Abstract: A reel for winding an elongated body includes a rotor 30 that pivots relative to a casing, a free roller 22 located on the outer peripheral side of the rotor 30, and an inner reel section 30 formed on the inner side thereof. An elongated body is wound in one direction on the outer periphery of the inner reel section 23, and the elongated body extending from the inner reel section is reversed by a reversing roller 21, wound in the other direction on the outer periphery of the free roller 22, and pulled out to the outer periphery of the rotor. The inner reel section 23 is adapted to be pivotable relative to the rotor 30. The pivot shaft of the inner reel section 23 is placed at a position different from the position of the center axis 11 for pivoting of the rotor 30. The reel has a pivoting device for pivoting the inner reel section 23 such that the rotor 30 and the inner reel section 23 pivot in the directions opposite to each other with substantially the same angular speed.

Abstract: When a substrate stage is located in a first area, a first measurement device measures the same portion of the substrate at the plural measurement points both before and after the stage is horizontally driven. A controller calculates a first difference of the stage in the vertical direction in the first area accompanying driving of the stage horizontally, based on a first measurement result, calculates a value representing a surface shape of the substrate by subtracting the first difference from the first measurement result, calculates a second difference of the stage in the vertical direction in the second area accompanying driving of the stage horizontally by subtracting the value from a value representing a vertical position of the substrate when the stage is located in the second area, and controls a vertical position of the stage in the second area based on the second difference.

Abstract: An exposure apparatus includes a first measurement device, a second measurement device, and a controller. The first measurement device measures the position of a substrate stage in the optical axis direction when the substrate stage is scanned in the first direction. The second measurement device measures the surface positions of the substrate in the optical axis direction at a plurality of measurement points on one straight line extending in the second direction on the substrate. The controller controls the second measurement device to measure at least one identical region on the substrate at different measurement points of the plurality of measurement points both before and after the substrate stage moves in steps in the second direction, and calculates a measurement error of the first measurement device attributed to the driving of the substrate stage in the second direction based on the measurement result obtained by the second measurement device.

Abstract: An alignment stage includes a first plane mirror which extends in two directions substantially perpendicular to each other in order to measure the position of a stage in the translation direction and the tilt of the stage in the direction of height, a first measurement unit which irradiates the plane mirror with a laser beam and measures the position of the stage in the translation direction by using reflection of the laser beam, and a second measurement unit which irradiates the first plane mirror with a laser beam and measures the position by using reflection of the laser beam at a position vertically spaced apart from the firs measurement unit in order to measure the tilt of the stage.

Abstract: A method for producing hydrogen including the steps of supplying a raw material gas from a gas inlet of a reactor tube; producing a gas mixture containing hydrogen, carbon monoxide, and carbon dioxide by a reforming reaction and a shift reaction; recovering, from a discharge outlet of a separator tube, hydrogen being isolated by passing through a permselective membrane into the separator tube from the gas mixture; and discharging other gas components incapable of passing through the permselective membrane from a gas outlet of the reactor. Hydrogen is produced under conditions where ? defined by the following equation is in the range of 0.4 to 100: ?={(CO2)/(CO)2}/K wherein (CO2) and (CO) denote the partial pressures of carbon dioxide and carbon monoxide at the gas outlet and K denotes the equilibrium constant of the disproportionation reaction of carbon monoxide at the internal temperature of the reactor tube.

Abstract: A wheel speed sensor includes a hall IC that outputs a signal representing a change of magnetic field generated by rotation of a detection object and that is simply covered with resin coating. In the process of molding the resin coating, a resin injection opening is positioned away from an end face of a sheath of a cable to be coated by a length no less than a minimum adhesion length for ensuring adhesion between the sheath and the resin coating. In addition, the holder and a cover of the detector are provided with waterproof protrusions extending along the entire peripheries of contact areas in which pressing pins are brought into contact with the holder and the cover. Accordingly, immersion of the detector is reliably prevented even when a void or the like occurs in the resin coating at a position near the injection opening.

Abstract: In an ammonia sensor (1), lead portions (7) and (9) are provided on an insulating substrate (5); a pair of comb-shaped electrodes (11) and (13) are connected to the lead portions (7) and (9), respectively; a sensitive layer (15) is provided on the comb-shaped electrodes (11) and (13); and a protective layer (17) is provided on the sensitive layer (15). Particularly, the sensitive layer (15) is formed of a gas-sensitive raw material predominantly containing ZrO2 and containing at least W in an amount of 2 to 40 wt. % as reduced to WO3.

Abstract: A rotation sensor includes a rotation detector mounted on a holder which is in turn inserted in a casing through its opening. A cover is formed by molding a resin so as to cover the opening of the casing and the portion of the holder protruding from the opening of the casing. A pair of relay terminals extend through a base portion of the holder and a gap defined in the holder, are fixed to a support wall, and connected to respective lead pieces of the detector. A resin cover is formed by molding a resin. When forming the cover, pressure is applied to the holder, thereby causing the holder to bulge axially in the holder. This in turn pushes the relay terminals in the axial direction. But since the relay terminals are fixed to the support wall, the support wall will absorb such pushing force, thereby preventing such pushing from being transmitted to the detector. In order to more effectively absorb such pushing force, the relay terminals may be provided with bent portions in the gap.

Abstract: A wheel speed sensor includes a rotation detector mounted in an opening formed in a holder which is in turn inserted in a casing having one end closed. A pair of lead pieces extend from the detector and have connecting portions connected to respective relay terminals. A lid having a projection is fitted in the opening of the holder so that the projection is inserted between the connecting portions. The projection thus separates and insulates the connecting portions from each other. A cover is formed by molding a resin to cover the open end of the casing and the portion of the holder protruding from the open end of the casing.

Abstract: The method for producing a pattern formation mold includes: a first step of applying to a substrate a radiation-sensitive negative-type resist composition containing an epoxy resin represented by formula (I): (wherein R1 represents a moiety derived from an organic compound having k active hydrogen atoms (k represents an integer of 1 to 100); each of n1, n2, through nk represents 0 or an integer of 1 to 100; the sum of n1, n2, through nk falls within a range of 1 to 100; and each of “A” s, which may be identical to or different from each other, represents an oxycyclohexane skeleton represented by formula (II): (wherein X represents any of groups represented by formulas (III) to (V): and at least two groups represented by formula (III) are contained in one molecule of the epoxy resin)), along with a radiation-sensitive cationic polymerization initiator, and a solvent for dissolving the epoxy resin therein; a second step of drying the substrate coated with the radiation-sensitive negative-type resist composition

Abstract: A high speed, wide-range, high-accuracy positioning stage device for eliminating errors due to deterministic elements such as variation of surface machining accuracy of a bar mirror and for preventing error accumulation due to indeterminate elements such as air fluctuations when switching between laser interferometers. When an X1 laser interferometer as a first position measurement device and an X2 laser interferometer as a second position measurement device are switched, at a place at which at least two position measurement devices are activated, when a value is handed over from the X1 laser interferometer, which was activated, to the X2 laser interferometer, which is to be activated, errors due to the effect of X-bar mirror flatness and air fluctuations are found by a correction function for the X-bar mirror and/or a table and the average of the measured values, and the value of the X2 laser interferometer is corrected by a correction device such as a calculation device.

Abstract: A rotation sensor includes a rotation detector mounted on a holder which is in turn inserted in a casing through its opening. A cover is formed by molding a resin so as to cover the opening of the casing and the portion of the holder protruding from the opening of the casing. A pair of relay terminals extend through a base portion of the holder and a gap defined in the holder, are fixed to a support wall, and connected to respective lead pieces of the detector. A resin cover is formed by molding a resin. When forming the cover, pressure is applied to the holder, thereby causing the holder to bulge axially in the holder. This in turn pushes the relay terminals in the axial direction. But since the relay terminals are fixed to the support wall, the support wall will absorb such pushing force, thereby preventing such pushing from being transmitted to the detector. In order to more effectively absorb such pushing force, the relay terminals may be provided with bent portions in the gap.

Abstract: A wheel speed sensor includes a rotation detector mounted in an opening formed in a holder which is in turn inserted in a casing having one end closed. A pair of lead pieces extend from the detector and have connecting portions connected to respective relay terminals. A lid having a projection is fitted in the opening of the holder so that the projection is inserted between the connecting portions. The projection thus separates and insulates the connecting portions from each other. A cover is formed by molding a resin to cover the open end of the casing and the portion of the holder protruding from the open end of the casing.

Abstract: An electrostatic capacitance tilt angle sensor having a size that is reduced without lowering detection capacity. The sensor is provided with a case including a first wall and a second wall facing each other. A common electrode is arranged on the first wall and a differential electrode is arranged on the second wall. A liquid electrostatic capacitance medium is accommodated in the case and contacts the common electrode and the differential electrode. The electrostatic capacitance medium includes an insulative liquid base and fine particles mixed in the base. The fine particles have a dielectric constant that is higher than that of the base.

Abstract: A testing apparatus using a scanning electron microscope for enabling tests and measurements on any part of a test subject in a nondestructive way without being limited by a size of the test subject, which is, a testing apparatus 1 using a scanning electron microscope for performing tests and measurements on any part of a test subject in a nondestructive way by using a scanning electron microscope 6a, comprising a local vacuum formation portion 9 for forming a local vacuum region by blocking around a part to be tested of the test subject from the outside air, wherein the local vacuum formation portion comprises an exhaust portion for exhausting to form a partial vacuum region, a float means 14 for floating the whole local vacuum formation portion above the test subject by emitting a compressed gas to an outer circumference portion of the local vacuum formation portion and a length measuring means 16 for measuring a distance between the test subject and the local vacuum formation portion for controlling floati

Abstract: The state of a polysilicon film formed by excimer laser annealing an amorphous silicon film is to be evaluated. When the amorphous silicon film is annealed to form a polysilicon film, linearity or periodicity presents itself in the spatial structure of the film surface of the polysilicon film formed depending on the energy applied to the amorphous silicon during annealing. This linearity or periodicity is processed as an image and represented numerically from the image by exploiting the linearity or periodicity. The state of the polysilicon film is checked based on the numerical results.

Abstract: An electrostatic capacitance tilt angle sensor having a size that is reduced without lowering detection capacity. The sensor is provided with a case including a first wall and a second wall facing each other. A common electrode is arranged on the first wall and a differential electrode is arranged on the second wall. A liquid electrostatic capacitance medium is accommodated in the case and contacts the common electrode and the differential electrode. The electrostatic capacitance medium includes an insulative liquid base and fine particles mixed in the base. The fine particles have a dielectric constant that is higher than that of the base.

Abstract: A polysilicon film evaluation apparatus is provided which enables objective automatic evaluation of the status of a polysilicon film, as formed to a high accuracy in a contact-free fashion.

Abstract: A testing apparatus using a scanning electron microscope for enabling tests and measurements on any part of a test subject in a nondestructive way without being limited by a size of the test subject, which is, a testing apparatus 1 using a scanning electron microscope for performing tests and measurements on any part of a test subject in a nondestructive way by using a scanning electron microscope 6a, comprising a local vacuum formation portion 9 for forming a local vacuum region by blocking around a part to be tested of the test subject from the outside air, wherein the local vacuum formation portion comprises an exhaust portion for exhausting to form a partial vacuum region, a float means 14 for floating the whole local vacuum formation portion above the test subject by emitting a compressed gas to an outer circumference portion of the local vacuum formation portion and a length measuring means 16 for measuring a distance between the test subject and the local vacuum formation portion for controlling floati

Abstract: In an ammonia sensor (1), lead portions (7) and (9) are provided on an insulating substrate (5); a pair of comb-shaped electrodes (11) and (13) are connected to the lead portions (7) and (9), respectively; a sensitive layer (15) is provided on the comb-shaped electrodes (11) and (13); and a protective layer (17) is provided on the sensitive layer (15). Particularly, the sensitive layer (15) is formed of a gas-sensitive raw material predominantly containing ZrO2 and containing at least W in an amount of 2 to 40 wt. % as reduced to WO3.