Patents by Inventor Stefan Tegen

Stefan Tegen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20140197130
    Abstract: A method for manufacturing a plurality of nanowires, the method including: providing a carrier comprising an exposed surface of a material to be processed and applying a plasma treatment on the exposed surface of the material to be processed to thereby form a plurality of nanowires from the material to be processed during the plasma treatment.
    Type: Application
    Filed: January 11, 2013
    Publication date: July 17, 2014
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Marko Lemke, Stefan Tegen, Uwe Rudolph
  • Publication number: 20140134844
    Abstract: In various embodiments, a method for processing a die is provided. The method may include forming a periodic structure at least one of over and in a carrier, the periodic structure including a plurality of structure elements; depositing masking material over the periodic structure; partially removing masking material to expose at least one structure element but not all of the structure elements; and removing the exposed at least one structure element.
    Type: Application
    Filed: November 12, 2012
    Publication date: May 15, 2014
    Applicant: INFINEON TECHNOLOGIES DRESDEN GMBH
    Inventors: Stefan Tegen, Marko Lemke
  • Publication number: 20140112067
    Abstract: An apparatus has a support and a plurality of bendable and conductive microstructures extending from the support. Two adjacent microstructures of the plurality of microstructures define a detectable first state if they are not bent such that end portions thereof, which are distal with respect to the support, do not touch each other, and the two adjacent microstructures of the plurality of microstructures define a detectable second state if they are bent such that the end portions thereof, which are distal with respect to the support, touch each other and are fixed to each other.
    Type: Application
    Filed: October 19, 2012
    Publication date: April 24, 2014
    Applicant: Infineon Technologies Dresden GmbH
    Inventors: Marko Lemke, Stefan Tegen
  • Publication number: 20120279548
    Abstract: The invention relates to an arrangement and circuit, and to a method for interconnecting flat rigid or flexible solar cells, the photoelectrical active layers thereof being applied to an insulating substrate material. The aim of the invention is provide a novel arrangement and circuit and an associated method for interconnecting flat solar cells, reducing the risk of short circuit and the inactive surface area in the matrix composite of the solar module and selectively allowing simple interconnection, both as a parallel circuit and as a series circuit in production. The solar cells (1) in the arrangement and circuit of flat rigid or flexible solar cells are disposed overlapping in the contact area to one or more adjacent solar cells (1). Said solar cells (1) are interconnected to each other directly once or a plurality of times in a novel manner, having a contact material (10) at the overlapping area to each other, used in contact material (10) or switching points (22).
    Type: Application
    Filed: May 17, 2010
    Publication date: November 8, 2012
    Inventors: Markus Münch, Stefan Tegen
  • Patent number: 8284596
    Abstract: An integrated circuit includes an array of diodes and an electrode coupled to each diode. The integrated circuit includes a layer of resistance changing material coupled to the electrodes and bit lines coupled to the layer of resistance changing material. The layer of resistance changing material provides a resistance changing element at each intersection of each electrode and each bit line.
    Type: Grant
    Filed: June 9, 2008
    Date of Patent: October 9, 2012
    Assignee: Qimonda AG
    Inventors: Igor Kasko, Thomas Happ, Andreas Walter, Stefan Tegen, Peter Baars, Klaus Muemmler
  • Patent number: 8125006
    Abstract: An integrated circuit comprising an array of memory cells and a corresponding production method are described. Each memory cell comprises a resistively switching memory element and a vertical selection diode coupled to a selection line in a selection line trench for selecting one cell from the plurality of memory cells. A selection line is coupled to the vertical selection diode at one vertical sidewall of the selection line trench.
    Type: Grant
    Filed: August 8, 2008
    Date of Patent: February 28, 2012
    Assignee: Qimonda AG
    Inventors: Ulrike Gruening-von Schwerin, Peter Baars, Klaus Muemmler, Stefan Tegen, Thomas Happ
  • Patent number: 8013377
    Abstract: Embodiments of the invention relate to an integrated circuit comprising a carrier, having a capacitor with a first electrode and a second electrode. The first electrode has a dielectric layer A layer sequence is arranged on the carrier, the capacitor being introduced in said layer sequence, wherein the layer sequence has a first supporting layer and a second supporting layer arranged at a distance above the first supporting layer, wherein the first and the second supporting layer adjoin the first electrode of the capacitor. Methods of manufacturing the integrated circuit are also provided.
    Type: Grant
    Filed: November 12, 2008
    Date of Patent: September 6, 2011
    Assignee: Qimonda AG
    Inventors: Peter Baars, Stefan Tegen, Klaus Muemmler
  • Patent number: 7952138
    Abstract: An integrated circuit includes a field effect transistor formed in an active area segment of a semiconductor substrate. The transistor comprises: a first source/drain contact region including a first vertical extension and a second source/drain contact region including a second vertical extension and a channel region formed around a recessed channel transistor groove, the groove being formed in the active area segment and extending to a groove depth larger than a lower first contact region depth, wherein the second vertical extension of the second source/drain contact region is arranged above the first extension of the first source/drain contact region, and wherein the recessed channel transistor groove is filled with a conductive gate material at a groove depth lower than the first contact region depth.
    Type: Grant
    Filed: July 5, 2007
    Date of Patent: May 31, 2011
    Assignee: Qimonda AG
    Inventors: Klaus Muemmler, Peter Baars, Stefan Tegen
  • Patent number: 7851356
    Abstract: A method of manufacturing an integrated circuit includes forming landing pads in an array region of a substrate, individual ones of the landing pads being electrically coupled to individual ones of portions of devices formed in the substrate in the array region. The method also includes forming wiring lines within a peripheral region of the substrate. Forming the landing pads and forming the wiring lines includes a common lithographic process being effective in both the array and peripheral regions. The wiring lines and the landing pads of the integrated circuit are self-aligned.
    Type: Grant
    Filed: September 28, 2007
    Date of Patent: December 14, 2010
    Assignee: Qimonda AG
    Inventors: Stefan Tegen, Klaus Muemmler, Peter Baars, Uta Mierau
  • Patent number: 7804708
    Abstract: An integrated circuit including an array of memory cells and method. In one embodiment, each memory cell includes a resistively switching memory element and a selection diode for selecting one cell from the plurality of memory cells. The memory element is coupled with its top to a first selection line and with its bottom side to the selection diode, the diode further being coupled to the bottom side of a second selection line.
    Type: Grant
    Filed: July 30, 2008
    Date of Patent: September 28, 2010
    Assignee: Qimonda AG
    Inventors: Ulrike Gruening-von Schwerin, Lothar Risch, Peter Baars, Klaus Muemmler, Stefan Tegen, Thomas Happ
  • Patent number: 7777266
    Abstract: An integrated circuit includes a conductive line, the conductive line having a conductive layer made of a metal or a first compound including a metal and a capping layer made of a second compound comprising the metal, the capping layer being in contact with the conductive layer, the first compound being different from the second compound.
    Type: Grant
    Filed: November 29, 2007
    Date of Patent: August 17, 2010
    Assignee: Qimonda AG
    Inventors: Peter Baars, Andreas Eifler, Klaus Muemmler, Stefan Tegen
  • Patent number: 7763514
    Abstract: A transistor of an integrated circuit includes a first and second source/drain regions, a channel region connecting the first and second source/drain regions, and a gate electrode configured to control an electrical current flowing in the channel. The gate electrode is disposed in a gate groove, that is defined in a top surface of a semiconductor substrate. The first and second source/drain regions extend at least to a depth d1, wherein the depth d1 is measured from the top surface of the substrate. A top surface of the gate electrode is disposed beneath the top surface of the semiconductor substrate in a distance to the top surface that is less than the depth d1.
    Type: Grant
    Filed: September 7, 2007
    Date of Patent: July 27, 2010
    Assignee: Qimonda AG
    Inventors: Johannes von Kluge, Stefan Tegen
  • Publication number: 20100032635
    Abstract: An integrated circuit comprising an array of memory cells and a corresponding production method are described. Each memory cell comprises a resistively switching memory element and a vertical selection diode coupled to a selection line in a selection line trench for selecting one cell from the plurality of memory cells. A selection line is coupled to the vertical selection diode at one vertical sidewall of the selection line trench.
    Type: Application
    Filed: August 8, 2008
    Publication date: February 11, 2010
    Applicant: QIMONDA AG
    Inventors: Ulrike Gruening-von Schwerin, Peter Baars, Klaus Muemmler, Stefan Tegen, Thomas Happ
  • Patent number: 7659602
    Abstract: A structure and method of forming a capacitor is described. In one embodiment, the capacitor includes a cylindrical first electrode having an inner portion bounded by a bottom surface and an inner sidewall surface, the first electrode further having an outer sidewall, the first electrode being formed from a conductive material. An insulating fill material is disposed within the inner portion of the first electrode. A capacitor dielectric is disposed adjacent at least a portion of the outer sidewall of the first electrode. A second electrode is disposed adjacent the outer sidewall of the first electrode and separated therefrom by the capacitor dielectric. The second electrode is not formed within the inner portion of the first electrode.
    Type: Grant
    Filed: June 2, 2008
    Date of Patent: February 9, 2010
    Assignee: Qimonda AG
    Inventors: Stefan Tegen, Klaus Muemmler, Peter Baars, Odo Wunnicke
  • Publication number: 20100027325
    Abstract: An integrated circuit including an array of memory cells and method. In one embodiment, each memory cell includes a resistively switching memory element and a selection diode for selecting one cell from the plurality of memory cells. The memory element is coupled with its top to a first selection line and with its bottom side to the selection diode, the diode further being coupled to the bottom side of a second selection line.
    Type: Application
    Filed: July 30, 2008
    Publication date: February 4, 2010
    Applicant: QIMONDA AG
    Inventors: Ulrike Gruening-von Schwerin, Lothar Risch, Peter Baars, Klaus Muemmler, Stefan Tegen, Thomas Happ
  • Publication number: 20090303780
    Abstract: An integrated circuit includes an array of diodes and an electrode coupled to each diode. The integrated circuit includes a layer of resistance changing material coupled to the electrodes and bit lines coupled to the layer of resistance changing material. The layer of resistance changing material provides a resistance changing element at each intersection of each electrode and each bit line.
    Type: Application
    Filed: June 9, 2008
    Publication date: December 10, 2009
    Applicant: Qimonda AG
    Inventors: Igor Kasko, Thomas Happ, Andreas Walter, Stefan Tegen, Peter Baars, Klaus Muemmler
  • Publication number: 20090294907
    Abstract: A structure and method of forming a capacitor is described. In one embodiment, the capacitor includes a cylindrical first electrode having an inner portion bounded by a bottom surface and an inner sidewall surface, the first electrode further having an outer sidewall, the first electrode being formed from a conductive material. An insulating fill material is disposed within the inner portion of the first electrode. A capacitor dielectric is disposed adjacent at least a portion of the outer sidewall of the first electrode. A second electrode is disposed adjacent the outer sidewall of the first electrode and separated therefrom by the capacitor dielectric. The second electrode is not formed within the inner portion of the first electrode.
    Type: Application
    Filed: June 2, 2008
    Publication date: December 3, 2009
    Inventors: Stefan Tegen, Klaus Muemmler, Peter Baars, Odo Wunnicke
  • Patent number: 7566611
    Abstract: The present invention provides a manufacturing method for an integrated semiconductor structure comprising the steps of providing a semiconductor substrate having a plurality of gate stacks in a memory cell region and at least one gate stack in a peripheral device region; forming caps made of one or more layers of a cap material over said plurality of gate stacks in said memory cell region and over said at least one gate stack in said peripheral device region; depositing a first protective layer made of carbon or made of a carbon containing material over said memory cell region and peripheral device region; forming a mask layer on said first protective layer in said memory cell region; exposing said cap of said at least one gate stack in said peripheral device region by removing said first protective layer in said peripheral device region in an etch step wherein said mask layer acts as a mask in said memory cell region; removing said mask layer and said first protective layer from said memory cell region; for
    Type: Grant
    Filed: May 31, 2006
    Date of Patent: July 28, 2009
    Assignee: Qimonda AG
    Inventors: Peter Baars, Klaus Muemmler, Stefan Tegen, Daniel Koehler, Joern Regul
  • Publication number: 20090140307
    Abstract: An integrated circuit includes a conductive line, the conductive line having a conductive layer made of a metal or a first compound including a metal and a capping layer made of a second compound comprising the metal, the capping layer being in contact with the conductive layer, the first compound being different from the second compound.
    Type: Application
    Filed: November 29, 2007
    Publication date: June 4, 2009
    Inventors: Peter Baars, Andreas Eifler, Klaus Muemmler, Stefan Tegen
  • Publication number: 20090121315
    Abstract: Embodiments of the invention relate to an integrated circuit comprising a carrier, having a capacitor with a first electrode and a second electrode. The first electrode has a dielectric layer A layer sequence is arranged on the carrier, the capacitor being introduced in said layer sequence, wherein the layer sequence has a first supporting layer and a second supporting layer arranged at a distance above the first supporting layer, wherein the first and the second supporting layer adjoin the first electrode of the capacitor. Methods of manufacturing the integrated circuit are also provided.
    Type: Application
    Filed: November 12, 2008
    Publication date: May 14, 2009
    Inventors: Peter Baars, Stefan Tegen, Klaus Muemmler