Patents by Inventor Takayuki YONEMURA

Takayuki YONEMURA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200274054
    Abstract: A piezoelectric element includes: a first electrode provided on a base; a second electrode; and a piezoelectric layer that is provided between the first electrode and the second electrode and that contains a complex oxide having a perovskite structure and including potassium, sodium, and niobium, where: a surface of the piezoelectric layer on a side of the second electrode is composed of faces of first grains and faces of second grains; a roughness height on the faces of the first grains is larger than a roughness height on the faces of the second grains; and an area occupied by the faces of the first grains is 10.0% or less on the surface of the piezoelectric layer.
    Type: Application
    Filed: February 20, 2020
    Publication date: August 27, 2020
    Applicant: SEIKO EPSON CORPORATION
    Inventors: Takayuki YONEMURA, Hidemichi FURIHATA, Yasuto KAKEMURA
  • Publication number: 20200269579
    Abstract: A piezoelectric element includes a first electrode disposed at a base body, a second electrode, and a piezoelectric layer disposed between the first electrode and the second electrode. The piezoelectric layer includes a first piezoelectric layer containing a complex oxide having a perovskite structure that contains lead, zirconium, and titanium and a second piezoelectric layer containing a complex oxide having a perovskite structure that is denoted by formula (1) below. The first piezoelectric layer is disposed between the first electrode and the second piezoelectric layer and is preferentially oriented to (100) when the crystal structure of the first piezoelectric layer is assumed to be pseudo-cubic, xPb(Mg,Nb)O3-yPbZrO3-zPbTiO3??(1) where in formula (1), 0<x,y,z<1 and x+y+z=1.
    Type: Application
    Filed: February 25, 2020
    Publication date: August 27, 2020
    Applicant: SEIKO EPSON CORPORATION
    Inventors: Tetsuya ISSHIKI, Takayuki YONEMURA
  • Publication number: 20200075837
    Abstract: A piezoelectric device includes: a first electrode provided above a substrate; a piezoelectric layer provided above the first electrode; and a second electrode provided above the piezoelectric layer. The piezoelectric layer includes a plurality of layers that includes a composite oxide of a Perovskite structure containing potassium, sodium, and niobium. The piezoelectric layer has a first region and a second region in a 3 ?m×3 ?m region of a plane perpendicular to a thickness direction of the piezoelectric layer. The first region is a region in which the ratio of an atomic concentration (atm %) of potassium with respect to the sum of the atomic concentration (atm %) of potassium and an atomic concentration (atm %) of sodium is 0.30 to 0.45, and the second region is a region in which the ratio is 0.55 to 0.75.
    Type: Application
    Filed: August 28, 2019
    Publication date: March 5, 2020
    Inventors: Takayuki YONEMURA, Yasuto KAKEMURA
  • Patent number: 10386222
    Abstract: A liquid detecting apparatus includes an ultrasonic sensor that transmits and receives an ultrasonic wave, and includes a piezoelectric layer which is formed of a thin film and an ultrasonic element which is provided with a first electrode and a second electrode to interpose the piezoelectric layer between the first electrode and the second electrode, on a diaphragm which is disposed on a substrate having a cavity, and a flow path that forms the same liquid level as a liquid level of a liquid which is stored in a container, in which an acoustic matching layer and a detection surface of a surface of a lens, which are disposed on a side of the ultrasonic sensor that transmits and receives the ultrasonic wave, are disposed to be in contact with the liquid within the flow path.
    Type: Grant
    Filed: November 2, 2017
    Date of Patent: August 20, 2019
    Assignee: Seiko Epson Corporation
    Inventors: Tetsuya Isshiki, Takayuki Yonemura
  • Patent number: 10374140
    Abstract: A piezoelectric device includes a substrate with a cavity, a vibrating plate which is provided on the substrate so as to block an opening surface of the cavity, and a piezoelectric element which is provided on a surface of the vibrating plate opposite to the cavity, including a first electrode, a piezoelectric layer, and a second electrode, in which the second electrode has a laminated structure including a Pt layer (lower layer side electrode) and an Ir layer (upper layer side electrode), in which the Pt layer is in contact with the piezoelectric layer, and in which, if it is assumed that two directions which are parallel to a surface of the substrate and mutually perpendicular are defined as an X direction and a Y direction, the Ir layer is extended to an outside of the cavity at least in the X direction on an X-Y plane view.
    Type: Grant
    Filed: December 15, 2016
    Date of Patent: August 6, 2019
    Assignee: Seiko Epson Corporation
    Inventors: Takayuki Yonemura, Tomohide Onogi, Chikara Kojima
  • Patent number: 10134977
    Abstract: A piezoelectric element has, from a substrate side, a first electrode, a piezoelectric layer containing a composite oxide of an ABO3 type perovskite structure containing Mg, and a second electrode, which are laminated, in which the first electrode includes a diffusion suppressing layer which suppresses diffusion of the Mg and a diffusion layer which diffuses the Mg as compared with the diffusion suppressing layer, and the diffusion suppressing layer is provided on the substrate side relative to the diffusion layer.
    Type: Grant
    Filed: October 16, 2015
    Date of Patent: November 20, 2018
    Assignee: Seiko Epson Corporation
    Inventors: Takayuki Yonemura, Tsutomu Asakawa
  • Publication number: 20180277742
    Abstract: A piezoelectric element has a diaphragm, a first electrode on the diaphragm, a piezoelectric layer on the first electrode, and a second electrode on the piezoelectric layer. The piezoelectric layer is a stack of multiple piezoelectric films and is made of a perovskite composite oxide containing lead, zirconium, and titanium and represented by the general formula ABO3, with the molar ratio of the A-site to the B-site (A/B) in the perovskite composite oxide being 1.14 or more and 1.22 or less. In current-time curve measurement, the activation energy calculated from relaxation current using an Arrhenius plot is 0.6 [eV] or less. The relaxation current is the amount of current at the time at which a downward trend in current turns upward.
    Type: Application
    Filed: March 14, 2018
    Publication date: September 27, 2018
    Inventors: Takayuki YONEMURA, Chikara KOJIMA, Xiaoxing WANG, Tetsuya ISSHIKI, Yasuhiro ITAYAMA
  • Publication number: 20180226560
    Abstract: A piezoelectric element having a vibrating section including a vibrating plate, a first electrode, a piezoelectric layer, and a second electrode, in which a crystal orientation of a piezoelectric material forming the piezoelectric layer is (100) and a crystal structure of the piezoelectric material is a tetragonal crystal, and a total thickness T1 of the vibrating plate and the first electrode and a total thickness T2 of the piezoelectric layer and the second electrode have a relationship of T1?T2.
    Type: Application
    Filed: February 2, 2018
    Publication date: August 9, 2018
    Inventors: Takayuki YONEMURA, Yasuhiro ITAYAMA, Chikara KOJIMA
  • Publication number: 20180143063
    Abstract: A liquid detecting apparatus includes an ultrasonic sensor that transmits and receives an ultrasonic wave, and includes a piezoelectric layer which is formed of a thin film and an ultrasonic element which is provided with a first electrode and a second electrode to interpose the piezoelectric layer between the first electrode and the second electrode, on a diaphragm which is disposed on a substrate having a cavity, and a flow path that forms the same liquid level as a liquid level of a liquid which is stored in a container, in which an acoustic matching layer and a detection surface of a surface of a lens, which are disposed on a side of the ultrasonic sensor that transmits and receives the ultrasonic wave, are disposed to be in contact with the liquid within the flow path.
    Type: Application
    Filed: November 2, 2017
    Publication date: May 24, 2018
    Inventors: Tetsuya ISSHIKI, Takayuki YONEMURA
  • Patent number: 9887344
    Abstract: Provided is a piezoelectric element in which a first electrode, a piezoelectric layer, and a second electrode are sequentially stacked on a substrate, the piezoelectric layer being formed of composite oxide having a perovskite structure which contains at least Pb, Nb, and Ti, in which the piezoelectric layer has a tetragonal crystal structure, the crystal is oriented to {100} against the substrate, and regions are mixed in a crystal lattice, each region including a (100) plane and a (001) plane which are orthogonal to a stacking direction, and the composite oxide of the piezoelectric layer is represented by the following general expression.
    Type: Grant
    Filed: June 30, 2015
    Date of Patent: February 6, 2018
    Assignee: Seiko Epson Corporation
    Inventors: Yasuhiro Itayama, Takayuki Yonemura
  • Patent number: 9799820
    Abstract: A liquid-ejecting head includes a pressure-generating chamber communicating with a nozzle opening, and a piezoelectric element. The piezoelectric layer contains a perovskite complex oxide containing Bi, La, Fe, and Mn and is ferroelectric.
    Type: Grant
    Filed: December 10, 2013
    Date of Patent: October 24, 2017
    Assignee: Seiko Epson Corporation
    Inventors: Takayuki Yonemura, Hiromu Miyazawa
  • Patent number: 9735335
    Abstract: A thermoelectric conversion element includes a first electrode on provided a substrate; a pyroelectric film that is provided on the first electrode, is formed of a composite oxide having an ABO3-type perovskite structure, and generates a surface charge due to temperature change; and a second electrode provided on the pyroelectric film, in which the composite oxide which forms at least a portion of layer in the pyroelectric film contains at least Pb, Nb, and Ti, and is formed of tetragonal crystal which is oriented in the direction of {100} on the substrate.
    Type: Grant
    Filed: May 12, 2016
    Date of Patent: August 15, 2017
    Assignee: Seiko Epson Corporation
    Inventors: Takayuki Yonemura, Toshiki Hara
  • Patent number: 9728709
    Abstract: A piezoelectric element in which a first electrode, a piezoelectric body layer comprised of a composite oxide having a perovskite structure that includes at least Pb, Nb and Ti, and a second electrode are sequentially laminated on a substrate, in which a crystal that configures the piezoelectric body layer has a tetragonal structure, and the crystal is {100} oriented to the substrate, and in which a region having a (100) plane and a region having a (001) plane that are perpendicular with respect to a direction of lamination, are mixed inside a lattice of the crystal.
    Type: Grant
    Filed: March 18, 2015
    Date of Patent: August 8, 2017
    Assignee: Seiko Epson Corporation
    Inventors: Takayuki Yonemura, Yasuhiro Itayama, Chikara Kojima
  • Publication number: 20170179365
    Abstract: A piezoelectric device includes a substrate with a cavity, a vibrating plate which is provided on the substrate so as to block an opening surface of the cavity, and a piezoelectric element which is provided on a surface of the vibrating plate opposite to the cavity, including a first electrode, a piezoelectric layer, and a second electrode, in which the second electrode has a laminated structure including a Pt layer (lower layer side electrode) and an Ir layer (upper layer side electrode), in which the Pt layer is in contact with the piezoelectric layer, and in which, if it is assumed that two directions which are parallel to a surface of the substrate and mutually perpendicular are defined as an X direction and a Y direction, the Ir layer is extended to an outside of the cavity at least in the X direction on an X-Y plane view.
    Type: Application
    Filed: December 15, 2016
    Publication date: June 22, 2017
    Inventors: Takayuki YONEMURA, Tomohide ONOGI, Chikara KOJIMA
  • Patent number: 9673378
    Abstract: A liquid-ejecting head includes a pressure-generating chamber communicating with a nozzle opening, and a piezoelectric element. The piezoelectric element has piezoelectric layer contains a perovskite complex oxide containing Bi, La, Fe, and Mn and can undergo electric-field-induced phase transition.
    Type: Grant
    Filed: December 13, 2013
    Date of Patent: June 6, 2017
    Assignee: Seiko Epson Corporation
    Inventors: Takayuki Yonemura, Hiromu Miyazawa
  • Publication number: 20170148974
    Abstract: A piezoelectric element in which a first electrode, a piezoelectric body layer comprised of a composite oxide having a perovskite structure that includes at least Pb, Nb and Ti, and a second electrode are sequentially laminated on a substrate, in which a crystal that configures the piezoelectric body layer has a tetragonal structure, and the crystal is {100} oriented to the substrate, and in which a region having a (100) plane and a region having a (001) plane that are perpendicular with respect to a direction of lamination, are mixed inside a lattice of the crystal.
    Type: Application
    Filed: March 18, 2015
    Publication date: May 25, 2017
    Inventors: Takayuki YONEMURA, Yasuhiro ITAYAMA, Chikara KOJIMA
  • Patent number: 9548406
    Abstract: A photoelectric conversion element includes a first electrode, a ferroelectric layer provided on the first electrode, and a second electrode provided on the ferroelectric layer, the second electrode being a transparent electrode, and a pn junction being formed between the ferroelectric layer and the first electrode or the second electrode.
    Type: Grant
    Filed: September 25, 2014
    Date of Patent: January 17, 2017
    Assignee: Seiko Epson Corporation
    Inventors: Takayuki Yonemura, Yoshihiko Yokoyama, Yasuaki Hamada
  • Publication number: 20160351778
    Abstract: A thermoelectric conversion element includes a first electrode on provided a substrate; a pyroelectric film that is provided on the first electrode, is formed of a composite oxide having an ABO3-type perovskite structure, and generates a surface charge due to temperature change; and a second electrode provided on the pyroelectric film, in which the composite oxide which forms at least a portion of layer in the pyroelectric film contains at least Pb, Nb, and Ti, and is formed of tetragonal crystal which is oriented in the direction of {100} on the substrate.
    Type: Application
    Filed: May 12, 2016
    Publication date: December 1, 2016
    Inventors: Takayuki YONEMURA, Toshiki HARA
  • Patent number: 9503656
    Abstract: A solid state imaging device includes: solid state imaging elements having a first electrode, a ferroelectric layer, and a transparent second electrode laminated together, and a PN junction between the ferroelectric layer and the first or second electrode; a controller acquiring brightness information of an imaging target, and determining whether each solid state imaging element is set to operate in a high or low sensitivity mode based on the brightness information; and a circuit applying a voltage to the solid state imaging element based on the determination, and setting the solid state imaging element to operate in the high or low sensitivity mode, in which a photovoltaic current from the solid state imaging element which is set to operate in the high or low sensitivity mode is detected, and an image is acquired based on the detection result.
    Type: Grant
    Filed: December 11, 2014
    Date of Patent: November 22, 2016
    Assignee: Seiko Epson Corporation
    Inventors: Takayuki Yonemura, Yasuaki Hamada, Yoshihiko Yokoyama
  • Patent number: 9385299
    Abstract: Provided is a piezoelectric element comprising a first electrode; a piezoelectric body layer provided on the first electrode, the piezoelectric body layer including 50 mol % or more of at least bismuth and iron, and the piezoelectric body layer having a current density-time curve obtained by applying a voltage to the first electrode and the second electrode including a plurality of inflection points; and a second electrode provided on the piezoelectric body layer.
    Type: Grant
    Filed: November 21, 2014
    Date of Patent: July 5, 2016
    Assignee: Seiko Epson Corporation
    Inventors: Takayuki Yonemura, Masahisa Nawano, Akio Konishi