Abstract: An aspherical reference surface 2 is manufactured with such a shape accuracy that an interference band appears according to the aspherical shape of a surface 1 to be measured, an aspherical wave front 3 is formed using the reference surface, and a large aspherical surface is measured from interference within a short time. The aspherical reference surface is an aspherical surface optical element 10 manufactured by fly-cutting or ELID-grinding, that produces the interference band from light reflected from the aspherical surface and predetermined reference light, and thereby measures the shape of the aspherical surface from interference. The aspherical surface optical element should be an aspherical reflecting mirror with such a shape accuracy that an interference band is generated and parallel light is reflected in the direction normal to the surface to be measured. Thus, the shape can be measured in a short time without using an aspherical surface standard.

Abstract: A probe head 10 and a laser interferometric displacement meter 20 are provided. The probe head supports a probe 2 that is capable of contacting a workpiece 1, that is free to move in the direction of the workpiece, and drives the probe towards the workpiece. The displacement meter measures the displacement of the probe with a high accuracy without contact. The probe head 10 is also provided with a probe shaft 12 with steps 11a, 11b at intermediate portions thereof and air bearings 14a, 14b that support the probe shaft on each side of the steps. The air bearings have a high stiffness in the radial direction, and the probe shaft is made to float by using compressed air, thus the resistance of the shaft to sliding is reduced. In addition, another compressed air is supplied to the location of the step and produces a driving force in the direction of the workpiece due to the difference of cross sectional areas on each side of the step, that provides a very small load within a predetermined range.

Abstract: An electrolytic in-process dressing device 10 is provided with a disk-shaped metal-bonded grindstone 2 with a surface 2a with a circular arc shape with a radius R at its outer periphery and a numerical control device 16. The disk-shaped metal-bonded grindstone 2 rotates around an axis Y, and the grindstone is dressed electrolytically while the device 10 grinds the workpiece 1. The numerical control device 16 is provided with a rotary truing device 12 that rotates around the X axis that orthogonally crosses the axis of rotation Y and trues the circular arc surface 2a, a shape measuring device 14 for measuring the shape of the circular arc surface of the grindstone and the shape of the processed surface of workpiece 1 on the machine, and controls the grindstone numerically in the three directions along the axes X, Y and Z. The numerical control device 16 moves the grindstone in three axial directions and repeats the operations of truing, grinding and measurements on-line.

Abstract: A substrate processing apparatus can efficiently use a gas supplied into a reaction tube by improving a shape of a gas nozzle. A cylinder reaction tube 12 is vertically disposed, and openings of a furnace opening flange 13 is airtightly sealed with a seal cap 14, and a boat 15 onto which wafers W as substrates are loaded in a multi-storied fashion is inserted into the reaction tube 12. A gas is supplied from a nozzle 21 to a plurality of wafers W in the cylindrical reaction tube 12 to deposit a thin film on the wafers W. The nozzle 21 is provided creepingly along an inner wall 22 of the tube in a tube axial direction of the cylinder reaction tube 12. In addition, the nozzle 21 has a nozzle space therein which has an extent of 45° or more and 180° or less in a circumferential direction within the tube. A plurality of gas nozzle openings 24 of the nozzle 21 are provided such that the nozzle openings 24 correspond to the respective wafers W so that a gas flows on the respective wafers W.

Abstract: A voltage is applied between a cylindrical cutting grindstone 2 that rotates about a vertical axis Y and a cylindrical truing grindstone 6 that rotates about a horizontal axis X. The vertical outer surface 2a and the horizontal lower surface 2b of the cutting grindstone are trued by a plasma discharge. Then without applying the voltage, the cutting grindstone 2 is trued mechanically by the truing grindstone 6, and while the outer periphery and lower surface of the cutting grindstone are dressed electrolytically, the outer periphery and lower surface are made to contact a workpiece 1 and process a micro-V groove. This method makes it possible to produce an immersion grating with a high resolution using hard, brittle materials such as germanium, gallium arsenide and lithium niobate.

Abstract: A rotating table 2 that holds a flat neutron lens component 1 and rotates about an axis of rotation Z, a circular-disk type of metal-bonded grinding wheel 3 with tapering surface 3a on the outer periphery thereof, a grinding wheel driving device 4 drives and rotates the grinding wheel around the axis A thereof, an electrode 5 with a surface close to the single tapering surface or the plurality of tapering surfaces of the grinding wheel, a power source 6 that applies an electrolytic voltage between the grinding wheel and the electrode, and a grinding fluid feeder 8 that supplies a conducting grinding fluid between the grinding wheel and the electrode are provided.

Abstract: A magnetic recording and reproducing apparatus according to the invention involves unloading a magnetic tape after the tape is positioned to one of its unloading regions which is located approximately in the middle of a lengthwise tape area where user data have been recorded. Such unloading regions are located at predetermined intervals along the magnetic tape. Through designation of an operation mode, the apparatus of the invention also permits selecting one of two unloading regions to which the magnetic tape is positioned before being unloaded. One of the two regions is located approximately in the middle of the user data-packed tape area, the other region designated by a host device. This manner of unloading allows the inventive apparatus to access desired locations on the magnetic tape at a significantly higher speed than conventional devices.

Abstract: An electrolytic in-process dressing device 10 is provided with a disk-shaped metal-bonded grindstone 2 with a surface 2a with a circular arc shape with a radius R at its outer periphery and a numerical control device 16. The disk-shaped metal-bonded grindstone 2 rotates around an axis Y, and the grindstone is dressed electrolytically while the device 10 grinds the workpiece 1. The numerical control device 16 is provided with a rotary truing device 12 that rotates around the X axis that orthogonally crosses the axis of rotation Y and trues the circular arc surface 2a, a shape measuring device 14 for measuring the shape of the circular arc surface of the grindstone and the shape of the processed surface of workpiece 1 on the machine, and controls the grindstone numerically in the three directions along the axes X, Y and Z. The numerical control device 16 moves the grindstone in three axial directions and repeats the operations of truing, grinding and measurements on-line.

Abstract: A voltage is applied between a cylindrical cutting grindstone 2 that rotates about a vertical axis Y and a cylindrical truing grindstone 6 that rotates about a horizontal axis X. The vertical outer surface 2a and the horizontal lower surface 2b of the cutting grindstone are trued by a plasma discharge. Then without applying the voltage, the cutting grindstone 2 is trued mechanically by the truing grindstone 6, and while the outer periphery and lower surface of the cutting grindstone are dressed electrolytically, the outer periphery and lower surface are made to contact a workpiece 1 and process a micro-V groove. This method makes it possible to produce an immersion grating with a high resolution using hard, brittle materials such as germanium, gallium arsenide and lithium niobate.

Abstract: The present invention is constituted so as to improve a quartz gas supply portion utilized in a normal pressure furnace, and to keep to a minimum the damage incurred by a normal pressure furnace by the shock from an earthquake. Quartz gas supply piping 25 for supplying a reactant gas is connected to a quartz reaction tube 4, which constitutes a furnace body. A stress concentration portion 23 for concentrating stress by prioritizing another location when vibration occurs in a furnace body is formed on this gas supply piping 25. The stress concentration portion 23 is disposed on the side of a source-side gas supply pipe 8, which is in front of a pipe clamp 21 that connects the source-side gas supply pipe 8 to a reaction tube-side gas supply pipe 7 mounted to the reaction tube 4. As a stress concentration portion 23, the simplest of V-grooves can be formed in the circumferential direction.

Abstract: A re-recording/re-reproducing device cleans both the magnetic tape and head of dregs which cause errors in writing and reading. A magnetic head records and reproduces input digital data to and from a magnetic tape at a normal speed. When an error in writing or reading the input digital data is detected, the tape is moved to a position where the error is detected and the magnetic head re-records/re-reproduces the input digital data to and from the magnetic tape, but does so at a speed higher than the normal speed of recording/reproducing, resulting in the removal of the dregs from the magnetic tape and head.

Abstract: A data recording apparatus is adapted to write and read digital data on and from a recording medium such as a tape, a disk or the like driven by a driving mechanism, so as to be applicable to recording of computer data, collection of experiment data in a variety of experiment instruments, recording of a variety of observation data, and so on. For writing and reading data while controlling the driving mechanism to run and stop the recording medium, a buffer memory is provided in order to coordinate a data recording or reproduction effected on the recording medium with a data transfer speed of a data transferred from and to an external apparatus such as a host computer. The data recording and reproducing amount and the operation of the driving mechanism are controlled based on the data transfer speed of data transferred to the buffer memory.

Abstract: A data recording apparatus is adapted to write and read digital data on and from a recording medium such as a tape, a disk or the like driven by a driving mechanism, so as to be applicable to recording of computer data, collection of experiment data in a variety of experiment instruments, recording of a variety of observation data, and so on. For writing and reading data while controlling the driving mechanism to run and stop the recording medium, a buffer memory is provided in order to coordinate a data recording or reproduction effected on the recording medium with a data transfer speed of a data transferred from and to an external apparatus such as a host computer. The data recording and reproducing amount and the operation of the driving mechanism are controlled based on the data transfer speed of data transferred to the buffer memory.

Abstract: A data recorder having a self-diagnostic function using a magnetic tape accommodated in a case (or cassette). The case is provided with holes indicating a grade of the magnetic tape. When the magnetic tape unit is loaded (mounted) in the data recorder, the holes are detected and identified. When the identified grade is that for the self-diagnosis, the self-diagnosis is executed using that magnetic tape. Cleaning of a head is also carried out using the identified cleaning magnetic tape.

Abstract: A self diagnosis method and control apparatus for positive self diagnosis of equipment having complicatedly interlaced mechanical portions. Equipment under diagnosis is divided into a plurality of areas under diagnosis, each of which is assigned an evaluation variable. Diagnosis is executed in units of diagnostic steps classified for each area under diagnosis. Based on an execution result, points are allotted to the evaluation variable. Based on the evaluation variable, or a sum of allotted points, each area under diagnosis is diagnosed and a diagnostic result is displayed for self diagnosis. Meanwhile, those diagnostic steps which are determined invalid by an execution result of another diagnostic step will not be executed. The equipment under diagnosis includes those which contain mechanical portions.

Abstract: A data reproducing device for reproducing a positional information track formed in the longitudinal direction of a magnetic tape according to the present invention is capable of easily correcting regenerative positional information on the basis of count information even when the regenerative information is not obtained from the positional information tack by obtaining the count information consisting of the number so updating operations of positional information in accordance with a first clock generated based on the regenerative positional information acquired from the positional information track formed in the longitudinal direction of the magnetic tape and with a second clock generated based on rotation frequencies of tape reels for driving the magnetic tape.