Abstract: A coating and developing system includes a resist film forming unit block and antireflection film forming unit blocks stacked up in layers to form a resist film and an antireflection film underlying the resist film and an antireflection film overlying the resist film in a small space. The coating and developing system is capable of coping with either of a case where antireflection films are formed and a case where any antireflection film is not formed and needs simple software. Film forming unit blocks, namely, a TCT layer B3, a COT layer B4 and a BCT layer B5, and developing unit blocks, namely, DEV layers B1 and B2, are stacked up in layers in a processing block S2. The TCT layer B3, the COT layer B4 and the BCT layer B5 are used selectively in the case where antireflection films are formed and the case where any antireflection film is not formed. The coating and developing system is controlled by a simple carrying program and simple software.

Abstract: A coating and developing system includes a resist film forming unit block and antireflection film forming unit blocks stacked up in layers to form a resist film and an antireflection film underlying the resist film and an antireflection film overlying the resist film in a small space. The coating and developing system is capable of coping with either of a case where antireflection films are formed and a case where any antireflection film is not formed and needs simple software. Film forming unit blocks, namely, a TCT layer B3, a COT layer B4 and a BCT layer B5, and developing unit blocks, namely, DEV layers B1 and B2, are stacked up in layers in a processing block S2. The TCT layer B3, the COT layer B4 and the BCT layer B5 are used selectively in the case where antireflection films are formed and the case where any antireflection film is not formed. The coating and developing system is controlled by a simple carrying program and simple software.

Abstract: A coating and developing system includes a resist film forming unit block and antireflection film forming unit blocks stacked up in layers to form a resist film and an antireflection film underlying the resist film and an antireflection film overlying the resist film in a small space. The coating and developing system is capable of coping with either of a case where antireflection films are formed and a case where any antireflection film is not formed and needs simple software. Film forming unit blocks, namely, a TCT layer B3, a COT layer B4 and a BCT layer B5, and developing unit blocks, namely, DEV layers B1 and B2, are stacked up in layers in a processing block S2. The TCT layer B3, the COT layer B4 and the BCT layer B5 are used selectively in the case where antireflection films are formed and the case where any antireflection film is not formed. The coating and developing system is controlled by a simple carrying program and simple software.

Abstract: A liquid state detecting element comprising: a film portion made of a flexible insulating material and extending in a longitudinal direction; and a pair of detecting electrodes juxtaposed to each other on a layer of said film portion and extending in said longitudinal direction, in which said detecting electrodes are for being immersed at least partially in a liquid to be measured, so that a state of said measured liquid is detected on a basis of an electrostatic capacity between said pair of detecting electrodes, wherein: said liquid state detecting element further comprises reinforcing portions made of a conductive material and disposed on said layer of said film portion on an outer side of said detecting electrodes; and said reinforcing portions include: a grounding terminal for being connected with a ground line; and a pair of parallel reinforcing portions extending in said longitudinal direction along side edges of said film portion so as to sandwich said pair of detecting electrodes.

Abstract: In a communication system for downloading programs from a center to in-vehicle terminals, a center can check whether downloading has been completed normally or a program is operating normally in an in-vehicle terminal. According to the timing of activating a downloaded program, an in-vehicle terminal checks whether the program is activated to operate normally. The information is transmitted to the center. Based on the information, the center becomes aware of the fact that downloading has been completed without any problem and that the program is operating normally in the in-vehicle terminal.

Abstract: In a communication system for downloading programs from a center to in-vehicle terminals, a center can check whether downloading has been completed normally or a program is operating normally in an in-vehicle terminal. According to the timing of activating a downloaded program, an in-vehicle terminal checks whether the program is activated to operate normally. The information is transmitted to the center. Based on the information, the center becomes aware of the fact that downloading has been completed without any problem and that the program is operating normally in the in-vehicle terminal.

Abstract: The present invention is a coating unit for applying a coating solution on a substrate, comprising: a container enclosing the substrate; a casing for accommodating the container therein; a supply device for supplying a predetermined gas into the casing; a first exhaust pipe for exhausting an atmosphere inside the container; a second exhaust pipe for exhausting an atmosphere inside the casing; a first adjusting device which is disposed in the first exhaust pipe, for adjusting a flow rate of an atmosphere passing through the first exhaust pipe; and a second adjusting device which is disposed in the second exhaust pipe, for adjusting a flow rate of an atmosphere passing through the second exhaust pipe. According to the present invention, the second exhaust pipe is usable for adjusting the exhaust flow rate to maintain a pressure inside the casing at a positive pressure.

Abstract: In a communication system for downloading programs from a center to in-vehicle terminals, a center can check whether downloading has been completed normally or a program is operating normally in an in-vehicle terminal. According to the timing of activating a downloaded program, an in-vehicle terminal checks whether the program is activated to operate normally. The information is transmitted to the center. Based on the information, the center becomes aware of the fact that downloading has been completed without any problem and that the program is operating normally in the in-vehicle terminal.

Abstract: A liquid state detecting element comprising: a film portion made of a flexible insulating material and extending in a longitudinal direction; and a pair of detecting electrodes juxtaposed to each other on a layer of said film portion and extending in said longitudinal direction, in which said detecting electrodes are for being immersed at least partially in a liquid to be measured, so that a state of said measured liquid is detected on a basis of an electrostatic capacity between said pair of detecting electrodes, wherein: said liquid state detecting element further comprises reinforcing portions made of a conductive material and disposed on said layer of said film portion on an outer side of said detecting electrodes; and said reinforcing portions include: a grounding terminal for being connected with a ground line; and a pair of parallel reinforcing portions extending in said longitudinal direction along side edges of said film portion so as to sandwich said pair of detecting electrodes.

Abstract: An engine oil deterioration detection apparatus 1 includes a sensing capacitor CS formed of paired electrodes dipped into engine oil whose deterioration is to be detected, the engine oil deterioration detection apparatus detecting deterioration of the engine oil on the basis of a change in electrostatic capacitance of the sensing capacitor CS. A measurement signal generation circuit 10 generates a measurement signal (6) to be supplied to the sensing capacitor CS in order to measure the electrostatic capacitance of the sensing capacitor CS. A detection signal output circuit 30 outputs a detection signal (10) on the basis of a response wave signal (7) produced from the sensing capacitor CS in response to supply of the measurement signal (6) thereto, the detection signal reflecting the electrostatic capacitance of the sensing capacitor CS.

Abstract: A processing solution is supplied from processing-solution suppliers onto the surfaces of targets to be processed while a flow rate of the processing solution is being adjusted. The processing solution is fed from a processing-solution supply source at a specific pressure via a processing-solution pressure-up feeder. The pressure of the processing solution fed via the processing-solution pressure-up feeder is adjust to another specific pressure or more at least when the processing-solution suppliers are operating simultaneously. A flow-rate detector detects the flow rate of the processing solution supplied from each processing-solution supplier. A pressure detector detects the pressure of the processing solution fed via the processing-solution pressure-up feeder.

Abstract: A processing solution is supplied from processing-solution suppliers onto the surfaces of targets to be processed while a flow rate of the processing solution is being adjusted. The processing solution is fed from a processing-solution supply source at a specific pressure via a processing-solution pressure-up feeder. The pressure of the processing solution fed via the processing-solution pressure-up feeder is adjust to another specific pressure or more at least when the processing-solution suppliers are operating simultaneously. A flow-rate detector detects the flow rate of the processing solution supplied from each processing-solution supplier. A pressure detector detects the pressure of the processing solution fed via the processing-solution pressure-up feeder.

Abstract: A processing solution is supplied from processing-solution suppliers onto the surfaces of targets to be processed while a flow rate of the processing solution is being adjusted. The processing solution is fed from a processing-solution supply source at a specific pressure via a processing-solution pressure-up feeder. The pressure of the processing solution fed via the processing-solution pressure-up feeder is adjust to another specific pressure or more at least when the processing-solution suppliers are operating simultaneously. A flow-rate detector detects the flow rate of the processing solution supplied from each processing-solution supplier. A pressure detector detects the pressure of the processing solution fed via the processing-solution pressure-up feeder.

Abstract: The present invention is a coating unit for applying a coating solution on a substrate, comprising: a container enclosing the substrate; a casing for accommodating the container therein; a supply device for supplying a predetermined gas into the casing; a first exhaust pipe for exhausting an atmosphere inside the container; a second exhaust pipe for exhausting an atmosphere inside the casing; a first adjusting device which is disposed in the first exhaust pipe, for adjusting a flow rate of an atmosphere passing through the first exhaust pipe; and a second adjusting device which is disposed in the second exhaust pipe, for adjusting a flow rate of an atmosphere passing through the second exhaust pipe. According to the present invention, the second exhaust pipe is usable for adjusting the exhaust flow rate to maintain a pressure inside the casing at a positive pressure.

Abstract: The present invention relates to a method capable of accurate imaging simulation even when the NA of illuminating light is large, or when the object under observation is not conformable to the 2.5-dimensional configuration, or when an image-forming optical system is focused to the inside of the object, and also relates to a system using the method. The imaging simulation method has a first step of calculating the electric field distribution of illuminating light entering a three-dimensional space containing an observation object, a second step of calculating the electric field distribution in the three-dimensional space of scattered light generated by interaction between the illuminating light and the observation object, and a third step of calculating imaging of the scattered light performed by an image-forming optical system by using the Helmholtz-Kirchhoff integral using a characteristic Green's function group of the image-forming optical system.

Abstract: The present invention is a coating unit for applying a coating solution on a substrate, comprising: a container enclosing the substrate; a casing for accommodating the container therein; a supply device for supplying a predetermined gas into the casing; a first exhaust pipe for exhausting an atmosphere inside the container; a second exhaust pipe for exhausting an atmosphere inside the casing; a first adjusting device which is disposed in the first exhaust pipe, for adjusting a flow rate of an atmosphere passing through the first exhaust pipe; and a second adjusting device which is disposed in the second exhaust pipe, for adjusting a flow rate of an atmosphere passing through the second exhaust pipe. According to the present invention, the second exhaust pipe is usable for adjusting the exhaust flow rate to maintain a pressure inside the casing at a positive pressure.

Abstract: Terminal equipment receives map image information from a central apparatus along with recommended-route information generated by the central apparatus and presenting a recommended route leading from present position to destination, and the terminal equipment displays both the map information and the recommended-route information. When it is detected that the terminal equipment has deviated from the recommended route, the present position of the terminal equipment is transmitted to the central apparatus, and the central apparatus, based on the received present position, searches for a new route and transmits newly generated recommended-route information to the terminal equipment, which displays the newly received recommended route by superimposing it onto the already received map.

Abstract: The present invention relates to a control system for electrical equipment comprising an electrical equipment group or groups including at least one piece of electrical equipment and a control unit or units connected to said electrical equipment group or groups wherein:

Abstract: Thermal processing unit sections each with ten tiers and coating processing unit sections each with five tiers are disposed around a first main wafer transfer section and a second main wafer transfer section, and in the thermal processing unit section, the influence of the time required for substrate temperature regulation processing on a drop in throughput can be reduced greatly by transferring the wafer W while the temperature of the wafer W is being regulated by a temperature regulation and transfer device.

Abstract: In a communication system for downloading programs from a center to in-vehicle terminals, a center can check whether downloading has been completed normally or a program is operating normally in an in-vehicle terminal. According to the timing of activating a downloaded program, an in-vehicle terminal checks whether the program is activated to operate normally. The information is transmitted to the center. Based on the information, the center becomes aware of the fact that downloading has been completed without any problem and that the program is operating normally in the in-vehicle terminal.