Abstract: A support shaft is non-rotationally inserted into bearing plates of support member. Accelerator rotor is attached to support shaft and can rotate, and a driver rotates it by means of the actuation of the accelerator pedal. Sensor rotor of accelerator opening sensor is attached to support shaft and can rotate. Protruding portion of sensor rotor is engaged with recess portion formed in accelerator rotor. Because plate spring inserted into recess portion sandwiches protruding portion in a direction opposite of the direction of rotation, with respect to sensor rotor, shift or deviation in the direction of rotation of accelerator rotor is prevented. Further, with respect to sensor rotor, accelerator rotor can slide in contact with plate spring while sliding in the direction of support shaft and the radial direction of accelerator rotor.

Abstract: In an accelerator, an acceleration rotor made of resin is rotatably supported in a support shaft, one end portion of a pedal arm is connected to an acceleration pedal, and the other end portion of the pedal arm is attached to attachment portions of the acceleration rotor. The attachment portions are provided in the acceleration rotor to be separated in a rotation direction of the acceleration rotor. For example, the attachment portions are a press-fitting portion, into which a top end part of the other end portion of the pedal arm is press-fitted, and an insertion portion, into which a bending part of the other end portion of the pedal arm is inserted. Thus, the pedal arm can be accurately readily attached to the resinous acceleration rotor to be only rotated around the support shaft of the acceleration rotor.

Abstract: An electrostatic chucking mechanism including an electrode body, a dielectric block placed on the front of the electrode body and having a dielectric portion to be dielectrically polarized for electrostatically chucking an object to be chucked, and an intermediate layer placed between the electrode body and the dielectric block. The intermediate layer is formed of a metal such as indium having extendibility for absorbing thermal deformation of the electrode body or the dielectric block and is heated and pressurized, thereby joining the electrode body and the dielectric block. A thin film of indium, chrome, or the like, is prepared on the junction face of the dielectric block, enhancing a junction force and adhesion by the intermediate layer.

Abstract: A plasma treatment device for forming a high-quality thin film with fewer surface flaws and etching by preventing the generation of fine powders from deposited films in a film-forming chamber, by means of plasma treatment using gaseous starting materials. The plasma treatment chamber device includes a plasma generation chamber 11, a power-supplying mechanism for supplying power to this chamber, a film-forming chamber 113 to be spatially connected to the plasma generation chamber 11, a magnetic field generation mechanism 14 provided around this film-forming chamber for forming a multicusp magnetic field therein, an evacuation mechanism for evacuating the chamber, a first gas-supplying mechanism 16 for supplying gaseous starting materials and a second gas-supplying mechanism 17 for supplying gaseous materials for forming films. An inner wall surface 113b of the film-forming chamber is located in an area having a multicusp magnetic field with an intensity of from 50 to 200 G.

Abstract: A system for processing a substrate with plasma. In the system, a substrate holder includes an energy application member for energizing an exposure face other than a substrate placement portion. The energy application member energizes the exposure face by an induced current when high-frequency electromagnetic wave power is applied, by heat generated upon energization, or by ion bombardment when a high-frequency electric field is applied. Perfluorocarbon 14 gas and oxygen gas introduced by a gas introduction mechanism form plasma by a power supply mechanism for etching and removing a thin film deposited on the exposure face. At this time, the etching is accelerated by energy given by the energy application member.

Abstract: A rotary position detector comprises an integrally molded rotor made of a synthetic resin to which a contact is fixed, a housing and a cover member on which a resistance circuit surface is formed. A contact surface and the resistance circuit surface to which the contact is attached has a cylindrical recess disposed on the same axis center as the shaft or a protrusion engaging in the recess. Alternatively, the resistance circuit surface may be provided on the rotor and the contact is provided on the cover member. A terminal contact which integrates an external contact terminal and a contact may be employed.

Abstract: A thin film deposition apparatus forms a thin film onto substrates by use of a plasma gas and a material gas. In this apparatus, generation of particles in a deposition chamber can be reduced and hence a high quality thin film with fewer surface defects can be formed. The apparatus comprises a bell jar, a power-supply unit for supplying electric power to the bell jar, a deposition chamber, a vacuum pumping unit for evacuating the deposition chamber, a first gas introduction unit for introducing a gas used for generating plasma, and a second gas introduction unit for introducing a material gas used for forming the thin film, and further a blocking member for preventing either or both of the material gas and the plasma from entering a space between a gas supply end-portion of the second introduction unit and an interior surface of the deposition chamber. The blocking member is shaped to have relatively large curvature.

Abstract: A closed type scroll compressor has a drive shaft supported by a frame through bearings lubricated with a lubricating oil supplied from an oil reservoir via a lubricating oil passage bore formed in the drive shaft. The end of the drive shaft in which the upstream end of the lubricating oil passage bore opens is connected to the oil reservoir through a joint tube which is supported by supporting structures including a combination of a spherical slide bearing and slide bearing and capable of taking up any mounting error or displacement of the drive shaft in any direction. The compressor can be assembled easily without any risk of uneven or local contact of each sliding portion.

Abstract: A scroll compressor apparatus comprising a closed scroll compressor, an oil reservoir vessel separate from the closed scroll compressor, a discharge pipe, and an oil supply pipe. The closed scroll compressor includes a closed container having a suction port through which a compression medium is suctioned, a scroll compression mechanism encased in the closed container, a motor encased in the closed container, a first oil supply passage extending through an end plate of a fixed scroll and through which a first opening facing a sliding contact portion with an orbiting scroll is communicated with an oil supply port, a second oil supply passage formed in an end plate of the orbiting scroll and through which the first opening is communicated with a second opening facing an end face of a driving shaft, and a third oil supply passage, formed in the driving shaft, through which the second opening is communicated with the third opening facing a bearing supporting the driving shaft.

Abstract: A scroll compressor has a scroll mechanism disposed in a closed container and driven by a motor through a crank shaft rotatably supported at two points by first and second bearings disposed adjacent the opposite ends of the motor. The bearing which is remote from the scroll mechanism comprises a sliding bearing. The first end of the crank shaft remote from the scroll mechanism has a peripheral surface disposed in sliding engagement with the sliding bearing and formed therein with a lubricant supply groove communicated with an axial lubricant supply hole formed in the crank shaft and having a closed end adjacent the first end of the crank shaft and opened in an end face of a crank pin section thereof. The sliding bearing is communicated with a lubricant reservoir formed by a lower part of the container. The lubricant in the reservoir is subjected to the pressure of a compressed fluid discharged from the scroll mechanism and is forcibly fed into the lubricant supply groove through the sliding bearing.

Abstract: A scroll compressor comprises an orbiting scroll and a fixed scroll, each of which has a wrap formed on an end plate in upstanding position. These orbiting and fixed scrolls are assembled together with the wraps facing inwardly to each other so as to define a plurality of spaces by the wraps and the end plates of both scrolls. These spaces move toward the center of both scrolls during the orbiting movement of the orbiting scroll so as to reduce the respective capacities of the spaces. Thus, compression of a fluid is carried out. This compressor also includes a motor for driving the orbiting scroll and a driving shaft for connecting the orbiting scroll and the motor. At the end of the driving shaft on the motor side, a first oil supply pump is provided with its suction port communicating to an oil sump of the compressor.

Abstract: A compressor unit composed of a fixed scroll and an orbiting scroll which are engaged with each other, and a variable speed motor are disposed in a hermetic chamber. A first bearing is provided in an engagement portion between a crankshaft and the orbiting scroll in an intermediate pressure chamber provided on a back surface of the orbiting scroll for applying thereto an intermediate pressure between a discharge pressure and a suction pressure. The crankshaft is supported by a second bearing provided close to the orbiting scroll and a third bearing provided close to the motor. The first, second and third bearings are lubricated by force of a differential pressure between the discharge pressure and the intermediate pressure through an oil passage. The oil passage is in communication at one end thereof with the lubricant oil on which the discharge pressure is applied, and opens at the other end thereof into the intermediate pressure chamber.

Abstract: An oil feeding system for a scroll compressor includes an enclosed vessel accommodating therein an electric motor disposed at an upper position and a scroll compressor section disposed at a lower section and adjacent to the motor. A suction pipe opens into the enclosed vessel for the purpose of maintaining a low-pressure atmosphere in the interior of the enclosed vessel. A gyratory shaft of a gyratory scroll engages with an eccentric hole formed in the end of the drive shaft, and a trochoid pump is disposed at the end of the gyratory shaft. A pump case has a portion below the pump, which is formed with a circular-arc large-volume suction port on one side thereof and a circular-arc discharge-side oil sump on the other side thereof.

Abstract: A hermetic scroll compressor comprising a compressor component and an electric motor arranged respectively in upper and lower portions of a closed housing. The compressor component includes fixed and orbiting scrolls in mesh with each other. A frame is fixedly connected to the fixed scroll and supports the orbiting scroll for orbiting motion, with at least one passage group of a plurality of vertically extending passages being provided at a peripheral surface of the frame for communicating a space above the compressor component with a space between the compressor component and the electric motor. One of th e passages has a higher fluid resistance than the remaining passages, with the passage having high fluid resistance being vertically aligned with a passage provided at the periphery of the electric motor for communicating the space above the electric motor with a lubricating oil reservoir below the electric motor.

Abstract: A scroll fluid machine comprising a pair of fixed and orbiting scrolls having their respective wraps in mesh with each other. A drive shaft engaging the orbiting scroll is connected to an electric motor and is supported by a frame. An end plate of the oribiting scroll is slidably held between the frame and an end plate of the fixed scroll. A first feed oil passage is formed in at least one of the end plate of the fixed scroll and the frame. The first passage has one end communicates with an oil reservoir defined at a bottom of the housing and the other end opening on a sliding surface contacting with the orbiting scroll. A second feed oil passage formed in the end plate of the orbiting scroll has one end always communicating with the other end of the first passage. The other end of the second passage is located in the vicinity of the axis of the orbiting scroll. A third feed oil passage formed in the drive shaft has one end communicating with the other end of the second passage.

Abstract: A scroll compressor is disclosed. A first main bearing and a second main bearing is coaxially formed on the sole frame but a balancer can be easily attached to a drive shaft by forming a space and an opening in the frame of the scroll compressor. The balancer is inserted through the opening formed in the periphery of the frame. One end of the drive shaft is inserted in the hole of the balancer and the first and second main bearings. The drive shaft and the balancer are fixed by suitable fixing means, so that the drive shaft is rotatably supported by the first and second main bearings, and the balancer can be rotated together with the drive shaft. Accordingly, since the frame of this invention has a single, integral frame structure, it is possible to coaxially form the first main bearing and the second main bearing, both of which are mounted on the frame.

Abstract: A scroll-type fluid machine for an air conditioning machine comprises a hermetically closed vessel which houses therein an orbiting scroll member and a stationary scroll member forming together a compressor portion, an Oldham ring member for preventing the orbiting scroll member from rotating about its own axis, a driving motor having a driving shaft connected to the orbiting scroll member for driving the same, and a frame for supporting the shaft, a low pressure liquid introducing passage for making the interior of the hermetically closed vessel a low pressure chamber, and a high pressure fluid discharge passage. A sealing member is provided at the back of the orbiting scroll member with its surfaces slidably contacting the frame and the orbiting scroll member to form a chamber separated from the low pressure chamber.

Abstract: The scroll type compressor has a hermetic casing, and a scroll compressor section and an electric motor section which are contained within the hermetic casing. These compressor and electric motor sections are fitted through a frame in the hermetic casing. In a portion of the frame intermediate between the compressor and the electric motor section, a plurality of segmented concave spaces are defined. At an upper portion in the hermetic casing, a discharge space which communicates with a discharge port of the scroll compressor section is defined. Further, in a portion of the casing between the compressor and the motor section, a delivery port which open to one of the concave spaces in the frame is provided. Furthermore, at least one fluid passage is provided in an outer periphery of the compressor section and this passage makes the discharge space communicate with the other concave spaces in the frame.

Abstract: A scroll compressor comprises an orbiting scroll and a fixed scroll, each of which includes a spiral wrap. These orbiting and fixed scrolls define between their wraps a plurality of close spaces at symmetrical positions. These closed spaces are moved toward the center of the scrolls by means of orbital motion of the orbiting scroll relative to the fixed scroll for reducing their capacities to compress fluid confined therein. Upon starting the compressor, some of the spaces which are in mid course of compressing and the other closed spaces which locate at the downstream side just before the communication with a discharge port, are communicated with each other through valves which open when pressure in the closed spaces at the upstream side is higher than that in the closed spaces at the downstream side, whereby a loading torque upon starting is decreased.

Abstract: In a sealed type scroll compressor including an intermediate pressure chamber in which a pressure intermediate in magnitude between a discharge pressure and a suction pressure prevails, a bearing device including a roller bearing and a plain bearing mounted on a frame for supporting a shaft section of a crankshaft. To reduce application of unsymmetrical load to the bearings and prevent an increase in a bearing friction loss, the roller bearing is located in a position close to a crank section of the crankshaft and the plain bearing is located in a position remote from the crank section.