Abstract: A single crystal silicon substrate at least a part of which constitutes a flow path for liquid includes a through-hole constituting a part of the flow path and extending through the single crystal silicon substrate in a direction intersecting a substrate surface of the single crystal silicon substrate. The through-hole is formed by metal-assisted chemical etching, and includes a striped portion in which at least one of a concave portion or a convex portion along a direction in which the liquid flows extends.

Abstract: An illuminator includes a light source that outputs first light, a wavelength converter that converts the first light into second light, an optical element that reflects the first light toward the wavelength converter and transmits the second light, and an illumination system which is disposed on the opposite side of the optical element from the wavelength converter. The wavelength converter includes a substrate, a reflection layer facing a first surface of the substrate, a wavelength conversion layer having a second surface and facing the reflection layer, and a structural element facing the second surface and having a plurality of protrusions that reflect part of the first light. The plurality of protrusions each have an inclining surface that inclines with respect to the second surface, and at least part of the first light and reflected off the inclining surface enters the illumination system without traveling via the optical element.

Abstract: An illuminator includes a light source that outputs first light, a wavelength converter that converts the first light into second light, an optical element that reflects the first light toward the wavelength converter and transmits the second light, and an illumination system which is disposed on the opposite side of the optical element from the wavelength converter. The wavelength converter includes a substrate, a reflection layer facing a first surface of the substrate, a wavelength conversion layer having a second surface and facing the reflection layer, and a structural element facing the second surface and having a plurality of protrusions that reflect part of the first light. The plurality of protrusions each have an inclining surface that inclines with respect to the second surface, and at least part of the first light and reflected off the inclining surface enters the illumination system without traveling via the optical element.

Abstract: The wavelength conversion element according to the present disclosure includes a wavelength conversion layer which has a first surface and a second surface different from the first surface, and which includes a scattering element no higher than 5% in volume ratio, and which is configured to convert light in a first wavelength band into light in a second wavelength band different from the first wavelength band, and a plurality of protruding parts which is disposed so as to be opposed to the first surface, and which includes a first protruding part and a second protruding part adjacent to each other. A height of the plurality of protruding parts is no smaller than 1 ?m, and a distance between a vertex of the first protruding part and a vertex of the second protruding part in a direction along the first surface is no smaller than 3 ?m.

Abstract: The wavelength conversion element according to the present disclosure includes a wavelength conversion layer which has a first surface and a second surface different from the first surface, and which includes a scattering element no higher than 5% in volume ratio, and which is configured to convert light in a first wavelength band into light in a second wavelength band different from the first wavelength band, and a plurality of protruding parts which is disposed so as to be opposed to the first surface, and which includes a first protruding part and a second protruding part adjacent to each other. A height of the plurality of protruding parts is no smaller than 1 ?m, and a distance between a vertex of the first protruding part and a vertex of the second protruding part in a direction along the first surface is no smaller than 3 ?m.

Abstract: A wiring substrate includes a first substrate having a first surface and a second surface at an opposite side to the first surface, a first interconnection disposed on the first surface, a second interconnection disposed on the second surface, and a through interconnection electrically coupling the first interconnection and the second interconnection to each other, and penetrating the first substrate, wherein the through interconnection includes a first through interconnection coupled to the first interconnection, and a second through interconnection coupled to the second interconnection, and the first through interconnection and the second through interconnection partially overlap each other in a plan view from a thickness direction of the first substrate.

Abstract: A wavelength conversion element includes a wavelength conversion layer which has a first face on which an excitation light is incident and a second face facing the first face, a first layer which is provided facing the second face and contains a first inorganic oxide, a second layer which is provided facing the first layer and contains a first metal or a second inorganic oxide that is different from the first inorganic oxide, and a third layer which is provided facing the second layer, contains either silver or aluminum, and reflects the excitation light or a light obtained by wavelength conversion of the excitation light by the wavelength conversion layer.

Abstract: A wavelength conversion element includes a wavelength conversion layer which has a first face on which an excitation light is incident and a second face facing the first face, a first layer which is provided facing the second face and contains a first inorganic oxide, a second layer which is provided facing the first layer and contains a first metal or a second inorganic oxide that is different from the first inorganic oxide, and a third layer which is provided facing the second layer, contains either silver or aluminum, and reflects the excitation light or a light obtained by wavelength conversion of the excitation light by the wavelength conversion layer.

Abstract: A pressure sensor includes a substrate which has a diaphragm that is flexurally deformed by receiving a pressure, a side wall section which is placed on one surface side of the substrate and surrounds the diaphragm in a plan view, and a sealing layer which is placed so as to face the diaphragm through a space surrounded by the side wall section and seals the space, wherein the sealing layer includes a first silicon layer, a second silicon layer which is located on the opposite side to the substrate with respect to the first silicon layer, and a silicon oxide layer which is located between the first silicon layer and the second silicon layer, and the silicon oxide layer is sealed from the outside by being covered with the second silicon layer.

Abstract: A pressure sensor includes a substrate that has a diaphragm which bends and deforms by receiving pressure and a displacement regulating unit that regulates deformation of the diaphragm, in which the diaphragm and the displacement regulating unit are spaced away from each other in a first state where the diaphragm receives pressure within a measurable range, and the diaphragm and the displacement regulating unit come into contact with each other in a second state where the diaphragm receives pressure exceeding the measurable range.

Abstract: A pressure sensor includes an SOI substrate which has a first silicon layer, a second silicon layer placed on one side of the first silicon layer, and a silicon oxide layer placed between the first and second silicon layers, and a concave section which opens to the surface on the first silicon layer side of the SOI substrate, wherein in a plan view of the SOI substrate, a portion overlapping the concave section of the SOI substrate becomes a diaphragm which is flexurally deformed by receiving a pressure, and the second silicon layer is exposed on the bottom surface of the concave section.

Abstract: An electronic device includes a package including an opening, and a cavity communicating with the opening, a pressure sensor element disposed in the cavity, and a waterproof unit is disposed in the package so as to cover the opening, in which the waterproof unit includes a through hole that is a separate body from the package, blocks passing of liquid, and permits passing of gas from an outside of the package into an inside of the cavity.

Abstract: A screen has an incidence plane that reflects a projected light, and, on the incidence plane, a plurality of lens elements are arranged. The plurality of lens elements have quarter-spherical surfaces, and the spherical surfaces are formed so as to face a light source of the projected light. In a portion of the spherical surface, the portion onto which the projected light is projected, a reflecting section that reflects the projected light is formed. This makes it possible to increase the area of the reflecting sections in the incidence plane and thereby increase the brightness of the screen.

Abstract: A screen has an incidence plane that reflects a projected light, and, on the incidence plane, a plurality of lens elements are arranged. The plurality of lens elements have quarter-spherical surfaces, and the spherical surfaces are formed so as to face a light source of the projected light. In a portion of the spherical surface, the portion onto which the projected light is projected, a reflecting section that reflects the projected light is formed. This makes it possible to increase the area of the reflecting sections in the incidence plane and thereby increase the brightness of the screen.

Abstract: A light-emitting device includes a substrate, and a light-emitting element including a lower electrode, a light-emitting function layer, and an upper electrode that are formed on the substrate in that order. At least one auxiliary electrode in a strip shape extends in a first direction on and in contact with the upper electrode. The auxiliary electrode has a cross section taken along the direction intersecting the first direction, having a shape including a tapered portion. The light-emitting device also includes a barrier layer covering the auxiliary electrode and the upper electrode. The barrier layer prevents water and oxygen from penetrating into the light-emitting element.

Abstract: A film forming device includes a mask member that is made of silicon and has first openings of predetermined patterns; a magnetic member that is made of a magnetic material and has a second opening, and that is aligned with the mask member so that the first openings are arranged in the second opening in plan view of the second opening; and a substrate holding member that generates magnetic force between the magnetic member and itself in order to adhere the mask member and a substrate to each other. The mask member and the substrate are interposed between the magnetic member and the substrate holding member in this order from the magnetic member.

Abstract: A mask includes: a base plate having an opening; a chip having an aperture pattern positioned at the opening in the base plate; a plug detachably arranged to the base plate; and a joining member joining the chip and the plug.

Abstract: A process for producing an emissive device that includes (1) feeding the first material to the first region and the third region and to a side adjacent to a first face of at least one first electrode by a gas-phase process with a first mask to form films; (2) feeding the second material to the second region and the third region such that the second material fed in the third region is stacked above the first material in the third region and to the side adjacent to the first face of each first electrode by a gas-phase process to form the emissive layers; and (3) forming a second electrode at a side of each emissive layer opposite the side adjacent to the first electrode.

Abstract: Provided is a mask which is used to form on the surface of a substrate a plurality of linear film members disposed in parallel to each other by fixing one surface of the mask to the substrate and supplying a film material through the other surface of the mask by the use of a vapor process. The mask includes: a mask body having a plurality of openings corresponding to patterns of the linear film members; and reinforcement ribs which are disposed to cross the openings and which have a function of preventing deformation of the mask body due to the weight thereof. Here, the reinforcement ribs are disposed close to the other surface of the mask in the thickness direction of the openings.

Abstract: A cleaning apparatus of organic substances attached to a vapor-deposition mask for low molecular weight organic EL devices comprises a first stage for treating a vapor-deposition mask with a derivative of pyrrolidone, a second stage for rinsing the vapor-deposition mask with water, and a third stage for rinsing the vapor-deposition mask with flowing water. The cleaning apparatus also comprises a fourth stage for treating the vapor-deposition mask with ethanol, a fifth stage for drying the vapor-deposition mask, and a carrying means that carries the vapor-deposition mask to each stage in sequence. It is desirable to adopt N-methyl-2-pyrrolidone as the derivative of pyrrolidone.