the pad plate toward the charging cradle, the height of the bottom base is less than or equal to the height of the charging contact portion, so that the bottom base covers the platform and the contact portion is in contact with the charging contact portion.

Abstract: A rotary device includes a rotatable member, at least one movable ring, and a supporting member. The supporting member includes a stopping portion. The rotatable member includes a rotary ring and a positioning portion. The movable ring includes an acting portion. The rotary ring and the at least one movable ring are coaxially disposed on the supporting member, and the movable ring is disposed between the rotatable member and the supporting member. The rotary ring and the at least one movable ring is capable of rotating relative to the supporting member. A part of the positioning portion overlaps the movable ring. When the rotary ring rotates relative to the supporting member, the part of the positioning portion pushes the acting portion, to drive the at least one movable ring to rotate until the acting portion is stopped between the positioning portion and the stopping portion.

Abstract: An optical element driving mechanism is provided. The optical element driving mechanism includes a case, a bottom, a holder, a driving assembly, and a position sensing assembly. The bottom is connected to the case. The holder is disposed on the bottom and holds an optical element with an optical axis. The driving assembly drives the holder to move. The position sensing assembly senses the holder. The position sensing assembly includes a magnetic element, a sensor, and a magnetic-permeable element. The magnetic element is disposed on the holder. The sensor senses the magnetic element. The magnetic-permeable element is disposed adjacent to the sensor. The magnetic element and the sensor are arranged along a first direction. The sensor and the magnetic-permeable element are arranged along a second direction. The first direction is different from the second direction.

Abstract: A multi-unit receiving mechanism includes a bottom case, a first cover body, and a second cover body. The first cover body is pivotally connected to the bottom case for being rotatable to cover the bottom case, so as to define a first receiving space therebetween. A first electronic unit is removably held in the first receiving space. The second cover is pivotally connected to the first cover body for being rotatable to cover the first cover body and the bottom case, so as to define a second receiving space therebetween. A second electronic unit is removably held in the second receiving space. A second cover removably holds a third electronic unit.

Abstract: The telescopic adjuster includes a telescopic rod assembly, a driving unit, and a chain. The telescopic rod assembly includes a fixed tube and a driving tube, where the fixed tube is sleeved over the driving tube or the driving tube is sleeved over the fixed tube, the fixed tube is fixed to a housing, and the driving tube can extend or retract relative to the fixed tube. The driving unit includes a first motor and a first gear, where the first motor is configured to drive the first gear. The chain has one end wound around the first gear and the other end fixed to a top end of the driving tube. When the first motor drives the first gear to rotate, the first gear drives the chain to push or pull the driving tube so that the driving tube extends or retracts relative to the fixed tube.

Abstract: Methods are described that include providing a laser-based measurement tool. An implement of a semiconductor fabrication process tool (e.g., susceptor) is delivered to the laser-based measurement tool where a plurality of measurements is performed of a surface of the implement using a blue wavelength radiation. The measurements are of a distance (e.g., angstroms) from a reference plane and provide an indication of the profile of the surface of the susceptor. As the surface profile of the susceptor can affect layers deposited on target substrates using the susceptor, the measurements provide for a disposition of the susceptor.

Abstract: A stator assembly is used to be assembled to form a stator core. The stator assembly includes a tooth and a yoke. One end of the tooth is connected to the yoke. The yoke has an inner side, an outer side, a first coupling side, and a second coupling side. The first coupling side further includes a first engaging structure, and the second coupling side further includes a second engaging structure. The second engaging structure corresponds the first engaging structure. The outer side has a groove. The groove has a side surface and a bottom surface. An angle is defined between the side surface and the bottom surface, and the angle is in a range from 135° to 165°.

Abstract: A fixing device for junction wires of a stator of a motor includes a box and flat conductors. The box has circular grooves radially arranged at a side of the box and terminal accommodating grooves located at a peripheral edge at the side of the box. Each of the flat conductors has an arc-shaped holding portion and two terminals connected to an upper edge of the arc-shaped holding portion and horizontally bended. The arc-shaped holding portions are accommodated in the circular grooves. The terminals are exposed out of the circular grooves and partially accommodated in the terminal accommodating grooves, respectively. At least one of the terminals has an extending section extending over at least one of the circular grooves. A distance between the extending section and the arc-shaped holding portion of the flat conductor in the at least one circular groove is a fixed value.

Abstract: A display device includes a flexible display panel and a housing. The housing includes connectors and couplers. Each of the connectors includes two accommodating slots. The connectors and the couplers are sequentially arranged in a staggered manner and connected with one another. Each of the couplers includes a coupling body and two cylinders. The two cylinders are connected to two sides of the coupling body. Each of the cylinders is disposed in the accommodating slot of the adjacent connector. A radial interval of an opening of the accommodating slot is greater than a thickness of the coupling body and is less than a diameter of the cylinder. While the housing is being bent along with the flexible display panel, the adjacent two connectors are being away from each other until the cylinder in the accommodating slot is blocked by the corresponding opening.