Abstract: Improvement of the workability in an automatic guided vehicle which carries and transfers a semiconductor wafer between stations in a semiconductor manufacturing plant etc.

Abstract: A tester apparatus comprising a loader/unloader unit including a loader section for carrying a device, which have been carried to a carry-in section to a device-charging and -aligning section, and an unloader section for carrying device, which have been tested, from a device-discharging and -aligning section to a carry-out section, and a tester unit including carrier for carrying devices, which have been aligned at the device-charging and -aligning section, to a test position while carrying device, which have been tested, from the test position to a device-discharging and -aligning section, and a test section for electrically testing device at the test position to find whether the device is good or fault ones, wherein the tester unit is detachably connected to the loader/unloader unit.

Abstract: A probe system according to the present invention has a plurality of exploration portions disposed in a line, spaced apart from one another for predetermined distances and each having a test head, for establishing electrical connection between the test head and electrodes of a subject of exploration so as to explore electrical characteristics of the subject of exploration, a conveyance passage running parallel to the line of the exploration portions, a retainer portion on which a plurality of the subjects of exploration are placed, which is facing to the conveyance passage and which is capable of elevating vertical with respect to the conveyance passage at a position above the conveyance passage, and delivery and acceptance unit arranged capable of moving along the conveyance passage and arranged to deliver and accept the subjects of exploration between the retainer portion and each of the exploration portions.

Abstract: A method of testing electrical characteristics with a probe device, wherein an object to be tested is placed on a table of the probe device, and the electrical characteristics of the object are measured while light is supplied from a light source unit outside the test unit to the test unit for the object through a light supplying means unit. A light source need not be arranged inside the test unit, thereby preventing the temperature atmosphere inside the test unit from being disturbed, and the electrical characteristics of the object can be tested under severe conditions with radiation of external light.