Abstract: A two-dimensional array of discrete dielectric template structures is formed over a substrate. A first dielectric spacer matrix may be formed in lower portions of the trenches between the discrete dielectric template structures. A second dielectric spacer matrix layer may be formed in upper portions of the trenches. A pair of a source cavity and a drain cavity may be formed within a volume of each of the discrete dielectric template structures. A source electrode and a drain electrode may be formed in each source cavity and each drain cavity, respectively. The gate electrodes may be formed prior to, or after, formation of the two-dimensional array of discrete dielectric template structures to provide a two-dimensional array of field effect transistors that may be connected to, or may contain, memory elements.

Abstract: A method includes forming a transistor having source and drain regions. The following are formed on the source/drain region: a first via, a first metal layer extending along a first direction on the first via, a second via overlapping the first via on the first metal layer, and a second metal extending along a second direction different from the first direction on the second via; and the following are formed on the drain/source region: a third via, a third metal layer on the third via, a fourth via overlapping the third via over the third metal layer, and a controlled device at a same height level as the second metal layer on the third metal layer.

Abstract: A flow optimizer is disclosed for use in plasma chamber. The flow optimizer includes a ring that is disposed between a wafer support and a dielectric window defined in the plasma chamber. The ring of the flow optimizer is configured to be positioned between the wafer support and the dielectric window so that an outer edge of the ring is adjacent to side walls of the plasma chamber and an opening of the ring is substantially aligned with a diameter of the wafer support.

Abstract: A semiconductor device is described. The semiconductor device includes a substrate and a metal layer disposed on the substrate. A seed layer is formed on the metal layer. A ferroelectric gate layer is formed on the seed layer. A channel layer is formed over the ferroelectric gate layer. The seed layer is arranged to increase the orthorhombic phase fraction of the ferroelectric gate layer.

Abstract: The present disclosure relates integrated chip structure. The integrated chip structure includes a memory array having a plurality of memory devices arranged in a plurality of rows and a plurality of columns. A word-line is coupled to a first set of the plurality of memory devices disposed within a first row of the plurality of rows. A bit-line is coupled to a second set of the plurality of memory devices disposed within a first column of the plurality of columns. A local interconnect extends in parallel to the bit-line and is coupled to the bit-line and two or more of the second set of the plurality of memory devices. The local interconnect is coupled to the bit-line by a plurality of interconnect vias that are between the local interconnect and the bit-line.

Abstract: A method for manufacturing a semiconductor feature includes: alternatingly forming first and second dielectric layers on a semiconductor substrate along a vertical direction; forming multiple spaced-apart trenches penetrating the first and second dielectric layers; forming multiple support segments filling the trenches; removing the second dielectric layers to form multiple spaces; forming multiple conductive layers filling the spaces; removing the support segments to expose the conductive layers and the first dielectric layers; selectively forming a blocking layer covering the first dielectric layers outside of the conductive layers; forming multiple selectively-deposited sub-layers on the exposed conductive layers outside of the blocking layer and each connected to one of the conductive layers; forming multiple channel sub-layers on the selectively-deposited sub-layers outside of the blocking layer; removing the blocking layer; forming multiple isolation sub-layers filling the trenches; and forming multiple

Abstract: A semiconductor device and methods of fabricating the same are disclosed. The method can include forming a fin structure on a substrate, forming a source/drain (S/D) region on the fin structure, forming a gate structure on the fin structure adjacent to the S/D region, and forming a capping structure on the gate structure. The forming the capping structure includes forming a conductive cap on the gate structure, forming a cap liner on the conductive cap, and forming a carbon-based cap on the cap liner. The method further includes forming a first contact structure on the S/D region, forming an insulating cap on the first contact structure, and forming a second contact structure on the conductive cap.

Abstract: In a method of manufacturing a semiconductor device, an underlying structure is formed over a substrate. A film is formed over the underlying structure. Surface topography of the film is measured and the surface topography is stored as topography data. A local etching is performed by using directional etching and scanning the substrate so that an entire surface of the film is subjected to the directional etching. A plasma beam intensity of the directional etching is adjusted according to the topography data.

Abstract: A ferroelectric memory device, a manufacturing method of the ferroelectric memory device and a semiconductor chip are provided. The ferroelectric memory device includes a gate electrode, a ferroelectric layer, a channel layer, first and second blocking layers, and source/drain electrodes. The ferroelectric layer is disposed at a side of the gate electrode. The channel layer is capacitively coupled to the gate electrode through the ferroelectric layer. The first and second blocking layers are disposed between the ferroelectric layer and the channel layer. The second blocking layer is disposed between the first blocking layer and the channel layer. The first and second blocking layers comprise a same material, and the second blocking layer is further incorporated with nitrogen. The source/drain electrodes are disposed at opposite sides of the gate electrode, and electrically connected to the channel layer.

Abstract: A device includes gates and a first conductive segment. A first distance is present between a first gate of the gates and the first conductive segment. A second distance is present between a second gate of the gates and the first conductive segment. The first distance is greater than the second distance.

Abstract: In some embodiments, the present disclosure relates to a method for forming an integrated circuit (IC), including forming a first electrode layer having a first metal over a substrate, performing a first atomic layer deposition (ALD) pulse that exposes the first electrode layer to oxygen atoms, exposing the first electrode layer to a first temperature, the first temperature causing the first electrode layer to react with the oxygen atoms to form a seed structure over the first electrode layer, and performing a series of ALD pulses at a second temperature to form a ferroelectric structure over the seed structure. The second temperature is less than the first temperature and the ferroelectric structure is configured to store a data state.

Abstract: Semiconductor structures and methods of forming the same are provided. A semiconductor structure includes gate electrodes and first insulation patterns laterally disposed and alternately arranged on a substrate, a gate dielectric layer disposed on the gate electrodes and the first insulation patterns, at least one channel pattern disposed on the gate dielectric layer, source electrodes and drain electrodes laterally disposed and alternately arranged on the channel pattern, and second insulation patterns disposed on the channel pattern between the source and drain electrodes. Besides, from a top view, each of the drain electrodes is overlapped with one of the first insulation patterns.

Abstract: Various embodiments of the present disclosure are directed towards an integrated chip including a semiconductor layer overlying a substrate. A ferroelectric layer overlies the substrate. A pair of source/drain structures are disposed on the semiconductor layer. A lower metal layer is disposed along a lower surface of the ferroelectric layer. An upper metal layer is disposed along an upper surface of the ferroelectric layer.

Abstract: The present disclosure describes a semiconductor structure and a method for forming the same. The method can include forming a fin structure over a substrate. The fin structure can include a channel layer and a sacrificial layer. The method can further include forming a first recess structure in a first portion of the fin structure, forming a second recess structure in the sacrificial layer of a second portion of the fin structure, forming a dielectric layer in the first and second recess structures, and performing an oxygen-free cyclic etching process to etch the dielectric layer to expose the channel layer of the second portion of the fin structure. The oxygen-free cyclic etching process can include two etching processes to selectively etch the dielectric layer over the channel layer.

Abstract: A semiconductor device and method of manufacture are provided. In embodiments a memory array is formed by manufacturing portions of a word line during different and separate processes, thereby allowing the portions formed first to act as a structural support during later processes that would otherwise cause undesired damage to the structures.

Abstract: A vertical cable barrier includes a top rail defining a plurality of top through holes spaced apart along a top web portion. A bottom rail includes a bottom web portion and a pair of bottom leg portions, where the bottom web portion and the pair of bottom leg portions form a channel, and the bottom web portion defines a plurality of bottom through holes spaced apart along the bottom web portion and aligned with the top through holes. A vertical cable is disposed on each side of a rigid support member. Each vertical cable includes a top end directly attached to a hollow tubular shank of a first top swage fitting and a bottom end of received in and directly attached to a hollow tubular shank of a first bottom swage fitting, where the top end of the vertical cable extends through one of the plurality of top through holes, and the bottom end of the vertical cable extends through one of the bottom through holes that is disposed in vertical alignment with the one top through hole.

Abstract: A semiconductor device includes a semiconductor substrate, a semiconductor fin protruding from the semiconductor substrate, and an isolation layer disposed above the semiconductor substrate. The isolation layer includes a first portion disposed on a first sidewall of the semiconductor fin and a second portion disposed on a second sidewall of the semiconductor fin. Top surfaces of the first and second portions of the isolation layer are leveled. The first portion of the isolation layer includes an air pocket. The semiconductor device also includes a dielectric fin with a bottom portion embedded in the second portion of the isolation layer.

Abstract: A semiconductor device and a manufacturing method thereof are provided. The semiconductor device includes a gate, a semiconductor channel layer, a gate dielectric layer, a source terminal and a drain terminal. The semiconductor channel layer is disposed over and above the gate. The gate dielectric layer is disposed between the gate and the semiconductor channel layer. The source terminal and the drain terminal are disposed on the semiconductor channel layer. A contact plug is disposed on at least one of the source terminal and the drain terminal. A dielectric pattern surrounds the contact plug and covers the source terminal and the drain terminal. A gas barrier layer is disposed on the dielectric pattern and surrounding the contact plug.

Abstract: A memory system including a plurality of memory cells, a plurality of word lines, a plurality of bit lines, and a plurality of source lines. The plurality of memory cells are arranged in rows and columns, each of the plurality of memory cells having a gate, a drain, and a source. In the plurality of word lines, each of the word lines having a corresponding row, wherein each of the word lines is coupled to the gates of the memory cells in the corresponding row. In the plurality of bit lines and the plurality of source lines, each of the bit lines and each of the source lines having a corresponding column, where each of the bit lines is connected to the drain of the memory cells in the corresponding column and each of the source lines is connected to the source of the memory cells in the corresponding column.

Abstract: An exemplary method includes forming a multilayer interlevel dielectric (ILD) layer having a metal-containing dielectric layer (e.g., an aluminum oxide layer) between a first dielectric layer and a second dielectric layer and forming a bottom electrode via in the multilayer ILD layer. The method further includes forming a bottom electrode layer over the bottom electrode via, magnetic tunnel junction (MTJ) layers over the bottom electrode layer, and a top electrode layer over the MTJ layers. The bottom electrode layer, the MTJ layers, and the top electrode layer are etched to form a bottom electrode, an MTJ element, and a top electrode, respectively, of a magnetoresistive random-access memory (MRAM). The etching, such as an ion beam etch, forms a recess in the multilayer ILD layer that extends to the metal-containing dielectric layer of the multilayer ILD layer. In some embodiments, the etching extends the recess into and/or through the metal-containing dielectric layer.