Abstract: In a method for forming a semiconductor device photo-sensing regions are formed over a frontside of a substrate. A first layer is formed over a backside of the substrate and is patterned to form a plurality of grid lines. The grid lines can define a plurality of first areas and a plurality of second areas. A second layer maybe formed over exposed portions of the backside, the gridlines, the first areas, and the second areas and a third layer may be formed over the second layer. The second and third layer may have different etch rates and the third layer is pattern so as to remove the third layer from over the plurality of first areas.

Abstract: A method of manufacturing a semiconductor device and a semiconductor processing system are provided. The method includes the following steps. A photoresist layer is formed on a substrate in a lithography tool. The photoresist layer is exposed in the lithography tool to form an exposed photoresist layer. The exposed photoresist layer is developed to form a patterned photoresist layer in the lithography tool by using a developer. An ammonia gas by-product of the developer is removed from the lithography tool.

Abstract: The present disclosure describes the formation of a pad structure in an image sensor device using a sacrificial isolation region and a silicon oxide based stack with no intervening nitride etch-stop layers. The image sensor device includes a semiconductor layer comprising a first horizontal surface opposite to a second horizontal surface; a metallization layer formed on the second horizontal surface of the semiconductor layer, where the metallization layer includes a dielectric layer. The image sensor device also includes a pad region traversing through the semiconductor layer from the first horizontal surface to the second horizontal surface. The pad region includes an oxide layer with no intervening nitride layers formed on the dielectric layer of the metallization layer and a pad structure in physical contact with a conductive structure of the metallization layer.

Abstract: An integrated circuit includes a standard cell. The standard cell may include a plurality of gate lines and a plurality of first wirings. The plurality of first wirings may include a clubfoot structure conductive pattern that includes a first conductive pattern and a second conductive pattern spaced apart from each other. Each of the first conductive pattern and the second conductive pattern may include a first line pattern extending in a first direction and a second line pattern protruding from one end of the first line pattern in a direction perpendicular to the first direction. The plurality of gate lines may be spaced apart from each other by a first pitch in the first direction, and the plurality of second wirings may be spaced apart from each other by a second pitch in the first direction. The first pitch may be greater than the second pitch.

Abstract: An integrated circuit including a plurality of standard cells is provided. The integrated circuit includes a first standard cell group including at least two first standard cells, a second standard cell group adjacent to the first standard cell group in a first direction, the second standard cell group including at least one second standard cell, and a first insulating gate bordered by one side of at least one of the first standard cells and one side of the at least one second standard cell, wherein each of the first and second standard cells includes a p-type transistor (pFET) and an n-type transistor (nFET) which are integrated, wherein each of the first and second standard cells has first wiring lines of different designs, and wherein each of the first and second standard cells has the same or different placement of an active region according to the corresponding design.

Abstract: A semiconductor device is provided. The semiconductor device includes a first cell region and a filler region that are adjacent each other in a first direction. The semiconductor device includes an active pattern extending in the first direction, inside the first cell region, a gate electrode extending in a second direction intersecting the first direction, on the active pattern, a gate contact electrically connected to an upper surface of the gate electrode, a source/drain contact electrically connected to a source/drain region of the active pattern, adjacent a side of the gate electrode, a connection wiring that extends in the first direction over the first cell region and the filler region, and is electrically connected to one of the gate contact or the source/drain contact, and a filler wiring that is inside the filler region. A related layout design method and fabricating method are also provided.

Abstract: An integrated circuit includes a first cell arranged in a first row extending in a first horizontal direction, a second cell arranged in a second row adjacent to the first row, and a third cell continuously arranged in the first row and the second row. The first cell and the second cell comprise respective portions of a first power line extending in the first horizontal direction, and the third cell includes a second power line electrically connected to the first power line and extending in the first horizontal direction in the first row.

Abstract: An apparatus includes a chamber, a pedestal configured to receive and support a semiconductor wafer in the chamber, and an edge ring disposed over the pedestal. The edge ring includes a first portion having a first top surface, a second portion coupled to the first portion and having a second top surface lower than the first top surface, and a recess defined in the first portion. The second top surface is under the semiconductor wafer. The recess has a depth, and a distance between the pedestal and an inner surface of the recess is substantially equal to the depth of the recess.

Abstract: A cutting tool of a hole punch has an outer circumferential wall extending in an up-down direction and surrounding an axis, and a cutting surrounding surface extending and inclined inwardly and upwardly from a bottom peripheral edge of the outer circumferential wall toward the axis. The cutting surrounding surface has upper and lower cutting surrounding edges, and defines front and rear cutting edges. The front cutting edge has first and second lower points on the lower and upper cutting surrounding edges. The rear cutting edge has first and second upper points on the lower and upper cutting surrounding edges and higher than the first and second lower points. A concaved paper pressing curve surface extends upwardly from the upper cutting surrounding edge to define a paper moving recess.

Abstract: An image sensor structure includes a semiconductor device, a plurality of image sensing elements formed in the semiconductor substrate, an interconnect structure formed on the semiconductor substrate, and a composite grid structure over the semiconductor substrate. The composite grid structure includes a tungsten grid, an oxide grid over the tungsten grid, and an adhesion enhancement grid spacing the tungsten grid from the oxide grid.

Abstract: In a method for forming a semiconductor device photo-sensing regions are formed over a frontside of a substrate. A first layer is formed over a backside of the substrate and is patterned to form a plurality of grid lines. The grid lines can define a plurality of first areas and a plurality of second areas. A second layer maybe formed over exposed portions of the backside, the gridlines, the first areas, and the second areas and a third layer may be formed over the second layer. The second and third layer may have different etch rates and the third layer is pattern so as to remove the third layer from over the plurality of first areas.

Abstract: A method of manufacturing a semiconductor device and a semiconductor processing system are provided. The method includes the following steps. A photoresist layer is formed on a substrate in a lithography tool. The photoresist layer is exposed in the lithography tool to form an exposed photoresist layer. The exposed photoresist layer is developed to form a patterned photoresist layer in the lithography tool by using a developer. An ammonia gas by-product of the developer is removed from the lithography tool.

Abstract: Provided is an integrated circuit including a plurality of standard cells each including a front-end-of-line (FEOL) region and a back-end-of-line (BEOL) region on the FEOL region, the FEOL region including at least one gate line extending in a first horizontal direction. A BEOL region of a first standard cell among the plurality of standard cells includes an eaves section not overlapping an FEOL region of the first standard cell in a vertical direction, the eaves section protruding in a second horizontal direction perpendicular to the first horizontal direction.

Abstract: Embodiments of the present disclosure describe a chemical replacement system and a method to automatically replace PR bottles. The chemical replacement system includes a computer system and a transfer module. The computer system can receive a request signal to replace one or more chemical containers and transmit a command to the transfer module. The transfer module, being controlled by the computer system, can include a holder configured to hold the one or more chemical containers (e.g., PR bottles); a door unit configured to open in response to the command; and a transfer unit configured to eject the holder in response to the command for replacement. The chemical replacement system can further include an automated vehicle configured to replace the one or more chemical containers in the ejected holder.

Abstract: An integrated circuit includes a first standard cell including a first p-type transistor, a first n-type transistor, a first gate stack intersecting first and second active regions, first extended source/drain contacts on a first side of the first gate stack, a first normal source/drain contact on a second side of the first gate stack, a first gate via connected to the first gate stack, and a first source/drain via connected to the first normal source/drain contact, a second standard cell adjacent the first standard cell and including a second p-type transistor, a second n-type transistor, a second gate stack intersecting the first and second active regions, and a second gate via connected to the second gate stack, an input wiring connected to the first gate via, and an output wiring at a same level as the input wiring to connect the first source/drain via and the second gate via.

Abstract: A layout method is provided. The layout method may include placing first and second standard cells from a standard cell library, interconnecting the placed standard cells to generate a layout draft, confirming placement and routing at a boundary region between the interconnected standard cells, and revising the layout draft based on the confirmation. Each of the standard cells includes, in part, a conductive line that extends in the first direction and is interconnected to an adjacent standard cell through a source/drain via. To confirm the placement and routing, a first spaced distance from a tip of one of the conductive lines to a tip of the other conductive line, and a second spaced distance from the tip of the first conductive line to the cell boundary are compared with preset threshold values. Revising the layout draft may include adjusting a tip position of one of the conductive lines.

Abstract: An image processing apparatus is disclosed. The image processing apparatus comprises: a receiver configured to receive an input frame including a plurality of image regions, corresponding to a plurality of faces of a three-dimensional polyhedron, and metadata; and a processor configured to render an output frame including at least one a part of the input frame, on the basis of padding information included in the metadata. Here, the processor may be configured to identify, on the basis of the padding information, a padding region included in at least one of the plurality of image regions, and render, on the basis of the determined padding region, a boundary between at least one face of the plurality of faces and another face of the plurality of faces adjoining the at least one face of the polyhedron.

Abstract: Provided herein is a method for the treatment and/or prophylaxis of a cancer associated with galectin-1. The method includes administering to a subject a pharmaceutical composition that mainly composed of ganoderic acid S (GAS) and ganoderic acid T (GAT). The method further includes administering to the subject another anti-cancer agent before, together with, or after the administration of the present pharmaceutical composition, so as to synergistically suppress the growth of the cancer.

Abstract: A method for monitoring gas in a wafer processing system is provided. The method includes producing an exhaust flow in an exhausting conduit from a processing chamber. The method further includes placing a gas sensor in fluid communication with a detection point located in the exhausting conduit via a sampling tube that passes through a through hole formed on the exhausting conduit. The detection point is located away from the through hole. The method also includes detecting a gas condition at the detection point with the gas sensor. In addition, the method also includes analyzing the gas condition detected by the gas sensor to determine if the gas condition in the exhausting conduit is in a range of values.

Abstract: An integrated circuit includes a first standard cell including a first first-type transistor, a first second-type transistor, a third second-type transistor, and a third first-type transistor, a second standard cell including a second first-type transistor, a second second-type transistor, a fourth second-type transistor and a fourth first-type transistor, a plurality of wiring layers which are disposed on the first and second standard cells and includes a first wiring layer, a second wiring layer, and a third wiring layer sequentially stacked. A source contact of the first first-type transistor and a source contact of the second first-type transistor are electrically connected through a first power rail of the plurality of wiring layers, and a source contact of the third first-type transistor and a source contact of the fourth first-type transistor are electrically connected through a second power rail of the plurality of wiring layers.