Abstract: Compositions suitable for forming oxymetal hardmask layers are provided. Methods of forming oxymetal hardmask layers using such compositions are also provided, where the surface of the oxymetal hardmask layer formed has a water contact angle substantially matched to that of subsequently applied organic coatings.

Abstract: Provided are compositions and methods for trimming a photoresist pattern. The photoresist pattern trimming composition comprises: a matrix polymer comprising a unit formed from a monomer of the following general formula (I): wherein: R1 is chosen from hydrogen, fluorine, C1-C3 alkyl and C1-C3 fluoroalkyl; R2 is chosen from C1-C15 alkylene; and R3 is chosen from C1-C3 fluoroalkyl; an aromatic acid that is free of fluorine; and a solvent. The compositions and methods find particular applicability in the manufacture of semiconductor devices.

Abstract: Polymeric reaction products of certain aromatic alcohols with certain aromatic aldehydes are useful as underlayers in semiconductor manufacturing processes.

Abstract: A compound having the formula (I): wherein a is an integer of from 1 to 10, and x is an integer of from 1 to 3, X1 comprises a fluoroalcohol, fluorinated ester, or fluorinated anhydride, Y is a single bond, C1-20 alkylene group, O, S, NR, ester, carbonate, sulfonate, sulfone, or sulfonamide, wherein R is H or C1-20 alkyl, and wherein the C1-20 alkylene group is structurally only carbon, or one or more structural carbon atoms in the C1-20 alkylene group is replaced by oxygen, carbonyl, ester, or a combination comprising at least one of the foregoing, Ar is a substituted or unsubstituted, C5 or greater monocyclic, polycyclic, or fused polycyclic cycloalkyl; or a substituted or unsubstituted, C5 or greater monocyclic, polycyclic, or fused polycyclic aryl group, wherein the cycloalkyl or aryl is a carbocycle or comprises a heteroatom comprising O, S, N, F, or a combination comprising at least one of the foregoing, each R1 is independently a substituted C5-40 aryl, substituted C5-40 heteroaryl, C1-40 alkyl, a

Abstract: This invention provides a composition containing an organometallic compound having a chromophore moiety in the metal polymer backbone which allows a wider range of n/k values such that substrate reflectivity can be controlled under various conditions.

Abstract: A toner container includes a substantially tetrahedral toner-containing portion having an openable edge to discharge toner contained in the toner-containing portion, and a reference fold along which the toner container is foldable after the openable edge is opened. The reference fold extends from the openable edge and is provided on medians of two triangular faces of the toner-containing portion adjoining each other along the openable edge.

Abstract: A photoacid generator compound has the formula (I): [A—(CHR1)p]k-(L)—(CH2)m—(C(R2)2)nSO3?Z+??(I) wherein A is a substituted or unsubstituted, monocyclic, polycyclic, or fused polycyclic C5 or greater cycloaliphatic group optionally comprising O, S, N, F, or a combination comprising at least one of the foregoing, R1 is H, a single bond, or a substituted or unsubstituted C1-30 alkyl group, wherein when R1 is a single bond, R1 is covalently bonded to a carbon atom of A, each R2 is independently H, F, or C1-4 fluoroalkyl, wherein at least one R2 is not hydrogen, L is a linking group comprising a sulfonate group, a sulfonamide group, or a C1-30 sulfonate or sulfonamide-containing group, Z is an organic or inorganic cation, p is an integer of 0 to 10, k is 1 or 2, m is an integer of 0 or greater, and n is an integer of 1 or greater.

Abstract: A photoacid generator compound has the formula (I): [A-(CHR1)p]k-(L)-(CH2)m—(C(R2)2)n—SO3?Z+??(I) wherein A is a substituted or unsubstituted, monocyclic, polycyclic, or fused polycyclic C5 or greater cycloaliphatic group optionally comprising O, S, N, F, or a combination comprising at least one of the foregoing, R1 is H, a single bond, or a substituted or unsubstituted C1-30 alkyl group, wherein when R1 is a single bond, R1 is covalently bonded to a carbon atom of A, each R2 is independently H, F, or C1-4 fluoroalkyl, wherein at least one R2 is not hydrogen, L is a linking group comprising a sulfonate group, a sulfonamide group, or a C1-30 sulfonate or sulfonamide-containing group, Z is an organic or inorganic cation, p is an integer of 0 to 10,k is 1 or 2, m is an integer of 0 or greater, and n is an integer of 1 or greater.

Abstract: Compositions suitable for forming oxymetal hardmask layers are provided. Methods of forming oxymetal hardmask layers using such compositions are also provided, where the surface of the oxymetal hardmask layer formed has a water contact angle substantially matched to that of subsequently applied organic coatings.

Abstract: A compound having the formula (I): wherein a is an integer of from 1 to 10, and x is an integer of from 1 to 3, X1 comprises a fluoroalcohol, fluorinated ester, or fluorinated anhydride, Y is a single bond, C1-20 alkylene group, O, S, NR, ester, carbonate, sulfonate, sulfone, or sulfonamide, wherein R is H or C1-20 alkyl, and wherein the C1-20 alkylene group is structurally only carbon, or one or more structural carbon atoms in the C1-20 alkylene group is replaced by oxygen, carbonyl, ester, or a combination comprising at least one of the foregoing, Ar is a substituted or unsubstituted, C5 or greater monocyclic, polycyclic, or fused polycyclic cycloalkyl; or a substituted or unsubstituted, C5 or greater monocyclic, polycyclic, or fused polycyclic aryl group, wherein the cycloalkyl or aryl is a carbocycle or comprises a heteroatom comprising O, S, N, F, or a combination comprising at least one of the foregoing, each R1 is independently a substituted C5-40 aryl, substituted C5-40 heteroaryl, C1-40 alkyl, a

Abstract: A photoresist composition comprises an acid-sensitive polymer, and a cyclic sulfonium compound having the formula: (Ra)1—(Ar)—S+(—CH2—)m·?O3S—(CRb2)n-(L)p-X wherein each Ra is independently a substituted or unsubstituted C1-30 alkyl group, C6-30 aryl group, C7-30 aralkyl group, or combination comprising at least one of the foregoing, Ar is a monocyclic, polycyclic, or fused polycyclic C6-30 aryl group, each Rb is independently H, F, a linear or branched C1-10 fluoroalkyl or a linear or branched heteroatom-containing C1-10 fluoroalkyl, L is a C1-30 linking group optionally comprising a heteroatom comprising O, S, N, F, or a combination comprising at least one of the foregoing heteroatoms, X is a substituted or unsubstituted, C5 or greater monocyclic, polycyclic or fused polycyclic cycloaliphatic group, optionally comprising a heteroatom comprising O, S, N, F, or a combination comprising at least one of the foregoing, and 1 is an integer of 0 to 4, m is an integer of 3 to 20, n is an integer of 0 to 4, and p

Abstract: A semiconductive member including an alkali metal salt having the formula (M)n.X in a surface layer thereof. M represents Na+, K+, or Li+; X represents Cl?, Br?, I?, F?, CH3COO?, CF3COO?, CH(COOH)CHCOO?, (CHCOO?)2, CH2(COOH)CH2COO?, (CH2COO?)2, (HOOC)Ar(COO?), Ar(COO?)2, (HOOC)2Ar(COO?), (HOOC)Ar(COO?)2, Ar(COO?)3, (HOOC)3Ar(COO?), (HOOC)2Ar(COO?)2, (HOOC)Ar(COO?)3, Ar(COO?)4, Ar—SO3?, Ar(SO3?)2, an oligomer or a polymer having an acrylic acid anion unit, or an oligomer or a polymer having an methacrylic acid anion unit; Ar represents a benzene ring, a naphthalene ring, or a biphenyl ring; and n is a numeral equivalent to the anionic valence of X.

Abstract: New photoresist compositions are provided that comprise one or more materials that have base-reactive groups and are particularly useful for dry lithography. Particularly preferred photoresists of the invention can exhibit reduced defects following development of a coating layer of the resist.

Abstract: This invention relates to new photoacid generator compounds and photoresist compositions that comprise such compounds. In particular, the invention relates to photoacid generator compounds that comprise base-cleavable groups.

Abstract: A developing device develops an electrostatic latent image formed on an image carrier with toner. The developing device includes a developer carrier, a developer supplying unit that supplies a developer on the developer carrier, a layer shaping member that shapes the developer supplied on the developer carrier into a thin layer, and an electric-field control member that is arranged downstream of a shaping nip formed between the developer carrier and the layer shaping member and that controls an intensity of an electric field generated between the developer carrier and the layer shaping member.

Abstract: A developing device for developing an electrostatic latent image on an image carrier by supplying a one-component developer to the image carrier. Good images can be obtained over long periods of time, without printing history becoming apparent on account of residual developer. The developing device has a developer carrier that is rotatable and disposed facing an image carrier; and a conductive developer supply and recovery member rotatably arranged so as to abut the developer carrier. The rotation direction of the conductive developer supply and recovery member is opposite to the rotation direction of the developer carrier at a position where the developer carrier and the conductive developer supply and recovery member abut each other. A contact pressure P between the developer carrier and the conductive developer supply and recovery member is set so as to satisfy the relationship 0 (kPa)<P<5.0 (kPa).

Abstract: A developer regulating member capable of stably regulating the thickness of a developer even when used for a long time, while preventing the increase in the production cost, a developing device having the developer regulating member, an image forming apparatus having the developing device, a process cartridge, and a method of producing the developer regulating member. The average crystal particle diameter D [?m] of a plate-like member provided in a layer-thinning blade which functions as the developer regulating member and which abuts against a developing roller functioning as a developer carrier, and the curvature radius R [?m] of a bent portion satisfy the relationship of D?60.53×R×10?3?12.61.

Abstract: A developing device that prevents the formation of agglomerated masses of developing agent in the bottom of the developing agent housing chamber near the developing roller and the supply roller, and that maintains the fluidity of the developing agent in the bottom of the developing agent housing chamber, while minimizing any increase in size of the developing device.

Abstract: A developing device that can reliably supply toner from a toner supply roller to a developing roller and that does not generate scraping irregularities in the toner thin layer on the developing roller, and a process cartridge and an image forming apparatus having the same. The developing device has: a toner supply chamber; a developing roller provided in the toner supply chamber; a toner supply roller provided in the toner supply chamber for supplying toner to the developing roller; and a layer regulation member for forming the toner on the developing roller into a thin layer, and develops electrostatic latent images on an image carrier by applying bias voltage to the developing roller. An intermediate contact member is interposed between the developing roller and the toner supply roller.

Abstract: An image developing method is disclosed that is able to efficiently remove degraded toner on a developing agent carrier, prevent formation of abnormal images, ensure good image quality over time, and increase the service life of the device. The developing method includes a step of calculating an amount of consumption of the developing agent during image formation and an amount of consumption of the developing agent in a compulsory toner consumption mode under different calculation conditions between the image formation and the compulsory toner consumption mode. In the compulsory toner consumption mode, a developing bias different from a developing bias used during image formation is applied for a predetermined time period to discharge residual developing agent on a developing agent carrier to a latent image carrier.