Patents by Inventor Shinichiro Hayashi

Shinichiro Hayashi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6104049
    Abstract: A coating of liquid precursor containing a metal is applied to a first electrode, baked on a hot plate in oxygen ambient at a temperature not exceeding 300.degree. C. for five minutes, then RTP annealed at 675.degree. C. for 30 seconds. The coating is then annealed in oxygen or nitrogen ambient at 700.degree. C. for one hour to form a thin film of layered superlattice material with a thickness not exceeding 90 nm. A second electrode is applied to form a capacitor, and a post-anneal is performed in oxygen or nitrogen ambient at a temperature not exceeding 700.degree. C. If the material is strontium bismuth tantalate, the precursor contains u mole-equivalents of strontium, v mole-equivalents of bismuth, and w mole-equivalents of tantalum, where 0.8.ltoreq.u.ltoreq.1.0, 2.0.ltoreq.v.ltoreq.2.3, and 1.9.ltoreq.w.ltoreq.2.1.
    Type: Grant
    Filed: January 11, 1999
    Date of Patent: August 15, 2000
    Assignee: Symetrix Corporation
    Inventors: Narayan Solayappan, Vikram Joshi, Carlos A. Paz de Araujo, Larry D. McMillan, Shinichiro Hayashi, Tatsuo Otsuki
  • Patent number: 6017579
    Abstract: A new method (P200) is provided for making magnesium oxide layers (122) in plasma displays (100). A magnesium carboxylate liquid precursor solution is applied to a display panel (102), dried, and annealed to yield a solid magnesium oxide layer (122) having excellent electro-optical performance.
    Type: Grant
    Filed: April 14, 1997
    Date of Patent: January 25, 2000
    Assignees: Symetrix Corporation, Matsushita Electronics Corporation
    Inventors: Gota Kano, Carlos A. Paz De Araujo, Koji Arita, Michael C. Scott, Larry D. McMillan, Shinichiro Hayashi
  • Patent number: 5972428
    Abstract: A liquid primer is misted, flowed into a deposition chamber and deposited on a substrate. A liquid precursor is then misted, flowed into a deposition chamber and deposited on the substrate. The primer and precursor are dried to form a solid thin film, which is then annealed to form a part of an electronic component in an integrated circuit, such as the dielectric in a memory cell. The primer is a solvent, and the precursor includes a metal carboxylate, a metal alkoxide, or a metal alkoxycarboxylate in a precursor solvent. Preferably, the primer and the precursor solvent are the same solvent, such as 2-methoxyethanol, xylenes, or n-butyl acetate.
    Type: Grant
    Filed: March 5, 1996
    Date of Patent: October 26, 1999
    Assignees: Symetrix Corporation, Matsushita Electronics Corporation
    Inventors: Shinichiro Hayashi, Larry D. McMillan, Masamichi Azuma, Carlos A. Paz de Araujo
  • Patent number: 5965536
    Abstract: Disclosed are methods for inhibiting and modulating the actions of CXC intercrine molecules. The antileukinate peptides described inhibit IL-8, GRO and MIP2.beta. binding to neutrophils and neutrophil activation. The peptides are particularly advantageous as they inhibit IL-8-induced enzyme release at a 25 fold lower concentration than is required to inhibit chemotaxis, which makes them ideal for treating various inflammatory diseases and disorders including, amongst others, Adult Respiratory Distress Syndrome (ARDS), cystic fibrosis and chronic bronchitis.
    Type: Grant
    Filed: June 14, 1996
    Date of Patent: October 12, 1999
    Assignee: Board of Regents, The University of Texas System
    Inventors: Allen Barry Cohen, deceased, Edmund J. Miller, Shinichiro Hayashi, Anna K. Kurdowska, Ronald R. Tuttle
  • Patent number: 5965219
    Abstract: UV radiation is applied to a substrate in a deposition chamber to desorb water and other contaminates from it. A liquid precursor is misted, flowed into the deposition chamber and deposited on a substrate while UV radiation is applied to the mist. The film of liquid on the substrate is dried and annealed on the substrate while the UV radiation is applied to form a solid thin film of a metal oxide. The thin film is then incorporated into an electronic device of an integrated circuit fabricated on the substrate. The application of UV radiation to both the mist during deposition and the thin film after deposition significantly increases the quality of the resulting integrated circuits. The process has been found to be particularly excellent for making BST, strontium bismuth tantalate, and strontium bismuth niobate.
    Type: Grant
    Filed: January 25, 1996
    Date of Patent: October 12, 1999
    Assignees: Symetrix Corporation, Matsushita Electronics Corporation
    Inventors: Shinichiro Hayashi, Larry D. McMillan, Carlos A. Paz de Araujo
  • Patent number: 5962085
    Abstract: A substrate is located within a deposition chamber, the substrate defining a substrate plane. A barrier plate is disposed in spaced relation above the substrate and substantially parallel thereto, the area of said barrier plate in a plane parallel to said substrate being substantially equal to said area of said substrate in said substrate plane, i.e. within 10% of said substrate area. The barrier plate has a smoothness tolerance of 5% of the average distance between said barrier plate and said substrate. A mist is generated, allowed to settle in a buffer chamber, filtered through a 1 micron filter, and flowed into the deposition chamber between the substrate and barrier plate to deposit a liquid layer on the substrate. The liquid is dried to form a thin film of solid material on the substrate, which is then incorporated into an electrical component of an integrated circuit.
    Type: Grant
    Filed: March 4, 1996
    Date of Patent: October 5, 1999
    Assignees: Symetrix Corporation, Matsushita Electronics Corporation
    Inventors: Shinichiro Hayashi, Larry D. McMillan, Masamichi Azuma, Carlos A. Paz de Araujo
  • Patent number: 5849071
    Abstract: A precursor liquid comprising several metal 2-ethylhexanoates, such as strontium, tantalum and bismuth 2-ethylhexanoates, in a solvent such as xylenes/methyl ethyl ketone and a small amount of hexamethyl-disilazane. The liquid is dried, baked, and annealed to form a thin film of a layered superlattice material, such as strontium bismuth tantalate, on the substrate.
    Type: Grant
    Filed: June 16, 1997
    Date of Patent: December 15, 1998
    Assignees: Symetrix Corporation, Matsushita Electronics Corporation
    Inventors: Gary F. Derbenwick, Larry D. McMillan, Narayan Solayappan, Michael C. Scott, Carlos A. Paz de Araujo, Shinichiro Hayashi
  • Patent number: 5846597
    Abstract: A precursor liquid comprising several metal 2-ethylhexanoates, such as strontium, tantalum and bismuth 2-ethylhexanoates, in a xylenes/methyl ethyl ketone solvent is prepared, a substrate is placed within a vacuum deposition chamber, a small amount of hexamethyl-disilazane is added to the precursor liquid is misted, and the mist is flowed into the deposition chamber while maintaining the chamber at ambient temperature to deposit a layer of the precursor liquid on the substrate. The liquid is dried, baked, and annealed to form a thin film of a layered superlattice material, such as strontium bismuth tantalate, on the substrate. Then an integrated circuit is completed to include at least a portion of the layered superlattice material film in a component of the integrated circuit.
    Type: Grant
    Filed: June 16, 1997
    Date of Patent: December 8, 1998
    Assignees: Symetrix Corporation, Matsushita Electronics Corporation
    Inventors: Gary F. Derbenwick, Larry D. McMillan, Narayan Solayappan, Michael C. Scott, Carlos A. Paz de Araujo, Shinichiro Hayashi
  • Patent number: 5843516
    Abstract: A precursor liquid comprising several metal 2-ethylhexanoates, such as strontium, tantalum and bismuth 2-ethylhexanoates, in a xylenes/methyl ethyl ketone solvent is prepared, a substrate is placed within a vacuum deposition chamber, a small amount of hexamethyl-disilazane is added to the precursor liquid is misted, and the mist is flowed into the deposition chamber while maintaining the chamber at ambient temperature to deposit a layer of the precursor liquid on the substrate. The liquid is dried, baked, and annealed to form a thin film of a layered superlattice material, such as strontium bismuth tantalate, on the substrate. Then an integrated circuit is completed to include at least a portion of the layered superlattice material film in a component of the integrated circuit.
    Type: Grant
    Filed: September 16, 1996
    Date of Patent: December 1, 1998
    Assignees: Symetrix Corporation, Matsushita Electronics Corporation
    Inventors: Gary F. Derbenwick, Larry D. McMillan, Narayan Solayappan, Michael C. Scott, Carlos A. Paz de Araujo, Shinichiro Hayashi
  • Patent number: 5759923
    Abstract: A precursor liquid comprising silicon in a xylenes solvent is prepared, a substrate is placed within a vacuum deposition chamber, the precursor liquid is misted, and the mist is flowed into the deposition chamber while maintaining the chamber at ambient temperature to deposit a layer of the precursor liquid on the substrate. The liquid is dried, baked, and annealed to form a thin film of silicon dioxide or silicon glass on the substrate. Then an integrated circuit is completed to include at least a portion of the silicon dioxide or silicon glass layer as an insulator for an electronic device in the integrated circuit.
    Type: Grant
    Filed: March 14, 1996
    Date of Patent: June 2, 1998
    Assignees: Symetrix Corporation, Matsushita Electronics Corporation
    Inventors: Larry D. McMillan, Michael C. Scott, Carlos A. Paz de Araujo, Tatsuo Otsuki, Shinichiro Hayashi
  • Patent number: 5187456
    Abstract: A line filter arranged in such a manner that a foil conductors are used as the coil conductor and the shield plate, and a reactor is formed therein by laminating and winding the foil conductor and the shield plate with an insulating material held therebetween. A line filter arranged in such a manner that a pair of coil blocks connected to each other in parallel is provided on the iron core leg is included in the scope of the invention. Each of the coil blocks is structured in such a manner that the coil conductor and the shield plate made of the foil conductors are stacked and wound via the insulating material. A structure is included within the scope of the invention, the structure having a plurality of filter mechanisms connected to one another in series, each of the filter mechanisms being constituted by a pair of coil blocks connected to each other in parallel.
    Type: Grant
    Filed: September 24, 1990
    Date of Patent: February 16, 1993
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventor: Shinichiro Hayashi