Abstract: A showerhead assembly of a substrate processing apparatus, which is positioned below a gas distribution plate in which a first coupling groove is formed, comprises a showerhead plate provided with an insertion groove formed at a position facing the first coupling groove in a vertical direction; a bush unit inserted into the insertion groove and formed with a second coupling groove having the same central axis as that of the first coupling groove; and a fastening unit coupled to the first coupling groove and the second coupling groove, wherein the insertion groove has an area of a lower end, which is larger than that of an upper end, and the bush unit has one side and the other side, which are asymmetrical based on the second coupling groove, and is separated into two or more.

Abstract: A manufacturing method of a substrate treating apparatus includes: preparing a body having a lower end provided at a first level, having a step formed at a second level higher than the first level, and having an upper end provided at a third level higher than the second level; forming a first coating layer from the first level to a height of a fourth level higher than the third level by a thermal spray coating (TSC) method so as to surround the body; forming a bonding unit from an upper surface of the body to the fourth level; forming a second coating layer on the first coating layer, the second coating layer having a smaller thickness than the bonding unit and higher hardness than the first coating layer; and providing a puck on upper surfaces of the bonding unit and the second coating layer.

Abstract: A membrane-electrode assembly and a method for manufacturing the same are provided. The membrane-electrode assembly includes a pattern layer formed between a separator and a subgasket through a UV curing process.

Abstract: Provided is a consumable component treating apparatus for ensuring coating thickness uniformity and a semiconductor manufacturing equipment including the same. The consumable component treating apparatus comprises a housing; a process gas providing unit for providing process gas to an interior of the housing; a plasma generating unit including a high-frequency power source and for generating plasma inside the housing using the process gas; a holder for fixing a base material; a metal substrate for supporting the holder; and a support module for supporting a target material coated on a base material using the plasma.

Abstract: Disclosed is a non-destructive inspection method capable of effectively evaluating adhesion quality of an adhesion portion formed between a cell frame and an EGA without damage to parts or deterioration in durability or adhesiveness of parts. In addition, an EGA-cell frame assembly capable of effectively evaluating adhesion quality of an adhesion portion formed between a cell frame and an EGA by the non-destructive inspection method is provided.

Abstract: Proposed is an inspection technology for inspecting a focus ring. A device and a method for inspecting the focus ring including a heat transfer member are proposed. The inspection device may include a housing configured to provide inspection space of the focus ring, with a predetermined area of an upper wall of the housing being formed of a transparent material, a hot plate provided in the housing and configured to heat treat the focus ring while the hot plate supports the focus ring, and an inspection unit configured to inspect a connection state between the focus ring and the heat transfer member by obtaining a thermal image of the focus ring after the focus ring is completely heat treated.

Abstract: Proposed is a method for inspecting for quality of a coating film coated on a component installed in a processing space. The method for inspecting a coating film includes irradiating to irradiate the component with light, observing a coating film to acquire an image of light emitted from the coating film when the irradiating is performed, and inspecting a coating film to inspect the quality of the coating film on the basis of the acquired image of light.

Abstract: A thin-film forming apparatus and method are provided. A thin-film forming apparatus includes a chamber configured to hold a vacuum formed in the chamber, a deposition object placed at a set position inside the chamber, a sputtering target placed inside the chamber and containing particles for deposition, a gas supply module configured to supply a gas for forming a plasma state inside the chamber, a step-coverage control module located inside the chamber and facing the deposition object, and a voltage supply module located inside the chamber and configured to supply an electric current to the sputtering target, wherein the deposition object is deposited with the particles provided from the sputtering target based on the electric current, and wherein the step-coverage control module is configured to control a step coverage of the deposition object by adjusting an amount of the particles moving toward the deposition object through a repositioning maneuver.

Abstract: The inventive concept provides a method for treating a surface of an object to be treated, in which a part provided and contaminated in an apparatus for treatment of a substrate such as a wafer serves as the object to be treated. In an embodiment, the surface treatment method includes forming a vacuum in an atmosphere in which the object is provided and cleaning the surface of the object by collision of first particles with contaminants on the surface of the object at supersonic speed.

Abstract: A flow velocity increasing device of an apparatus for depositing a thin film includes a device body disposed within the chamber and a flow velocity increasing hole portion formed in the device body and tapered in a direction of gas passage so that a flow velocity of passed gas is faster than that externally.

Abstract: A transformable toy transformable so as to be coupled to a model toy and a toy set including the model toy and the transformable toy are provided. The transformable toy includes a transformable body that is transformable into a first state of being independent from the model toy and a second state of partially covering the model toy and being releasably coupled to the model toy. The transformable body incudes a frame portion and a transformation portion. The frame portion partially covers the model toy in the second state of the transformable body. The transformation portion is coupled to the frame portion so as to be rotatable about a corresponding rotation axis. The transformation portion is rotated about the corresponding rotation axis with respect to the frame portion for transformation of the transformable body from one of the first and second states to the other.

Abstract: A transformable toy transformable so as to be coupled to a model toy and a toy set including the model toy and the transformable toy are provided. The transformable toy includes a transformable body. The transformable body is configured to be transformable into a first state where the transformable body is independent from the model toy and a second state where the transformable body at least partially covers the model toy and is releasably coupled to the model toy. The transformable body includes a pair of grip portions. The pair of grip portions are configured to be rotatable in opposite directions about one rotation axis or a pair of rotation axes and are configured to releasably grip the model toy by being moved toward each other.

Abstract: Disclosed are a method of heat treating a membrane electrode assembly, in which a first membrane electrode assembly or the like is positioned between a first member and a second member and heat treatment is performed as at least one of the first member and the second member being a heating member, and also in which variation in the temperature of the membrane electrode assembly at different roll positions is decreased and interfacial bonding between the layers in the membrane electrode assembly is enhanced. Thus, the quality of the membrane electrode assembly, such as the durability and performance thereof, may be improved, the yield thereof may be increased, and the amount of heat treatment may be efficiently increased, thereby reducing costs through mass heat treatment and decreasing the rate of processing of the membrane electrode assembly.

Abstract: An integrated control system of a vehicle includes: a power manager that receives power of a vehicle and supplies power to a first sensor, a second sensor, and a third sensor connected to an accelerator pedal, a brake pedal, and a transmission, respectively; a sensor signal receiver that receives an accelerator pedal output signal, a brake pedal output signal, and a transmission output signal from the first sensor, second sensor, and third sensor, respectively; a main controller that is connected to the power manager, monitors information about power supplied to the first sensor, second sensor, and third sensor, and integrally controls accelerating, braking, and shifting of the vehicle in response to the accelerator pedal output signal, brake pedal output signal, and transmission output signal; and a communicator that sends the accelerator pedal output signal, brake pedal output signal, and transmission output signal to a plurality of relevant control units.

Abstract: Disclosed herein are membrane-electrode-subgasket assembly and a membrane-electrode-subgasket assembly manufactured by the method. The membrane-electrode-subgasket assembly includes substrates having sizes and shapes asymmetric with each other provided on a first and second surfaces thereof.

Abstract: A method of manufacturing an Electricity-Generating Assembly (EGA) includes: preparing an electrolyte membrane including a central portion and a peripheral portion; providing a contact member to the peripheral portion of the electrolyte membrane; providing at least one of a first Gas Diffusion Electrode (GDE) including a reaction portion of a first Gas Diffusion Layer (GDL) and a first electrode layer or a second GDE including a reaction portion of a second GDL and a second electrode layer, on at least one central portion of the first surface of the electrolyte membrane or the second surface of the electrolyte membrane; and providing a gas diffusion portion of a respective GDL among the first and second GDLs on the contact member.

Abstract: An anti-theft device for a vehicle includes an approach prevention cover disposed in a shift lever housing to cover a shift cable connected to a shift lever so as to prevent the shift cable from being detached. Such an anti-theft vehicle makes is possible to easily and efficiently prevent theft of the vehicle by preventing a shift cable operated along with operation of a shift lever from being removed.

Abstract: A method of manufacturing an Electricity-Generating Assembly (EGA) includes: preparing an electrolyte membrane including a central portion and a peripheral portion; providing a contact member to the peripheral portion of the electrolyte membrane; providing at least one of a first Gas Diffusion Electrode (GDE) including a reaction portion of a first Gas Diffusion Layer (GDL) and a first electrode layer or a second GDE including a reaction portion of a second GDL and a second electrode layer, on at least one central portion of the first surface of the electrolyte membrane or the second surface of the electrolyte membrane; and providing a gas diffusion portion of a respective GDL among the first and second GDLs on the contact member.

Abstract: The inventive concept provides a method for treating a surface of an object to be treated, in which a part provided and contaminated in an apparatus for treatment of a substrate such as a wafer serves as the object to be treated. In an embodiment, the surface treatment method includes forming a vacuum in an atmosphere in which the object is provided and cleaning the surface of the object by collision of first particles with contaminants on the surface of the object at supersonic speed.

Abstract: A shift lever assembly for a vehicle includes a housing having an inner space and an open part. The open part is provided at a lower part of the housing and is open in upward and downward directions. A shift lever is rotatably mounted in the inner space by being inserted into the inner space from a lower side to an upper side of the inner space through the open part. A bracket is assembled with the lower part of the housing to close the open part and allowing the housing to be fixed to a vehicle body.