Abstract: An apparatus of removing carbon monoxide, has: a hydrogen gas supply unit of supplying a hydrogen gas, a catalytic reaction unit provided with a catalyst body carrying a platinum group metal catalyst, a hydrogen gas introducing unit which introduces a hydrogen gas containing carbon monoxide from the hydrogen gas supply unit to the catalytic reaction unit, and an oxidizing gas supply unit of supplying an oxidizing gas containing oxygen to the catalytic reaction unit, wherein the catalyst body is brought into an oxidizing atmosphere for a period of time during operation according to a predetermined condition or when the apparatus is stopped. Thus, carbon monoxide can be eliminated sufficiently.

Abstract: A fuel cell cogeneration system comprises a fuel cell, a cooling system for the fuel cell, a heater, a heat utilization portion configured to store heat recovered in the cooling system to allow the heat to be consumed, a detector configured to detect calories remaining in the heat utilization portion, and a controller, wherein the controller determines whether or not the calories remaining in the heat utilization portion are at least not less than the calories required to increase the temperature of the fuel cell to the operating temperature, and based on determination, increases the temperature of the fuel cell to the operating temperature by supplying the remaining calories to the fuel cell through the cooling system and/or by heating the cooling water in the cooling system by the heater.

Abstract: A temperature compensated differential amplifier includes a first differential amplifier and a second differential amplifier. The first differential amplifier includes a feedback resistance, and has a gain proportional to temperature. The second differential amplifier is connected to the output side of the first differential amplifier, includes no feedback resistance, and has a gain inversely proportional to the temperature. The first differential amplifier carries out the temperature compensation of the gain and distortion of the second differential amplifier.

Abstract: There are provided a fuel cell, a fuel gas supplying unit, an oxidizer gas supplying unit, a state detecting unit of detecting the temperature of the fuel gas supplying unit, an operation controlling unit of detecting abnormalities of predetermined functions performed by the fuel gas supplying unit utilizing the results detected by the state detecting unit and performing operation control in an operation mode corresponding to the contents of abnormalities, and an operation mode switching unit of switching to an operation mode corresponding to the contents of abnormalities.

Abstract: A power controller includes power storage means for storing DC power from DC power generation means that. Power conversion means include a DC/DC converter that converts a voltage when receiving a DC input. Charge and discharge means discharge electric power from the power storage means to the power conversion means and charge DC power from the DC power generation means in the power storage means. The charge and discharge means are provided among the DC power generation means, the power storage means and the power conversion means. Detection means detect electric energy of an external power load to which power from at least the power conversion means is supplied. Control means control operation of the charge and discharge means on the basis of the detected electric energy.

Abstract: After successively depositing a first metal film and a first silicon oxide film on an insulating film formed on a semiconductor substrate, etching is carried out by using a first resist pattern as a mask, so as to form a first interlayer insulating film having openings from the first silicon oxide film and first metal interconnects from the first metal film. A third interlayer insulating film of an organic film is filled in the openings of the first interlayer insulating film, and the first interlayer insulating film is etched by using a hard mask. A second metal film is then filled in a space in the second interlayer insulating film, so as to form second metal interconnects.

Abstract: After a plurality of grooves are formed in an insulating film and in an anti-reflection film on the insulating film, a barrier metal film and a conductive film are deposited on the anti-reflection film such that each of the wiring grooves is filled therewith. Subsequently, the portions of the conductive film outside the grooves are removed by polishing and then the portions of the barrier metal film outside the wiring are removed by polishing. Thereafter, a foreign matter adhered to a surface to be polished during polishing is removed and then a surface of the anti-reflection film is polished.

Abstract: It has been expected that more economical power generation could be performed using a fuel cell. The present invention provides a fuel cell power generation apparatus including a fuel cell 1 for generating power and heat to be supplied to a consumption point, storing means 11 of storing data on past patterns of time variations of power and/or heat consumption at the consumption point, power controlling means 12 of performing control for regulating power generation carried out based on the stored data and flow rate controlling means 4.

Abstract: An inventive semiconductor device includes: an interlevel dielectric film 204 provided on a semiconductor substrate 101; and interconnects 208a and 208c buried in the interlevel dielectric film 204 and electrically connected to the semiconductor substrate 101. An MIM capacitor 201 includes: first and second electrodes 208b and 214b each made of a metal; and a capacitive insulating film 210 of a dielectric. The first electrode 208b is buried in the interlevel dielectric film 204. The capacitive insulating film 210 is provided on the first electrode 208b. The second electrode 214b is a metal layer provided to face the first electrode 208b with the capacitive insulating film 210 interposed therebetween.

Abstract: A fuel cell system includes a fuel cell that supplies an oxidizer containing oxygen to a positive electrode, supplies a fuel gas containing hydrogen to a negative electrode and generates power, a battery containing at least water as an electrolyte, a hydrogen tank that stores hydrogen generated from the battery and a hydrogen pipe that supplies hydrogen in the hydrogen tank to the fuel cell.

Abstract: After a plurality of grooves are formed in an insulating film and in an anti-reflection film on the insulating film, a barrier metal film and a conductive film are deposited on the anti-reflection film such that each of the grooves is filled therewith. Subsequently, the portions of the conductive film outside the grooves are removed by polishing and then the portions of the barrier metal film outside the grooves are removed by polishing. Thereafter, respective foreign matters adhered to a polishing pad and to a surface to be polished during polishing are removed and then a surface of the anti-reflection film is polished.

Abstract: After a plurality of grooves are formed in an insulating film and in an anti-reflection film on the insulating film, a barrier metal film and a conductive film are deposited on the anti-reflection film such that each of the wiring grooves is filled therewith. Subsequently, the portions of the conductive film outside the grooves are removed by polishing and then the portions of the barrier metal film outside the wiring are removed by polishing. Thereafter, a foreign matter adhered to a surface to be polished during polishing is removed and then a surface of the anti-reflection film is polished.

Abstract: The fuel cell system includes a humidifying unit for humidifying supply air to be supplied to the fuel cell, utilizing cooling water used for cooling the fuel cell. It also includes a pre-humidifying unit for humidifying the supply air beforehand with air discharged from the fuel cell, the pre-humidifying unit being positioned in the upstream of the humidifying unit within a supply air path. The cooling water, which recovered heat generated when the fuel cell generated electricity, releases heat in a cooling water heat radiator. The heat is then utilized for heating water which circulates in a hot water path and the hot water is stored in a hot water reserve tank.

Abstract: After a plurality of grooves are formed in an insulating film and in an antireflection film on the insulating film, a barrier metal film and a conductive film are deposited on the anti-reflection film such that each of the grooves is filled therewith. Subsequently, the portions of the conductive film outside the grooves are removed by polishing and then the portions of the barrier metal film outside the grooves are removed by polishing. Thereafter, a foreign matter adhered to a surface to be polished during polishing is removed and then a surface of the anti-reflection film is polished by using an abrasive agent of the same type as used in the step of polishing the conductive film.

Abstract: After a plurality of grooves are formed in an insulating film, a barrier metal film and a conductive film are deposited successively on the insulating film such that each of the grooves is filled completely therewith. Subsequently, the portions of the conductive film outside the grooves are removed by polishing and then the portions of the barrier metal film outside the grooves are removed by polishing. Thereafter, a foreign matter adhered to the surface to be polished during polishing is removed and then a surface of the insulating film is polished.

Abstract: A fuel cell system comprises a reformer for reforming a feed material to generate a reformed gas containing hydrogen, a material feed means for feeding the feed material to the reformer, a heater for heating the reformer, a fuel cell for generating a power by reacting the reformed gas supplied from the reformer with an oxidizing gas, and a temperature detector for detecting a temperature at a predetermined position in the fuel cell system, and in a first antifreezing operation mode, when the detector detects a temperature which is not higher than a threshold, the feed material heated in the reformer by the heater is caused to flow through flow passages and of the reformed gas.

Abstract: An aim of the invention is to provide a fuel cell power generation system which can operate in a reduced space to reduce the initial cost and the running cost without deteriorating the performance. In a fuel cell power generation system comprising a fuel cell having an anode, a cathode and a polymer electrolyte membrane, a fuel gas feed pipe for supplying a fuel gas into the anode, an oxidant gas feed pipe for supplying an oxidant gas into the cathode, a reforming unit connected to the fuel gas feed pipe for reforming a raw material gas, a heating unit for heating the reforming unit, a raw material gas supplying unit for supplying the raw material gas into the reforming unit, a water supplying unit for supplying water into the reforming unit, and an air supplying unit for supplying air into the reforming unit, water is introduced into at least one selected from the fuel gas feed pipe, the oxidant gas feed pipe, the cathode and the anode to purge gases retained in the system.

Abstract: It has been difficult to reduce a waste of energy in a fuel cell power generating process when, for example, a temporary rise or drop of a power load occurs. A fuel cell power generation system includes: load detection means 103 of detecting power requested by a load 104; and output control means 102 of accumulating a time at which a detected power requested by the load 104 is equal to or larger than a predetermined value when a fuel cell body 101 does not generate power to be supplied to the load 104, and allowing the fuel cell body 101 to start generating power to be supplied to the load 104 according to a predetermined rule based on an accumulation result.

Abstract: (Object)

Abstract: A fuel cell system and a method of operating the system capable of increasing the service life of an ion exchange resin used for maintaining the water quality of cooling water and reducing the power consumption of auxiliary equipment at a low cost by avoiding a pressure variation in a cooling water channel; the fuel cell system, comprising a solid high polymer fuel cell (11), a cooling water tank (12), a cooling water channel (13), a cooling water pump (14), a heat exchanger (15), a fuel side condenser (16) and an air side condenser (17) for cooling the exhaust fuel gas and exhaust oxidizer gas exhausted from the fuel cell (11) to condensate the vapor contained therein, a condensed water tank (18) for storing the water condensed by the fuel side condenser (16) and the air side condenser (17), a water feed passage (20) having a water feed pump (19) for feeding the condensed water to the cooling water tank (12) provided therein, and a water drain passage (21) from the cooling water tank (12).