Patents by Inventor Shuangqiang Luo

Shuangqiang Luo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240071495
    Abstract: Memory circuitry comprising strings of memory cells comprises a stack comprising vertically-alternating insulative tiers and conductive tiers. Channel-material strings of memory cells extend through the insulative tiers and the conductive tiers in a memory-array region. The insulative tiers and the conductive tiers extend from the memory-array region into a stair-step region. The stair-step region comprises a cavity comprising a flight of stairs having insulative material atop treads of the stairs. Individual of the treads comprise conducting material of one of the conductive tiers. Conductive vias extend through the insulative material. Individual of the conductive vias are directly above and directly against the conducting material of the respective individual tread. A lining is over sidewalls of the individual conductive vias. The lining has a bottom. The individual conductive vias are directly under the bottom of the lining directly above the conducting material of the respective individual tread.
    Type: Application
    Filed: August 26, 2022
    Publication date: February 29, 2024
    Applicant: Micron Technology, Inc.
    Inventors: Jiewei Chen, Jordan D. Greenlee, Shuangqiang Luo, Silvia Borsari
  • Patent number: 11917817
    Abstract: A microelectronic device comprises a stack structure comprising a vertically alternating sequence of conductive material and insulative material arranged in tiers. The stack structure has blocks separated from one another by first dielectric slot structures. Each of the blocks comprises two crest regions, a stadium structure interposed between the two crest regions in a first horizontal direction and comprising opposing staircase structures each having steps comprising edges of the tiers of the stack structure, and two bridge regions neighboring opposing sides of the stadium structure in a second horizontal direction orthogonal to the first horizontal direction and having upper surfaces substantially coplanar with upper surfaces of the two crest regions. At least one second dielectric slot structure is within horizontal boundaries of the stadium structure in the first horizontal direction and partially vertically extends through and segmenting each of the two bridge regions.
    Type: Grant
    Filed: December 17, 2020
    Date of Patent: February 27, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Shuangqiang Luo, John D. Hopkins, Lifang Xu, Nancy M. Lomeli, Indra V. Chary, Kar Wui Thong, Shicong Wang
  • Patent number: 11915974
    Abstract: Integrated circuitry comprises vertical conductive vias individually having a lower portion thereof that is directly against conductor material of islands. The islands comprise multiple different composition materials directly above the conductor material. Apart from the conductive vias, the islands individually comprise at least one of (a), (b), or (c), where: (a): a top material that is of different composition from all material that is vertically between the top material and the conductor material; (b): the top material having its top surface in a vertical cross-section extending laterally-outward beyond two opposing laterally-outermost edges of a top surface of the material that is immediately directly below the top material; and (c): is of different composition from that of an upper portion of the conductor material and including a portion thereof that is elevationally coincident with the conductor material or that is directly against the conductor material.
    Type: Grant
    Filed: April 12, 2021
    Date of Patent: February 27, 2024
    Assignee: Micron Technology, Inc.
    Inventors: John D. Hopkins, Shuangqiang Luo, Alyssa N. Scarbrough
  • Patent number: 11910598
    Abstract: A microelectronic device comprises a stack structure comprising alternating conductive structures and insulative structures arranged in tiers, the tiers individually comprising one of the conductive structures and one of the insulative structures, first support pillar structures extending through the stack structure within a first region of the microelectronic device, the first support pillar structures electrically isolated from a source structure underlying the stack structure, second support pillar structures extending through the stack structure within a second region of the microelectronic device, the second support pillar structures comprising an electrically conductive material in electrical communication with the source structure, and bridge structures extending between at least some neighboring first support pillar structures of the first support pillar structures. Related memory devices, electronic systems, and methods are also described.
    Type: Grant
    Filed: July 29, 2022
    Date of Patent: February 20, 2024
    Inventors: Shuangqiang Luo, Indra V. Chary, Justin B. Dorhout
  • Patent number: 11901292
    Abstract: A microelectronic device comprises pillar structures comprising semiconductive material, contact structures in physical contact with upper portions of the pillar structures, and conductive structures over and in physical contact with the contact structures. Each of the conductive structures comprises an upper portion having a first width, and a lower portion vertically interposed between the upper portion and the contact structures. The lower portion has a tapered profile defining additional widths varying from a second width less than the first width at an uppermost boundary of the lower portion to a third width less than the second width at a lowermost boundary of the lower portion. Memory devices, electronic systems, and methods of forming microelectronic devices are also described.
    Type: Grant
    Filed: August 11, 2022
    Date of Patent: February 13, 2024
    Inventors: Shuangqiang Luo, Indra V. Chary
  • Patent number: 11901287
    Abstract: Microelectronic devices include a stack structure having a vertically alternating sequence of insulative structures and conductive structures arranged in tiers. At least one stadium, of stadiums within the stack structure, comprise staircase(s) having steps provided by a group of the conductive structures. Step contacts extend to the steps of the staircase(s) of the at least one of the stadiums. Each conductive structure of the group of conductive structures has more than one of the step contacts in contact therewith at at least one of the steps of the staircase(s). Additional microelectronic devices are also disclosed, as are methods of fabrication and electronic systems.
    Type: Grant
    Filed: September 15, 2021
    Date of Patent: February 13, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Shuangqiang Luo, Lifang Xu
  • Patent number: 11903211
    Abstract: A method of forming a microelectronic device comprises forming isolated nitride structures on steps of stair step structures comprising stacked tiers comprising alternating levels of a first insulative material and a second insulative material, forming a photoresist material over some of the stair step structures, and replacing the isolated nitride structures and the second insulative material with an electrically conductive material to respectively form conductive pad structures and electrically conductive lines. Related microelectronic devices and electronic devices are also disclosed.
    Type: Grant
    Filed: January 6, 2022
    Date of Patent: February 13, 2024
    Inventors: Lifang Xu, John D. Hopkins, Roger W. Lindsay, Shuangqiang Luo
  • Publication number: 20240047349
    Abstract: Methods, systems, and devices for support structures for three dimensional memory arrays are described. For example, a portion of a memory die may formed at least in part from a stack of material layers deposited over a substrate, and the memory die may include a set of access lines in a staircase arrangement over the stack. At least a portion of the stack of material layers between the staircase arrangement and the substrate may be configured to be continuous, or uninterrupted, which may result in fewer physical discontinuities in the stack of material layers below the staircase arrangement. In some examples, at least a portion of the stack of material layers (e.g., conductive portions) in such a region may be electrically isolated from other portions of the memory die, which may support aspects of structural support while limiting electrical interaction with the other portions of the memory die.
    Type: Application
    Filed: August 8, 2022
    Publication date: February 8, 2024
    Inventor: Shuangqiang Luo
  • Publication number: 20240049468
    Abstract: Some embodiments include an assembly having conductive structures distributed along a level within a memory array region and another region proximate the memory array region. The conductive structures include a first stack over a metal-containing region. A semiconductor material is within the first stack. A second stack is over the conductive structures, and includes alternating conductive tiers and insulative tiers. Cell-material-pillars are within the memory array region. The cell-material-pillars include channel material. The semiconductor material directly contacts the channel material. Conductive post structures are within the other region. Some of the conductive post structures are dummy structures and have bottom surfaces which are entirely along an insulative oxide material. Others of the conductive post structures are live posts electrically coupled with CMOS circuitry. Some embodiments include methods of forming assemblies.
    Type: Application
    Filed: October 19, 2023
    Publication date: February 8, 2024
    Applicant: Micron Technology, Inc.
    Inventors: Shuangqiang Luo, Dong Wang, Rui Zhang, Da Xing, Xiao Li, Pei Qiong Cheung, Xiao Zeng
  • Publication number: 20240046989
    Abstract: A method used in forming a memory array comprising strings of memory cells comprises forming a lower stack comprising vertically-alternating different-composition lower first tiers and lower second tiers. The lower stack comprises lower channel-material strings extending through the lower first tiers and the lower second tiers. An upper stack is formed directly above the lower stack. The upper stack comprises vertically-alternating different-composition upper first tiers and upper second tiers. The upper stack comprises upper channel-material strings of select-gate transistors. Individual of the upper channel-material strings are directly electrically coupled to individual of the lower channel-material strings. The upper and lower first tiers are conductive at least in a finished-circuitry construction. The upper and lower second tiers are insulative and comprise insulative material.
    Type: Application
    Filed: August 5, 2022
    Publication date: February 8, 2024
    Applicant: Micron Technology, Inc.
    Inventors: Jiewei Chen, Shuangqiang Luo, Lifang Xu
  • Patent number: 11889691
    Abstract: Some embodiments include an assembly having conductive structures distributed along a level within a memory array region and another region proximate the memory array region. The conductive structures include a first stack over a metal-containing region. A semiconductor material is within the first stack. A second stack is over the conductive structures, and includes alternating conductive tiers and insulative tiers. Cell-material-pillars are within the memory array region. The cell-material-pillars include channel material. The semiconductor material directly contacts the channel material. Conductive post structures are within the other region. Some of the conductive post structures are dummy structures and have bottom surfaces which are entirely along an insulative oxide material. Others of the conductive post structures are live posts electrically coupled with CMOS circuitry. Some embodiments include methods of forming assemblies.
    Type: Grant
    Filed: March 24, 2021
    Date of Patent: January 30, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Shuangqiang Luo, Dong Wang, Rui Zhang, Da Xing, Xiao Li, Pei Qiong Cheung, Xiao Zeng
  • Publication number: 20240015971
    Abstract: A microelectronic device comprises a stack structure, at least one staircase structure, contact structures, and support structures. The stack structure comprises vertically alternating conductive structures and insulating structures arranged in tiers, each of the tiers individually comprising one of the conductive structures and one of the insulating structures. The at least one staircase structure is within the stack structure and has steps comprising edges of at least some of the tiers. The contact structures are on the steps of the at least one staircase structure. The support structures horizontally alternate with the contact structures in a first horizontal direction and vertically extend through the stack structure. The support structures have oblong horizontal cross-sectional shapes. Additional microelectronic devices, memory devices, and electronic systems are also described.
    Type: Application
    Filed: September 25, 2023
    Publication date: January 11, 2024
    Inventors: Shuangqiang Luo, Xuan Li, Adeline Yii
  • Patent number: 11864380
    Abstract: Some embodiments include an integrated assembly having a memory array region which includes channel material pillars extending through a stack of alternating conductive and insulative levels. A second region is adjacent the memory array region. A conductive expanse is within the memory array region and electrically coupled with the channel material of the channel material pillars. A panel extends across the memory array region and the second region. The panel separates one memory block region from another. The panel has a first portion over the conductive expanse, and has a second portion adjacent the first portion. The panel has a bottom surface. A first segment of the bottom surface is adjacent an upper surface of the conductive expanse. A segment of the bottom surface within the second portion is elevationally offset relative to the first segment. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: August 1, 2022
    Date of Patent: January 2, 2024
    Inventor: Shuangqiang Luo
  • Publication number: 20230395509
    Abstract: A microelectronic device includes a stack structure comprising a vertically alternating sequence of conductive material and insulative material arranged in tiers, the stack structure divided into blocks by filled slot structures, each of the blocks comprising: a memory array region; staircase structures having steps; and crest regions interposed in a first horizontal direction between horizontally neighboring pairs of the staircase structures, and contact structures within the first crest region of each of the blocks and vertically extending through the stack structure to a source tier underlying the stack structure, the contact structures comprising: first contact structures in electrical communication with control logic circuitry; and second contact structures electrically isolated from the control logic circuitry, at least some the first contact structures relatively more centrally positioned with each of the blocks in a second horizontal direction orthogonal to the first horizontal direction than at least
    Type: Application
    Filed: June 2, 2022
    Publication date: December 7, 2023
    Inventor: Shuangqiang Luo
  • Publication number: 20230395512
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes memory cells located on tiers; control gates for the memory cells and located on respective tiers; a dielectric structure over the control gates; a first conductive contact formed in the dielectric structure and contacting a first control gate, the first conductive contact having a first length; and a second conductive contact formed in the dielectric structure and contacting the second control gate, the second conductive contact having a second length unequal to the first length, wherein the second conductive contact includes a first portion and a second portion, the second portion is between the first portion and the second control gate, the first portion including a first region having a first width, the second portion including a second region having a second width, and the second width being greater than the first width.
    Type: Application
    Filed: June 23, 2022
    Publication date: December 7, 2023
    Inventors: Shuangqiang Luo, Indra V. Chary
  • Publication number: 20230395501
    Abstract: Some embodiments include apparatuses. One of the apparatuses includes a conductive structure including a first conductive region under first memory cells, a second conductive region under second memory cells, and a third conductive region between the first and second conductive regions; conductive islands adjacent each other and formed in the third conductive region and separated from the third conductive region; dielectric isolators separating the conductive islands from each other, wherein the conductive islands include a conductive island such that a first portion of the conductive islands is located on a first side of the conductive island, and a second portion of the conductive islands is located on a second side of the conductive island; and the width of the conductive island is greater than the width of at least one conductive island in each of the first and second portions of the conductive islands.
    Type: Application
    Filed: May 25, 2023
    Publication date: December 7, 2023
    Inventor: Shuangqiang Luo
  • Publication number: 20230395150
    Abstract: A microelectronic device includes a stack structure including blocks separated from one another by dielectric slot structures and each including a vertically alternating sequence of conductive structures and insulative structures arranged in tiers. The blocks including a stadium structure including opposing staircase structures each having steps comprising edges of the tiers. The blocks further include a filled trench vertically overlying and within horizontal boundaries of the stadium structure. The filled trench includes dielectric liner structures and additional dielectric liner structures having a different material composition than that of the dielectric liner structures and alternating with the dielectric liner structures. The filled trench also includes dielectric fill material overlying an alternating sequence of the dielectric liner structures and additional dielectric liner structures.
    Type: Application
    Filed: June 1, 2023
    Publication date: December 7, 2023
    Inventors: Rui Zhang, Shuangqiang Luo, Mohad Baboli, Rajasekhar Venigalla
  • Publication number: 20230387023
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes tiers located one over another, the tiers including respective memory cells and control gates for the memory cells; conductive contacts contacting the control gates, the conductive contacts having different lengths extending in a direction from one tier to another tier among the tiers; and a contact structure adjacent one of the conductive contacts. The contact structure includes a conductive core portion extending through the tiers and separated from the control gates, and a dielectric liner portion adjacent the conductive core portion. The dielectric liner portion includes a first dielectric material, a second dielectric material adjacent the first dielectric material, and a third dielectric material adjacent the second dielectric material.
    Type: Application
    Filed: May 27, 2022
    Publication date: November 30, 2023
    Inventor: Shuangqiang Luo
  • Publication number: 20230363164
    Abstract: A method of forming a microelectronic device comprises forming a microelectronic device structure. The microelectronic device structure comprises a stack structure comprising insulative structures and additional insulative structures vertically alternating with the insulative structures, a dielectric structure vertically extending partially through the stack structure, and a dielectric material vertically overlying and horizontally extending across the stack structure and the dielectric structure. Portions of at least the dielectric material and the dielectric structure are removed to form a trench vertically overlying and at least partially horizontally overlapping a remaining portion of the dielectric structure. The trench is substantially filled with additional dielectric material. Microelectronic devices, memory devices, and electronic systems are also described.
    Type: Application
    Filed: June 28, 2023
    Publication date: November 9, 2023
    Inventors: Shuangqiang Luo, Indra V. Chary, Justin B. Dorhout
  • Publication number: 20230354601
    Abstract: Methods, systems, and devices for divider and contact formation for memory cells are described. In some examples, a protective mask (e.g., a photoresist layer) may be formed over existing circuit structures above a substrate. Contact structures may be exposed when the protective mask is removed. In some examples, the protective mask may be removed using a dry etching operation. In some examples, one or more additional etching operations may be performed to expose (and subsequently fabricate) additional circuit structures.
    Type: Application
    Filed: April 28, 2022
    Publication date: November 2, 2023
    Inventor: Shuangqiang Luo