Abstract: A nonvolatile memory device has a plurality of nonvolatile memory cells in which a memory gate electrode is formed over a first semiconductor region with a gate insulating film and a gate nitride film interposed therebetween. First and second switch gate electrodes, and first and second signal electrodes used as source/drain electrodes are formed on both sides of the memory gate electrode. Electrons are injected into the gate nitride film from the source side to store information in the memory cells. The memory gate electrode and the switch gate electrodes extend in the same direction. The application of a high electric field to a memory cell which is not selected for writing can be avoided owing to the switch gate electrodes being held in a cut-off state.

Abstract: A multi-storage nonvolatile memory of high density, high speed and high reliability has a memory transistor and switch transistors disposed on both the sides of the memory transistor. The memory transistor includes a gate insulating film having discrete traps and a memory gate electrode, whereas the switch transistors include switch gate electrodes. The gate insulating film has the discrete traps for storing information charge, can locally inject carriers, and one memory cell constitutes a multi-storage cell for storing at least information of 2 bits. The switch transistors having the switch gate electrodes realize source side injection. The memory transistor is formed together with the switch transistors in self-aligned diffusion. The memory gate electrode of the memory transistor is connected to a word line so as to perform word-line erase.

Abstract: When two bits are stored per memory cell and the two bits are written or read, writing or reading operation has to be performed twice. When a memory array is constructed by using a memory cell, by the access of twice, read time or write time twice as long as conventional read or write time is required. It causes deterioration in speed of a system using the memory. To solve the problem, according to the invention, bit arrangement of a conventional memory cell array is changed according to a writing or reading method With the configuration, a plurality of bytes can be simultaneously written or read by a single access. In order to perform reading at higher speed, a sense amplifier requiring no precharging is also provided.

Abstract: A multi-storage nonvolatile memory of high density, high speed and high reliability has a memory transistor and switch transistors disposed on both the sides of the memory transistor. The memory transistor includes a gate insulating film having discrete traps and a memory gate electrode, whereas the switch transistors include switch gate electrodes. The gate insulating film has the discrete traps for storing information charge, can locally inject carriers, and one memory cell constitutes a multi-storage cell for storing at least information of 2 bits. The switch transistors having the switch gate electrodes realize source side injection. The memory transistor is fommed together with the switch transistors in self-aligned diffusion. The memory gate electrode of the memory transistor is connected to a word line so as to perform word-line erase.

Abstract: Disclosed herein is a nonvolatile memory device having a plurality of nonvolatile memory cells. In the nonvolatile memory cell, a memory gate electrode is formed over a first semiconductor region with a gate insulating film and a gate nitride film interposed therebetween. First and second switch gate electrodes, and first and second signal electrodes used as source/drain electrodes are formed on both sides of the memory gate electrode. Electrons are injected into the gate nitride film from the source side so that each of the memory cells stores information therein. The memory gate electrode and the switch gate electrodes extend in the same direction.

Abstract: When two bits are stored per memory cell and the two bits are written or read, writing or reading operation has to be performed twice. When a memory array is constructed by using a memory cell, by the access of twice, read time or write time twice as long as conventional read or write time is required. It causes deterioration in speed of a system using the memory. To solve the problem, according to the invention, bit arrangement of a conventional memory cell array is changed according to a writing or reading method With the configuration, a plurality of bytes can be simultaneously written or read by a single access. In order to perform reading at higher speed, a sense amplifier requiring no precharging is also provided.

Abstract: Disclosed herein is a nonvolatile memory device having a plurality of nonvolatile memory cells. In the nonvolatile memory cell, a memory gate electrode is formed over a first semiconductor region with a gate insulating film and a gate nitride film interposed therebetween. First and second switch gate electrodes, and first and second signal electrodes used as source/drain electrodes are formed on both sides of the memory gate electrode. Electrons are injected into the gate nitride film from the source side so that each of the memory cells stores information therein. The memory gate electrode and the switch gate electrodes extend in the same direction.

Abstract: A plurality of connection holes 24 for connecting n+ type semiconductor region 20 of zener diodes (D1, D2) and wires 21 and 22 to each other are not arranged in the center of the n+ type semiconductor region 20, that is, in a region in which a p+ type semiconductor region 6 and the n+ type semiconductor region 20 form a junction but is arranged in the periphery which is deeper than the center in junction depth. In addition, these connection holes 24 are spaced from each other so that a pitch between the adjacent connection holes 24 is greater than a minimum pitch between connection holes of the circuit, and thereby a substrate shaving quantity is reduced when the respective connection holes 24 are formed by means of dry etching.

Abstract: The present invention deals with a semiconductor memory circuit device, in which a memory array portion of a rectangular shape consisting of semiconductor non-volatile memory elements is formed on a main surface of the semiconductor substrate, a low voltage driver circuit (decoder) is formed along a side of the memory array portion, and a high voltage driver circuit is formed along an opposite side of the memory array portion. This permits a reduction in word line length and avoids crossing of the word lines to permit increased operation speed and, particularly, increased reading speed.

Abstract: A semiconductor memory device whose data hold condition is not affected due to degradation of transistor characteristics by minimizing leakage charges and the switching transistor size. The semiconductor memory device employs memory cell charge holding electrode that is insulated from the remaining memory cell structure, particularly the switching transistor source drain leakage path. The write element controls the tunneling of charge carriers through such insulator to the charge holding portion or capacitor electrode, for writing data. Particularly, the write element includes a PN junction for various advantages.

Abstract: The present invention deals with a semiconductor memory circuit device, in which a memory array portion of a rectangular shape consisting of semiconductor non-volatile memory elements is formed on a main surface of the semiconductor substrate, a low voltage driver circuit (decoder) is formed along a side of the memory array portion, and a high voltage driver circuit is formed along an opposite side of the memory array portion. This permits a reduction in word line length and avoids crossing of the word lines to permit increased operation speed and, particularly, increased reading speed.

Abstract: The present invention deals with a semiconductor memory circuit device, in which a memory array portion of a rectangular shape consisting of semiconductor non-volatile memory elements is formed on a main surface of the semiconductor substrate, a low voltage driver circuit (decoder) is formed along a side of the memory array portion, and a high voltage driver circuit is formed along an opposite side of the memory array portion. This permits a reduction in word line length and avoids crossing of the word lines to permit increased operation speed and, particularly, increased reading speed.

Abstract: The present invention deals with a semiconductor memory circuit device, in which a memory array portion of a rectangular shape consisting of semiconductor non-volatile memory elements is formed on a main surface of the semiconductor substrate, a low voltage driver circuit (decoder) is formed along a side of the memory array portion, and a high voltage driver circuit is formed along an opposite side of the memory array portion. This permits a reduction in word line length and avoids crossing of the word lines to permit increased operation speed and, particularly, increased reading speed.

Abstract: In the semiconductor integrated circuit device provided with a plurality of second well regions of the same conductivity type, formed by dividing a first well region provided in the semiconductor substrate by an isolation trench, the isolation trench is substantially linear on the semiconductor substrate surface and the ends reach out of the first well region, however there is no intersection part, namely a corner part T part or cross part in the isolation trench. Therefore, no cavity occurs in the filler in the trench and stress is not concentrated on the intersection part. In addition, defects due to junction leak or mechanical damage do not occur, that is, there is no characteristic deterioration occuring. By providing the second well with memory cell, a semiconductor memory device whose characteristic defect rate and reliability defect rate are remarkably low can be formed.

Abstract: The present invention deals with a semiconductor memory circuit device, in which a memory array portion of a rectangular shape consisting of semiconductor non-volatile memory elements is formed on a main surface of the semiconductor substrate, a low voltage driver circuit (decoder) is formed along a side of the memory array portion, and a high voltage driver circuit is formed along an opposite side of the memory array portion. This permits a reduction in word line length and avoids crossing of the word lines to permit increased operation speed and, particularly, increased reading speed.

Abstract: In a semiconductor device which includes an insulation film through which a charge can tunnel, a gate insulation film of a material different from the material of said insulation film or having a thickness different from that of said insulation film, and a floating gate extending over said tunnelable insulation film, the improvement wherein at least two sides of said tunnelable region are bounded by a device separation oxide film.

Abstract: A semiconductor nonvolatile memory wherein a unit cell is constructed of a series connection consisting of an MNOS (metal-silicon nitride-silicon dioxide-semiconductor) transistor whose gate electrode is made of polycrystalline silicon and an MOS (metal-silicon dioxide-semiconductor) transistor whose gate electrode is also made of polycrystalline silicon, such unit cells being arrayed in the form of a matrix, and wherein the gate electrode of the MOS transistor is used as a reading word line, the gate electrode of the MNOS transistor is used as a writing word line, and a terminal of either of the MNOS transistor and the MOS transistor connected in series and constituting the unit cell is used as a data line.

Abstract: The present invention deals with a semiconductor memory circuit device, in which a memory array portion of a rectangular shape consisting of semiconductor non-volatile memory elements is formed on a main surface of the semiconductor substrate, a low voltage driver circuit (decoder) is formed along a side of the memory array portion, and a high voltage driver circuit is formed along an opposite side of the memory array portion. This permits a reduction in word line length and avoids crossing of the word lines to permit increased operation speed and, particularly, increased reading speed.

Abstract: An LSI memory comprises a memory array including usual memory cells arranged in a matrix form, usual address transistors for selecting usual lines connected to the columns or rows of the memory array, address lines for controlling the usual address transistors, spare memory cells provided in the memory array, a spare line connected to the spare memory cells, spare address transistors connected between the address lines and the spare lines, and nonvolatile memory elements connected between the sources of the spare address transistors and the ground. By putting any one of the nonvolatile memory elements into the written state, any one of the spare address transistors are conditioned into an active state so that the spare line can be substituted for a defective usual line.

Abstract: A semiconductor nonvolatile memory wherein a unit cell is constructed of a series connection consisting of an MNOS (metal--silicon nitride--silicon dioxide--semiconductor) transistor whose gate electrode is made of polycrystalline silicon and an MOS (metal--silicon dioxide--semiconductor) transistor whose gate electrode is also made of polycrystalline silicon, such unit cells being arrayed in the form of a matrix, and wherein the gate electrode of the MOS transistor is used as a reading word line, the gate electrode of the MNOS transistor is used as a writing word line, and a terminal of either of the MNOS transistor and the MOS transistor connected in series and constituting the unit cell is used as a data line.