Abstract: A thermal processing system (1) includes a reaction vessel (2) capable of forming a silicon nitride film on semiconductor wafers (10) through interaction between hexachlorodisilane and ammonia, and an exhaust pipe (16) connected to the reaction vessel (2). The reaction vessel 2 is heated at a temperature in the range of 500 to 900° C. and the exhaust pipe (16) is heated at 100° C. before disassembling and cleaning the exhaust pipe 16. Ammonia is supplied through a process gas supply pipe (13) into the reaction vessel (2), and the ammonia is discharged from the reaction vessel (2) into the exhaust pipe (16).

Abstract: This invention is an oxynitride film forming method including: a reaction chamber heating step of heating a reaction chamber to a predetermined temperature, the reaction chamber containing an object to be processed; a gas heating step of heating a process gas to a temperature not lower than a reaction temperature at which an oxynitride film can be formed, the process gas consisting of dinitrogen oxide gas; and a film forming step of forming an oxynitride film on the object to be processed by supplying the heated process gas into the heated processing chamber. The temperature to which the reaction chamber is heated in the reaction chamber heating step is set at a temperature below a temperature at which the process gas undergoes a reaction.

Abstract: An active filter suppresses harmonic current components flowing through a power supply, to which a compensation object load including a harmonic component source and a capacitive load is coupled. The active filter supplies a compensation current Ic in accordance with an output of a subtracter coupled to current transformers for detecting the load current I1 and the capacitive load current If, respectively. Thus, the compensation current Ic supplied from the active filter corresponds to and compensates only for the harmonic current components generated by the harmonic component source. The capacitive load current If is excluded from control operation. Thus, the positive feedback of the system is avoided, and stable control operation can be obtained.

Abstract: A disk driving apparatus is disclosed which, in such apparatus constituted of a disk holding portion on which a hub disposed in the center of a disk is loaded and a motor for supplying the disk holding portion with rotational power, comprises a guide cap which is disposed within the disk holding portion and driven by the motor. The guide cap is provided thereon with a centering peripheral surface, over which the center hole of the hub is to be fitted with virtually no clearance left therebetween, and a taper surface formed in continuance from the centering peripheral surface for guiding the center hole of the hub onto the centering peripheral surface.

Abstract: A disk driving apparatus is disclosed which, in such apparatus constituted of a disk holding portion on which a hub disposed in the center of a disk is loaded and a motor for supplying the disk holding portion with rotational power, comprises within the disk holding portion two members, a guide cap and a housing, externally attached to the outer rings of bearings fitted to the shaft of the motor. The guide cap is provided thereon with a centering peripheral surface with which the center hole of the hub is engaged and the housing is provided with portions for positioning parts which are attached thereto in the direction of the shaft of the disk.

Abstract: A floppy disk drive including a disk drive motor having an output shaft, a turntable secured to the output shaft of the motor and having a hole, a spring member attached to the bottom of the turntable, and a disk drive pin provided on the spring member for transmitting the rotation of the motor to a floppy disk on the turntable and having an upper end projecting above the top of the turntable through its hole for engaging the floppy disk. The spring member has a portion to which the drive pin is attached, and which allows the drive pin to incline both radially and circumferentially of a hub on the floppy disk when the hub acts on the drive pin.