Patents by Inventor Shuangqiang Luo
Shuangqiang Luo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12315803Abstract: A microelectronic device comprises pillar structures comprising semiconductive material, contact structures in physical contact with upper portions of the pillar structures, and conductive structures over and in physical contact with the contact structures. Each of the conductive structures comprises an upper portion having a first width, and a lower portion vertically interposed between the upper portion and the contact structures. The lower portion has a tapered profile defining additional widths varying from a second width less than the first width at an uppermost boundary of the lower portion to a third width less than the second width at a lowermost boundary of the lower portion. Memory devices, electronic systems, and methods of forming microelectronic devices are also described.Type: GrantFiled: December 29, 2023Date of Patent: May 27, 2025Assignee: Lodestar Licensing Group LLCInventors: Shuangqiang Luo, Indra V. Chary
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Patent number: 12315801Abstract: A microelectronic device comprises a stack structure, contact structures, and additional contact structures. The stack structure comprises a vertically alternating sequence of conductive material and insulative material arranged in tiers. The stack structure is divided into blocks each comprising a stadium structure including steps comprising horizontal ends of the tiers. The contact structures are within a horizontal area of the stadium structure and vertically extend through the stack structure. The additional contact structures are on at least some of the steps of the stadium structure and are coupled to the contact structures. Memory devices and electronic devices are also disclosed.Type: GrantFiled: June 16, 2021Date of Patent: May 27, 2025Assignee: Micron Technology, Inc.Inventors: Indra V. Chary, Shuangqiang Luo, Lifang Xu
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Patent number: 12295140Abstract: A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Strings of memory cells comprise channel-material strings that extend through the insulative tiers and the conductive tiers in the memory blocks. A through-array-via (TAV) region comprises TAV constructions that extend through the insulative tiers and the conductive tiers. The TAV constructions individually comprise a radially-outer insulative lining and a conductive core radially-inward of the insulative lining. The insulative lining comprises a radially-inner insulative material and a radially-outer insulative material that are of different compositions relative one another. The radially-outer insulative material is in radially-outer recesses that are in the first tiers as compared to the second tiers. The radially-inner insulative material extends elevationally along the insulative tiers and the conductive tiers.Type: GrantFiled: November 23, 2021Date of Patent: May 6, 2025Assignee: Micron Technology, Inc.Inventors: Jordan D. Greenlee, Allen McTeer, Rita J. Klein, John D. Hopkins, Nancy M. Lomeli, Xiao Li, Alyssa N. Scarbrough, Jiewei Chen, Naiming Liu, Shuangqiang Luo, Silvia Borsari, John Mark Meldrim, Shen Hu
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Publication number: 20250126791Abstract: A method of forming a microelectronic device comprises forming a microelectronic device structure. The microelectronic device structure comprises a stack structure comprising insulative structures and additional insulative structures vertically alternating with the insulative structures, a dielectric structure vertically extending partially through the stack structure, and a dielectric material vertically overlying and horizontally extending across the stack structure and the dielectric structure. Portions of at least the dielectric material and the dielectric structure are removed to form a trench vertically overlying and at least partially horizontally overlapping a remaining portion of the dielectric structure. The trench is substantially filled with additional dielectric material. Microelectronic devices, memory devices, and electronic systems are also described.Type: ApplicationFiled: December 18, 2024Publication date: April 17, 2025Inventors: Shuangqiang Luo, Indra V. Chary, Justin B. Dorhout
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Patent number: 12278180Abstract: A method used in forming a memory array comprising strings of memory cells comprises forming a stack comprising vertically-alternating first tiers and second tiers having channel-material strings therein. Conductive vias are formed through insulating material that is directly above the channel-material strings. Individual of the conductive vias are directly electrically coupled to individual of the channel-material strings. After forming the conductive vias, horizontally-elongated trenches are formed into the stack to form laterally-spaced memory-block regions. Intervening material is formed in the trenches laterally-between and longitudinally-along the immediately-laterally-adjacent memory-block regions. Additional methods and structures independent of method are disclosed.Type: GrantFiled: October 21, 2021Date of Patent: April 15, 2025Inventors: Harsh Narendrakumar Jain, Shuangqiang Luo
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Patent number: 12266569Abstract: Integrated circuitry comprises vertical conductive vias individually having a lower portion thereof that is directly against conductor material of islands. The islands comprise multiple different composition materials directly above the conductor material. Apart from the conductive vias, the islands individually comprise at least one of (a), (b), or (c), where: (a): a top material that is of different composition from all material that is vertically between the top material and the conductor material; (b): the top material having its top surface in a vertical cross-section extending laterally-outward beyond two opposing laterally-outermost edges of a top surface of the material that is immediately directly below the top material; and (c): is of different composition from that of an upper portion of the conductor material and including a portion thereof that is elevationally coincident with the conductor material or that is directly against the conductor material.Type: GrantFiled: January 18, 2024Date of Patent: April 1, 2025Assignee: Micron Technology, Inc.Inventors: John D. Hopkins, Shuangqiang Luo, Alyssa N. Scarbrough
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Publication number: 20250098158Abstract: A microelectronic device comprises a stack structure, slot structures vertically extending completely through the stack structure, and support pillar structures vertically extending through the stack structure. The stack structure comprises tiers vertically stacked relative to one another, each tier including a conductive material and insulative material vertically neighboring the conductive material. The stack structure includes a staircase structure therein comprising steps defined by edges of at least some of the tiers. The support pillar structures are arranged in rows horizontally extending in a first direction. The slot structures divide the stack structure into block structures. The microelectronic device further comprises additional slot structures within a horizontal area of one of the block structures. The additional slot structures include a first additional slot structure at least partially intersecting one of the rows of the support pillar structures.Type: ApplicationFiled: December 3, 2024Publication date: March 20, 2025Inventors: Shuangqiang Luo, Brett D. Lowe
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Publication number: 20250056802Abstract: Some embodiments include an assembly having conductive structures distributed along a level within a memory array region and another region proximate the memory array region. The conductive structures include a first stack over a metal-containing region. A semiconductor material is within the first stack. A second stack is over the conductive structures, and includes alternating conductive tiers and insulative tiers. Cell-material-pillars are within the memory array region. The cell-material-pillars include channel material. The semiconductor material directly contacts the channel material. Conductive post structures are within the other region. Some of the conductive post structures are dummy structures and have bottom surfaces which are entirely along an insulative oxide material. Others of the conductive post structures are live posts electrically coupled with CMOS circuitry. Some embodiments include methods of forming assemblies.Type: ApplicationFiled: October 29, 2024Publication date: February 13, 2025Applicant: Micron Technology, Inc.Inventors: Shuangqiang Luo, Dong Wang, Rui Zhang, Da Xing, Xiao Li, Pei Qiong Cheung, Xiao Zeng
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Patent number: 12224240Abstract: A microelectronic device, including a stack structure including alternating conductive structures and dielectric structures is disclosed. Memory pillars extend through the stack structure. Contacts are laterally adjacent to the memory pillars and extending through the stack structure. The contacts including active contacts and support contacts. The active contacts including a liner and a conductive material. The support contacts including the liner and a dielectric material. The conductive material of the active contacts is in electrical communication with the memory pillars. Methods and electronic systems are also disclosed.Type: GrantFiled: August 9, 2021Date of Patent: February 11, 2025Assignee: Micron Technology, Inc.Inventors: S M Istiaque Hossain, Indra V. Chary, Anilkumar Chandolu, Sidhartha Gupta, Shuangqiang Luo
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Publication number: 20250024673Abstract: A microelectronic device comprising a stack structure comprising a non-staircase region, a staircase region, and an array region. Each of the non-staircase region, the staircase region, and the array region comprises tiers of alternating conductive materials and dielectric materials. One or more pillars are in the non-staircase region and in the array region, and one or more supports are in the staircase region. A conductive material is in each of the non-staircase region, the staircase region, and the array region and extends vertically into a source adjacent to the tiers. The source comprises corrosion containment features in each of the non-staircase region, the staircase region, and the array region, adjacent to the conductive material in the source. Additional microelectronic devices, electronic systems, and methods are also disclosed.Type: ApplicationFiled: September 25, 2024Publication date: January 16, 2025Inventors: Shuangqiang Luo, Indra V. Chary
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Publication number: 20250017007Abstract: A method of forming a microelectronic device includes forming a microelectronic device structure. The microelectronic device structure includes a stack structure comprising insulative structures and electrically conductive structures vertically alternating with the insulative structures, pillar structures extending vertically through the stack structure, an etch stop material vertically overlaying the stack structure, and a first dielectric material vertically overlying the etch stop material. The method further includes removing portions of the first dielectric material, the etch stop material, and an upper region of the stack structure to form a trench interposed between horizontally neighboring groups of the pillar structures, forming a liner material within the trench, and substantially filling a remaining portion of the trench with a second dielectric material to form a dielectric barrier structure.Type: ApplicationFiled: July 6, 2023Publication date: January 9, 2025Inventors: Shuangqiang Luo, Indra V. Chary, Nancy M. Lomeli, Xiao Li
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Patent number: 12185546Abstract: A method of forming a microelectronic device comprises forming a microelectronic device structure. The microelectronic device structure comprises a stack structure comprising insulative structures and additional insulative structures vertically alternating with the insulative structures, a dielectric structure vertically extending partially through the stack structure, and a dielectric material vertically overlying and horizontally extending across the stack structure and the dielectric structure. Portions of at least the dielectric material and the dielectric structure are removed to form a trench vertically overlying and at least partially horizontally overlapping a remaining portion of the dielectric structure. The trench is substantially filled with additional dielectric material. Microelectronic devices, memory devices, and electronic systems are also described.Type: GrantFiled: June 28, 2023Date of Patent: December 31, 2024Assignee: Loestar Licensing Group LLCInventors: Shuangqiang Luo, Indra V. Chary, Justin B. Dorhout
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Patent number: 12178041Abstract: A microelectronic device comprises a stack structure comprising a vertically alternating sequence of conductive structures and insulative structures arranged in tiers, the stack structure divided into block structures separated from one another by slot structures, a staircase structure within the stack structure having steps comprising horizontal edges of the tiers, conductive contact structures in contact with the steps of the staircase structure, support pillar structures extending through the stack structure, and additional slot structures extending partially through the stack structure within one of the block structures, one of the additional slot structures extending between horizontally neighboring support pillar structures and closer to one of the horizontally neighboring support pillar structures than to an additional one of the horizontally neighboring support pillar structures. Related microelectronic devices, memory devices, and electronic systems are also described.Type: GrantFiled: January 10, 2023Date of Patent: December 24, 2024Assignee: Micron Technology, Inc.Inventors: Shuangqiang Luo, Brett D. Lowe
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Publication number: 20240422980Abstract: A microelectronic device comprises a stack structure, at least one staircase structure, contact structures, and support structures. The stack structure comprises vertically alternating conductive structures and insulating structures arranged in tiers, each of the tiers individually comprising one of the conductive structures and one of the insulating structures. The at least one staircase structure is within the stack structure and has steps comprising edges of at least some of the tiers. The contact structures are on the steps of the at least one staircase structure. The support structures horizontally alternate with the contact structures in a first horizontal direction and vertically extend through the stack structure. The support structures have oblong horizontal cross-sectional shapes. Additional microelectronic devices, memory devices, and electronic systems are also described.Type: ApplicationFiled: August 28, 2024Publication date: December 19, 2024Inventors: Shuangqiang Luo, Xuan Li, Adeline Yii
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Patent number: 12167604Abstract: Some embodiments include an assembly having conductive structures distributed along a level within a memory array region and another region proximate the memory array region. The conductive structures include a first stack over a metal-containing region. A semiconductor material is within the first stack. A second stack is over the conductive structures, and includes alternating conductive tiers and insulative tiers. Cell-material-pillars are within the memory array region. The cell-material-pillars include channel material. The semiconductor material directly contacts the channel material. Conductive post structures are within the other region. Some of the conductive post structures are dummy structures and have bottom surfaces which are entirely along an insulative oxide material. Others of the conductive post structures are live posts electrically coupled with CMOS circuitry. Some embodiments include methods of forming assemblies.Type: GrantFiled: October 19, 2023Date of Patent: December 10, 2024Assignee: Micron Technology, Inc.Inventors: Shuangqiang Luo, Dong Wang, Rui Zhang, Da Xing, Xiao Li, Pei Qiong Cheung, Xiao Zeng
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Patent number: 12127400Abstract: A microelectronic device comprising a stack structure comprising a non-staircase region, a staircase region, and an array region. Each of the non-staircase region, the staircase region, and the array region comprises tiers of alternating conductive materials and dielectric materials. One or more pillars are in the non-staircase region and in the array region, and one or more supports are in the staircase region. A conductive material is in each of the non-staircase region, the staircase region, and the array region and extends vertically into a source adjacent to the tiers. The source comprises corrosion containment features in each of the non-staircase region, the staircase region, and the array region, adjacent to the conductive material in the source. Additional microelectronic devices, electronic systems, and methods are also disclosed.Type: GrantFiled: January 24, 2022Date of Patent: October 22, 2024Inventors: Shuangqiang Luo, Indra V. Chary
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METHODS OF FORMING MICROELECTRONIC DEVICES INCLUDING DIFFERENTLY SIZED CONDUCTIVE CONTACT STRUCTURES
Publication number: 20240347464Abstract: A microelectronic device comprises a stack structure comprising insulative structures vertically interleaved with conductive structures, first support pillar structures vertically extending through the stack structure in a first staircase region including steps defined at edges of tiers of the insulative structures and conductive structures, and second support pillar structures vertically extending through the stack structure in a second staircase region including additional steps defined at edges of additional tiers of the insulative structures and conductive structures, the second support pillar structures having a smaller cross-sectional area than the first support pillar structures. Related memory devices, electronic systems, and methods are also described.Type: ApplicationFiled: June 24, 2024Publication date: October 17, 2024Inventors: Lingyu Kong, Lifang Xu, Indra V. Chary, Shuangqiang Luo, Sok Han Wong -
Publication number: 20240341095Abstract: Memory circuitry comprising strings of memory cells comprises vertically-alternating insulative tiers and conductive tiers that extend from a memory-array region into a stair-step region across an intermediate region that is between the memory-array region and the stair-step region. The insulative tiers and the conductive tiers comprise memory blocks upper portions of which individually comprise sub-blocks. Sub-block trenches are in the upper portions individually between immediately-laterally-adjacent of the sub-blocks. Strings of memory cells in the memory-array region comprise channel-material strings that extend through the insulative tiers and the conductive tiers in the memory blocks and in the sub-blocks. The sub-block trenches in the memory-array region, in the intermediate region, and in the stair-step region individually have a top.Type: ApplicationFiled: March 12, 2024Publication date: October 10, 2024Applicant: Micron Technology, Inc.Inventors: Shuangqiang Luo, Indra V. Chary, Kar Wui Thong
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Patent number: 12108600Abstract: A microelectronic device comprises a stack structure, at least one staircase structure, contact structures, and support structures. The stack structure comprises vertically alternating conductive structures and insulating structures arranged in tiers, each of the tiers individually comprising one of the conductive structures and one of the insulating structures. The at least one staircase structure is within the stack structure and has steps comprising edges of at least some of the tiers. The contact structures are on the steps of the at least one staircase structure. The support structures horizontally alternate with the contact structures in a first horizontal direction and vertically extend through the stack structure. The support structures have oblong horizontal cross-sectional shapes. Additional microelectronic devices, memory devices, and electronic systems are also described.Type: GrantFiled: September 25, 2023Date of Patent: October 1, 2024Assignee: Lodestar Licensing Group LLCInventors: Shuangqiang Luo, Xuan Li, Adeline Yii
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Publication number: 20240292623Abstract: A microelectronic device may include a stack structure comprising a vertically alternating sequence of insulative structures and conductive structures, the stack structure divided into block portions. The microelectronic device may additionally include slit structures horizontally interposed between the block portions of the stack structure. Each of the slit structures may include a dielectric liner covering side surfaces of the stack structure and an upper surface of an additional structure underlying the stack structure, and a plug structure comprising at least one metal surrounded by the dielectric liner.Type: ApplicationFiled: April 26, 2024Publication date: August 29, 2024Inventors: Shuangqiang Luo, Indra V. Chary, Justin B. Dorhout