Patents by Inventor Tetsuya Shibata
Tetsuya Shibata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10782365Abstract: A magnetic field sensor includes: a first magnetoresistance effect element; a second magnetoresistance effect element; an output port; a signal line; and a first input terminal configured to be capable of applying a DC current or a DC voltage to the first magnetoresistance effect element. Each of the first magnetoresistance effect element and the second magnetoresistance effect element includes a first magnetic layer, a second magnetic layer, and a spacer layer disposed therebetween, the first magnetoresistance effect element and the second magnetoresistance effect element are connected through the signal line, and the output port is connected in parallel with the second magnetoresistance effect element.Type: GrantFiled: July 19, 2018Date of Patent: September 22, 2020Assignee: TDK CORPORATIONInventor: Tetsuya Shibata
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Publication number: 20200286739Abstract: A substrate processing apparatus includes: a spin base rotatable in a horizontal plane about a centered rotary axis; a holder to hold a substrate above the spin base; a lower surface processing unit to discharge a processing liquid toward a lower surface of the substrate held by the holder. The holder includes: a plurality of first abutting members that abut the substrate from a position obliquely below said substrate and that hold the substrate in a horizontal posture in a position spaced from an upper surface of said spin base; a plurality of second abutting members that abut the substrate from a position lateral to said substrate and that hold said substrate in a horizontal posture in a position spaced from the upper surface of said spin base.Type: ApplicationFiled: May 26, 2020Publication date: September 10, 2020Inventors: Tomonori FUJIWARA, Nobuyuki SHIBAYAMA, Yukifumi YOSHIDA, Tetsuya SHIBATA, Akiyoshi NAKANO
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Patent number: 10720333Abstract: A substrate processing apparatus includes: a substrate holder to hold a substrate in a horizontal posture while rotating the substrate about a vertical rotary axis passing through the center of a plane of the substrate; a guard member having a shape extending along at least part of a surface peripheral area of the substrate, the guard member being placed in a position close to the surface peripheral area of the substrate held by the substrate holder in a noncontact manner; a cup being a tubular member with an open top end, the cup being provided so as to surround the substrate held by the substrate holder and the guard member together; and a nozzle from which a processing liquid is discharged to the surface peripheral area of the substrate held by the substrate holder. The nozzle is placed on a side opposite the cup with respect to at least part of the guard member.Type: GrantFiled: November 21, 2018Date of Patent: July 21, 2020Assignee: SCREEN Holdings Co., Ltd.Inventors: Tomonori Fujiwara, Nobuyuki Shibayama, Yukifumi Yoshida, Tetsuya Shibata, Akiyoshi Nakano
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Patent number: 10483458Abstract: A magnetoresistive effect device including a magnetoresistive effect element with which a high-frequency filter can be realized is provided. Magnetoresistive effect device includes: at least one magnetoresistive effect element including a magnetization fixed layer, spacer layer, and magnetization free layer in which magnetization direction is changeable; first and second port; signal line; and direct-current input terminal. First and second ports are connected to each other via signal line. Magnetoresistive effect element is connected to signal line and is to be connected to ground in parallel to second port. Direct-current input terminal is connected to signal line. A closed circuit including magnetoresistive effect element, signal line, ground, and direct-current input terminal is to be formed.Type: GrantFiled: June 2, 2016Date of Patent: November 19, 2019Assignee: TDK CORPORATIONInventors: Junichiro Urabe, Tetsuya Shibata, Atsushi Shimura, Takekazu Yamane, Tsuyoshi Suzuki
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Patent number: 10381997Abstract: A high-frequency filter includes at least one magnetoresistive effect element; a first port through which a high-frequency signal is input; a second port through which a high-frequency signal is output; and a signal line.Type: GrantFiled: January 12, 2018Date of Patent: August 13, 2019Assignee: TDK CORPORATIONInventors: Tetsuya Shibata, Junichiro Urabe, Atsushi Shimura, Takekazu Yamane
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Publication number: 20190245254Abstract: A magnetoresistive effect device includes an input port, an input-side signal line, an MR unit including a magnetoresistive effect element and a magnetic-field generating signal line, and an output unit including a magnetoresistive effect element, an output-side signal line, and an output port. The magnetoresistive effect device further includes a DC application terminal. The magnetoresistive effect element is connected to the output port via the output-side signal line in the output unit. The input-side signal line is arranged so that a high frequency magnetic field generated from the input-side signal line is applied to the magnetoresistive effect element in the MR unit. In the MR unit, the magnetoresistive effect element is connected to the magnetic-field generating signal line. The magnetic-field generating signal line is arranged so that a high-frequency magnetic field generated from magnetic-field generating signal line is applied to the magnetoresistive effect element in the output unit.Type: ApplicationFiled: October 23, 2017Publication date: August 8, 2019Applicant: TDK CORPORATIONInventors: Takekazu YAMANE, Tetsuya SHIBATA, Tsuyoshi SUZUKI, Junichiro URABE, Atsushi SHIMURA
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Publication number: 20190165475Abstract: Disclosed herein is a patch antenna that includes a first dielectric layer in which a patch conductor is provided, a second dielectric layer in which a signal line extending in a direction parallel to the patch conductor is provided, a feed conductor provided perpendicularly to the patch conductor so as to connect one end of the signal line and a feed point for the patch conductor, a first ground pattern provided between the patch conductor and the signal line, and a second ground pattern provided on an opposite side to the first ground pattern with respect to the signal line. The first dielectric layer has a dielectric constant lower than that of the second dielectric layer.Type: ApplicationFiled: November 28, 2018Publication date: May 30, 2019Applicant: TDK CorporationInventor: Tetsuya SHIBATA
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Publication number: 20190157762Abstract: Disclosed herein is a dual band patch antenna that includes a first feeding part, first and second radiation conductors, a first feeding conductor having one end connected to the first feeding part and other end connected to the first radiation conductor, a second feeding conductor having one end connected to the first feeding part and other end connected to the second radiation conductor, a first open stub having one end connected to the first feeding conductor and other end opened, and a second open stub having one end connected to the second feeding conductor and other end opened.Type: ApplicationFiled: November 14, 2018Publication date: May 23, 2019Applicant: TDK CorporationInventors: Tetsuya SHIBATA, Naoki SOTOMA
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Publication number: 20190096688Abstract: A substrate processing apparatus includes: a substrate holder to hold a substrate in a horizontal posture while rotating the substrate about a vertical rotary axis passing through the center of a plane of the substrate; a guard member having a shape extending along at least part of a surface peripheral area of the substrate, the guard member being placed in a position close to the surface peripheral area of the substrate held by the substrate holder in a noncontact manner; a cup being a tubular member with an open top end, the cup being provided so as to surround the substrate held by the substrate holder and the guard member together; and a nozzle from which a processing liquid is discharged to the surface peripheral area of the substrate held by the substrate holder. The nozzle is placed on a side opposite the cup with respect to at least part of the guard member.Type: ApplicationFiled: November 21, 2018Publication date: March 28, 2019Inventors: Tomonori FUJIWARA, Nobuyuki SHIBAYAMA, Yukifumi YOSHIDA, Tetsuya SHIBATA, Akiyoshi NAKANO
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Patent number: 10199231Abstract: A substrate processing apparatus includes: a substrate holder to hold a substrate in a horizontal posture while rotating the substrate about a vertical rotary axis passing through the center of a plane of the substrate; a guard member having a shape extending along at least part of a surface peripheral area of the substrate, the guard member being placed in a position close to the surface peripheral area of the substrate held by the substrate holder in a noncontact manner; a cup being a tubular member with an open top end, the cup being provided so as to surround the substrate held by the substrate holder and the guard member together; and a nozzle from which a processing liquid is discharged to the surface peripheral area of the substrate held by the substrate holder. The nozzle is placed on a side opposite the cup with respect to at least part of the guard member.Type: GrantFiled: September 16, 2014Date of Patent: February 5, 2019Assignee: SCREEN Holdings Co., Ltd.Inventors: Tomonori Fujiwara, Nobuyuki Shibayama, Yukifumi Yoshida, Tetsuya Shibata, Akiyoshi Nakano
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Publication number: 20190033401Abstract: A magnetic field sensor includes: a first magnetoresistance effect element; a second magnetoresistance effect element; an output port; a signal line; and a first input terminal configured to be capable of applying a DC current or a DC voltage to the first magnetoresistance effect element. Each of the first magnetoresistance effect element and the second magnetoresistance effect element includes a first magnetic layer, a second magnetic layer, and a spacer layer disposed therebetween, the first magnetoresistance effect element and the second magnetoresistance effect element are connected through the signal line, and the output port is connected in parallel with the second magnetoresistance effect element.Type: ApplicationFiled: July 19, 2018Publication date: January 31, 2019Applicant: TDK CORPORATIONInventor: Tetsuya SHIBATA
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Publication number: 20180309046Abstract: Magnetoresistive effect device including magnetoresistive effect element which high-frequency filter can be realized is provided. Magnetoresistive effect device includes: at least one magnetoresistive effect element including magnetization fixed, spacer, and magnetization free layer wherein magnetization direction is changeable; first and second ports; signal line; and direct-current input terminal. First and second ports are connected to each other via signal line. Magnetoresistive effect element is connected to signal line and is to be connected to ground in parallel to second port. Direct-current input terminal is connected to signal line. Closed circuit including magnetoresistive effect element, signal line, ground, and direct-current input terminal is to be formed. Magnetoresistive effect element is arranged wherein direct current input from direct-current input terminal flows through magnetoresistive effect element in direction from magnetization fixed layer to magnetization free layer.Type: ApplicationFiled: June 2, 2016Publication date: October 25, 2018Applicant: TDK CORPORATIONInventors: Junichiro URABE, Tetsuya SHIBATA, Atsushi SHIMURA, Takekazu YAMANE, Tsuyoshi SUZUKI
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Publication number: 20180277749Abstract: A magnetoresistive effect device including a magnetoresistive effect element with which a high-frequency filter can be realized is provided. Magnetoresistive effect device includes: at least one magnetoresistive effect element including a magnetization fixed layer, spacer layer, and magnetization free layer in which magnetization direction is changeable; first and second port; signal line; and direct-current input terminal. First and second ports are connected to each other via signal line. Magnetoresistive effect element is connected to signal line and is to be connected to ground in parallel to second port. Direct-current input terminal is connected to signal line. A closed circuit including magnetoresistive effect element, signal line, ground, and direct-current input terminal is to be formed.Type: ApplicationFiled: June 2, 2016Publication date: September 27, 2018Applicant: TDK CORPORATIONInventors: Junichiro URABE, Tetsuya SHIBATA, Atsushi SHIMURA, Takekazu YAMANE, Tsuyoshi SUZUKI
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Patent number: 10074688Abstract: A magnetoresistive effect device includes a first magnetoresistive effect element, a second magnetoresistive effect element, a first port, a second port, a signal line, and a direct-current input terminal. The first port, the first magnetoresistive effect element, and the second port are connected in series to each other in this order via the signal line. The second magnetoresistive effect element is connected to the signal line in parallel with the second port. The first magnetoresistive effect element and the second magnetoresistive effect element are formed so that the relationship between the direction of direct current that is input from the direct-current input terminal and that flows through the first magnetoresistive effect element and the order of arrangement of a magnetization fixed layer, a spacer layer, and a magnetization free layer in the first magnetoresistive effect element is opposite to the above relationship in the second magnetoresistive effect element.Type: GrantFiled: July 28, 2017Date of Patent: September 11, 2018Assignee: TDK CORPORATIONInventors: Tetsuya Shibata, Tsuyoshi Suzuki, Junichiro Urabe, Takekazu Yamane, Atsushi Shimura
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Publication number: 20180254555Abstract: Disclosed herein is an antenna device that includes a substrate, an IC chip mounted on the substrate, a first antenna element including a plurality of patch antenna conductors that is supplied with power from the IC chip and that radiates a beam in a direction substantially perpendicular to the substrate, and a second antenna element that is supplied with power from the IC chip and that radiates a beam in a first horizontal direction substantially parallel to the substrate.Type: ApplicationFiled: February 27, 2018Publication date: September 6, 2018Applicant: TDK CORPORATIONInventors: Naoki SOTOMA, Tetsuya SHIBATA, Yasuyuki HARA
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Publication number: 20180159492Abstract: A high-frequency filter includes at least one magnetoresistive effect element; a first port through which a high-frequency signal is input; a second port through which a high-frequency signal is output; and a signal line.Type: ApplicationFiled: January 12, 2018Publication date: June 7, 2018Applicant: TDK CORPORATIONInventors: Tetsuya SHIBATA, Junichiro URABE, Atsushi SHIMURA, Takekazu YAMANE
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Patent number: 9966922Abstract: A magnetoresistive effect device includes a magnetoresistive effect element first and second ports, a signal line, an inductor, and a direct current input terminal. The first port, the magnetoresistive effect element, and the second port are connected in series in this order via the signal line. The inductor is connected to one of the signal line between the magnetoresistive effect element and the first port and the signal line between the magnetoresistive effect element and the second port and is capable of being connected to ground. The direct-current input terminal is connected to the other of the above signal lines. A closed circuit including the magnetoresistive effect element, the signal line, the inductor, the ground, and direct-current input terminal is capable of being formed. The magnetoresistive effect element is arranged so that direct current flows in a direction from a magnetization fixed layer to a magnetization free layer.Type: GrantFiled: May 19, 2017Date of Patent: May 8, 2018Assignee: TDK CORPORATIONInventors: Tetsuya Shibata, Junichiro Urabe, Takekazu Yamane, Tsuyoshi Suzuki
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Patent number: 9948267Abstract: A magnetoresistive effect device includes at least one magnetoresistive effect element including a magnetization fixed layer, a spacer layer, and a magnetization free layer, a first port, a second port, a first signal line which is connected to the first port and through which high-frequency current corresponding to a high-frequency signal input into the first port flows, a second signal line, and a direct-current input terminal. The magnetoresistive effect element is arranged so that a high-frequency magnetic field occurring from the first signal line is applied to the magnetization free layer. The magnetoresistive effect element is connected to the second port via the second signal line. The direct-current input terminal is connected to the magnetoresistive effect element.Type: GrantFiled: February 22, 2017Date of Patent: April 17, 2018Assignee: TDK CORPORATIONInventors: Takekazu Yamane, Tetsuya Shibata, Junichiro Urabe, Atsushi Shimura
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Patent number: 9906199Abstract: A magnetoresistive effect device includes a magnetoresistive effect element including a magnetization fixed layer, a spacer layer, and a magnetization free layer; a first port; a second port; a signal line; an impedance element; and a direct-current input terminal. The first port, the magnetoresistive effect element, and the second port are connected in series in this order via the signal line. The impedance element is connected to ground and to the signal line between the magnetoresistive effect element and the first port or the second port. The direct-current input terminal is connected to the signal line at the opposite side to the impedance element with the magnetoresistive effect element in between the direct-current input terminal and the impedance element. A closed circuit including the magnetoresistive effect element, the signal line, the impedance element, the ground, and the direct-current input terminal is to be formed.Type: GrantFiled: March 10, 2016Date of Patent: February 27, 2018Assignee: TDK CORPORATIONInventors: Tetsuya Shibata, Junichiro Urabe, Atsushi Shimura, Takekazu Yamane
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Publication number: 20180040666Abstract: A magnetoresistive effect device includes a first magnetoresistive effect element, a second magnetoresistive effect element, a first port, a second port, a signal line, and a direct-current input terminal. The first port, the first magnetoresistive effect element, and the second port are connected in series to each other in this order via the signal line. The second magnetoresistive effect element is connected to the signal line in parallel with the second port. The first magnetoresistive effect element and the second magnetoresistive effect element are formed so that the relationship between the direction of direct current that is input from the direct-current input terminal and that flows through the first magnetoresistive effect element and the order of arrangement of a magnetization fixed layer, a spacer layer, and a magnetization free layer in the first magnetoresistive effect element is opposite to the above relationship in the second magnetoresistive effect element.Type: ApplicationFiled: July 28, 2017Publication date: February 8, 2018Applicant: TDK CORPORATIONInventors: Tetsuya SHIBATA, Tsuyoshi SUZUKI, Junichiro URABE, Takekazu YAMANE, Atsushi SHIMURA