Patents by Inventor Shuhei Yokoyama

Shuhei Yokoyama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20170313075
    Abstract: According to an example, a base, a diaphragm, and a driving element are provided. The driving element includes a first electrode disposed on a second surface of the diaphragm, a second electrode opposing the first electrode, and a piezoelectric body interposed between the first electrode and the second electrode. In addition, an inter-wiring insulating film that covers the second surface of the diaphragm and the driving element, and an extracting electrode which is on the inter-wiring insulating film, are further provided. The inter-wiring insulating film includes a contact hole that exposes a part of the second electrode and through which the second electrode and the extracting electrode contact each other. The contact hole is disposed at a position which aligned with a solid portion of a circumferential wall of the pressure chamber in the base.
    Type: Application
    Filed: February 9, 2017
    Publication date: November 2, 2017
    Inventors: Ryuichi ARAI, Ryutaro KUSUNOKI, Shuhei YOKOYAMA, Meng Fei WONG
  • Publication number: 20170305157
    Abstract: According to one embodiment in an ink jet head, the common electrodes for all the actuators, without overlapping with the first wiring pattern formed by individual electrodes, are connected to a second wiring pattern that passes between the outer peripheral portion of piezoelectric bodies, and a third wiring pattern that extends in a direction different from a direction of the second wiring pattern. The first wiring pattern and the third wiring pattern are electrically insulated at intersections thereof.
    Type: Application
    Filed: February 20, 2017
    Publication date: October 26, 2017
    Inventors: Meng Fei WONG, Ryutaro KUSUNOKI, Shuhei YOKOYAMA, Ryuichi ARAI
  • Patent number: 9707756
    Abstract: According to an embodiment, an inkjet head includes a pressure cell structure. The pressure cell structure includes pressure cells, flow control paths, and slits. The flow control paths are formed on both the sides of the pressure cells, and control flow of ink flowing into the pressure cells. The slits are in communication with the pressure cells and the flow control paths. The width of the slit is smaller than the width of the pressure cell.
    Type: Grant
    Filed: February 19, 2016
    Date of Patent: July 18, 2017
    Assignee: TOSHIBA TEC KABUSHIKI KAISHA
    Inventors: Ryutaro Kusunoki, Shuhei Yokoyama, Ryuichi Arai
  • Publication number: 20170165969
    Abstract: A liquid droplet ejecting apparatus includes a liquid container, a liquid ejection chip that is fixed to a lower surface of the liquid container to receive liquid from the liquid container, and includes a pressure chamber formed therein, a nozzle to eject liquid from the pressure chamber, and an actuator disposed adjacent to the nozzle, a base member having an opening at which the liquid container is fixed such that the nozzle is exposed on a lower surface of the base member, and a circuit substrate fixed to a lower side of the base member and including a wiring electrically connected to the actuator on a lower surface of the circuit substrate.
    Type: Application
    Filed: July 18, 2016
    Publication date: June 15, 2017
    Inventors: Shuhei YOKOYAMA, Satoshi KAIHO, Ikuo FUJISAWA
  • Publication number: 20170125601
    Abstract: In a semiconductor device including a transistor including an oxide semiconductor film and a protective film over the transistor, an oxide insulating film containing oxygen in excess of the stoichiometric composition is formed as the protective film under the following conditions: a substrate placed in a treatment chamber evacuated to a vacuum level is held at a temperature higher than or equal to 180° C. and lower than or equal to 260° C.; a source gas is introduced into the treatment chamber so that the pressure in the treatment chamber is set to be higher than or equal to 100 Pa and lower than or equal to 250 Pa; and a high-frequency power higher than or equal to 0.17 W/cm2 and lower than or equal to 0.5 W/cm2 is supplied to an electrode provided in the treatment chamber.
    Type: Application
    Filed: January 9, 2017
    Publication date: May 4, 2017
    Inventors: Kenichi OKAZAKI, Toshinari SASAKI, Shuhei YOKOYAMA, Takashi HAMOCHI
  • Patent number: 9570626
    Abstract: In a semiconductor device including a transistor including an oxide semiconductor film and a protective film over the transistor, an oxide insulating film containing oxygen in excess of the stoichiometric composition is formed as the protective film under the following conditions: a substrate placed in a treatment chamber evacuated to a vacuum level is held at a temperature higher than or equal to 180° C. and lower than or equal to 260° C.; a source gas is introduced into the treatment chamber so that the pressure in the treatment chamber is set to be higher than or equal to 100 Pa and lower than or equal to 250 Pa; and a high-frequency power higher than or equal to 0.17 W/cm2 and lower than or equal to 0.5 W/cm2 is supplied to an electrode provided in the treatment chamber.
    Type: Grant
    Filed: March 16, 2016
    Date of Patent: February 14, 2017
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Kenichi Okazaki, Toshinari Sasaki, Shuhei Yokoyama, Takashi Hamochi
  • Publication number: 20160375686
    Abstract: A liquid droplet ejecting apparatus includes a liquid container including an upper opening for receiving liquid and a lower opening for supplying the liquid, the upper opening being larger than the lower opening, and a liquid ejection chip that is fixed to a lower surface of the liquid container, and includes a pressure chamber formed therein, a nozzle to eject liquid from the pressure chamber, and an actuator disposed adjacent to the nozzle. An opening of the pressure chamber is in fluid communication with the lower opening and is entirely included in an area of the lower opening.
    Type: Application
    Filed: June 29, 2016
    Publication date: December 29, 2016
    Inventors: Shuhei YOKOYAMA, Satoshi KAIHO, Ikuo FUJISAWA, Ryutaro KUSUNOKI
  • Publication number: 20160279942
    Abstract: According to an embodiment, an inkjet head includes a pressure cell structure. The pressure cell structure includes pressure cells, flow control paths, and slits. The flow control paths are formed on both the sides of the pressure cells, and control flow of ink flowing into the pressure cells. The slits are in communication with the pressure cells and the flow control paths. The width of the slit is smaller than the width of the pressure cell.
    Type: Application
    Filed: February 19, 2016
    Publication date: September 29, 2016
    Inventors: Ryutaro KUSUNOKI, Shuhei YOKOYAMA, Ryuichi ARAI
  • Publication number: 20160279933
    Abstract: According to an embodiment, an inkjet head includes nozzles. The nozzles are arranged on a nozzle plate. The inkjet head further includes actuators arranged corresponding to the nozzles one to one on the nozzle plate. The inkjet head further includes common electrodes and individual electrodes that apply voltage to the actuators. A connection terminal of the common electrode is arranged between connection terminals of the individual electrode.
    Type: Application
    Filed: February 19, 2016
    Publication date: September 29, 2016
    Inventors: Ryuichi ARAI, Ryutaro KUSUNOKI, Shuhei YOKOYAMA
  • Patent number: 9415593
    Abstract: An ink jet head includes: a vibration plates having a plurality of openings of a first diameter; ink pressure chambers, each arranged on one surface of the corresponding vibration plate; first electrodes, each formed on the other surface of the vibration plate; a plurality of piezoelectric layers, each portion of which is formed on a first electrode such that it surrounds the opening and that, when a driving voltage is applied, deforms the vibration plate to expand or contract the ink pressure chamber; second electrodes formed on each piezoelectric layer; a protective layer which is at least formed on the vibration plate and the second electrode and has a nozzle for ejecting the ink having a diameter smaller than the first diameter extending therethrough and through the opening; and an ink-feeding mechanism that feeds the ink into the ink pressure chambers.
    Type: Grant
    Filed: July 2, 2015
    Date of Patent: August 16, 2016
    Assignee: TOSHIBA TEC KABUSHIKI KAISHA
    Inventors: Shuhei Yokoyama, Ryutaro Kusunoki, Chiaki Tanuma, Ryuichi Arai
  • Publication number: 20160197194
    Abstract: In a semiconductor device including a transistor including an oxide semiconductor film and a protective film over the transistor, an oxide insulating film containing oxygen in excess of the stoichiometric composition is formed as the protective film under the following conditions: a substrate placed in a treatment chamber evacuated to a vacuum level is held at a temperature higher than or equal to 180° C. and lower than or equal to 260° C.; a source gas is introduced into the treatment chamber so that the pressure in the treatment chamber is set to be higher than or equal to 100 Pa and lower than or equal to 250 Pa; and a high-frequency power higher than or equal to 0.17 W/cm2 and lower than or equal to 0.5 W/cm2 is supplied to an electrode provided in the treatment chamber.
    Type: Application
    Filed: March 16, 2016
    Publication date: July 7, 2016
    Inventors: Kenichi OKAZAKI, Toshinari SASAKI, Shuhei YOKOYAMA, Takashi HAMOCHI
  • Patent number: 9318317
    Abstract: In a semiconductor device including a transistor including an oxide semiconductor film and a protective film over the transistor, an oxide insulating film containing oxygen in excess of the stoichiometric composition is formed as the protective film under the following conditions: a substrate placed in a treatment chamber evacuated to a vacuum level is held at a temperature higher than or equal to 180° C. and lower than or equal to 260° C.; a source gas is introduced into the treatment chamber so that the pressure in the treatment chamber is set to be higher than or equal to 100 Pa and lower than or equal to 250 Pa; and a high-frequency power higher than or equal to 0.17 W/cm2 and lower than or equal to 0.5 W/cm2 is supplied to an electrode provided in the treatment chamber.
    Type: Grant
    Filed: November 17, 2014
    Date of Patent: April 19, 2016
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Kenichi Okazaki, Toshinari Sasaki, Shuhei Yokoyama, Takashi Hamochi
  • Patent number: 9308723
    Abstract: According to one embodiment, there is provided an ink jet head which includes a pressure chamber which is formed in a thickness direction of a substrate, and fills ink; a vibrating plate which is provided on a first face of the pressure chamber, and includes a nozzle which communicates with the pressure chamber; a driving unit which is provided on the vibrating plate, and includes a piezoelectric substance; and a warpage reducing layer which is provided on a second face which is opposite to the first face of the pressure chamber, and reduces warpage of the substrate.
    Type: Grant
    Filed: June 27, 2014
    Date of Patent: April 12, 2016
    Assignee: TOSHIBA TEC KABUSHIKI KAISHA
    Inventors: Shuhei Yokoyama, Ryutaro Kusunoki, Ryuichi Arai
  • Publication number: 20160027924
    Abstract: A semiconductor layer with a low density of trap states is provided. A transistor with stable electrical characteristics is provided. A transistor having high field-effect mobility is provided. A semiconductor device including the transistor is provided. A method for evaluating a semiconductor layer is provided. A method for evaluating a transistor is provided. A method for evaluating a semiconductor device is provided. Provided is, for example, a semiconductor layer with a low defect density which can be used for a channel formation region of a transistor, a transistor including a semiconductor layer with a low defect density in a channel formation region, or a semiconductor device including the transistor.
    Type: Application
    Filed: October 5, 2015
    Publication date: January 28, 2016
    Applicant: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Toshinari SASAKI, Hiroshi KANEMURA, Yasuharu HOSAKA, Shuhei YOKOYAMA, Toshimitsu OBONAI
  • Patent number: 9227403
    Abstract: An ink jet head includes a chamber unit including a pressure chamber formed to hold ink, and a nozzle plate unit. The nozzle plate includes a vibrating plate forming a bottom wall of the pressure chamber, a driving element that is provided on a bottom surface of the vibrating plate and configured to cause a volume of the pressure chamber to be changed by deforming the vibrating plate upon application of voltage to the driving element, and a protective layer disposed on a bottom surface of the vibrating plate and a bottom surface of the driving element. The protective layer has a first thickness between a bottom surface thereof and the bottom surface of the vibrating plate and second thickness between a bottom surface thereof and the bottom surface of the driving element, and the first thickness is greater than the second thickness.
    Type: Grant
    Filed: March 7, 2014
    Date of Patent: January 5, 2016
    Assignee: Toshiba Tec Kabushiki Kaisha
    Inventors: Shuhei Yokoyama, Ryutaro Kusunoki, Ryuichi Arai
  • Patent number: 9221255
    Abstract: An ink jet head includes a pressure chamber formed to hold ink, and a nozzle plate including a vibrating plate forming a bottom wall of the pressure chamber, a driving element that is provided on a surface of the vibrating plate and configured to cause a volume of the pressure chamber to be changed by deforming the vibrating plate upon application of voltage to the driving element, an opening through which the ink held in the pressure chamber is discharged in response to the change of the volume of the pressure chamber, and an insulating layer disposed between the driving element and the opening.
    Type: Grant
    Filed: March 7, 2014
    Date of Patent: December 29, 2015
    Assignee: Toshiba Tec Kabushiki Kaisha
    Inventors: Shuhei Yokoyama, Ryutaro Kusunoki, Ryuichi Arai, Masayuki Satomi
  • Publication number: 20150298458
    Abstract: An ink jet head includes: a vibration plates having a plurality of openings of a first diameter; ink pressure chambers, each arranged on one surface of the corresponding vibration plate; first electrodes, each formed on the other surface of the vibration plate; a plurality of piezoelectric layers, each portion of which is formed on a first electrode such that it surrounds the opening and that, when a driving voltage is applied, deforms the vibration plate to expand or contract the ink pressure chamber; second electrodes formed on each piezoelectric layer; a protective layer which is at least formed on the vibration plate and the second electrode and has a nozzle for ejecting the ink having a diameter smaller than the first diameter extending therethrough and through the opening; and an ink-feeding mechanism that feeds the ink into the ink pressure chambers.
    Type: Application
    Filed: July 2, 2015
    Publication date: October 22, 2015
    Inventors: Shuhei YOKOYAMA, Ryutaro KUSUNOKI, Chiaki TANUMA, Ryuichi ARAI
  • Patent number: 9150008
    Abstract: An ink jet head includes: a vibration plates having a plurality of openings of a first diameter; ink pressure chambers, each arranged on one surface of the corresponding vibration plate; first electrodes, each formed on the other surface of the vibration plate; a plurality of piezoelectric layers, each portion of which is formed on a first electrode such that it surrounds the opening and that, when a driving voltage is applied, deforms the vibration plate to expand or contract the ink pressure chamber; second electrodes formed on each piezoelectric layer; a protective layer which is at least formed on the vibration plate and the second electrode and has a nozzle for ejecting the ink having a diameter smaller than the first diameter extending therethrough and through the opening; and an ink-feeding mechanism that feeds the ink into the ink pressure chambers.
    Type: Grant
    Filed: April 17, 2013
    Date of Patent: October 6, 2015
    Assignee: Toshiba Tec Kabushiki Kaisha
    Inventors: Shuhei Yokoyama, Ryutaro Kusunoki, Chiaki Tanuma, Ryuichi Arai
  • Patent number: 9153649
    Abstract: A semiconductor layer with a low density of trap states is provided. A transistor with stable electrical characteristics is provided. A transistor having high field-effect mobility is provided. A semiconductor device including the transistor is provided. A method for evaluating a semiconductor layer is provided. A method for evaluating a transistor is provided. A method for evaluating a semiconductor device is provided. Provided is, for example, a semiconductor layer with a low defect density which can be used for a channel formation region of a transistor, a transistor including a semiconductor layer with a low defect density in a channel formation region, or a semiconductor device including the transistor.
    Type: Grant
    Filed: November 27, 2013
    Date of Patent: October 6, 2015
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Toshinari Sasaki, Hiroshi Kanemura, Yasuharu Hosaka, Shuhei Yokoyama, Toshimitsu Obonai
  • Patent number: 9138999
    Abstract: An ink jet head according to an embodiment comprises a substrate including amounting surface and a pressure chamber open to the mounting surface, the substrate having a first expansion coefficient. The ink jet head further comprises a vibration plate including a first surface fixed to the mounting surface of the substrate, a second surface located on the opposite side of the first surface, an opening portion open to the pressure chamber, a first portion having a second expansion coefficient different from the first expansion coefficient, and a second portion having a third expansion coefficient different from the second expansion coefficient. The ink jet head further comprises a piezoelectric element provided on the second surface of the vibration plate and configured to deform the vibration plate to thereby change a volume of the pressure chamber.
    Type: Grant
    Filed: August 30, 2013
    Date of Patent: September 22, 2015
    Assignee: Toshiba Tec Kabushiki Kaisha
    Inventors: Ryuichi Arai, Chiaki Tanuma, Ryutaro Kusunoki, Shuhei Yokoyama