Patents by Inventor Shih-Yin Hsiao

Shih-Yin Hsiao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9922881
    Abstract: A method for fabricating a semiconductor device structure is shown. A gate dielectric layer is formed on a substrate. A portion of the gate dielectric layer, which is located on a part of the substrate in which an S/D region is to be formed, is removed. A gate electrode is formed on the remaining gate dielectric layer. A spacer is formed on the sidewall of the gate electrode and the sidewall of the gate dielectric layer. The S/D region is then formed in the part of the substrate beside the spacer.
    Type: Grant
    Filed: January 12, 2016
    Date of Patent: March 20, 2018
    Assignee: United Microelectronics Corp.
    Inventors: Kai-Kuen Chang, Shih-Yin Hsiao
  • Publication number: 20180069089
    Abstract: A method of forming a semiconductor structure is disclosed. A substrate having a first area and a second area is provided, wherein a first surface of the first area is lower than a second surface of the second area. A first insulating layer, a first gate, a first dielectric layer and a first dummy gate are sequentially formed on the first surface of the first area. A second dielectric layer and a second dummy gate are formed on the second surface of the second area. An inter-layer dielectric layer is formed around the first gate, the first dummy gate and the second dummy gate. The first dummy gate and the second dummy gate are removed, so as to form a first trench and a second trench in the inter-layer dielectric layer. A second gate and a third gate are filled respectively in the first trench and the second trench.
    Type: Application
    Filed: October 31, 2017
    Publication date: March 8, 2018
    Applicant: United Microelectronics Corp.
    Inventors: Kun-Huang Yu, Shih-Yin Hsiao
  • Publication number: 20180047809
    Abstract: A bipolar junction transistor (BJT) device includes a semiconductor substrate, a first doping region with a first conductivity, a second doping region with a second conductivity, a third doping region with the first conductivity, at least one stacked block and a conductive contact. The first doping region is formed in the semiconductor substrate. The second doping region is formed in the first doping region. The at least one stacked block is formed on and insulated from the second doping region. The third doping region is formed in the second doping region and disposed adjacent to the at least one stacked block. The conductive contact electrically connects the at least one stacked block with the third doping region.
    Type: Application
    Filed: August 11, 2016
    Publication date: February 15, 2018
    Inventors: Shih-Yin Hsiao, Kai-Kuen Chang
  • Publication number: 20180005835
    Abstract: Provided is a memory device including a first gate, a second gate and an inter-gate dielectric layer. The first gate is buried in a substrate. The second gate includes metal and is disposed on the substrate. The inter-gate dielectric layer is disposed between the first and second gates. The inter-gate dielectric layer comprises a high-k layer having a dielectric constant of greater than about 10.
    Type: Application
    Filed: September 14, 2017
    Publication date: January 4, 2018
    Applicant: United Microelectronics Corp.
    Inventors: Kun-Huang Yu, Shih-Yin Hsiao
  • Patent number: 9859417
    Abstract: A high-voltage MOS transistor includes a semiconductor substrate, a gate oxide layer on the semiconductor substrate, a gate on the gate oxide layer, a spacer covering a sidewall of the gate, a source on one side of the gate, and a drain on the other side of the gate. The gate includes at least a first discrete segment and a second discrete segment. The first discrete segment is not in direct contact with the second discrete segment. The spacer fills into a gap between the first discrete segment and the second discrete segment.
    Type: Grant
    Filed: June 24, 2016
    Date of Patent: January 2, 2018
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Shih-Yin Hsiao, Kuan-Liang Liu, Ching-Chung Yang, Kai-Kuen Chang, Ping-Hung Chiang, Nien-Chung Li, Wen-Fang Lee, Chih-Chung Wang
  • Patent number: 9852952
    Abstract: A method for fabricating semiconductor device is disclosed. The method includes the steps of: providing a substrate having a logic region and high-voltage (HV) region; forming a first gate structure on the logic region and a second gate structure on the HV region; forming an interlayer dielectric (ILD) layer around the first gate structure and the second gate structure; forming a patterned hard mask on the HV region; and transforming the first gate structure into a metal gate.
    Type: Grant
    Filed: October 28, 2015
    Date of Patent: December 26, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chih-Chung Wang, Shih-Yin Hsiao, Wen-Fang Lee, Nien-Chung Li, Shu-Wen Lin
  • Publication number: 20170345926
    Abstract: A high-voltage MOS transistor includes a semiconductor substrate, a gate oxide layer on the semiconductor substrate, a gate on the gate oxide layer, a spacer covering a sidewall of the gate, a source on one side of the gate, and a drain on the other side of the gate. The gate includes at least a first discrete segment and a second discrete segment. The first discrete segment is not in direct contact with the second discrete segment. The spacer fills into a gap between the first discrete segment and the second discrete segment.
    Type: Application
    Filed: June 24, 2016
    Publication date: November 30, 2017
    Inventors: Shih-Yin Hsiao, Kuan-Liang Liu, Ching-Chung Yang, Kai-Kuen Chang, Ping-Hung Chiang, Nien-Chung Li, Wen-Fang Lee, Chih-Chung Wang
  • Publication number: 20170330948
    Abstract: A method of forming a gate layout includes providing a gate layout design diagram comprising at least one gate pattern, disposing at least one insulating plug pattern in the gate pattern for producing a modified gate layout in a case where any one of a length and a width of the gate pattern is greater than or equal to a predetermined size, and outputting and manufacturing the modified gate layout onto a photomask. The predetermined size is determined by a process ability limit, and the process ability limit is a smallest gate size causing gate dishing when a chemical mechanical polishing process is performed to a gate.
    Type: Application
    Filed: August 4, 2017
    Publication date: November 16, 2017
    Inventors: Shih-Yin Hsiao, Ching-Chung Yang, Wen-Fang Lee, Nien-Chung Li, Chih-Chung Wang
  • Publication number: 20170330947
    Abstract: A metal-oxide semiconductor transistor includes a substrate, a gate insulating layer disposed on a surface of the substrate, and a metal gate disposed on the gate insulating layer, wherein at least one of the length or the width of the metal gate is greater than or equal to approximately 320 nanometers, and the metal gate has at least one plug hole. The metal-oxide semiconductor transistor further includes at least one insulating plug disposed in the plug hole and two diffusion regions disposed respectively at two sides of the metal gate in the substrate.
    Type: Application
    Filed: August 3, 2017
    Publication date: November 16, 2017
    Inventors: Shih-Yin Hsiao, Ching-Chung Yang, Wen-Fang Lee, Nien-Chung Li, Chih-Chung Wang
  • Patent number: 9812327
    Abstract: Provided is a memory device including a first gate, a second gate and an inter-gate dielectric layer. The first gate is buried in a substrate. The second gate includes metal and is disposed on the substrate. The inter-gate dielectric layer is disposed between the first and second gates. A method of forming a memory device is further provided.
    Type: Grant
    Filed: September 23, 2015
    Date of Patent: November 7, 2017
    Assignee: United Microelectronics Corp.
    Inventors: Kun-Huang Yu, Shih-Yin Hsiao
  • Patent number: 9806150
    Abstract: A high voltage device includes a substrate, a first LDMOS transistor and a second LDMOS transistor disposed on the substrate. The first LDMOS transistor includes a first gate electrode disposed on the substrate. A first STI is embedded in the substrate and disposed at an edge of the first gate electrode and two first doping regions respectively disposed at one side of the first STI and one side of the first gate electrode. The second LDMOS transistor includes a second gate electrode disposed on the substrate. A second STI is embedded in the substrate and disposed at an edge of the second gate electrode. Two second doping regions are respectively disposed at one side of the second STI and one side of the second gate electrode, wherein the second STI is deeper than the first STI.
    Type: Grant
    Filed: May 4, 2017
    Date of Patent: October 31, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Shih-Yin Hsiao, Su-Hwa Tsai
  • Patent number: 9761657
    Abstract: A metal-oxide-semiconductor transistor includes a substrate, a gate insulating layer disposed on the surface of the substrate layer, a metal gate disposed on the gate insulating layer and having at least one plug hole, at least one dielectric plug disposed in the plug hole, and two diffusion regions disposed at two sides of the metal gate in the substrate. The metal gate is configured to operate under an operation voltage greater than 5 v.
    Type: Grant
    Filed: November 25, 2015
    Date of Patent: September 12, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Shih-Yin Hsiao, Ching-Chung Yang, Wen-Fang Lee, Nien-Chung Li, Chih-Chung Wang
  • Patent number: 9755046
    Abstract: A method of forming a semiconductor device is provided. At least two shallow trenches are formed in a substrate. An insulating layer is formed on surfaces of the substrate and the shallow trenches. A conductive layer is formed on the substrate between the shallow trenches. At least one spacer is formed on a sidewall of the conductive layer, wherein the spacer fills up each shallow trench.
    Type: Grant
    Filed: January 13, 2017
    Date of Patent: September 5, 2017
    Assignee: United Microelectronics Corp.
    Inventors: Shih-Yin Hsiao, Ching-Chung Yang
  • Publication number: 20170243950
    Abstract: A method of fabricating a transistor with reduced hot carrier injection effects includes providing a substrate covered by a gate material layer. Later, the gate material layer is patterned into a gate electrode. Then, a mask layer is formed to cover part of the gate electrode and expose two ends of the gate electrode. Finally, a first implantation process is performed to implant dopants through the exposed two ends of the gate electrode into the substrate directly under the gate electrode to form two LDD regions by taking the mask layer as a mask.
    Type: Application
    Filed: February 19, 2016
    Publication date: August 24, 2017
    Inventors: Kuan-Liang Liu, Shih-Yin Hsiao, Ching-Chung Yang
  • Patent number: 9741850
    Abstract: A semiconductor device having a substrate, a gate electrode, a source and a drain, and a buried gate dielectric layer is disclosed. The buried gate dielectric layer is disposed below said gate electrode and protrudes therefrom to said drain, thereby separating said gate electrode and said drain by a substantial distance to reduce gate induced drain leakage.
    Type: Grant
    Filed: August 12, 2016
    Date of Patent: August 22, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Shih-Yin Hsiao, Ching-Chung Yang, Ping-Hung Chiang, Nien-Chung Li, Wen-Fang Lee, Chih-Chung Wang, Kuan-Liang Liu, Kai-Kuen Chang
  • Publication number: 20170236899
    Abstract: A high voltage device includes a substrate, a first LDMOS transistor and a second LDMOS transistor disposed on the substrate. The first LDMOS transistor includes a first gate electrode disposed on the substrate. A first STI is embedded in the substrate and disposed at an edge of the first gate electrode and two first doping regions respectively disposed at one side of the first STI and one side of the first gate electrode. The second LDMOS transistor includes a second gate electrode disposed on the substrate. A second STI is embedded in the substrate and disposed at an edge of the second gate electrode. Two second doping regions are respectively disposed at one side of the second STI and one side of the second gate electrode, wherein the second STI is deeper than the first STI.
    Type: Application
    Filed: May 4, 2017
    Publication date: August 17, 2017
    Inventors: Shih-Yin Hsiao, Su-Hwa Tsai
  • Patent number: 9728616
    Abstract: The present invention provides a high-voltage metal-oxide-semiconductor transistor device and a manufacturing method thereof. First, a semiconductor substrate is provided and a dielectric layer and a conductive layer sequentially stacked on the semiconductor substrate. Then, the conductive layer is patterned to form a gate and a dummy gate disposed at a first side of the gate and followed by forming a first spacer between the gate and the dummy gate and a second spacer at a second side of the gate opposite to the first side, wherein the first spacer includes an indentation. Subsequently, the dummy gate is removed.
    Type: Grant
    Filed: October 26, 2015
    Date of Patent: August 8, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Shih-Yin Hsiao, Kai-Kuen Chang
  • Patent number: 9722072
    Abstract: A manufacturing method of a high-voltage metal-oxide-semiconductor (HV MOS) transistor device is provided. The manufacturing method includes the following steps. A semiconductor substrate is provided. A patterned conductive structure is formed on the semiconductor substrate. The patterned conductive structure includes a gate structure and a first sub-gate structure. The semiconductor substrate has a first region and a second region respectively disposed on two opposite sides of the gate structure. The first sub-gate structure is disposed on the first region of the semiconductor substrate. The first sub-gate structure is separated from the gate structure. A drain region is formed in the first region of the semiconductor substrate. A first contact structure is formed on the drain region and the first sub-gate structure. The drain region is electrically connected to the first sub-gate structure via the first contact structure.
    Type: Grant
    Filed: June 6, 2016
    Date of Patent: August 1, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Kai-Kuen Chang, Chia-Min Hung, Shih-Yin Hsiao
  • Patent number: 9716139
    Abstract: A method for forming a high voltage transistor is provided. First, a substrate having a top surface is provided, following by forming a thermal oxide layer on the substrate. At least a part of the thermal oxidation layer is removed to form a recess in the substrate, wherein a bottom surface of the recess is lower than the top surface of the substrate. A gate oxide layer is formed in the recess, then a gate structure is formed on the gate oxide layer. The method further includes forming a source/drain region in the substrate.
    Type: Grant
    Filed: June 2, 2015
    Date of Patent: July 25, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Kuan-Chuan Chen, Chih-Chung Wang, Wen-Fang Lee, Nien-Chung Li, Shih-Yin Hsiao
  • Publication number: 20170200650
    Abstract: A method for fabricating a semiconductor device structure is shown. A gate dielectric layer is formed on a substrate. A portion of the gate dielectric layer, which is located on a part of the substrate in which an S/D region is to be formed, is removed. A gate electrode is formed on the remaining gate dielectric layer. A spacer is formed on the sidewall of the gate electrode and the sidewall of the gate dielectric layer. The S/D region is then formed in the part of the substrate beside the spacer.
    Type: Application
    Filed: January 12, 2016
    Publication date: July 13, 2017
    Inventors: Kai-Kuen Chang, Shih-Yin Hsiao