Patents by Inventor Tak H. Ning

Tak H. Ning has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10134882
    Abstract: A method of controlling formation of junctions in a lateral bipolar junction transistor comprises: providing a starting substrate comprising a bulk silicon material as a handle substrate, a buried oxide layer on the handle substrate, and an intrinsic base semiconductor layer of germanium on the buried oxide layer; forming an extrinsic base layer on the intrinsic base semiconductor layer; etching at least a portion of the base layer; disposing a sidewall spacer on a side of the base layer; disposing a faceted germanium layer adjacent the sidewall spacer; recessing the faceted germanium layer and the intrinsic base semiconductor layer below the sidewall spacer; using a hot angle ion implantation technique to implant ions into a side of the intrinsic base semiconductor layer to form a junction edge/profile; annealing the implanted ions; and epitaxially growing a Si or SiGe layer on the germanium layer and the junction edge/profile.
    Type: Grant
    Filed: October 24, 2017
    Date of Patent: November 20, 2018
    Assignee: International Business Machines Corporation
    Inventors: Pouya Hashemi, Kam-Leung Lee, Tak H. Ning, Jeng-Bang Yau
  • Patent number: 10134917
    Abstract: A memory device including a first conductivity type vertically orientated semiconductor device in a first region of a substrate and a second conductivity type vertically orientated semiconductor device in a second region of the substrate. A common floating gate structure in simultaneous electrical communication with a first fin structure of the first conductivity type vertically orientated semiconductor device and a second fin structure of the second conductivity type vertically orientated semiconductor device.
    Type: Grant
    Filed: March 17, 2017
    Date of Patent: November 20, 2018
    Assignee: International Business Machines Corporation
    Inventors: Karthik Balakrishnan, Pouya Hashemi, Tak H. Ning, Alexander Reznicek
  • Patent number: 10115750
    Abstract: An integrated radiation sensor for detecting the presence of an environmental material and/or condition includes a sensing structure and first and second lateral bipolar junction transistors (BJTs) having opposite polarities. The first lateral BJT has a base that is electrically coupled to the sensing structure and is configured to generate an output signal indicative of a change in stored charge in the sensing structure. The second lateral BJT is configured to amplify the output signal of the first bipolar junction transistor. The first and second lateral BJTs, the sensing structure, and the substrate on which they are formed comprise a monolithic structure.
    Type: Grant
    Filed: May 22, 2017
    Date of Patent: October 30, 2018
    Assignee: International Business Machines Corporation
    Inventors: Michael S. Gordon, Tak H. Ning, Kenneth P. Rodbell, Jeng-Bang Yau
  • Patent number: 10090340
    Abstract: A semiconductor structure includes an optoelectronic device located in one region of a substrate. A dielectric material is located adjacent and atop the optoelectronic device. A top contact is located within a region of the dielectric material and contacting a topmost surface of the optoelectronic device. A bottom metal contact is located beneath the optoelectronic device and lining a pair of openings located with other regions of the dielectric material, wherein a portion of the bottom metal contact contacts an entire bottommost surface of the optoelectronic device.
    Type: Grant
    Filed: January 13, 2017
    Date of Patent: October 2, 2018
    Assignee: International Business Machines Corporation
    Inventors: Effendi Leobandung, Ning Li, Tak H. Ning, Jean-Olivier Plouchart, Devendra K. Sadana
  • Patent number: 10083875
    Abstract: A method of forming a semiconductor device and resulting structures having vertical transistors with different gate lengths are provided. A sacrificial gate is formed over a channel region of a semiconductor fin. The sacrificial gate includes a first material. The first material in a first portion of the sacrificial gate adjacent to the semiconductor fin is converted to a second material, the first portion having a first depth. The first portion of the sacrificial gate is then removed.
    Type: Grant
    Filed: February 15, 2017
    Date of Patent: September 25, 2018
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Karthik Balakrishnan, Pouya Hashemi, Tak H. Ning, Alexander Reznicek
  • Publication number: 20180269329
    Abstract: A memory device including a first conductivity type vertically orientated semiconductor device in a first region of a substrate and a second conductivity type vertically orientated semiconductor device in a second region of the substrate. A common floating gate structure in simultaneous electrical communication with a first fin structure of the first conductivity type vertically orientated semiconductor device and a second fin structure of the second conductivity type vertically orientated semiconductor device.
    Type: Application
    Filed: March 17, 2017
    Publication date: September 20, 2018
    Inventors: Karthik Balakrishnan, Pouya Hashemi, Tak H. Ning, Alexander Reznicek
  • Patent number: 10079278
    Abstract: A method for forming a bipolar junction transistor includes forming a collector intrinsic region, an emitter intrinsic region and an intrinsic base region between the collector intrinsic region and the emitter intrinsic region. A collector extrinsic contact region is formed in direct contact with the collector intrinsic region; an emitter extrinsic contact region is formed on the emitter intrinsic region and a base extrinsic contact region is formed in direct contact with the intrinsic base region. Carbon is introduced into at least one of the collector extrinsic contact region, the emitter extrinsic contact region and the base extrinsic contact region to suppress diffusion of dopants into the junction region.
    Type: Grant
    Filed: September 28, 2016
    Date of Patent: September 18, 2018
    Assignee: International Business Machines Corporation
    Inventors: Kevin K. Chan, Bahman Hekmatshoartabari, Tak H. Ning
  • Patent number: 10074734
    Abstract: Semiconductor structure including germanium-on-insulator lateral bipolar junction transistors and methods of fabricating the same generally include formation of a silicon passivation layer at an interface between the insulator layer and a germanium layer.
    Type: Grant
    Filed: August 16, 2017
    Date of Patent: September 11, 2018
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kevin K. Chan, Tak H. Ning, Jeng-Bang Yau
  • Patent number: 10043825
    Abstract: A method comprises forming shallow trenches in an intrinsic base semiconductor layer and forming a first base layer thereon; applying a first mask to the layer; etching the first base layer; forming a second base layer on the intrinsic base semiconductor layer adjacent the first base layer; removing the first mask; applying a second mask to the base layers; simultaneously etching the layers to produce extrinsic bases of reduced cross dimensions, a length of the second extrinsic base layer being different from a length of the first extrinsic base layer; disposing spacers on the extrinsic bases; etching around the bases leaving the intrinsic base semiconductor layer under the bases and spacers; implanting ions into sides of the intrinsic base semiconductor layer under the extrinsic bases to form emitter/collector junctions; depositing semiconductor material adjacent to the junctions and the trenches; and removing the applied second mask.
    Type: Grant
    Filed: May 16, 2017
    Date of Patent: August 7, 2018
    Assignee: International Business Machines Corporation
    Inventors: Karthik Balakrishnan, Pouya Hashemi, Tak H. Ning, Alexander Reznicek
  • Patent number: 10038061
    Abstract: A structure includes a laterally diffused (LD) MOSFET with an n-type drift region disposed on a surface of a substrate and a p-type body region contained in the drift region. The structure further includes an n-type source region contained in the p-type body region; an n-type drain region contained in the n-type drift region; a gate electrode disposed on a gate dielectric overlying a portion of the p-type body region and the n-type drift region and an electrically conductive field shield member disposed within the n-type drift region at least partially beneath the p-type body region and generally parallel to the gate electrode. The electrically conductive buried field shield member is contained within and surrounded by a layer of buried field shield oxide and is common to both a first LD MOSFET and a second LD MOSFET that are connected in parallel. Methods to fabricate the structure are also disclosed.
    Type: Grant
    Filed: July 8, 2016
    Date of Patent: July 31, 2018
    Assignee: International Business Machines Corporation
    Inventor: Tak H. Ning
  • Patent number: 10026733
    Abstract: A method for fabricating a complementary bipolar junction transistor (BJT) integrated structure. The method includes forming a first backplate in a monolithic substrate below a first buried oxide (BOX) layer. Another forming step forms a second backplate in the monolithic substrate below the first BOX layer. The second backplate is electrically isolated from the first backplate. Another forming step forms an NPN lateral BJT above the first BOX layer and superposing the first backplate. The NPN lateral BJT is configured to conduct electricity horizontally between an NPN emitter and an NPN collector when the NPN lateral BJT is active. Another forming step forms a PNP lateral BJT superposing the second backplate. The PNP lateral BJT is configured to conduct electricity horizontally between a PNP emitter and a PNP collector when the PNP lateral BJT is active.
    Type: Grant
    Filed: September 28, 2016
    Date of Patent: July 17, 2018
    Assignee: International Business Machines Corporation
    Inventors: Tak H. Ning, Jeng-Bang Yau
  • Patent number: 10026752
    Abstract: An amplifier circuit including a substrate layer and a plurality of lateral bipolar junction transistors positioned entirely above the substrate. The lateral bipolar junction transistors include a plurality of monolithic emitter-collector regions coplanar to each other. Each of the emitter-collector regions is both an emitter region of a first bipolar junction transistor a collector region of a second bipolar junction transistor from the lateral bipolar junction transistors. Accordingly, the lateral bipolar junction transistors are electrically coupled in series circuit at the emitter-collector regions.
    Type: Grant
    Filed: August 28, 2016
    Date of Patent: July 17, 2018
    Assignee: International Business Machines Corporation
    Inventors: Alberto Valdes Garcia, Tak H. Ning, Jean-Olivier Plouchart, Ghavam G. Shahidi, Jeng-Bang Yau
  • Publication number: 20180190803
    Abstract: A SOI lateral heterojunction Si-emitter SiGe-base bipolar transistor is provided that contains an intrinsic base region that includes a small band gap region (i.e., a silicon germanium alloy base of a first conductivity type) and a large band gap region (i.e., a silicon region of the first conductivity type) A silicon emitter of a second conductivity type that is opposite the first conductivity type is formed on the large-band gap side of the intrinsic base region and a silicon collector of the second conductivity type is formed on the small-band gap side of the intrinsic base region.
    Type: Application
    Filed: February 23, 2018
    Publication date: July 5, 2018
    Inventors: Pouya Hashemi, Tak H. Ning, Alexander Reznicek
  • Patent number: 10008281
    Abstract: A method of operating a programmable read-only-memory (ROM) cell unit having a series coupled CMOS NFET and CMOS PFET device formed on a semiconductor layer located on top of a buried dielectric layer, the buried dielectric layer formed on top of a cell substrate, and each NFET and PFET device having a respective gate, drain and source terminals. The method includes applying a first bias voltage to the cell substrate; and applying a second bias voltage to a drain terminal of the PFET device with respect to a source of the PFET, the second bias voltage sufficient to enable electron trapping at the buried dielectric layer associated with that cell, the injected electron carriers trapped at the buried dielectric layer providing a stored charge representative of a logic bit value at the unit cell that is physically undetectable and is configured to be read electrically.
    Type: Grant
    Filed: April 13, 2017
    Date of Patent: June 26, 2018
    Assignee: International Business Machines Corporation
    Inventors: Tak H. Ning, Ghavam G. Shahidi, Jeng-Bang Yau
  • Publication number: 20180166563
    Abstract: A method of forming a lateral bipolar junction transistor (LBJT) that includes providing a germanium containing layer on a crystalline oxide layer, and patterning the germanium containing layer stopping on the crystalline oxide layer to form a base region. The method may further include forming emitter and collector extension regions on opposing sides of the base region using ion implantation, and epitaxially forming an emitter region and collector region on the crystalline oxide layer into contact with the emitter and collector extension regions. The crystalline oxide layer provides a seed layer for the epitaxial formation of the emitter and collector regions.
    Type: Application
    Filed: February 12, 2018
    Publication date: June 14, 2018
    Inventors: Karthik Balakrishnan, Pouya Hashemi, Tak H. Ning, Alexander Reznicek
  • Patent number: 9966735
    Abstract: III-V lasers integrated with silicon photonic circuits and methods for making the same include a three-layer semiconductor stack formed from III-V semiconductors on a substrate, where a middle layer has a lower bandgap than a top layer and a bottom layer; a mirror region monolithically formed at a first end of the stack, configured to reflect emitted light in the direction of the stack; and a waveguide region monolithically formed at a second end of the stack, configured to transmit emitted light.
    Type: Grant
    Filed: June 21, 2016
    Date of Patent: May 8, 2018
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Cheng-Wei Cheng, Frank R. Libsch, Tak H. Ning, Uzma Rana, Kuen-Ting Shiu
  • Publication number: 20180108763
    Abstract: After forming a trench extending through an insulator layer and an underlying top semiconductor portion that is comprised of a first semiconductor material and a dopant of a first conductivity type to define an emitter and a collector on opposite sides of the trench in the top semiconductor portion, an intrinsic base comprising a second semiconductor material having a bandgap less than a bandgap of the first semiconductor material and a dopant of a second conductivity type opposite the first conductivity type is formed in a lower portion the trench by selective epitaxial growth. The intrinsic base protrudes above the top semiconductor portion and is laterally surrounded by entire top semiconductor portion and a portion of the insulator layer. An extrinsic base is then formed on top of the intrinsic base to fill a remaining volume of the trench by a deposition process.
    Type: Application
    Filed: December 19, 2017
    Publication date: April 19, 2018
    Inventors: Jin Cai, Kevin K. Chan, Christopher P. D'Emic, Tak H. Ning, Jeng-Bang Yau
  • Patent number: 9947675
    Abstract: A mask programmable read-only memory (PROM) cell is provided utilizing a vertical transistor processing flow. PROM programming is performed during the processing flow itself. Notably, “0” or “1” state can be programmed by tuning the threshold voltage of the vertical transistor by controlling the doping concentration of the epitaxially grown semiconductor channel material.
    Type: Grant
    Filed: September 29, 2016
    Date of Patent: April 17, 2018
    Assignee: International Business Machines Corporation
    Inventors: Karthik Balakrishnan, Pouya Hashemi, Tak H. Ning, Alexander Reznicek
  • Patent number: 9947778
    Abstract: A method of forming a lateral bipolar junction transistor (LBJT) that includes providing a germanium containing layer on a crystalline oxide layer, and patterning the germanium containing layer stopping on the crystalline oxide layer to form a base region. The method may further include forming emitter and collector extension regions on opposing sides of the base region using ion implantation, and epitaxially forming an emitter region and collector region on the crystalline oxide layer into contact with the emitter and collector extension regions. The crystalline oxide layer provides a seed layer for the epitaxial formation of the emitter and collector regions.
    Type: Grant
    Filed: July 15, 2016
    Date of Patent: April 17, 2018
    Assignee: International Business Machines Corporation
    Inventors: Karthik Balakrishnan, Pouya Hashemi, Tak H. Ning, Alexander Reznicek
  • Patent number: 9947677
    Abstract: A memory array includes an N×M array of memory cells, each memory cell having a first transistor connected to a first terminal and a second transistor connected in parallel to the first transistor and a second terminal, where the first and second transistors share a common floating gate and a common output node. Each memory cell further includes an access transistor connected in series to the common output node and a low voltage terminal, the access transistor configured to trigger hot-carrier injection to the common floating gate to change a voltage of the common floating gate. The first transistor is an n-type transistor and the second transistor is a p-type transistor.
    Type: Grant
    Filed: February 21, 2017
    Date of Patent: April 17, 2018
    Assignee: International Business Machines Corporation
    Inventors: Kevin K. Chan, Bahman Hekmatshoartabari, Tak H. Ning, Jeng-bang Yau