Patents by Inventor Shuangqiang Luo

Shuangqiang Luo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11864380
    Abstract: Some embodiments include an integrated assembly having a memory array region which includes channel material pillars extending through a stack of alternating conductive and insulative levels. A second region is adjacent the memory array region. A conductive expanse is within the memory array region and electrically coupled with the channel material of the channel material pillars. A panel extends across the memory array region and the second region. The panel separates one memory block region from another. The panel has a first portion over the conductive expanse, and has a second portion adjacent the first portion. The panel has a bottom surface. A first segment of the bottom surface is adjacent an upper surface of the conductive expanse. A segment of the bottom surface within the second portion is elevationally offset relative to the first segment. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: August 1, 2022
    Date of Patent: January 2, 2024
    Inventor: Shuangqiang Luo
  • Publication number: 20230395509
    Abstract: A microelectronic device includes a stack structure comprising a vertically alternating sequence of conductive material and insulative material arranged in tiers, the stack structure divided into blocks by filled slot structures, each of the blocks comprising: a memory array region; staircase structures having steps; and crest regions interposed in a first horizontal direction between horizontally neighboring pairs of the staircase structures, and contact structures within the first crest region of each of the blocks and vertically extending through the stack structure to a source tier underlying the stack structure, the contact structures comprising: first contact structures in electrical communication with control logic circuitry; and second contact structures electrically isolated from the control logic circuitry, at least some the first contact structures relatively more centrally positioned with each of the blocks in a second horizontal direction orthogonal to the first horizontal direction than at least
    Type: Application
    Filed: June 2, 2022
    Publication date: December 7, 2023
    Inventor: Shuangqiang Luo
  • Publication number: 20230395150
    Abstract: A microelectronic device includes a stack structure including blocks separated from one another by dielectric slot structures and each including a vertically alternating sequence of conductive structures and insulative structures arranged in tiers. The blocks including a stadium structure including opposing staircase structures each having steps comprising edges of the tiers. The blocks further include a filled trench vertically overlying and within horizontal boundaries of the stadium structure. The filled trench includes dielectric liner structures and additional dielectric liner structures having a different material composition than that of the dielectric liner structures and alternating with the dielectric liner structures. The filled trench also includes dielectric fill material overlying an alternating sequence of the dielectric liner structures and additional dielectric liner structures.
    Type: Application
    Filed: June 1, 2023
    Publication date: December 7, 2023
    Inventors: Rui Zhang, Shuangqiang Luo, Mohad Baboli, Rajasekhar Venigalla
  • Publication number: 20230395512
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes memory cells located on tiers; control gates for the memory cells and located on respective tiers; a dielectric structure over the control gates; a first conductive contact formed in the dielectric structure and contacting a first control gate, the first conductive contact having a first length; and a second conductive contact formed in the dielectric structure and contacting the second control gate, the second conductive contact having a second length unequal to the first length, wherein the second conductive contact includes a first portion and a second portion, the second portion is between the first portion and the second control gate, the first portion including a first region having a first width, the second portion including a second region having a second width, and the second width being greater than the first width.
    Type: Application
    Filed: June 23, 2022
    Publication date: December 7, 2023
    Inventors: Shuangqiang Luo, Indra V. Chary
  • Publication number: 20230395501
    Abstract: Some embodiments include apparatuses. One of the apparatuses includes a conductive structure including a first conductive region under first memory cells, a second conductive region under second memory cells, and a third conductive region between the first and second conductive regions; conductive islands adjacent each other and formed in the third conductive region and separated from the third conductive region; dielectric isolators separating the conductive islands from each other, wherein the conductive islands include a conductive island such that a first portion of the conductive islands is located on a first side of the conductive island, and a second portion of the conductive islands is located on a second side of the conductive island; and the width of the conductive island is greater than the width of at least one conductive island in each of the first and second portions of the conductive islands.
    Type: Application
    Filed: May 25, 2023
    Publication date: December 7, 2023
    Inventor: Shuangqiang Luo
  • Publication number: 20230387023
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes tiers located one over another, the tiers including respective memory cells and control gates for the memory cells; conductive contacts contacting the control gates, the conductive contacts having different lengths extending in a direction from one tier to another tier among the tiers; and a contact structure adjacent one of the conductive contacts. The contact structure includes a conductive core portion extending through the tiers and separated from the control gates, and a dielectric liner portion adjacent the conductive core portion. The dielectric liner portion includes a first dielectric material, a second dielectric material adjacent the first dielectric material, and a third dielectric material adjacent the second dielectric material.
    Type: Application
    Filed: May 27, 2022
    Publication date: November 30, 2023
    Inventor: Shuangqiang Luo
  • Publication number: 20230363164
    Abstract: A method of forming a microelectronic device comprises forming a microelectronic device structure. The microelectronic device structure comprises a stack structure comprising insulative structures and additional insulative structures vertically alternating with the insulative structures, a dielectric structure vertically extending partially through the stack structure, and a dielectric material vertically overlying and horizontally extending across the stack structure and the dielectric structure. Portions of at least the dielectric material and the dielectric structure are removed to form a trench vertically overlying and at least partially horizontally overlapping a remaining portion of the dielectric structure. The trench is substantially filled with additional dielectric material. Microelectronic devices, memory devices, and electronic systems are also described.
    Type: Application
    Filed: June 28, 2023
    Publication date: November 9, 2023
    Inventors: Shuangqiang Luo, Indra V. Chary, Justin B. Dorhout
  • Publication number: 20230354601
    Abstract: Methods, systems, and devices for divider and contact formation for memory cells are described. In some examples, a protective mask (e.g., a photoresist layer) may be formed over existing circuit structures above a substrate. Contact structures may be exposed when the protective mask is removed. In some examples, the protective mask may be removed using a dry etching operation. In some examples, one or more additional etching operations may be performed to expose (and subsequently fabricate) additional circuit structures.
    Type: Application
    Filed: April 28, 2022
    Publication date: November 2, 2023
    Inventor: Shuangqiang Luo
  • Patent number: 11800706
    Abstract: Some embodiments include an integrated assembly having a conductive expanse over conductive nodes. The conductive nodes include a first composition. A bottom surface of the conductive expanse includes a second composition which is different composition than the first composition. A stack is over the conductive expanse. The stack includes alternating first and second levels. Pillar structures extend vertically through the stack. Each of the pillar structures includes a post of conductive material laterally surrounded by an insulative liner. At least one of the posts extends through the conductive expanse to directly contact one of the conductive nodes. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: August 6, 2021
    Date of Patent: October 24, 2023
    Inventors: Shuangqiang Luo, Indra V. Chary, Justin B. Dorhout, Rita J. Klein
  • Publication number: 20230335193
    Abstract: A microelectronic device comprises a stack structure comprising blocks each including a vertically alternating sequence of conductive material and insulative material arranged in tiers, at least one of the blocks comprising: a memory array region having vertically extending strings of memory cells within a horizontal area thereof; and a staircase region horizontally neighboring the memory array region. The staircase structure has steps comprising horizontal ends of the tiers; and a crest sub-region horizontally interposed between the staircase structure and the memory array region. A masking structure overlies the stack structure and has a different material composition than each of the conductive material and the insulative material. Filled slot structures are interposed between the blocks of the stack structure, at least one of the filled slot structures comprises at least one fill material that has an uppermost boundary vertically underlying an uppermost boundary of the masking structure.
    Type: Application
    Filed: April 13, 2022
    Publication date: October 19, 2023
    Inventors: Shuangqiang Luo, Indra V. Chary, Mithun Kumar Ramasahayam
  • Publication number: 20230328975
    Abstract: Some embodiments include an integrated assembly having a first memory region, a second memory region, and an intermediate region between the memory regions. A stack extends across the memory regions and the intermediate region. The stack includes alternating conductive levels and insulative levels. Channel-material-pillars are arranged within the memory regions. Memory-block-regions extend longitudinally across the memory regions and the intermediate region. Staircase regions are within the intermediate region. Each of the staircase regions laterally overlaps two of the memory-block-regions. First panel regions extend longitudinally across at least portions of the staircase regions. Second panel regions extend longitudinally and provide lateral separation between adjacent memory-block-regions. The second panel regions are of laterally different dimensions than the first panel regions and/or are compositionally different than the first panel regions.
    Type: Application
    Filed: June 8, 2023
    Publication date: October 12, 2023
    Applicant: Micron Technology, Inc.
    Inventors: Shuangqiang Luo, Lifang Xu, Indra V. Chary
  • Patent number: 11785775
    Abstract: A method of forming a microelectronic device includes forming a microelectronic device structure. The microelectronic device structure includes a stack structure having an alternating sequence of conductive structures and insulative structures, an upper stadium structure, a lower stadium structure, and a crest region defined between a first stair step structure of the upper stadium structure and a second stair step structure of the lower stadium structure. The stack structure further includes pillar structures extending through the stack structure and dielectric structures interposed between neighboring pillar structures within the upper stadium structure. The method further includes forming a trench in the crest region of the stack structure between two dielectric structures of the dielectric structures on opposing sides of another dielectric structure and filling the trench with a dielectric material. The trench partially overlaps with the dielectric structures.
    Type: Grant
    Filed: January 20, 2021
    Date of Patent: October 10, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Lifang Xu, Shuangqiang Luo, Harsh Narendrakumar Jain, Nancy M. Lomeli, Christopher J. Larsen
  • Publication number: 20230317601
    Abstract: Microelectronic devices include a tiered stack comprising a vertically alternating sequence of insulative structures and conductive structures arranged in tiers. A stadium within the tiered stack includes a staircase with steps at ends of some of the tiers. The steps each have a tread provided by an upper surface portion of one of the conductive structures. Conductive contact structures extend to one of the steps and include a first conductive contact structure terminating at the tread of the step and a second conductive contact structure extending through the tread of the step. Related fabrication methods and electronic systems are also disclosed.
    Type: Application
    Filed: March 30, 2022
    Publication date: October 5, 2023
    Inventors: Harsh Narendrakumar Jain, Scott L. Light, Shruthi Kumara Vadivel, Shuangqiang Luo
  • Patent number: 11770930
    Abstract: A microelectronic device comprises a stack structure, at least one staircase structure, contact structures, and support structures. The stack structure comprises vertically alternating conductive structures and insulating structures arranged in tiers, each of the tiers individually comprising one of the conductive structures and one of the insulating structures. The at least one staircase structure is within the stack structure and has steps comprising edges of at least some of the tiers. The contact structures are on the steps of the at least one staircase structure. The support structures horizontally alternate with the contact structures in a first horizontal direction and vertically extend through the stack structure. The support structures have oblong horizontal cross-sectional shapes. Additional microelectronic devices, memory devices, and electronic systems are also described.
    Type: Grant
    Filed: November 24, 2021
    Date of Patent: September 26, 2023
    Inventors: Shuangqiang Luo, Xuan Li, Adeline Yii
  • Publication number: 20230290409
    Abstract: A microelectronic device includes a stack structure, slot structures, and dielectric material. The stack structure includes blocks each including a vertically alternating sequence of conductive material and insulative material arranged in tiers. At least one of the blocks includes an array region including strings of memory cells, and a staircase region including a crest sub-region interposed between a staircase structure and the array region. An uppermost boundary of the tiers within the crest sub-region underlies an uppermost boundary of the tiers within the array region. The slot structures are interposed between the blocks of the stack structure. The dielectric material extends over and between the blocks of the stack structure. A thickness of a portion of the dielectric material overlying the crest sub-region is greater than a thickness of an additional portion of the dielectric material overlying the array region. Related memory devices, electronic systems, and methods are also described.
    Type: Application
    Filed: March 10, 2022
    Publication date: September 14, 2023
    Inventors: Shuangqiang Luo, John D. Hopkins, Jiewei Chen, Jordan D. Greenlee
  • Publication number: 20230290739
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes tiers located one over another, the tiers including respective memory cells and control gates for the memory cells; a first pillar extending through the tiers and separated from the control gates, the first pillar including a first dielectric liner portion and a first core portion adjacent the first dielectric liner portion, the first dielectric liner portion and the first core portion extending along a length of the first pillar; and a second pillar extending through the tiers and separated from the control gates, the second pillar including a second dielectric liner portion and a second core portion adjacent the second dielectric liner portion, the second dielectric portion and the second core portion extending along a length of the second pillar, wherein the first core portion and the second core portion have different materials.
    Type: Application
    Filed: March 14, 2022
    Publication date: September 14, 2023
    Inventors: Shuangqiang Luo, John Hopkins
  • Patent number: 11756596
    Abstract: Methods, systems, and devices for transition structures for three-dimensional memory arrays are described. A memory device may include a staircase region which includes a set of vias. The set of vias may include a first subset of vias which couple respective word line plates of the memory region with associated word line decoders, and a second subset of vias which are electrically isolated from the word line plates. The second subset of vias may be arranged in one or more rows positioned between the first subset of vias and the memory region. In some cases, the second subset of vias may be positioned above respective conductive contacts. Additionally or alternatively, the second subset of vias may be positioned above a common conductor shared with pillars of the memory region.
    Type: Grant
    Filed: May 24, 2022
    Date of Patent: September 12, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Shuangqiang Luo, Indra V. Chary, Lifang Xu
  • Patent number: 11742282
    Abstract: Some embodiments include conductive interconnects which include the first and second conductive materials, and which extend upwardly from a conductive structure. Some embodiments include integrated assemblies having conductive interconnects.
    Type: Grant
    Filed: August 7, 2020
    Date of Patent: August 29, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Jordan D. Greenlee, Rita J. Klein, Everett A. McTeer, John D. Hopkins, Shuangqiang Luo, Song Kai Tan, Jing Wai Fong, Anurag Jindal, Chieh Hsien Quek
  • Patent number: 11715685
    Abstract: A method of forming a microelectronic device includes forming a microelectronic device structure. The microelectronic device structure includes a stack structure comprising insulative structures and electrically conductive structures vertically alternating with the insulative structures, pillar structures extending vertically through the stack structure, an etch stop material vertically overlaying the stack structure, and a first dielectric material vertically overlying the etch stop material. The method further includes removing portions of the first dielectric material, the etch stop material, and an upper region of the stack structure to form a trench interposed between horizontally neighboring groups of the pillar structures, forming a liner material within the trench, and substantially filling a remaining portion of the trench with a second dielectric material to form a dielectric barrier structure.
    Type: Grant
    Filed: October 6, 2020
    Date of Patent: August 1, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Shuangqiang Luo, Indra V. Chary, Nancy M. Lomeli, Xiao Li
  • Patent number: 11716841
    Abstract: Some embodiments include an integrated assembly having a first memory region, a second memory region, and an intermediate region between the memory regions. A stack extends across the memory regions and the intermediate region. The stack includes alternating conductive levels and insulative levels. Channel-material-pillars are arranged within the memory regions. Memory-block-regions extend longitudinally across the memory regions and the intermediate region. Staircase regions are within the intermediate region. Each of the staircase regions laterally overlaps two of the memory-block-regions. First panel regions extend longitudinally across at least portions of the staircase regions. Second panel regions extend longitudinally and provide lateral separation between adjacent memory-block-regions. The second panel regions are of laterally different dimensions than the first panel regions and/or are compositionally different than the first panel regions.
    Type: Grant
    Filed: January 6, 2021
    Date of Patent: August 1, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Shuangqiang Luo, Lifang Xu, Indra V. Chary