Abstract: In a semiconductor device including a transistor including an oxide semiconductor film and a protective film over the transistor, an oxide insulating film containing oxygen in excess of the stoichiometric composition is formed as the protective film under the following conditions: a substrate placed in a treatment chamber evacuated to a vacuum level is held at a temperature higher than or equal to 180° C. and lower than or equal to 260° C.; a source gas is introduced into the treatment chamber so that the pressure in the treatment chamber is set to be higher than or equal to 100 Pa and lower than or equal to 250 Pa; and a high-frequency power higher than or equal to 0.17 W/cm2 and lower than or equal to 0.5 W/cm2 is supplied to an electrode provided in the treatment chamber.

Abstract: An ink jet head includes a pressure chamber connected to a nozzle, an actuator configured to cause liquid in the pressure chamber to be ejected from the nozzle by deforming a wall of the pressure chamber, and a drive circuit configured to apply voltage to the actuator to drive the actuator. When a droplet of the liquid is ejected from the nozzle, the voltage applied to the actuator is changed from a first value to a second value that causes the pressure chamber to expand, and then changed from a third value that is equal to the second value or between the first value and the second value to the first value after a time period ?, which is a primary natural oscillation period of the actuator when the pressure chamber and the nozzle are filled with the liquid.

Abstract: In a semiconductor device including a transistor including an oxide semiconductor film and a protective film over the transistor, an oxide insulating film containing oxygen in excess of the stoichiometric composition is formed as the protective film under the following conditions: a substrate placed in a treatment chamber evacuated to a vacuum level is held at a temperature higher than or equal to 180° C. and lower than or equal to 260° C.; a source gas is introduced into the treatment chamber so that the pressure in the treatment chamber is set to be higher than or equal to 100 Pa and lower than or equal to 250 Pa; and a high-frequency power higher than or equal to 0.17 W/cm2 and lower than or equal to 0.5 W/cm2 is supplied to an electrode provided in the treatment chamber.

Abstract: A droplet dispensing apparatus includes a droplet ejecting array having a plurality of nozzle groups, each nozzle group including a plurality of nozzles arranged in columns in a first direction and rows in a second direction that intersects the first direction, and the plurality of nozzles being arranged in a third direction, a light emitting unit configured to emit light along an optical path in the third direction oblique with respect to the first direction, a light receiving unit configured to receive light from the light emitting unit, the light receiving unit being on an opposite side of the droplet ejecting array from the light emitting unit, and a controller configured to receive signals from the light receiving unit according to light intensity as detected by the light receiving unit, and adjust ejection timings such that each of the plurality of nozzle groups ejects at a different timing.

Abstract: According to one embodiment, a droplet dispensing apparatus includes a droplet ejection array having a plurality of nozzles from which droplets can be ejected into a well opening of a microplate plate on a baseplate, a sensor configured to detect a liquid amount in the microplate, and a controller configured to detect that a nozzle in the plurality of nozzles is not discharging during a droplet ejection process based on an initial liquid amount in the microplate as detected by the sensor and a final liquid amount in the microplate as detected by the sensor during a droplet ejection process in which a predetermined number of droplets are to be ejected from the plurality of nozzles into the microplate.

Abstract: According to one embodiment, a droplet dispensing apparatus includes a droplet ejection array having a plurality of nozzles from which droplets can be ejected into a well opening of a microplate plate on a baseplate, the plurality of nozzles being arranged in columns in a first direction and rows in a second direction that intersects the first direction, a light emitting unit configured to emit light having polarization perpendicular to a third direction oblique with respect to the first direction and the second direction, and a light receiving unit configured to receive light from the light emitting unit, the light receiving unit being on an opposite side of the droplet ejection array from the light emitting unit.

Abstract: A liquid droplet ejecting apparatus includes a liquid container including an upper opening for receiving liquid and a lower opening for supplying the liquid, the upper opening being larger than the lower opening, and a liquid ejection chip that is fixed to a lower surface of the liquid container, and includes a pressure chamber formed therein, a nozzle to eject liquid from the pressure chamber, and an actuator disposed adjacent to the nozzle. An opening of the pressure chamber is in fluid communication with the lower opening and is entirely included in an area of the lower opening.

Abstract: According to one embodiment in an inkjet head, the common electrodes for all the actuators, without overlapping with the first wiring pattern formed by individual electrodes, are connected to a second wiring pattern that passes between the outer peripheral portion of piezoelectric bodies, and a third wiring pattern that extends in a direction different from a direction of the second wiring pattern. The first wiring pattern and the third wiring pattern are electrically insulated at intersections thereof.

Abstract: According to one embodiment, a liquid medicine discharge device includes a nozzle plate including a nozzle from which a liquid medicine can be discharged, a pressure chamber structure having an outlet on a first surface side and an inlet on a second surface side and a pressure chamber in fluid communication with the nozzle via the outlet on the first side, a liquid holding container on the second surface and in fluid communication with the pressure chamber via the inlet on the second surface, and an actuator configured to cause the liquid medicine to be ejected from the nozzle by changing a pressure in the pressure chamber and including a piezoelectric element formed of a lead-free material.

Abstract: According to one embodiment, a liquid ejection head includes a first base having a plurality of nozzles from which liquid can be ejected, a second base on the first base and having a plurality of pressure chambers in fluid communication with the plurality of nozzles, and a third base located on the second base, with the second base being interposed between the first and third bases, the third base having a common chamber in fluid communication with the plurality of pressure chambers, an inner wall of the common chamber has an uneven surface portion shaped so as to trap air bubbles entrained in the liquid to be ejected from the plurality of nozzles.

Abstract: According to one embodiment in an ink jet head, the common electrodes for all the actuators, without overlapping with the first wiring pattern formed by individual electrodes, are connected to a second wiring pattern that passes between the outer peripheral portion of piezoelectric bodies, and a third wiring pattern that extends in a direction different from a direction of the second wiring pattern. The first wiring pattern and the third wiring pattern are electrically insulated at intersections thereof.

Abstract: A droplet ejecting apparatus includes a solution container, first and second nozzle groups fluidly connected to the solution container and having nozzles from which the solution can be ejected, first actuators respectively associated with each nozzle in the first nozzle group, second actuators respectively associated with each nozzle in the second nozzle group, and drive circuits respectively connected in a parallel to the first and second actuators. Each nozzle has a pressure chamber associated therewith. Each actuator causes a pressure change in a corresponding pressure chamber to control an ejection of a droplet of the solution from the corresponding nozzle. Each drive circuit is configured to supply a drive signal. When supplied by each drive circuit to the first and second actuators respectively, each drive signal causes solution to be ejected from each nozzle of each respective nozzle group at a same time.

Abstract: A droplet ejecting head includes a board, a pressure chamber, a nozzle, and an actuator configured to cause a pressure change in the pressure chamber in response to an electrical signal supplied from a drive circuit. The drive circuit is configured to set the electrical signal at a first voltage level, change the electrical signal to a second voltage level, set the electrical signal to a third voltage level during a time period after changing the electrical signal from the first voltage level to the second voltage level, the time period being equal to a primary natural oscillation period of the actuator when the pressure chamber and the nozzle are filled with solution, and set the electrical signal to the first voltage level after the time period has elapsed. The third voltage level is between the first and second voltage levels or equal to the second voltage level.

Abstract: A droplet ejecting apparatus includes a solution holding container having a solution inlet on a first surface for receiving a solution and a solution outlet on a second surface opposite to the first surface, solution-contacting inner surfaces of the solution holding container between the solution outlet and the solution inlet having a convex-curved shape, a nozzle fluidly connected to the solution outlet via a pressure chamber, and an actuator adjacent the nozzle and configured to cause solution to be ejected from the nozzle by changing pressure inside the pressure chamber.

Abstract: According to one embodiment, a droplet ejecting apparatus includes a solution holding container having a solution inlet for receiving a solution on a first side and a plurality of solution outlets on a second side, a plurality of droplet ejecting arrays, each droplet ejecting array being respectively connected to one solution outlet in the plurality of solution outlets, and a first nozzle group in each droplet ejecting array fluidly connected to the respective one solution outlet via a pressure chamber structure.

Abstract: A droplet ejecting apparatus includes a plurality of nozzle groups each including a plurality of nozzles, a plurality of pressure chambers each configured to supply a solution to a corresponding nozzle of a nozzle group in the plurality of nozzle groups, a plurality of actuators each configured to cause a pressure change in a corresponding pressure chamber in the plurality of pressure chambers to control an ejection of a droplet of the solution from the corresponding nozzle, and a solution holding container having a solution inlet for receiving solution and a solution outlet, the solution holding container being configured to supply the solution to the plurality of nozzle groups via the plurality of pressure chambers.

Abstract: According to an embodiment, an inkjet head includes nozzles. The nozzles are arranged on a nozzle plate. The inkjet head further includes actuators arranged corresponding to the nozzles one to one on the nozzle plate. The inkjet head further includes common electrodes and individual electrodes that apply voltage to the actuators. A connection terminal of the common electrode is arranged between connection terminals of the individual electrode.

Abstract: A liquid droplet ejecting apparatus includes a liquid container, a liquid ejection chip that is fixed to a lower surface of the liquid container to receive liquid from the liquid container, and includes a pressure chamber formed therein, a nozzle to eject liquid from the pressure chamber, and an actuator disposed adjacent to the nozzle, a base member having an opening at which the liquid container is fixed such that the nozzle is exposed on a lower surface of the base member, and a circuit substrate fixed to a lower side of the base member and including a wiring electrically connected to the actuator on a lower surface of the circuit substrate.

Abstract: An ink jet head includes a substrate having a pressure chamber formed therein, the pressure chamber being in communication with a nozzle through which ink is to be discharged, a first plate that is deformable to change a volume of the pressure chamber, and a second plate between the first plate and the pressure chamber, that stretches in response to an electric signal applied thereto. The second plate contracts in an in-plane direction to cause the first plate to deform and thereby the volume of the pressure chamber to be enlarged, when the electric signal is applied, and the second plate returns to an original shape thereof to cause the first plate to return to an original shape thereof and thereby the volume of the pressure chamber to return to an original volume thereof, when the electric signal is no longer applied.

Abstract: A liquid droplet ejecting apparatus includes a liquid container, a liquid ejection chip that is fixed to a lower surface of the liquid container to receive liquid from the liquid container, and includes a pressure chamber formed therein, a nozzle to eject liquid from the pressure chamber, and an actuator disposed adjacent to the nozzle, a base member having an opening at which the liquid container is fixed such that the nozzle is exposed on a lower surface of the base member, and a circuit substrate fixed to a lower side of the base member and including a wiring electrically connected to the actuator on a lower surface of the circuit substrate.