Abstract: An oxidation and reduction fine particles generator includes an atomization electrode, a water feeder for supplying water to the atomization electrode and a high voltage generator, and also includes a switch device and a controller. The switch device changes an operation mode to an oxidation mode or a reduction mode. The controller generates negatively charged fine water particles including radicals through electrostatic atomization by applying a high voltage to water supplied to the atomization electrode in the oxidation mode. The controller also inactivates and activates the water feeder and the high voltage generator, respectively to generate reduction fine particles from the atomization electrode by dry discharge in the reduction mode.

Abstract: The electrostatic atomizing device includes a discharge electrode, an opposed electrode, and a voltage application device. The voltage application device is configured to apply a voltage between the discharge electrode and the opposed electrode so as to atomizing a liquid supplied to the discharge electrode. The electrostatic atomizing device further includes a reduced water provision device configured to supply reduced water as the above liquid to the discharge electrode.

Abstract: A substrate processing apparatus in accordance with the present invention includes a process chamber configured to accommodate a substrate, a gas supply line configured to supply a gas to an inside of the process chamber, and an exhaust line configured to exhaust the inside of the process chamber. The gas supply line of the substrate processing apparatus includes a preheating unit preheating the gas supplied from a gas source, a metal pipeline having an angled section wherein the metal pipe line connects the preheating unit and the inside of the process chamber to supply the gas preheated by the preheating unit into the process chamber, and a heat dissipation member covering the angled section to dissipate heat from the angled section.

Abstract: An electrostatic atomizing device for ejecting a mist of charged minute particles includes metal ion elution means for eluting sterilizing metal ions into a liquid to be electrostatically atomized. The metal ions are taken up by the charged minute particles, and are ejected into an environment space together with the charged minute particles, thereby eliciting a sterilizing effect. The elution amount of the metal ions is regulated by varying the voltage applied between two kinds of metal bodies.

Abstract: The liquid supplied to an emitter electrode located at a tip of an atomization nozzle receives the high-voltage and electrically charged. The mist of the charged minute water particles of nanometer sizes is generated from the emitter electrode. A pressure regulating means regulates a pressure applied to the liquid on the tip of the emitter electrode. Therefore, the mode of generating the mist of the charged minute water particles of nanometer sizes or the mode of generating the mist of the charged minute water particles of nanometer and micron size is selected.

Abstract: Disclosed is an electrostatic atomizer, which comprises a high-voltage applying section adapted to apply a high voltage between an atomizing electrode and a counter electrode so as to electrostatically atomize water supplied onto the atomizing electrode, wherein the high-voltage applying section is operable to set an absolute value of a voltage to be applied to the atomizing electrode smaller than an absolute value of a voltage to be applied to the counter electrode. This allows a physical object, such as an article stored in a mist-receiving space or an inner wall of a structural member defining the mist-receiving space to become less likely to be electrostatically charged, and makes it possible to avoid causing a problem about discomfort due to discharge of static charges when a user touches the physical object.

Abstract: An electrostatic atomization device having a simple structure and allowing for reduction in size. The electrostatic atomization device has an atomization electrode including a P type Peltier element and an N type Peltier element joined with the P type Peltier element. The atomization electrode is cuspate so as to form a projection with a joined portion of the P type Peltier element and the N type Peltier element. High voltage is applied to the P and N type Peltier elements so that discharging occurs at a distal portion of the atomization electrode, current flows to the P and N type Peltier elements to produce a cooling effect at the joined portion, and condensed water generated by the cooling effect is atomized by the discharging to generate charged fine water droplets.

Abstract: An electrostatically atomizing unit for use in a temperature regulating appliance to add a function of generating a mist of charged minute water particles for deodorization and/or sterilization of a temperature-regulated space. The appliance has a cold space of which air is cooled by cooling means and is fed to cool the temperature-regulated space divided from the cold space by a partition. The atomizing unit has an emitter electrode which is configured to condense water from within a surrounding air. A high voltage source applies a high voltage to the emitter electrode to atomize the condensed water into the charged minute water particles which are discharged from the emitter electrode into the temperature-regulated space. The emitter electrode is provided with a cooling coupler which establishes a heat transfer relation through the partition to the cold space to cool the emitter electrode by making the use of the cooling means inherent to the appliance.

Abstract: An electrostatic atomization device that prevents the cooling capability from being lowered due to contact of an atomization electrode with another ember, while effectively preventing surplus production of condensed water that would destabilize discharging at the distal end of the atomization electrode. the electrostatic atomization device includes an atomization electrode having a cylindrical electrode body and a base which is informed at a basal end of the electrode body and has a larger diameter than the electrode from the base to produce condensed water on the atomization electrode. Voltage is applied to the atomization electrode when the condensed water is produced to generate charged fine water droplets. A partition plate includes an insertion hole that receives the electrode body of the atomization electrode. The partition plate and the base of the atomization electrode form a water collection region in between.

Abstract: Disclosed is an electrostatic atomizer, which comprises a cooler adapted to cool an atomizing electrode so as to allow moisture in air to be frozen onto the atomizing electrode, a melter adapted to melt ice frozen on the atomizing electrode so as to supply water onto the atomizing electrode, a high-voltage applying section adapted to apply a high voltage to the atomizing electrode, and a control section adapted to activate the high-voltage applying section in a state after supplying water onto the atomizing electrode by melting the ice frozen thereon, so as to apply a high voltage to the atomizing electrode to electrostatically atomize the water supplied on the atomizing electrode.

Abstract: A substrate processing apparatus includes a processing chamber in which a substrate is processed, a substrate holder configured to be loaded into and unloaded from the processing chamber while holding the substrate, a transfer chamber in which a charging operation for causing the substrate holder to hold an unprocessed substrate and a discharging operation for taking out a processed substrate from the substrate holder are performed, and a cleaning unit configured to blow clean air into the transfer chamber. The transfer chamber has a polygonal plan-view shape and includes corner areas. The cleaning unit is arranged in one of the corner areas of the transfer chamber.

Abstract: A substrate processing apparatus includes a substrate container holding shelf comprising a plurality of shelf boards configured to hold substrate containers thereon; a substrate container carrying mechanism configured to load and unload the substrate containers into/from the substrate container holding shelf; a substrate container holding shelf elevation mechanism configured to lift each of the plurality of the shelf boards of the substrate container holding shelf in a vertical direction; and a processing unit configured to receive at least one of the substrate containers from the substrate container holding shelf.

Abstract: An electrostatic atomization apparatus (4) includes a discharge electrode (1) and a liquid supplying device (2), which supplies liquid to the discharge electrode. A high voltage application device (3) that applies high voltage to the discharge electrode and performs electrostatic atomization on the liquid supplied to the discharge electrode. A discharge optimization unit electrically coupled to the high voltage application device so that potential at the discharge electrode is such that electrostatic atomization is performed in an acyclic manner without stopping discharging.

Abstract: A substrate processing apparatus comprises: an outer tube; a manifold connected to the outer tube and made of a non-metal material; an inner tube disposed in the manifold at a more inner side than the outer tube and configured to process a substrate therein; a heating device installed at a more outer side than the outer tube and configured to heat the inside of the outer tube; a lid configured to open and close an opening of the manifold, with a seal member intervened therebetween; and a heat absorption member installed in the manifold, with a bottom end of the inner tube intervened therebetween, and configured to absorb heat from the heating device, the heat absorption member being made of a non-metal material.

Abstract: A substrate processing apparatus includes a reactor; at least two boat conveying devices configured to convey at least two boats; at least one boat support table configured to support the at least two boats, the boat support table being movable to a position below the reactor; and a control unit configured to control the boat conveying devices such that when a first boat of the at least two boats supported by a first boat conveying device of the plurality of boat conveying devices holds a processed substrate processed by the reactor and is moved back to a position spaced apart from the reactor, a second boat of the at least two boats holding an unprocessed substrate is loaded into the reactor using a second boat conveying device of the at least two boat conveying devices.

Abstract: An electrostatic atomization device (A) for increasing hydrophilicity of collected matter (15) that has low hydrophilicity and is attached to a surface of a processing subject (1). The device includes an atomization electrode (6), which generates electrostatically charged atomized water droplets to increase the hydrophilicity, a water supply member (8), which supplies water to the atomization electrode (6), and a voltage application member (9), which applies voltage to the water supplied to the atomization electrode (6).

Abstract: An electrostatic atomizer includes a discharge electrode, an opposite electrode positioned in front of the discharge electrode in a spaced-apart relationship therewith, a housing for defining an atomization chamber between the discharge electrode and the opposite electrode, a water supply unit for supplying water for atomization to the discharge electrode, and a voltage application unit for applying a voltage to the discharge electrode. The housing is provided with an air vent window through which the atomization chamber is opened laterally outwards. The opposite electrode is provided with a soundproof shield portion extended therefrom to cover, when seen from a front side of the opposite electrode, the space existing laterally outwards of the air vent window of the housing. The soundproof shield portion reflects rearwards a discharge sound generated in the atomization chamber.